摘要:
A multilayer film-coated substrate having the stress of the film relaxed by depositing a multilayer film comprising a metal oxide film and a silicon oxide film on a substrate at a high speed by a sputtering method using a conductive sputtering material, and a process for producing a multilayer film-coated substrate having such a low stress, are presented. A multilayer film-coated substrate comprising a substrate and at least a metal oxide film and a silicon oxide film laminated thereon repeatedly at least once, wherein at least one layer of said metal oxide film is a metal oxide film deposited by sputtering by using, as the target material, a metal oxide MOX which is deficient in oxygen than the stoichiometric composition, to have the oxygen deficiency resolved, and the stress of the multilayer film is from −100 MPa to +100 MPa.
摘要翻译:通过使用导电性溅射材料的溅射法,通过在基板上高速沉积包含金属氧化物膜和氧化硅膜的多层膜而使薄膜的应力弛豫的多层膜被覆基板,以及制造方法 提出了具有如此低应力的多层膜涂覆的基板。 一种多层膜被覆基板,包括基板和至少一层金属氧化物膜和氧化硅膜,其上重复层叠至少一次,其中至少一层所述金属氧化物膜是通过溅射沉积的金属氧化物膜,其通过使用作为 目标材料,缺氧量低于化学计量组成的金属氧化物MO X X,以使氧缺陷分解,多层膜的应力为-100MPa〜+100MPa。
摘要:
A multilayer film-coated substrate having the stress of the film relaxed by depositing a multilayer film comprising a metal oxide film and a silicon oxide film on a substrate at a high speed by a sputtering method using a conductive sputtering material, and a process for producing a multilayer film-coated substrate having such a low stress, are presented.A multilayer film-coated substrate comprising a substrate and at least a metal oxide film and a silicon oxide film laminated thereon repeatedly at least once, wherein at least one layer of said metal oxide film is a metal oxide film deposited by sputtering by using, as the target material, a metal oxide MOX which is deficient in oxygen than the stoichiometric composition, to have the oxygen deficiency resolved, and the stress of the multilayer film is from −100 MPa to +100 MPa.
摘要:
A light absorptive antireflector comprising a substrate, and a first layer of a light absorptive film, a second layer made of a material which has slight absorption within a visible light region and a third layer made of a material which has a refractive index smaller than 1.55, sequentially formed on the substrate, which has an adequate low reflection performance within a wide range of a wavelength region and which has an electromagnetic shielding ability and a low luminous transmittance suitable for improving the contrast of a display, has freeness in transmittance and reflection color and is excellent also in the productivity, and a method for its production.
摘要:
An organic substrate provided with a light absorptive antireflection film, which contains an organic substrate, and a light absorbing film and a low refractive index film formed in this order on the substrate, to reduce reflection of incident light from the low refractive index film side, wherein the organic substrate has its surface plasma-treated, and a layer made essentially of at least one member selected from the group consisting of silicon, a silicon nitride, a silicon oxide and a silicon oxy-nitride, is formed between the plasma-treated substrate surface and the light absorbing film.
摘要:
A chemical sensor element contains a resonator having a first reflector in which particles of a fine metal structure are arranged two-dimensionally and periodically is counterposed with interposition of a dielectric layer to a second reflector, wherein the resonance wavelength of a resonator in which the entire of the first reflector is replaced by a metal thin film having the same thickness as the metal fine structure is different from the surface plasmon resonance wavelength induced in the metal fine structure; and the mode of the surface plasmon resonance excited in the metal fine structure is coupled with the mode of the resonator in which the entire of the first reflector is replaced by the metal thin film.
摘要:
An optical filter includes a substrate, and a periodic structure in which a plurality of members formed of silicon are periodically arranged on a surface of the substrate. The filter selectively transmits light of a first wavelength included in light incident on the periodic structure in the direction of the substrate. The members are two-dimensionally arranged with a period of 400 nm to 500 nm. The dimension of the members in the direction parallel to the surface is of 120 nm to 160 nm. A local maximum value of the transmission spectrum of the first wavelength is within the range of 400 nm to 500 nm.
摘要:
[Problem] An object of the present invention is to provide a novel anticancer drug which is useful for treating prostate cancer accompanying androgen receptor mutation[Means for Solution] The present inventors conducted thorough research on mutant androgen-related diseases for which the traditional anti-androgen drugs become ineffective. As a result, they found that the compound, which is an active ingredient of the pharmaceutical composition of the present invention, exhibits an inhibitory action against transcriptional activation in a human mutant androgen receptor (AR), and has an excellent antitumor action in a human prostate cancer-bearing mouse, thereby completing the present invention. Accordingly, the compound, which is an active ingredient of the pharmaceutical composition of the present invention, is useful for a series of androgen receptor-related diseases including prostate cancer.
摘要:
Provided is an optical apparatus having high durability, less optical absorption than a hole-type metal thin film filter, high transmittance and high reflectance, and variable optical characteristics. The apparatus includes: a dielectric substrate; a metal structure group including multiple metal structures two-dimensionally and discretely disposed at regular intervals; and a dielectric layer covering the metal structure group, in which: the metal structures have a first length equal to or shorter than a predetermined wavelength in a visible light region in one direction, and a second length equal to or shorter than the wavelength in a perpendicular direction; and the metal structures resonates with light entering the dielectric substrate or the dielectric layer, having a variable dielectric constant, to generate localized surface plasmon resonance on a surface of the metal structures to have a minimum transmittance or a maximum reflectance of the light having the wavelength.
摘要:
A communication terminal includes a CPU (28). The CPU (28) issues to a router (16) a send request for requesting the router (16) to send an ask signal for repetitive responses to a server (14). Then, the ask signal is sent to the server (14) by the router (16), and a receive port is temporarily opened. From the server (14), a response signal is repeatedly sent in response to the ask signal. To the response signal, time information representative of a waiting time from receiving an ask signal to its reply is attached. A response signal sent back while the receive port is opened arrives at the communication terminal through the router (16), but a response signal sent back after the receive port is closed is discarded in the router (16). The CPU (28) repeatedly issues a send request to the router (16) regarding a time indicated by time information attached to the response signal lastly received as an issuance cycle (T).
摘要:
Even when only a few antigens exist in a specimen, a change in a dielectric constant and a change in an optical spectrum accompanied thereto in the periphery of a conductive member are made larger, so that sensing at high sensitivity can be performed. A structure including a protrusion including a dielectric material protruded on a substrate and a conductive member provided on a first surface of the protrusion, in which the maximum value of the cross-sectional area in the cross-section in parallel with a first surface of the conductive member is larger than the area of the first surface.