Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device
    1.
    发明授权
    Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device 有权
    用于制造量子点功能结构,量子点功能结构和光学功能器件的方法和装置

    公开(公告)号:US06648975B2

    公开(公告)日:2003-11-18

    申请号:US09784300

    申请日:2001-02-16

    IPC分类号: C23C1400

    摘要: The present invention is to fabricate a quantum dot functional structure having ultra-fine particles homogeneously distributed in a transparent medium by efficiently fabricating high-purity ultra-fine particles having a single particle diameter and uniform structure and depositing the ultra-fine particles onto a substrate in conjunction with the transparent medium. For these purposes, an apparatus for fabricating a quantum dot functional structure is provided. The apparatus comprises: an ultra-fine particle generating chamber for generating high-purity ultra-fine particles by exciting a semiconductor target with pulsed laser light in a low-pressure rare gas atmosphere, and then by allowing the semiconductor target to be detached or ejected by ablation reaction and condensed and grown in the gas; an ultra-fine particle classifying chamber for classifying the ultra-file particles; a depositing chamber for depositing the high-purity semiconductor ultra-fine particles and the transparent medium by exciting a transparent medium target with excimer laser light at the same time or alternately when the high-purity semiconductor ultra-fine particles are collected onto the substrate, and by collecting the substance generated through ablation reaction onto the substrate; and a carrier gas exhaust system.

    摘要翻译: 本发明通过有效地制造具有单一粒径和均匀结构的高纯度超细颗粒,并将超细颗粒沉积到基底上,制造均匀分布在透明介质中的超细颗粒的量子点功能结构 与透明介质一起使用。 为了这些目的,提供了一种用于制造量子点功能结构的装置。 该装置包括:超细颗粒发生室,用于通过在低压稀有气体气氛中用脉冲激光激发半导体靶,然后通过使半导体靶被分离或喷射而产生高纯度超细颗粒 通过消融反应并在气体中冷凝和生长; 用于对超微粒子进行分类的超细粒子分级室; 用于通过同时激发具有准分子激光的透明介质靶或者当高纯度半导体超细颗粒被收集到基板上时交替沉积高纯度半导体超细颗粒和透明介质的沉积室, 并通过将通过消融反应产生的物质收集到基底上; 和载气排气系统。

    Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device
    2.
    发明授权
    Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device 有权
    用于制造量子点功能结构,量子点功能结构和光学功能器件的方法和装置

    公开(公告)号:US07384666B2

    公开(公告)日:2008-06-10

    申请号:US10657248

    申请日:2003-09-09

    IPC分类号: B05D5/06

    摘要: Fabrication of a quantum dot functional structure having ultra-fine particles homogeneously distributed in a transparent medium includes depositing such particles having a single particle diameter and uniform structure onto a substrate with the transparent medium. An apparatus for fabricating a quantum dot functional structure comprises: a generating chamber for generating high-purity ultra-fine particles by exciting a semiconductor target with pulsed laser light in low-pressure rare gas, and then allowing the semiconductor target to be detached or ejected by ablation and condensed and grown in the gas; a particle classifying chamber for classifying the ultra-fine particles; a depositing chamber for depositing the high-purity semiconductor ultra-fine particles and the transparent medium by exciting a transparent medium target with excimer laser light simultaneously or alternately when the particles are collected onto the substrate, and by collecting the substance generated through ablation onto the substrate; and a carrier gas exhaust system.

    摘要翻译: 具有均匀分布在透明介质中的超细颗粒的量子点功能结构的制造包括使用透明介质将具有单一粒径和均匀结构的这种颗粒沉积在基板上。 一种用于制造量子点功能结构的装置,其特征在于包括:通过在低压稀有气体中激发具有脉冲激光的半导体靶产生高纯度超细颗粒的发生室,然后允许半导体靶被分离或排出 通过消融冷凝并在气体中生长; 用于分级超细颗粒的颗粒分级室; 用于通过同时或交替地将颗粒收集到基板上同时或交替地激发具有准分子激光的透明介质靶的沉积高纯度半导体超细颗粒和透明介质的沉积室,并且通过将通过烧蚀产生的物质收集到 基质; 和载气排气系统。

    Fine particle classification apparatus and method for classifying aerosol particles in a sheath gas
    5.
    发明授权
    Fine particle classification apparatus and method for classifying aerosol particles in a sheath gas 有权
    用于对护套气体中的气溶胶颗粒进行分类的细颗粒分级装置和方法

    公开(公告)号:US06809314B2

    公开(公告)日:2004-10-26

    申请号:US09925414

    申请日:2001-08-10

    IPC分类号: H01J4904

    CPC分类号: G01N15/0266 Y10T428/25

    摘要: A fine-particle classification apparatus includes an aerosol generation section which generates an aerosol containing fine particles in a medium background gas, a fine-particle classification section which classifies the fine particles contained in the aerosol in a sheath gas, and an introduction section, between the aerosol generation section and the fine-particle classification section, which introduces the aerosol generated in the aerosol generation section into the fine-particle classification section. The introduction section uses a carrier gas with an adequately high velocity to introduce the aerosol generated in the aerosol generation section to the classification section using a pressure difference.

    摘要翻译: 细颗粒分级装置包括:气溶胶生成部,其生成含有中等背景气体中的微粒子的气溶胶,将包含在气溶胶中的细颗粒分类为鞘气体的细粒分级部和导入部, 气溶胶生成部和细粒分级部,其将在气溶胶生成部中产生的气溶胶引入微粒分类部。 引入部分使用具有足够高速度的载气,使用压差将气溶胶发生部分中产生的气溶胶引入分级部。

    Light-emitting device and optical integrated device
    6.
    发明授权
    Light-emitting device and optical integrated device 失效
    发光装置和光集成装置

    公开(公告)号:US07480229B2

    公开(公告)日:2009-01-20

    申请号:US11408062

    申请日:2006-04-21

    IPC分类号: G11B7/00

    摘要: In fabricating a monochromic and highly coherent light source, no single crystalline bulk semiconductor is used, but two different kinds of transparent substances are alternately stacked over each other to constitute a periodic structure in ½ of the intended wavelength. At least one of the two kinds of transparent substances is controllable in electric conductivity, and the structure is such that inside a medium consisting of this kind of transparent substance light-emitting semiconductor particulates are embedded. Accordingly, a light-emitting device has this structure, which makes possible control of the center wavelength of light emission, the width of wavelength distribution and coherence by adjusting the geometrical parameters of the device without having to alter the kind of material use.

    摘要翻译: 在制造单色和高度相干光源时,不使用单晶体半导体,但是两种不同种类的透明物质彼此交替堆叠以构成所需波长的1/2的周期性结构。 两种透明物质中的至少一种在导电性方面是可控的,并且其结构是这样的,即在由这种透明物质发光的半导体微粒组成的介质内嵌入。 因此,发光装置具有这样的结构,其可以通过调节装置的几何参数来控制发光的中心波长,波长分布的宽度和相干性,而不必改变材料的种类。

    Cold cathode forming process
    8.
    发明授权
    Cold cathode forming process 失效
    冷阴极成型工艺

    公开(公告)号:US06726517B2

    公开(公告)日:2004-04-27

    申请号:US09988396

    申请日:2001-11-19

    IPC分类号: H01J900

    CPC分类号: H01J9/025

    摘要: The object of the present invention is to form the fine structure on a cathode surface homogeneously and reproducibly to realize the increased emission current value and stability with a simple process in the electron emission element forming process. An electron emission part of an electron emission element that is a crystalline thin film of electron emissive material formed in self-aligning fashion by means of a laser ablation process, in which a laser beam is irradiated onto a target material and the material ejected and emitted from the target material is deposited to form a thin film on a substrate facing to the target, is used as the thin film electron source. The above-mentioned structure is effective to realize the low electron emission threshold value and the increased emission current value and stability, and realize the reduced cost with the structure that is simpler than the conventional structure.

    摘要翻译: 本发明的目的是在阴极表面上均匀且可再现地形成精细结构,以通过电子发射元件形成过程中的简单工艺实现增加的发射电流值和稳定性。 作为电子发射元件的电子发射部分,其是通过激光烧蚀工艺以自对准方式形成的电子发射材料的结晶薄膜,其中将激光束照射到目标材料上并且材料被喷射和发射 从目标材料沉积以在面向靶的衬底上形成薄膜,用作薄膜电子源。 上述结构对于实现低电子发射阈值和增加的发射电流值和稳定性是有效的,并且以比传统结构简单的结构实现降低的成本。

    Fine-particle classification apparatus and functional material production apparatus
    9.
    发明授权
    Fine-particle classification apparatus and functional material production apparatus 有权
    细颗粒分级装置及功能材料生产装置

    公开(公告)号:US06454862B1

    公开(公告)日:2002-09-24

    申请号:US09432800

    申请日:1999-11-03

    IPC分类号: C23C1400

    CPC分类号: G01N15/0266 Y10T428/25

    摘要: In the fine-particle classification apparatus of the present invention, a carrier gas velocity in a take-in section to introduce the aerosol to the fine-particle classification apparatus from the aerosol generation apparatus is increased so as to decrease the static pressure in the take-in section. It is thereby possible to decrease the static pressure in the take-in section than the total pressure in the aerosol generation apparatus. As a result, it is possible to introduce the aerosol inside the fine-particle classification apparatus with a total pressure equal to or higher than that in the aerosol generation apparatus from a fine particle generating area, i.e. aerosol generation apparatus with a pressure equal to or lower than that in the fine-particle classification apparatus.

    摘要翻译: 在本发明的细粒分级装置中,增加了从气溶胶发生装置将气溶胶引入微粒分级装置的吸入部中的载气速度,从而降低取样中的静压 在部分。 由此,能够降低吸入部的静压比气溶胶发生装置的总压。 结果,可以从细颗粒产生区域(即气体生成装置的压力等于或等于或等于或等于)的气体发生装置中,在气雾发生装置内的总压力等于或高于气溶胶发生装置的气体中引入气溶胶 低于细粒分级装置。

    Thin film formation method
    10.
    发明授权
    Thin film formation method 有权
    薄膜形成方法

    公开(公告)号:US06451391B1

    公开(公告)日:2002-09-17

    申请号:US09392794

    申请日:1999-09-09

    IPC分类号: C23L1432

    CPC分类号: C23C14/28

    摘要: In a laser ablation method comprising the steps of irradiating a laser beam to target material 107, and depositing ejected species from the target material on a faced substrate 109 to form a thin film, an ambient gas is introduced into reaction chamber 101 under a constant certain pressure when the laser ablation is performed, using a target material with almost or the same composition as that of a thin film to be obtained. It is thereby possible to obtain a thin film with the same composition as that of the target material readily, without requiring an introduction of O2 gas and a substrate heating. As a result, it is not necessary to limit materials for a substrate, and it is possible to adjust the adaptability of an anaerobic process.

    摘要翻译: 在一种激光烧蚀方法中,包括以下步骤:将激光束照射到靶材料107上,并将来自目标材料的喷射物质沉积在表面基底109上以形成薄膜,将环境气体以恒定的一定值引入反应室101 使用与获得的薄膜几乎或相同组成的目标材料进行激光烧蚀时的压力。 由此,可以容易地获得与目标材料组成相同的薄膜,而不需要引入O 2气体和基板加热。 结果,不需要限制基板的材料,并且可以调节厌氧处理的适应性。