Method of manufacturing semiconductor device having polycrystalline
silicon layer with metal silicide film
    1.
    发明授权
    Method of manufacturing semiconductor device having polycrystalline silicon layer with metal silicide film 失效
    制造具有金属硅化物膜的多晶硅层的半导体器件的方法

    公开(公告)号:US4716131A

    公开(公告)日:1987-12-29

    申请号:US675768

    申请日:1984-11-28

    摘要: A metal silicide film is formed on the sides of a polycrystalline silicon layer formed on a semiconductor substrate via an insulating film and the surface of the metal silicide film is covered by a silicon oxide film, whereby the silicon layer has a low electrical resistance and no short-circuiting is necessary. For example, in an insulated gate field effect transistor, the gate electrode is constituted by the polycrystalline silicon layer and the metal silicide film at the side walls of the polycrystalline silicon layer. Such a gate electrode has a low electrical resistance and does not cause undesirable short-circuiting with source and drain regions by the existence of the silicon oxide film formed on the surface of the metal silicide film. Also, other metal silicide film may be formed on the upper surface of the gate electrode. Moreover the silicide-SiO.sub.2 structure may be used on the source and drain regions.

    摘要翻译: 通过绝缘膜在半导体衬底上形成的多晶硅层的侧面上形成金属硅化物膜,并且金属硅化物膜的表面被氧化硅膜覆盖,由此硅层具有低电阻和无 短路是必要的。 例如,在绝缘栅场效应晶体管中,栅极由多晶硅层和多晶硅层侧壁的金属硅化物膜构成。 这种栅电极具有低电阻,并且由于存在形成在金属硅化物膜的表面上的氧化硅膜,不会引起与源区和漏区的不期望的短路。 而且,也可以在栅电极的上表面上形成其他的金属硅化物膜。 此外,硅化物SiO 2结构可以用在源区和漏区上。

    Magnetic disk apparatus
    2.
    发明授权
    Magnetic disk apparatus 失效
    磁盘装置

    公开(公告)号:US4651242A

    公开(公告)日:1987-03-17

    申请号:US684294

    申请日:1984-12-20

    摘要: A magnetic disk apparatus using at least one floating magnetic head which is floated above the surface of a rotating magnetic disk by utilizing dynamic pressure of air caused by the rotation of the magnetic disk, the magnetic disk apparatus comprising, a magnetic head assembly including a magnetic head and a supporting device for supporting the magnetic head to float above the surface of the rotating magnetic disk, the supporting device being provided with a space changing device for changing a space between the magnetic disk surface and the magnetic head, a driver coupled with the space changing device for driving the space changing device, and a controller coupled with the driver for controlling the driving of the space changing device by the driver to change the space between the magnetic head and the magnetic disk surface.

    摘要翻译: 一种使用至少一个浮动磁头的磁盘装置,该浮动磁头通过利用由磁盘的旋转引起的空气的动态压力浮动在旋转磁盘的表面上方,磁盘装置包括:磁头组件,其包括磁性 头部和用于支撑磁头浮动在旋转磁盘表面上方的支撑装置,支撑装置设置有用于改变磁盘表面和磁头之间的空间的空间改变装置,驱动器与 用于驱动空间改变装置的空间改变装置,以及与驱动器耦合的控制器,用于控制驾驶员对空间改变装置的驱动,以改变磁头和磁盘表面之间的空间。

    Magnetic disk apparatus having improved arrangement of head disk
assemblies
    4.
    发明授权
    Magnetic disk apparatus having improved arrangement of head disk assemblies 失效
    具有头盘组件改进布置的磁盘设备

    公开(公告)号:US5206772A

    公开(公告)日:1993-04-27

    申请号:US638822

    申请日:1991-01-08

    IPC分类号: G11B33/12 G11B33/14

    摘要: A magnetic head disk apparatus has a housing with one thicknesswise end providing the front side and the other thicknesswise end providing the rear side of the apparatus. The apparatus further has a plurality of head disk assemblies each including at least one combination of a magnetic head and a magnetic disk. The head disk assemblies are arranged in a plurality of rows not only in heightwise and breadthwise directions but also in the thicknesswise direction of the housing. With this arrangement, it is possible to accommodate a multiplicity of head disk assemblies with a high space factor in the housing.

    摘要翻译: 磁头盘装置具有壳体,该壳体具有提供前侧的一个厚度方向端部,并且提供设备的后侧的另一个厚度方向端部。 该装置还具有多个头盘组件,每个头盘组件包括磁头和磁盘的至少一个组合。 头盘组件不仅​​在高度方向和宽度方向上而且在壳体的厚度方向上布置成多行。 利用这种布置,可以容纳在壳体中具有高空间系数的多个头盘组件。

    Magnetic disk apparatus using a rotary actuator for magnetic head
positioning with reduced vibration
    8.
    发明授权
    Magnetic disk apparatus using a rotary actuator for magnetic head positioning with reduced vibration 失效
    使用旋转执行机构进行磁头定位的减磁振动装置

    公开(公告)号:US5247410A

    公开(公告)日:1993-09-21

    申请号:US712540

    申请日:1991-06-10

    CPC分类号: G11B5/54

    摘要: A magnetic disk apparatus includes a magnetic disk, a magnetic head which performs information recording and reproducing for the magnetic disk, a load spring for supporting the magnetic head, a head arm for fixing the load spring, a housing for housing these components, a shaft which fixes the head arm, bearings for supporting the shaft rotatably on the housing, and a motor which is coupled to the shaft. The motor comprises a motor cover, a permanent magnet which is divided into a plurality of segments and fixed on the shaft, and a coil which is fixed on the interior surface of the motor cover by being spaced with a certain gap from the permanent magnet. The shaft is included with a counter weight so as to complement the weight of the head arm, load spring and magnetic head. The coil has linear conductor sections parallel to the shaft, with the total number of linear sections being set equal to the total number of segments of permanent magnet.

    摘要翻译: 一种磁盘装置,包括:磁盘,用于执行磁盘的信息记录和再现的磁头;用于支撑磁头的负载弹簧;用于固定负载弹簧的磁头臂;用于容纳这些部件的壳体;轴 其固定头臂,用于将轴支撑在壳体上的轴承以及联接到轴的马达。 电动机包括电动机盖,永久磁铁,其分成多个段并固定在轴上;线圈,其通过与永磁体间隔开一定间隙而固定在电机盖的内表面上。 轴配有平衡重,以补充头臂,负载弹簧和磁头的重量。 线圈具有与轴平行的线性导体部分,其中线性部分的总数被设置为等于永磁体的总段数。

    Device and method for manufacture of carbonaceous material
    10.
    发明授权
    Device and method for manufacture of carbonaceous material 失效
    用于制造碳质材料的装置和方法

    公开(公告)号:US06794599B2

    公开(公告)日:2004-09-21

    申请号:US10470423

    申请日:2003-07-28

    IPC分类号: B23K1500

    摘要: An apparatus and method for manufacturing a carbonaceous material are provided. The carbonaceous material manufacturing apparatus includes a reaction tube and a gas supply portion. An anode and a cathode defining an arc discharge portion is placed in the reaction tube, and a capturer is located provided as well to capture carbonaceous materials generated. At the location of the capturer, an RF heater is disposed around the reaction tube. In a carbonaceous material manufacturing method, carbonaceous materials generated in the arc discharge portion are transported from a gas supply portion into the reaction tube by the gas supplied into the reaction tube, then heated by a RF heater in the capturer where the carbonaceous materials are not exposed to the atmospheric air, to thereby promote removal of impurities and growth of single-walled carbon nanotubes.

    摘要翻译: 提供了一种用于制造碳质材料的装置和方法。 碳质材料制造装置包括反应管和气体供给部。 将阳极和阴极限定为电弧放电部分放置在反应管中,并且还设置捕获器以捕获产生的碳质材料。 在捕获器的位置,RF加热器设置在反应管周围。 在碳质材料制造方法中,在电弧放电部中产生的碳质材料通过供给到反应管中的气体从气体供给部输送到反应管中,然后通过RF加热器在不含碳质材料的捕获器中加热 暴露于大气中,从而促进杂质的去除和单壁碳纳米管的生长。