公开(公告)号：US06648975B2

公开(公告)日：2003-11-18

申请号：US09784300

申请日：2001-02-16

申请人： Nobuyasu Suzuki ,  Toshiharu Makino ,  Yuka Yamada ,  Takehito Yoshida ,  Takafumi Seto ,  Nobuhiro Aya

发明人： Nobuyasu Suzuki ,  Toshiharu Makino ,  Yuka Yamada ,  Takehito Yoshida ,  Takafumi Seto ,  Nobuhiro Aya

IPC分类号： C23C1400

CPC分类号： B82Y30/00 ,  B22F9/12 ,  B22F2998/00 ,  B22F2999/00 ,  B82Y10/00 ,  C23C14/06 ,  C23C14/228 ,  C23C14/28 ,  H01L33/0054 ,  B22F1/0018 ,  B22F2202/11

摘要： The present invention is to fabricate a quantum dot functional structure having ultra-fine particles homogeneously distributed in a transparent medium by efficiently fabricating high-purity ultra-fine particles having a single particle diameter and uniform structure and depositing the ultra-fine particles onto a substrate in conjunction with the transparent medium. For these purposes, an apparatus for fabricating a quantum dot functional structure is provided. The apparatus comprises: an ultra-fine particle generating chamber for generating high-purity ultra-fine particles by exciting a semiconductor target with pulsed laser light in a low-pressure rare gas atmosphere, and then by allowing the semiconductor target to be detached or ejected by ablation reaction and condensed and grown in the gas; an ultra-fine particle classifying chamber for classifying the ultra-file particles; a depositing chamber for depositing the high-purity semiconductor ultra-fine particles and the transparent medium by exciting a transparent medium target with excimer laser light at the same time or alternately when the high-purity semiconductor ultra-fine particles are collected onto the substrate, and by collecting the substance generated through ablation reaction onto the substrate; and a carrier gas exhaust system.

摘要翻译： 本发明通过有效地制造具有单一粒径和均匀结构的高纯度超细颗粒，并将超细颗粒沉积到基底上，制造均匀分布在透明介质中的超细颗粒的量子点功能结构 与透明介质一起使用。 为了这些目的，提供了一种用于制造量子点功能结构的装置。 该装置包括：超细颗粒发生室，用于通过在低压稀有气体气氛中用脉冲激光激发半导体靶，然后通过使半导体靶被分离或喷射而产生高纯度超细颗粒 通过消融反应并在气体中冷凝和生长; 用于对超微粒子进行分类的超细粒子分级室; 用于通过同时激发具有准分子激光的透明介质靶或者当高纯度半导体超细颗粒被收集到基板上时交替沉积高纯度半导体超细颗粒和透明介质的沉积室， 并通过将通过消融反应产生的物质收集到基底上; 和载气排气系统。

公开(公告)号：US07384666B2

公开(公告)日：2008-06-10

申请号：US10657248

申请日：2003-09-09

申请人： Nobuyasu Suzuki ,  Toshiharu Makino ,  Yuka Yamada ,  Takehito Yoshida ,  Takafumi Seto ,  Nobuhiro Aya

发明人： Nobuyasu Suzuki ,  Toshiharu Makino ,  Yuka Yamada ,  Takehito Yoshida ,  Takafumi Seto ,  Nobuhiro Aya

IPC分类号： B05D5/06

CPC分类号： B82Y30/00 ,  B22F9/12 ,  B22F2998/00 ,  B22F2999/00 ,  B82Y10/00 ,  C23C14/06 ,  C23C14/228 ,  C23C14/28 ,  H01L33/0054 ,  B22F1/0018 ,  B22F2202/11

摘要： Fabrication of a quantum dot functional structure having ultra-fine particles homogeneously distributed in a transparent medium includes depositing such particles having a single particle diameter and uniform structure onto a substrate with the transparent medium. An apparatus for fabricating a quantum dot functional structure comprises: a generating chamber for generating high-purity ultra-fine particles by exciting a semiconductor target with pulsed laser light in low-pressure rare gas, and then allowing the semiconductor target to be detached or ejected by ablation and condensed and grown in the gas; a particle classifying chamber for classifying the ultra-fine particles; a depositing chamber for depositing the high-purity semiconductor ultra-fine particles and the transparent medium by exciting a transparent medium target with excimer laser light simultaneously or alternately when the particles are collected onto the substrate, and by collecting the substance generated through ablation onto the substrate; and a carrier gas exhaust system.

摘要翻译： 具有均匀分布在透明介质中的超细颗粒的量子点功能结构的制造包括使用透明介质将具有单一粒径和均匀结构的这种颗粒沉积在基板上。 一种用于制造量子点功能结构的装置，其特征在于包括：通过在低压稀有气体中激发具有脉冲激光的半导体靶产生高纯度超细颗粒的发生室，然后允许半导体靶被分离或排出 通过消融冷凝并在气体中生长; 用于分级超细颗粒的颗粒分级室; 用于通过同时或交替地将颗粒收集到基板上同时或交替地激发具有准分子激光的透明介质靶的沉积高纯度半导体超细颗粒和透明介质的沉积室，并且通过将通过烧蚀产生的物质收集到 基质; 和载气排气系统。

公开(公告)号：US07099261B2

公开(公告)日：2006-08-29

申请号：US10754504

申请日：2004-01-12

申请人： Takehito Yoshida ,  Yuka Yamada ,  Nobuyasu Suzuki ,  Toshiharu Makino

发明人： Takehito Yoshida ,  Yuka Yamada ,  Nobuyasu Suzuki ,  Toshiharu Makino

IPC分类号： G11B7/00

CPC分类号： H05B33/22 ,  G11B7/127 ,  H01L33/18 ,  H01S3/0637 ,  H01S3/169 ,  H01S5/183 ,  H01S5/18388 ,  H01S5/3031

摘要： In fabricating a monochromic and highly coherent light source, no single crystalline bulk semiconductor is used, but two different kinds of transparent substances are alternately stacked over each other to constitute a periodic structure in ½ of the intended wavelength. At least one of the two kinds of transparent substances is controllable in electric conductivity, and the structure is such that inside a medium consisting of this kind of transparent substance light-emitting semiconductor particulates are embedded. Accordingly, a light-emitting device has this structure, which makes possible control of the center wavelength of light emission, the width of wavelength distribution and coherence by adjusting the geometrical parameters of the device without having to alter the kind of material use.

公开(公告)号：US20060187992A1

公开(公告)日：2006-08-24

申请号：US11408062

申请日：2006-04-21

申请人： Takehito Yoshida ,  Yuka Yamada ,  Nobuyasu Suzuki ,  Toshiharu Makino

发明人： Takehito Yoshida ,  Yuka Yamada ,  Nobuyasu Suzuki ,  Toshiharu Makino

IPC分类号： H01S5/00

CPC分类号： H05B33/22 ,  G11B7/127 ,  H01L33/18 ,  H01S3/0637 ,  H01S3/169 ,  H01S5/183 ,  H01S5/18388 ,  H01S5/3031

摘要： In fabricating a monochromic and highly coherent light source, no single crystalline bulk semiconductor is used, but two different kinds of transparent substances are alternately stacked over each other to constitute a periodic structure in ½ of the intended wavelength. At least one of the two kinds of transparent substances is controllable in electric conductivity, and the structure is such that inside a medium consisting of this kind of transparent substance light-emitting semiconductor particulates are embedded. Accordingly, a light-emitting device has this structure, which makes possible control of the center wavelength of light emission, the width of wavelength distribution and coherence by adjusting the geometrical parameters of the device without having to alter the kind of material use.

公开(公告)号：US06809314B2

公开(公告)日：2004-10-26

申请号：US09925414

申请日：2001-08-10

申请人： Takehito Yoshida ,  Toshiharu Makino ,  Nobuyasu Suzuki ,  Yuka Yamada

发明人： Takehito Yoshida ,  Toshiharu Makino ,  Nobuyasu Suzuki ,  Yuka Yamada

IPC分类号： H01J4904

CPC分类号： G01N15/0266 ,  Y10T428/25

摘要： A fine-particle classification apparatus includes an aerosol generation section which generates an aerosol containing fine particles in a medium background gas, a fine-particle classification section which classifies the fine particles contained in the aerosol in a sheath gas, and an introduction section, between the aerosol generation section and the fine-particle classification section, which introduces the aerosol generated in the aerosol generation section into the fine-particle classification section. The introduction section uses a carrier gas with an adequately high velocity to introduce the aerosol generated in the aerosol generation section to the classification section using a pressure difference.

摘要翻译： 细颗粒分级装置包括：气溶胶生成部，其生成含有中等背景气体中的微粒子的气溶胶，将包含在气溶胶中的细颗粒分类为鞘气体的细粒分级部和导入部， 气溶胶生成部和细粒分级部，其将在气溶胶生成部中产生的气溶胶引入微粒分类部。 引入部分使用具有足够高速度的载气，使用压差将气溶胶发生部分中产生的气溶胶引入分级部。

公开(公告)号：US07145320B2

公开(公告)日：2006-12-05

申请号：US10762308

申请日：2004-01-23

申请人： Takehito Yoshida ,  Nobuyasu Suzuki ,  Toshiharu Makino ,  Yuka Yamada

发明人： Takehito Yoshida ,  Nobuyasu Suzuki ,  Toshiharu Makino ,  Yuka Yamada

IPC分类号： G01N27/00 ,  G01N27/62

CPC分类号： G01N15/0656

摘要： A particle counter counts particles in aerosol having a particle size of from 2 nm to 50 nm in an operating pressure range from an atmospheric pressure through a reduced pressure to a low vacuum and calculate a particle size distribution. The particle counter charges particles in the aerosol and applies an electrostatic field thereto, and mixes the aerosol with a non-charged sheath gas flow shaped like a laminar flow whereby the respective particles separate into traces depending on their particle size where they can be counted. Further, by using an electron multiplier for exciting cluster ions to detect the charged particles and operating it as a high-pass filter, even if the number density of the particles is small, it is possible to effectively count the particles.

摘要翻译： 颗粒计数器在从大气压至减压至低真空的操作压力范围内，计算粒径为2nm至50nm的气溶胶中的颗粒，并计算出粒度分布。 颗粒计数器对气溶胶中的颗粒进行充电并对其施加静电场，并将气溶胶与形成为层流的非充电鞘气流混合，由此各个颗粒根据颗粒尺寸分离成痕迹，在那里它们可以被计数。 此外，通过使用电子倍增器激发簇离子来检测带电粒子并将其作为高通滤波器进行操作，即使粒子的数量密度小，也可以有效地计数粒子。

公开(公告)号：US06814239B2

公开(公告)日：2004-11-09

申请号：US10076070

申请日：2002-02-15

申请人： Nobuyasu Suzuki ,  Takehito Yoshida ,  Toshiharu Makino ,  Yuka Yamada

发明人： Nobuyasu Suzuki ,  Takehito Yoshida ,  Toshiharu Makino ,  Yuka Yamada

IPC分类号： B07B100

CPC分类号： C23C14/228 ,  C23C14/28 ,  G01N15/06 ,  G01N15/065 ,  G01N15/0656

摘要： An apparatus for producing high-purity standard particles produces nanometer-sized high-purity standard particles of monodispersive uniform structure efficiently, with the abatement of contamination and damage. The apparatus includes a particle generation chamber, a particle classification chamber and a particle collecting chamber. The particle generation chamber excites a semiconductor target with pulse laser beam under a low-pressure rare gas ambient so as to detach and eject materials from the target into the ambient gas, in which those materials are condensed and grow into high-purity particles. The particle classification chamber subjects the high-purity particles as generated to classification, and the particles collecting chamber collects high-purity standard particles as classified onto a substrate.

公开(公告)号：US06562417B2

公开(公告)日：2003-05-13

申请号：US10180054

申请日：2002-06-27

申请人： Nobuyasu Suzuki ,  Toshiharu Makino ,  Yuka Yamada ,  Takehito Yoshida

发明人： Nobuyasu Suzuki ,  Toshiharu Makino ,  Yuka Yamada ,  Takehito Yoshida

IPC分类号： B05D306

CPC分类号： C23C14/5813 ,  B05D1/12 ,  B05D3/061 ,  C23C4/12 ,  C23C14/5846

摘要： A method of depositing nano-particles in a gas stream for efficiently depositing nano-particles by irradiating an electron beam on charged nano-particles in the stream of a first gas species containing the nano-particles, as well as a method of modifying the surface of the nano-particles in a gas stream by mixing them with the first gas species in a gas mixing chamber thereby activating the second gas species, intended for providing a method of depositing nano-particles and a method of modifying the surface thereof in a gas stream, capable of efficiently depositing the nano-particles in a charged state in a gas stream and modifying the surface of the nano-particles which are extremely sensitive to defects and impurities caused by large exposure ratio of surface atoms in a gas stream at a good controllability.

摘要翻译： 一种通过在含有纳米颗粒的第一气体物流中的电荷束照射电子束以有效地沉积纳米颗粒的气流中沉积纳米颗粒的方法，以及改变表面的方法 通过将其与气体混合室中的第一气体物质混合，从而激活第二气体物质，旨在提供沉积纳米颗粒的方法和在气体中改性其表面的方法，将气体流中的纳米颗粒 流，能够在气流中有效地将纳米颗粒沉积为带电状态，并且改变对由良好的气流中的表面原子的大的暴露比导致的缺陷和杂质极度敏感的纳米颗粒的表面 可控性。

公开(公告)号：US07480229B2

公开(公告)日：2009-01-20

申请号：US11408062

申请日：2006-04-21

申请人： Takehito Yoshida ,  Yuka Yamada ,  Nobuyasu Suzuki ,  Toshiharu Makino

发明人： Takehito Yoshida ,  Yuka Yamada ,  Nobuyasu Suzuki ,  Toshiharu Makino

IPC分类号： G11B7/00

CPC分类号： H05B33/22 ,  G11B7/127 ,  H01L33/18 ,  H01S3/0637 ,  H01S3/169 ,  H01S5/183 ,  H01S5/18388 ,  H01S5/3031

摘要： In fabricating a monochromic and highly coherent light source, no single crystalline bulk semiconductor is used, but two different kinds of transparent substances are alternately stacked over each other to constitute a periodic structure in ½ of the intended wavelength. At least one of the two kinds of transparent substances is controllable in electric conductivity, and the structure is such that inside a medium consisting of this kind of transparent substance light-emitting semiconductor particulates are embedded. Accordingly, a light-emitting device has this structure, which makes possible control of the center wavelength of light emission, the width of wavelength distribution and coherence by adjusting the geometrical parameters of the device without having to alter the kind of material use.

摘要翻译： 在制造单色和高度相干光源时，不使用单晶体半导体，但是两种不同种类的透明物质彼此交替堆叠以构成所需波长的1/2的周期性结构。 两种透明物质中的至少一种在导电性方面是可控的，并且其结构是这样的，即在由这种透明物质发光的半导体微粒组成的介质内嵌入。 因此，发光装置具有这样的结构，其可以通过调节装置的几何参数来控制发光的中心波长，波长分布的宽度和相干性，而不必改变材料的种类。

公开(公告)号：US06943048B2

公开(公告)日：2005-09-13

申请号：US10407250

申请日：2003-04-07

申请人： Yuka Yamada ,  Takehito Yoshida ,  Nobuyasu Suzuki ,  Toshiharu Makino ,  Toshihiro Arai ,  Kazuhiko Kimoto

发明人： Yuka Yamada ,  Takehito Yoshida ,  Nobuyasu Suzuki ,  Toshiharu Makino ,  Toshihiro Arai ,  Kazuhiko Kimoto

IPC分类号： H05B33/14 ,  B23K26/00 ,  B23K26/12 ,  B23K101/40 ,  B82Y20/00 ,  H01L21/203 ,  H01L31/0248 ,  H01L31/028 ,  H01L31/09 ,  H01L31/10 ,  H01L33/34 ,  H05B33/12 ,  H01L21/00

CPC分类号： H01L31/0284 ,  H01L31/09 ,  H01L33/346

摘要： An optoelectronic material, device applications, and methods for manufacturing the optoelectronic material are provided to make it possible to obtain stable characteristics without deterioration of luminescence over time in the atmosphere. The optoelectronic material is composed of a porous silicon the surface of which is nitrided to form a silicon nitride layer thereon. This allows a stable electroluminescence to be obtained, without oxidation of the surface of the porous silicon.

摘要翻译： 提供光电子材料，器件应用以及用于制造光电子材料的方法，以使得可以获得稳定的特性，而不会在大气中随着时间的流逝而劣化发光。 光电子材料由多孔硅组成，其表面被氮化以在其上形成氮化硅层。 这允许获得稳定的电致发光，而不会氧化多孔硅的表面。