公开(公告)号：US09879979B2

公开(公告)日：2018-01-30

申请号：US14441821

申请日：2013-10-28

申请人： TSINGHUA UNIVERSITY

发明人： Ming Zhang ,  Yu Zhu ,  Leijie Wang ,  Jinchun Hu ,  Longmin Chen ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Haihua Mu

IPC分类号： G01B9/02 ,  G01B11/14 ,  G01D5/26 ,  G01D5/38

CPC分类号： G01B11/14 ,  G01B9/02002 ,  G01B9/02007 ,  G01B9/02011 ,  G01B2290/70 ,  G01D5/266 ,  G01D5/38

摘要： A displacement measurement system of heterodyne grating interferometer, comprises a reading head, a measurement grating and an electronic signal processing component. Laser light emitted from the laser tube is collimated, passes through the first polarization spectroscope, and then emits two light beams with an orthogonal polarization direction and an orthogonal propagation direction; the two light beams pass through two acousto-optic modulators and respectively generate two first-order diffraction light beams with different frequencies, which are later divided into reference light and measurement light; two parallel reference light beams form a beat frequency electric signal with positive and negative first-order diffraction measurement light respectively after passing through a measurement signal photo-electric conversion unit; the beat frequency signals are transmitted to the electronic signal processing component for signal processing, thus the output of linear displacement in two directions is realized.

公开(公告)号：US20150362723A1

公开(公告)日：2015-12-17

申请号：US14761605

申请日：2014-01-13

申请人： TSINGHUA UNIVERSITY

发明人： Yu Zhu ,  Ming Zhang ,  Leijie Wang ,  Rong Cheng ,  Kaiming Yang ,  Zhao Liu ,  Jinchun Hu ,  Wensheng Yin ,  Haihua MU ,  Chuxiong Hu ,  Dengfeng Xu

IPC分类号： G02B26/06 ,  G03F7/20

CPC分类号： G02B26/06 ,  G03F7/20 ,  G03F7/70316 ,  G03F7/70408

摘要： An optical grating phase modulator for a laser interference photoetching system is composed of a substrate, an optical grating, an electric motor and an optical grating positioner. The optical grating, the electric motor and the optical grating positioner are all mounted on the substrate. The optical grating is circular or rectangular, and adopt transmission or reflection type optical grating. A light beam is incident on the optical grating and generates diffraction, and when the electric motor drives the optical grating to continuously move relative to the incident light beam, diffracted light will generate a frequency shift, thereby realizing the phase modulation of the light beam. The optical grating phase modulator has the advantages of high phase modulation speed, high regulation precision and wide regulation range, thereby improving the whole performance of an interference photoetching system.

摘要翻译： 用于激光干涉光刻系统的光栅相位调制器由基板，光栅，电动马达和光栅定位器组成。 光栅，电动机和光栅定位器都安装在基板上。 光栅为圆形或矩形，采用透射或反射型光栅。 光束入射到光栅上并产生衍射，并且当电动机驱动光栅相对于入射光束连续移动时，衍射光将产生频移，从而实现光束的相位调制。 光栅相位调制器具有相位调制速度快，调节精度高，调节范围宽等特点，提高了干涉光刻系统的整体性能。

公开(公告)号：US11307018B2

公开(公告)日：2022-04-19

申请号：US17257219

申请日：2019-06-26

申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

发明人： Yu Zhu ,  Ming Zhang ,  Leijie Wang ,  Fuzhong Yang ,  Rong Cheng ,  Xin Li ,  Weinan Ye ,  Jinchun Hu

IPC分类号： G01B9/02003 ,  G01B9/02015 ,  G01B11/06 ,  G01B9/02

摘要： A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal. The measurement system has advantages of insensitivity to grating rotation angle error, small volume, light weight, and a facilitating arrangement.

公开(公告)号：US20150268031A1

公开(公告)日：2015-09-24

申请号：US14441828

申请日：2013-10-28

申请人： TSINGHUA UNIVERSITY

发明人： Yu Zhu ,  Ming Zhang ,  Leijie Wang ,  Jinchun Hu ,  Longmin Chen ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Haihua Mu

IPC分类号： G01B9/02 ,  G01B11/14

CPC分类号： G01B9/02007 ,  G01B9/02049 ,  G01B11/14 ,  G01D5/266 ,  G01D5/38

摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.

摘要翻译： 双频光栅干涉仪位移测量系统，包括双频激光器，干涉仪，测量光栅和电子信号处理部件。 测量系统基于光栅衍射，光学多普勒效应和光拍频理论实现位移测量。 双频激光从双频激光器发射并通过偏振光谱仪分为参考光和测量光。 测量光入射到测量光栅以产生正负一阶衍射。 衍射光和参考光在光检测单元处形成包含关于两个方向的位移信息的拍频信号，并且在信号处理之后实现线性位移输出。 测量系统可以实现亚纳米级，甚至更高的分辨率和精度，同时可以测量长的水平位移和垂直位移。

公开(公告)号：US20150077032A1

公开(公告)日：2015-03-19

申请号：US14395471

申请日：2013-04-15

申请人： TSINGHUA UNIVERSITY

发明人： Kaiming Yang ,  Yu Zhu ,  Dongdong Yu ,  Rong Cheng ,  Ming Zhang ,  Xin Li ,  Haihua Mu ,  Jinchun Hu ,  Dengfeng Xu ,  Wensheng Yin ,  Guofeng Ji

IPC分类号： G05B19/18

CPC分类号： G05B19/18 ,  G05B2219/41117 ,  H02P25/06

摘要： A single degree of freedom vibration isolating device of a linear motor and a motion control method thereof. The vibration isolating device comprises a balance block, an anti-drifting driving unit, and a control unit. An upper surface of the balance block is connected to a stator of the linear motor, and a lower surface of the balance block is connected to a base. The anti-drifting driving unit is connected to the balance block for controlling the position of the balance block. Provided two motion control methods; inputting a second grating ruler signal to the control unit as feedback to perform variable stiffness and nonlinear control on the balance block; inputting a first and a second grating ruler signal to the control unit as feedback to obtain resultant centroid displacement signals of the rotor and the balance block to perform nonlinear anti-drifting control on the balance block.

摘要翻译： 线性电动机的单自由度隔振装置及其运动控制方法。 防振装置包括平衡块，防漂移驱动单元和控制单元。 平衡块的上表面连接到线性电动机的定子，并且平衡块的下表面连接到基座。 防漂移驱动单元连接到用于控制平衡块的位置的平衡块。 提供两种运动控制方法; 向控制单元输入第二光栅尺信号作为反馈以对平衡块执行可变刚度和非线性控制; 将第一和第二光栅标尺信号输入到控制单元作为反馈，以获得转子和平衡块的合成重心位移信号，以对平衡块执行非线性防漂移控制。

公开(公告)号：US09885556B2

公开(公告)日：2018-02-06

申请号：US14441828

申请日：2013-10-28

申请人： TSINGHUA UNIVERSITY

发明人： Yu Zhu ,  Ming Zhang ,  Leijie Wang ,  Jinchun Hu ,  Longmin Chen ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Haihua Mu

IPC分类号： G01B9/02 ,  G01D5/26 ,  G01D5/38 ,  G01B11/14

CPC分类号： G01B9/02007 ,  G01B9/02049 ,  G01B11/14 ,  G01D5/266 ,  G01D5/38

摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.

公开(公告)号：US20150097508A1

公开(公告)日：2015-04-09

申请号：US14382221

申请日：2013-02-21

申请人： SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. ,  TSINGHUA UNIVERSITY

发明人： Yu Zhu ,  Jinchun Hu ,  Dengfeng Xu ,  Yuting Sun ,  Wensheng Yin ,  Ming Zhang ,  Kaiming Yang ,  Haihua Mu

IPC分类号： G05B6/02 ,  G01B7/14

CPC分类号： G05B6/02 ,  G01B7/023 ,  G01B7/14

摘要： A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals Bsx, Bcx, Bsy and Bcy and magnetic field reference values Bksx, Bkcx, Bksy and Bkcy; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δx and Δy are X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value.  B ksx  B cx - B kcx  B sx B M 2  ≥ Δ x ( I )  B ksy  B cy - B kcy  B sy B M 2  ≥ Δ y ( II )

摘要翻译： 一种用于测量平面电动机转子的位移的方法。 测量方法包括：四个磁感应强度传感器分布在平面电机转子上; 处理四个分布式传感器的采样信号以获得信号Bsx，Bcx，Bsy和Bcy以及磁场参考值Bksx，Bkcx，Bksy和Bkcy; 并且可以通过判断根据不等式（I）和（II）分别测量X方向位移和Y方向位移，其中＆Dgr; x和＆Dgr; y分别是X方向位移分辨率和Y方向位移分辨率， BM是所述平面电动机的磁场的磁感应强度振幅。 本发明提供的方法计算简单，可以避免超验函数的计算，解决象限判断问题，有利于实时高速运行，具有很高的工程价值。 B ksxB cx - B kcx B B sx B M 2≥＆Dgr; x（I）B yBsy sy y（II）

公开(公告)号：US12038690B2

公开(公告)日：2024-07-16

申请号：US17767424

申请日：2020-10-23

申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

发明人： Leijie Wang ,  Yu Zhu ,  Ming Zhang ,  Jitao Xu ,  Xin Li ,  Rong Cheng ,  Kaiming Yang ,  Jinchun Hu

IPC分类号： G03F7/20

CPC分类号： G03F7/2053

摘要： A laser interference photolithography system, comprising a laser device, a first reflector, a grating beam-splitter, a second reflector, a first universal reflector, a first lens, a second universal reflector, a second lens, a beam splitting prism, a control module, an angle measurement module, a third lens and a substrate. The control module comprises a signal processing terminal, a controller, and a driver. The signal processing terminal is connected to the angle measurement module, the controller is connected to both the signal processing terminal and the driver, and the driver is connected to both the first universal reflector and the second universal reflector. The laser emits a laser light that is split into two beams of light by the system, and the two beams of light are focused on the substrate for exposure.

公开(公告)号：US11940349B2

公开(公告)日：2024-03-26

申请号：US17610730

申请日：2020-05-13

申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

发明人： Leijie Wang ,  Ming Zhang ,  Yu Zhu ,  Jiankun Hao ,  Xin Li ,  Rong Cheng ,  Kaiming Yang ,  Jinchun Hu

IPC分类号： G01M11/02 ,  G01M11/04 ,  G02B5/18 ,  G02B7/00 ,  G02B27/10 ,  G02B27/28 ,  G02B27/30 ,  G02F1/11

CPC分类号： G01M11/0214 ,  G01M11/04 ,  G02B5/1857 ,  G02B7/003 ,  G02B27/1006 ,  G02B27/283 ,  G02B27/30 ,  G02F1/11

摘要： Disclosed is a plane grating calibration system, comprising an optical subsystem, a frame, first vibration isolator, a vacuum chuck, a workpiece stage, second vibration isolator, a base platform and a controller; the optical subsystem is mounted on the frame, and the frame is isolated from vibration by the first vibration isolator; the vacuum chuck is rotatably mounted on the workpiece stage, the workpiece stage is positioned on the base platform, and the base platform is isolated from vibration by the second vibration isolator. A displacement interferometer is integrated into the optical subsystem, and the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources.

公开(公告)号：US09904183B2

公开(公告)日：2018-02-27

申请号：US15307752

申请日：2015-04-17

申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

发明人： Yu Zhu ,  Ming Zhang ,  Fan Zhi ,  Zhao Liu ,  Rong Cheng ,  Kaiming Yang ,  Li Zhang ,  Huichao Qin ,  Yanpo Zhao ,  Li Tian ,  Weinan Ye ,  Jin Zhang ,  Wensheng Yin ,  Haihua Mu ,  Jinchun Hu

IPC分类号： G03F7/20

CPC分类号： G03F7/70716 ,  G03F7/70725 ,  G03F7/70733 ,  G03F7/70758 ,  G03F7/70766 ,  G03F7/70775

摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.