公开(公告)号：US5349205A

公开(公告)日：1994-09-20

申请号：US983826

申请日：1992-12-01

申请人： Ikunori Kobayashi ,  Kazuyoshi Nakamura ,  Koji Matsunaga ,  Mamoru Takeda ,  Tomizo Matsuoka

发明人： Ikunori Kobayashi ,  Kazuyoshi Nakamura ,  Koji Matsunaga ,  Mamoru Takeda ,  Tomizo Matsuoka

IPC分类号： G02F1/1362 ,  H01L27/12 ,  H01L29/49 ,  H01L27/01

CPC分类号： H01L29/4908 ,  H01L27/12 ,  G02F2001/136295

摘要： A thin-film transistor array is suited for the manufacture of an image display utilizing liquid crystal. In the thin-film transistor array, a first electrically conductive layer made principally of aluminum is selectively formed on one surface of a substrate. The first electrically conductive layer contains, as an impurity, a high-melting point metal which can be anodized. An oxide layer is formed by an anodization process on the first electrically conductive layer, and the first insulating layer is formed on the oxide layer so as to overlay the substrate. Furthermore, a first semiconductor layer made principally of silicon is selectively formed on the insulating layer, and a pair of second semiconductor layers made principally of silicon containing phosphorus are formed on the first semiconductor layer. A pair of second electrically conductive layers are formed on the paired second semiconductor layers, respectively.

摘要翻译： 薄膜晶体管阵列适用于制造利用液晶的图像显示器。 在薄膜晶体管阵列中，主要由铝制成的第一导电层选择性地形成在衬底的一个表面上。 作为杂质，第一导电层含有可被阳极氧化的高熔点金属。 在第一导电层上通过阳极氧化处理形成氧化物层，并且在氧化物层上形成第一绝缘层以覆盖基板。 此外，主要由硅制成的第一半导体层选择性地形成在绝缘层上，并且在第一半导体层上形成一个主要由含硅的磷制成的一对第二半导体层。 一对第二导电层分别形成在成对的第二半导体层上。

公开(公告)号：US5334544A

公开(公告)日：1994-08-02

申请号：US099460

申请日：1993-07-30

申请人： Tomizo Matsuoka ,  Mamoru Takeda ,  Ikunori Kobayashi

发明人： Tomizo Matsuoka ,  Mamoru Takeda ,  Ikunori Kobayashi

IPC分类号： H01L29/78 ,  H01L21/28 ,  H01L21/316 ,  H01L21/336 ,  H01L29/49 ,  H01L29/786 ,  H01L21/265

CPC分类号： H01L29/66765 ,  H01L21/28008 ,  H01L21/31687 ,  H01L29/4908 ,  G02F2001/136295 ,  Y10S148/118

摘要： A method of making thin film transistors such that the first conductive layer of a thin film transistor is formed with an aluminum system metal having a low electric resistance, and another metal capable of anodic oxidation is deposited to prevent the aluminum system metal from producing hillocks. The metal capable of anodic oxidation and part of the aluminum system metal are changed into an insulator by an anodic oxidation treatment. In all, the gate insulator of the thin film transistor comprises three layers of aluminum oxide, an oxide of the metal capable of anodic oxidation, and silicon nitride. The method makes it possible to form the lower-layer wiring and gate electrode having a low electric resistance and a flawless gate insulator having excellent insulative quality.

摘要翻译： 一种制造薄膜晶体管的方法，使得薄膜晶体管的第一导电层由具有低电阻的铝系金属形成，并且沉积另一种能够阳极氧化的金属，以防止铝系金属产生生成小丘。 能够进行阳极氧化的金属和铝系金属的一部分通过阳极氧化处理变成绝缘体。 总之，薄膜晶体管的栅极绝缘体包括三层氧化铝，能够阳极氧化的金属的氧化物和氮化硅。 该方法可以形成具有低电阻的下层布线和栅电极以及具有优异绝缘品质的无瑕疵栅极绝缘体。

公开(公告)号：US5835168A

公开(公告)日：1998-11-10

申请号：US44001

申请日：1993-04-08

申请人： Mamoru Takeda ,  Ikunori Kobayashi

发明人： Mamoru Takeda ,  Ikunori Kobayashi

IPC分类号： G02F1/136 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/30 ,  G02F1/133

CPC分类号： G02F1/136213

摘要： A liquid crystal display panel includes a plurality of signal lines Yj (j=1-N: total signal line number N) and a plurality of scanning lines Xi (i=1-M) arranged in a matrix pattern of N.times.M, and thin film transistors for switching signal inputs between a display pixel electrode C (i, j) and signal wiring Yj, disposed to correspond to respective intersections of the signal lines and the scanning lines, and auxiliary capacitance Cadd formed in an electrically parallel relationship with the display pixel electrode C (i, j) composed of liquid crystal. The auxiliary capacitance Cadd is formed between the scanning line Xi-1 controlling the display pixel electrode C(i-1, j) at a previous stage of the display pixel electrode C (i, j) and display pixel electrode C (i, j), and disposed n such a positional relationship that the display pixel electrode C (i, j) completely covers the scanning line Xi-1 at the previous stage in a direction of its line width in terms of a cross sectional construction. By the above arrangement, variations of the display pixel signal due to a leaking electric field from the gate line may be reduced.

摘要翻译： 液晶显示面板包括以N×M的矩阵图案排列的多条信号线Yj（j = 1-N：总信号线数N）和多条扫描线Xi（i = 1-M），薄膜 用于在显示像素电极C（i，j）和信号布线Yj之间切换信号输入的晶体管，其布置成对应于信号线和扫描线的各个交叉点，以及与显示像素以电并联形式形成的辅助电容Cadd 由液晶构成的电极C（i，j）。 辅助电容Cadd形成在控制显示像素电极C（i，j）的前一级的显示像素电极C（i-1，j）的扫描线Xi-1与显示像素电极C（i，j）之间 ），并且设置n这样的位置关系，使得显示像素电极C（i，j）在横截面结构方面在其宽度方向上完全覆盖前一级的扫描线Xi-1。 通过上述布置，可以减少由于来自栅极线的泄漏电场引起的显示像素信号的变化。

公开(公告)号：US5699134A

公开(公告)日：1997-12-16

申请号：US343936

申请日：1994-11-17

申请人： Mamoru Takeda ,  Ikunori Kobayashi ,  Mitsuhiro Uno

发明人： Mamoru Takeda ,  Ikunori Kobayashi ,  Mitsuhiro Uno

IPC分类号： G02F1/136 ,  G02F1/13 ,  G02F1/1333 ,  G02F1/1345 ,  G02F1/1362 ,  G02F1/1368 ,  H01L21/304 ,  H01L29/78 ,  H01L29/786

CPC分类号： G02F1/1309 ,  G02F1/136204

摘要： A liquid crystal display (LCD) panel includes a short-circuit ring formed of aluminum or an aluminum alloy during manufacture. The short-circuit ring is formed along a gate wiring line or a source wiring line. After the panel is inspected for defects, the short-circuit ring is removed. In the LCD manufacturing process, a glass substrate is cut outside the short-circuit ring made of aluminum, and thereafter the short-circuit ring is removed by grinding the short-circuit ring while spraying water having a low resistance on the substrate. The water may include carbon dioxide gas. Low resistance aluminum may be used as the gate wiring line and the short-circuit ring. This aluminum material, which is used as a current supply wiring line, can be subjected to an anodic oxidation process. Thus, it is not necessary to form a film of any metal other than aluminum. This can simplify or reduce the number of fabrication processes. Furthermore, because the aluminum is trimmed off by grinding, it is not clawed during cutting. In this manner, the aluminum short-circuit material is removed without causing short circuits between adjacent wiring lines and without slipping the tooth when scribing a scratch marking line by a scriber.

摘要翻译： 液晶显示器（LCD）面板包括在制造期间由铝或铝合金形成的短路环。 沿着栅极布线或源极布线形成短路环。 在面板检查缺陷后，短路环被去除。 在LCD制造工序中，在由铝构成的短路环的外侧切断玻璃基板，然后在基板上喷涂低电阻的水时，通过研磨短路环来除去短路环。 水可以包括二氧化碳气体。 低电阻铝可用作栅极布线和短路环。 用作电流布线的铝材料可以进行阳极氧化处理。 因此，不需要形成铝以外的任何金属的膜。 这可以简化或减少制造工艺的数量。 此外，由于通过研磨来修整铝，所以在切割期间不会被卡住。 以这种方式，除去铝短路材料，而不会在相邻布线之间引起短路，并且在划线器划刻划线时不会滑动齿。

公开(公告)号：US20120240850A1

公开(公告)日：2012-09-27

申请号：US13137913

申请日：2011-09-21

申请人： Ikunori Kobayashi ,  Jung Woo Ko ,  Sang Shin Lee ,  Taek Kyo Kang

发明人： Ikunori Kobayashi ,  Jung Woo Ko ,  Sang Shin Lee ,  Taek Kyo Kang

IPC分类号： B05C11/00

CPC分类号： C23C14/042 ,  C23C16/042

摘要： A deposition mask that is placed on a mask frame by a tensile force includes first through nth corrected patterns obtained by correcting first through nth initially designed patterns, which are arranged sequentially in a first direction, a row direction and a column direction in view of the tensile force applied to the deposition mask. Outermost sides of the first through nth corrected patterns include first outermost sides extending in a second direction perpendicular to the first direction and second outermost sides extending in a direction parallel to the first direction. The first outermost sides have a first curvature and are recessed inwardly with respect to the first and the nth initially designed patterns. The second outermost sides have a second curvature and protrude outwardly with respect to the first through nth initially designed patterns.

摘要翻译： 通过拉伸力放置在掩模框架上的沉积掩模包括通过校正第一至第n初始设计的图案而获得的第一至第n校正图案，其中第一至第n校正图案按照第一方向，第四方向和第四方向 施加到沉积掩模的张力。 第一至第n校正图案的最外侧包括沿垂直于第一方向的第二方向延伸的第一最外侧和在平行于第一方向的方向延伸的第二最外侧。 第一最外侧具有第一曲率并且相对于第一和第n初始设计的图案向内凹入。 第二最外侧具有第二曲率并且相对于第一至第n初始设计的图案向外突出。

公开(公告)号：US20090286447A1

公开(公告)日：2009-11-19

申请号：US12385620

申请日：2009-04-14

申请人： Ikunori Kobayashi

发明人： Ikunori Kobayashi

IPC分类号： H01J9/00

CPC分类号： H01L51/56 ,  C23C14/042 ,  C23C14/50 ,  H01L51/0008

摘要： An apparatus and method for fabricating an organic light emitting diode display device are provided. The apparatus for fabricating an organic light emitting diode display device includes a chamber, a mask disposed in the chamber to mount a substrate on the upper surface thereof and having a certain pattern of openings, a deposition material source disposed under the mask and supplying a deposition material to the mask through the openings of the mask to form a layer on the substrate, and a holding unit pressing the substrate toward the mask. The holding unit includes a member that is capable of being deformed according to a deformed shape of the substrate such that the mask closely contacts the substrate.

摘要翻译： 提供一种用于制造有机发光二极管显示装置的装置和方法。 用于制造有机发光二极管显示装置的装置包括：腔室，设置在腔室中以将衬底安装在其上表面上并具有确定的开口图案的掩模;沉积材料源，设置在掩模下方并提供沉积物 通过掩模的开口向掩模施加材料以在基板上形成层，以及保持单元将基板朝向掩模。 保持单元包括能够根据基板的变形形状而变形的构件，使得掩模紧密接触基板。

公开(公告)号：US08815015B2

公开(公告)日：2014-08-26

申请号：US12385620

申请日：2009-04-14

申请人： Ikunori Kobayashi

发明人： Ikunori Kobayashi

IPC分类号： C23C16/00

CPC分类号： H01L51/56 ,  C23C14/042 ,  C23C14/50 ,  H01L51/0008

摘要： An apparatus and method for fabricating an organic light emitting diode display device are provided. The apparatus for fabricating an organic light emitting diode display device includes a chamber, a mask disposed in the chamber to mount a substrate on the upper surface thereof and having a certain pattern of openings, a deposition material source disposed under the mask and supplying a deposition material to the mask through the openings of the mask to form a layer on the substrate, and a holding unit pressing the substrate toward the mask. The holding unit includes a member that is capable of being deformed according to a deformed shape of the substrate such that the mask closely contacts the substrate.

摘要翻译： 提供一种用于制造有机发光二极管显示装置的装置和方法。 用于制造有机发光二极管显示装置的装置包括：腔室，设置在腔室中以将衬底安装在其上表面上并具有确定的开口图案的掩模;沉积材料源，设置在掩模下方并提供沉积物 通过掩模的开口向掩模施加材料以在基板上形成层，以及保持单元将基板朝向掩模。 保持单元包括能够根据基板的变形形状而变形的构件，使得掩模紧密接触基板。

公开(公告)号：US08701592B2

公开(公告)日：2014-04-22

申请号：US13242521

申请日：2011-09-23

申请人： Jung-Woo Ko ,  Ikunori Kobayashi ,  Sang-Shin Lee ,  Taek-Kyo Kang

发明人： Jung-Woo Ko ,  Ikunori Kobayashi ,  Sang-Shin Lee ,  Taek-Kyo Kang

IPC分类号： B05C11/11

CPC分类号： C23C14/042 ,  Y10T29/49863 ,  Y10T428/24314

摘要： A mask frame includes a frame and a mask installed on the frame while being stretched in a first direction. The mask includes a deposition area including a plurality of deposition pattern portions, an edge unit formed to have a thickness greater than a thickness of the deposition area and including a first edge and a second edge that extend in the first direction on two sides of the deposition area, and two or more ribs formed to have a thickness greater than the thickness of the deposition area between deposition pattern portions adjacent to each other in a second direction perpendicular to the first direction.

摘要翻译： 掩模框架包括框架和安装在框架上的面罩，同时在第一方向上被拉伸。 掩模包括包括多个沉积图案部分的沉积区域，形成为具有大于沉积区域的厚度的厚度的边缘单元，并且包括沿着第一边缘和第二边缘在第一方向延伸的第二边缘 沉积区域和形成为具有大于垂直于第一方向的第二方向上彼此相邻的沉积图案部分之间的沉积区域的厚度的两个或更多个肋。

公开(公告)号：US5373378A

公开(公告)日：1994-12-13

申请号：US53414

申请日：1993-04-28

申请人： Yoneharu Takubo ,  Ikunori Kobayashi ,  Tetsu Ogawa

发明人： Yoneharu Takubo ,  Ikunori Kobayashi ,  Tetsu Ogawa

IPC分类号： G02F1/1368 ,  G09G3/36 ,  G02F1/1343

CPC分类号： G02F1/1368 ,  G09G3/3648 ,  G09G2300/043 ,  G09G2310/0232

摘要： Pixel electrodes in the periphery of a thin film transistor array (peripheral part of the display screen) of an active matrix type liquid crystal display device are directly electrically shortcircuited with signal lines, whereby an alternating current signal is always applied to the pixel electrodes without being passed through a thin film transistor as a switching element. Thereby the liquid crystal arranged on the peripheral part of the display screen is driven in a static state resulting in a high stability against the display characteristics.

摘要翻译： 有源矩阵型液晶显示装置的薄膜晶体管阵列（显示屏的外围部分）的外围的像素电极与信号线直接电短路，由此一直对像素电极施加交流信号，而不会 通过作为开关元件的薄膜晶体管。 由此，布置在显示屏的周边部分上的液晶以静态状态被驱动，导致相对于显示特性的高稳定性。

公开(公告)号：US20120234236A1

公开(公告)日：2012-09-20

申请号：US13237340

申请日：2011-09-20

申请人： Jung-Woo Ko ,  Ikunori Kobayashi

发明人： Jung-Woo Ko ,  Ikunori Kobayashi

IPC分类号： B05C11/00 ,  B32B37/14 ,  B23P11/00 ,  B32B37/02

CPC分类号： B05B12/20 ,  B05C21/005 ,  C23C14/042 ,  H01J9/24 ,  H01J11/48 ,  H01L51/0011 ,  H01L51/5246 ,  Y10T29/49826

摘要： A deposition mask comprises a mask frame having an open window defined in a center thereof, a first mask sheet placed on the mask frame and including a plurality of open regions and a separation region which separates the open regions, and a second mask sheet placed on the first mask sheet and including a first aperture portion in a region which contacts the separation region of the first mask sheet.

摘要翻译： 沉积掩模包括具有限定在其中心的开放窗口的掩模框架，设置在掩模框架上的第一掩模板，并且包括多个开放区域和分离开放区域的分离区域，以及放置在其上的第二掩模板 第一掩模片，并且在与第一掩模片的分离区域接触的区域中包括第一孔部。