公开(公告)号：US4430400A

公开(公告)日：1984-02-07

申请号：US304153

申请日：1981-09-21

申请人： Toshio Nakano ,  Yoshio Taniguchi ,  Ken Tsutsui ,  Akira Sasano ,  Tadeo Kaneko ,  Akiya Izumi ,  Michiaki Hashimoto

发明人： Toshio Nakano ,  Yoshio Taniguchi ,  Ken Tsutsui ,  Akira Sasano ,  Tadeo Kaneko ,  Akiya Izumi ,  Michiaki Hashimoto

IPC分类号： G02B5/20 ,  G03F7/00 ,  H01L27/14 ,  H04N9/07 ,  G03F5/00 ,  G03C5/00

CPC分类号： G03F7/0007

摘要： Disclosed is a method of producing color filters, which comprises forming a layer of an organic polymeric material having a predetermined light-sensitive characteristic on a substrate, exposing this layer to a predetermined pattern, developing the exposed layer to form a filter base and dyeing the filter base, wherein after the development of the exposed layer, the layer is wetted with a dehydrating solution to remove water from the filter base. By this dehydrating treatment, the filter base can be processed with very high precision.

摘要翻译： 公开了一种生产滤色器的方法，其包括在基板上形成具有预定光敏特性的有机聚合物材料层，将该层暴露于预定图案，显影曝光层以形成滤色器基底并染色 过滤基底，其中在暴露层的显影之后，用脱水溶液润湿层以从过滤器基底去除水。 通过该脱水处理，可以以非常高的精度对过滤器基底进行加工。

公开(公告)号：US4395629A

公开(公告)日：1983-07-26

申请号：US215073

申请日：1980-12-10

申请人： Akira Sasano ,  Toshio Nakano ,  Ken Tsutsui ,  Michiaki Hashimoto ,  Tadao Kaneko ,  Yoshio Taniguchi ,  Haruo Matsumaru ,  Akiya Izumi

发明人： Akira Sasano ,  Toshio Nakano ,  Ken Tsutsui ,  Michiaki Hashimoto ,  Tadao Kaneko ,  Yoshio Taniguchi ,  Haruo Matsumaru ,  Akiya Izumi

IPC分类号： H04N9/07 ,  H01L27/14 ,  H01L27/146 ,  G01J3/34

CPC分类号： H01L27/14667 ,  H01L27/14621 ,  H01L27/14645

摘要： According to a solid-state imager of this invention, in case where a plurality of color filters are disposed on a semiconductor body for the solid-state imager including a plurality of photosensitive regions and where the color filter of a third color is constructed by the overlapping between filter members of a first color and a second color, that one of the filter members which has a spectral transmittance substantially transmitting light for exposure for use in forming the filter members is arranged as a lower layer closer to a substrate of the semiconductor body. Even when the filter members are formed by the exposure process, a solid-state imager having good characteristics can be manufactured.

摘要翻译： 根据本发明的固态成像器，在多个滤色器设置在包括多个感光区域的固态成像器的半导体本体上并且第三颜色的滤色器由 在第一颜色和第二颜色的过滤构件之间重叠，具有基本上透射用于形成过滤构件的曝光用光的光谱透射率中的一个被布置为更靠近半导体本体的衬底的下层 。 即使当通过曝光处理形成过滤构件时，也可以制造具有良好特性的固态成像器。

公开(公告)号：US4412236A

公开(公告)日：1983-10-25

申请号：US180042

申请日：1980-08-21

申请人： Akira Sasano ,  Toshio Nakano ,  Ken Tsutsui ,  Michiaki Hashimoto ,  Tadao Kaneko ,  Norio Koike ,  Akiya Izumi

发明人： Akira Sasano ,  Toshio Nakano ,  Ken Tsutsui ,  Michiaki Hashimoto ,  Tadao Kaneko ,  Norio Koike ,  Akiya Izumi

IPC分类号： H01L27/146 ,  H01L27/14 ,  H01L27/02 ,  H01L29/78

CPC分类号： H01L27/14645 ,  H01L27/14609 ,  H01L27/14621 ,  H01L27/14667

摘要： A color solid-state imager comprising a semiconductor body which has a photoelectric conversion function and which includes at least photosensitive elements and switching elements, and predetermined color filters which are formed on the body; characterized in that a light absorbing layer is disposed at least over a vicinity of an output terminal of each switching element. The contours of the color filters can be accurately formed, and unnecessary light can be intercepted to stabilize the electrical characteristics of the solid-state imager.

摘要翻译： 一种彩色固态成像器，包括具有光电转换功能并且至少包括光敏元件和开关元件的半导体本体和形成在本体上的预定滤色器; 其特征在于，至少在每个开关元件的输出端子的附近设置光吸收层。 可以精确地形成滤色器的轮廓，并且可以截取不必要的光以稳定固态成像器的电特性。

公开(公告)号：US4311773A

公开(公告)日：1982-01-19

申请号：US120114

申请日：1980-02-11

申请人： Tadao Kaneko ,  Michiaki Hashimoto ,  Toshio Nakano ,  Akira Sasano

发明人： Tadao Kaneko ,  Michiaki Hashimoto ,  Toshio Nakano ,  Akira Sasano

IPC分类号： G03F7/00 ,  H01L31/0216 ,  G03C5/00 ,  G03C11/00 ,  G03F5/00

CPC分类号： H01L31/02162 ,  G03F7/0007

摘要： A method of producing color filters comprising:a step for forming a photosensitive film by coating, on a rugged substrate, a mixture of a light-absorbing material which absorbs light and which can be removed with a solvent and a photosensitive material;a step for irradiating light onto the photosensitive film through a predetermined pattern;a step for removing dissolvable portions of the photosensitive film and the light-absorbing material from the photosensitive film which remains on the substrate; anda step for dyeing the photosensitive film into any desired color.

摘要翻译： 一种彩色滤光片的制造方法，其特征在于，包括：通过在粗糙基板上涂布吸收光并可用溶剂和感光材料除去的吸光材料的混合物来形成感光膜的步骤; 用于通过预定图案将光照射到感光膜上的步骤; 从保留在基板上的感光膜除去感光膜和光吸收材料的可溶解部分的步骤; 以及将感光膜染色成任何所需颜色的步骤。

公开(公告)号：US4285007A

公开(公告)日：1981-08-18

申请号：US123085

申请日：1980-02-20

申请人： Toshio Nakano ,  Tadao Kaneko ,  Michiaki Hashimoto ,  Yoshio Hatano ,  Haruo Matsumaru ,  Akira Sasano ,  Eiichi Maruyama

发明人： Toshio Nakano ,  Tadao Kaneko ,  Michiaki Hashimoto ,  Yoshio Hatano ,  Haruo Matsumaru ,  Akira Sasano ,  Eiichi Maruyama

IPC分类号： G02B5/20 ,  H01L27/14 ,  H01L27/146 ,  H04N9/04

CPC分类号： H01L27/14645 ,  H01L27/14609 ,  H01L27/14621

摘要： A color solid-state imager comprises a semiconductor body over which are successively laminated a predetermined number of filter layers of any desired shape having predetermined spectral characteristics and, laminated on the filter layers, a predetermined number of layers composed of a transparent, organic high molecular material which is sensitive to radiation, the semiconductor substrate having at least a detector portion composed of an array of a plurality of optical detector elements. The method of making color solid-state imagers can be simplified by at least using the radiation-sensitive high molecular material for the intermediate layers or protection layers which are used for forming a laminate construction of color-decomposing filters.Further, in mounting the color-decomposing filters on the semiconductor substrate, it is particularly preferred to form beforehand a film of an organic high molecular material.

摘要翻译： 彩色固态成像器包括半导体本体，其上依次层叠具有预定光谱特性的任意所需形状的预定数量的滤光层，并且层叠在滤光层上，预定数量的层由透明的有机高分子 对辐射敏感的材料，所述半导体衬底至少具有由多个光学检测器元件的阵列组成的检测器部分。 通过至少使用辐射敏感的高分子材料用于形成分色滤光片的层叠结构的中间层或保护层，可以简化制备彩色固态成像器的方法。 此外，在将分色滤光片安装在半导体基板上时，特别优选预先形成有机高分子材料的膜。

公开(公告)号：US4273842A

公开(公告)日：1981-06-16

申请号：US895372

申请日：1978-04-11

申请人： Saburo Nonogaki ,  Hajime Morishita ,  Michiaki Hashimoto ,  Toshikatsu Manabe ,  Yoshifumi Tomita ,  Masahiro Nishizawa

发明人： Saburo Nonogaki ,  Hajime Morishita ,  Michiaki Hashimoto ,  Toshikatsu Manabe ,  Yoshifumi Tomita ,  Masahiro Nishizawa

IPC分类号： G03F7/016 ,  G03F7/28 ,  H01J9/227 ,  H01J29/22 ,  H01J29/32 ,  G03C5/00

CPC分类号： H01J29/327 ,  G03F7/016 ,  G03F7/28 ,  H01J29/225 ,  H01J9/2271 ,  H01J9/2278

摘要： A patternwise coated powder layer can be formed by a process comprising the steps of coating a photosensitive composition, which contains an aromatic diazonium salt as a photosensitive component and becomes sticky by exposure, onto the surface of a substrate to form a thin layer, subjecting the thin layer to patternwise exposure with actinic radiation to produce stickiness at the exposed area, and then contacting powder particles with the thin layer after exposure to make the thin layer to accept the powder particles according to the powder acceptability of the thin layer. According to this process, for example, the phosphor screen of a color picture tube can simply be produced.LIST OF PRIOR ART (37 CFR 1.56 (a))The following reference is cited to show the state of the art:Japanese Patent Laid-Open Publication No. 47-7266 (1972)

摘要翻译： 图案化涂层粉末层可以通过以下步骤形成，该方法包括以下步骤：将含有芳香族重氮盐作为感光性成分的感光性组合物涂布在基材表面上，形成薄层， 薄膜以光化辐射进行图案曝光以在曝光区域产生粘性，然后在曝光后使粉末颗粒与薄层接触，以使薄层根据薄层的粉末可接受性接受粉末颗粒。 根据该处理，例如可以简单地制造彩色显像管的荧光屏。

公开(公告)号：US5314783A

公开(公告)日：1994-05-24

申请号：US970031

申请日：1992-11-02

申请人： Shigeru Koibuchi ,  Asao Isobe ,  Michiaki Hashimoto

发明人： Shigeru Koibuchi ,  Asao Isobe ,  Michiaki Hashimoto

IPC分类号： G03C1/00 ,  G03C1/72 ,  G03F7/004 ,  G03F7/022 ,  H01L21/027 ,  G03F7/023 ,  G03C1/61

CPC分类号： G03F7/0226

摘要： A photosensitive resin composition comprising (A) an alkaline aqueous solution-soluble novolak resin, (B) a photosensitizer obtained by reacting a polyhydroxy compound with 1,2-naphthoquinone-(2)-diazido-5(or 4)-sulfonyl chloride, and (C) an ultraviolet absorber such as 2-(2'-hydroxy-5'-methylphenyl)-benzotriazole, has a strong absorption against a light of a wavelength of 365 nm and is suitable for producing semiconductor elements, etc.

摘要翻译： 一种感光性树脂组合物，其包含（A）碱性水溶性溶液型酚醛清漆树脂，（B）通过使多羟基化合物与1,2-萘醌 - （2） - 叠氮基-5（或4） - 磺酰氯反应而得到的光敏剂， 和（C）2-（2'-羟基-5'-甲基苯基） - 苯并三唑等紫外线吸收剂对波长365nm的光具有很强的吸收性，适用于制造半导体元件等。

公开(公告)号：US06319649B1

公开(公告)日：2001-11-20

申请号：US09024873

申请日：1998-02-17

申请人： Koji Kato ,  Masahiro Hashimoto ,  Michiaki Hashimoto ,  Toshio Sakamizu ,  Hiroshi Shiraishi

发明人： Koji Kato ,  Masahiro Hashimoto ,  Michiaki Hashimoto ,  Toshio Sakamizu ,  Hiroshi Shiraishi

IPC分类号： G03F7021

CPC分类号： G03F7/0045 ,  G03F7/039 ,  Y10S430/106 ,  Y10S430/111

摘要： A chemically amplified photosensitive resin composition containing a first compound forming an acid by irradiation of actinic ray and a second compound that changes the solubility to an aqueous alkali solution with acid-catalyzed reaction wherein an ion dissociative compound having the composition represented by the general formula (1) or (2), as well a method of forming a resist pattern using the composition are disclosed, the formulae being expressed by: where each of R2, R3 and R4 represents hydrogen, and an alkyl or aryl group of 1 to 7 carbon atoms, at least one of R1, R2, R3 and R4 represents hydrogen, Y1 represents chlorine, bromine, iodine, carbonate group of 1 to 7 carbon atoms or sulfonate group of 1 to 7 carbon atoms, and

摘要翻译： 一种化学放大型光敏树脂组合物，其含有通过光化射线照射形成酸的第一化合物和通过酸催化反应改变其对碱性水溶液的溶解度的第二化合物，其中具有由通式表示的组成的离子解离化合物（ 1）或（2），以及使用该组合物形成抗蚀剂图案的方法，其公式表示为：其中R2，R3和R4各自表示氢，并且具有1至7个碳原子的烷基或芳基 R1，R2，R3和R4中的至少一个表示氢，Y1表示氯，溴，碘，1〜7个碳原子的碳酸酯基或1〜7个碳原子的磺酸酯基，

公开(公告)号：US5290666A

公开(公告)日：1994-03-01

申请号：US715694

申请日：1991-06-17

申请人： Michiaki Hashimoto ,  Shouichi Uchino

发明人： Michiaki Hashimoto ,  Shouichi Uchino

IPC分类号： G03C1/54 ,  G03F7/09 ,  G03F7/30 ,  G03F7/021

CPC分类号： G03F7/091 ,  G03C1/54

摘要： The present invention relates to a method of forming a pattern using a photosensitive film having bleaching properties for use as a contrast enhancing layer. The photosensitive film comprises an aromatic diazonium salt having extremely high purity content. In addition, no harmful metals are incorporated during preparation. Fine patterns of various semiconductor devices can thus be formed with high accuracy. The diazonium salt is selected from the group consisting of trifluromethanesulfonic acid salt, methanesulfonic acid salts, and trifluromethaneacetic salts of aromatic diazonium compounds.

摘要翻译： 本发明涉及使用具有漂白性的感光膜形成图案的方法，用作对比增强层。 感光膜包含具有极高纯度含量的芳族重氮盐。 此外，在制备过程中没有掺入有害金属。 因此可以高精度地形成各种半导体器件的精细图案。 重氮盐选自芳族重氮化合物的三氟甲烷磺酸盐，甲磺酸盐和三氟乙烷醋酸盐。

公开(公告)号：US5024920A

公开(公告)日：1991-06-18

申请号：US355635

申请日：1989-05-23

申请人： Hajime Morishita ,  Nobuaki Hayashi ,  Saburo Nonogaki ,  Michiaki Hashimoto ,  Masato Ito ,  Masahiro Nishizawa ,  Kiyoshi Miura ,  Yoshiyuki Odaka

发明人： Hajime Morishita ,  Nobuaki Hayashi ,  Saburo Nonogaki ,  Michiaki Hashimoto ,  Masato Ito ,  Masahiro Nishizawa ,  Kiyoshi Miura ,  Yoshiyuki Odaka

IPC分类号： G02B5/20 ,  G03F7/00 ,  G03F7/012 ,  G03F7/26

CPC分类号： G03F7/012

摘要： This invention relates to a process for forming a pattern using a photosensitive composition comprising a polymeric azide and a high-molecular weight copolymer or polymer. The photosensitive composition comprises a copolymer containing at least a water-soluble non-photosensitive monomeric unit having an electrolytic functional group, a monomeric unit having an azido group and an electrolytic functional group and a high-soluble high molecular weight copolymer or polymer which exhibits reciprocity law failure characteristic.

摘要翻译： 本发明涉及使用包含聚合叠氮化物和高分子量共聚物或聚合物的光敏组合物形成图案的方法。 光敏组合物包含至少含有具有电解官能团的水溶性非感光单体单元，具有叠氮基的单体单元和电解官能团的共聚物以及表现出互易性的高溶解性高分子量共聚物或聚合物 法律失效特征。