公开(公告)号：US5294271A

公开(公告)日：1994-03-15

申请号：US3745

申请日：1993-01-13

申请人： Tsunetoshi Suzaki ,  Tomoyoshi Iwao ,  Teruo Tanaka ,  Toshiro Yamada

发明人： Tsunetoshi Suzaki ,  Tomoyoshi Iwao ,  Teruo Tanaka ,  Toshiro Yamada

IPC分类号： C21D1/25 ,  C21D8/02 ,  C21D9/02

CPC分类号： C21D8/0273 ,  C21D1/25 ,  C21D2211/004 ,  C21D2211/008 ,  C21D8/0236 ,  C21D9/02

摘要： The high-temperature relaxation resistance of spring steel is improved by providing a specified composition of the steel, and subjecting that steel composition to a controlled heat treatment. The high-temperature relaxation resistance, which can not be estimated from the mechanical properties (e.g. strength and hardness) of steel materials at an ordinary temperature, is improved by these conditions which the inventors have found out from many experiments. Especially, the temper-softening resistance is enhanced by an increase of the Si content. The density of dislocation is lowered by providing fine carbides (MO.sub.2 C) serving as inhibitors for the migration of dislocation. These are precipitated by a controlled heat treatment without reducing hardness in the tempered state. Consequently, the obtained spring steel can be used operated in a high-temperature environment for a long time without a deterioration in its properties.

摘要翻译： 通过提供钢的特定组成，并对钢组合物进行受控热处理，提高了弹簧钢的耐高温松弛性。 由常规温度下的钢材的机械性能（如强度和硬度）不能估计的耐高温松弛性得到改善，这些条件由本发明人从许多实验中发现。 特别地，通过增加Si含量来提高耐软化性。 通过提供用作位错迁移抑制剂的细小碳化物（MO2C）来降低位错密度。 这些通过受控热处理而沉淀，而不降低回火状态下的硬度。 因此，所得到的弹簧钢可以在高温环境下长时间使用而不劣化其特性。

公开(公告)号：US20080274334A1

公开(公告)日：2008-11-06

申请号：US11628014

申请日：2005-05-30

申请人： Akira Sekiya ,  Tatsuya Sugimoto ,  Toshiro Yamada ,  Takanobu Mase

发明人： Akira Sekiya ,  Tatsuya Sugimoto ,  Toshiro Yamada ,  Takanobu Mase

IPC分类号： C09K13/00 ,  H01L21/306 ,  B32B3/00

CPC分类号： H01L21/31116 ,  C07C41/18 ,  C07C43/17 ,  C07C45/513 ,  C07C45/673 ,  C07C45/82 ,  C07C49/227 ,  C07C2601/04 ,  C07F9/5352 ,  Y10T428/24479 ,  C07C49/687

摘要： A dry etching gas comprising a C4-6 fluorine compound which has an ether bond or carbonyl group and one or more fluorine atoms in the molecule and is constituted only of carbon, fluorine, and oxygen atoms and in which the ratio of the number of fluorine atoms to the number of carbon atoms (F/C) is 1.9 or lower (provided that the compound is neither a fluorine compound having one cyclic ether bond and one carbon-carbon double bond nor a saturated fluorine compound having one carbonyl group); a mixed dry etching gas comprising the dry etching gas and at least one gas selected from the group consisting of rare gases, O2, O3, CO, CO2, CHF3, CH2F2, CF4, C2F6, and C3F8; and a method of dry etching which comprises converting either of these dry etching gases into a plasma and processing a semiconductor material with the plasma. The dry etching gases can be safely used, are reduced in influence on the global environment, and can highly selectively dry-etch a semiconductor material at a high dry etching rate to form a satisfactory pattern shape. The dry etching method employs either of these dry etching gases.

摘要翻译： 一种干蚀刻气体，其包含在分子中具有醚键或羰基和一个或多个氟原子的C 4-6二氟化合物，其仅由碳，氟和氧原子构成，并且在 氟原子数与碳原子数的比例（F / C）为1.9以下（前提是该化合物既不是具有一个环醚键的氟化合物，也不是一个碳 - 碳双键，也不是饱和氟 具有一个羰基的化合物）; 包括干蚀刻气体和至少一种选自稀有气体O 2，O 3，CO，CO 2的气体的混合干蚀刻气体， CH 2，CH 2，CH 2，CH 2，CF 4，C 2， F 6，和C 3 F 8; 以及干蚀刻方法，其包括将这些干蚀刻气体中的任一种转化为等离子体并用等离子体处理半导体材料。 可以安全地使用干蚀刻气体，减小对全局环境的影响，并且可以以高干蚀刻速率高度选择性地干蚀刻半导体材料以形成令人满意的图案形状。 干蚀刻方法采用这些干蚀刻气体中的任一种。

公开(公告)号：US06395700B1

公开(公告)日：2002-05-28

申请号：US09582325

申请日：2000-06-23

申请人： Toshiro Yamada ,  Takashi Uruma ,  Tatsuya Sugimoto

发明人： Toshiro Yamada ,  Takashi Uruma ,  Tatsuya Sugimoto

IPC分类号： C11D324

CPC分类号： C07C23/08 ,  C07C17/00 ,  C07C17/208 ,  C07C17/23

摘要： Compounds each having a —CH2—CHF— group and a number of carbon atoms of 4 or above are prepared by hydrogenating a compound having a —CCl═CF— group and a number of carbon atoms of 4 or above in the presence of a noble metal catalyst in a liquid or gas phase. The compound having a —CCl═CF— group and a number of carbon atoms of 4 or above is preferably a C4-C10 alicyclic one, and can be prepared by reacting a compound having a —CCl═CCl— group and a number of carbon atoms of 4 or above with a fluorinating agent.

摘要翻译： 通过在贵金属存在下氢化具有-CCl = CF-基团和多个碳原子数4以上的化合物来制备各自具有-CH 2 -CHF-基团和碳原子数为4以上的化合物 金属催化剂在液相或气相中。 具有-CCl = CF-基团和碳原子数为4以上的化合物优选为C 4 -C 10脂环族化合物，可以通过使具有-CCl = CCl-的化合物和多个碳原子 4或以上的原子与氟化剂。

公开(公告)号：US06211420B1

公开(公告)日：2001-04-03

申请号：US09180627

申请日：1998-11-13

申请人： Akira Sekiya ,  Toshiro Yamada ,  Mitsuru Sugawara

发明人： Akira Sekiya ,  Toshiro Yamada ,  Mitsuru Sugawara

IPC分类号： C07C1720

CPC分类号： C07C23/08 ,  C07C17/206 ,  C07C17/208 ,  C07C17/383

摘要： In a process for preparing a fluorinated olefin having a carbon—carbon double bond, the carbon atoms of which have a fluorine atom, by reacting a halogenated olefin having at least one carbon—carbon double bond, a carbon atom or the carbon atoms of which bond have a chlorine atom or atoms bound thereto, and, in which the carbon atom or atoms with a single bond in the molecule have no halogen atom other than a fluorine atom, with an alkali metal fluoride, said reaction of the halogenated olefin with the alkali metal fluoride is conducted in the presence of an organic halogen-containing compound having a carbon—carbon single bond, a carbon or the carbons of which have at least one halogen atom other than fluorine atom.

摘要翻译： 在通过使具有至少一个碳 - 碳双键的卤代烯烃，碳原子或碳原子的碳原子与碳原子一起形成碳原子的碳 - 碳双键的氟代烯烃的方法中，其碳原子具有氟原子 键具有与其结合的氯原子或原子，并且其中分子中具有单键的碳原子或原子不具有氟原子的卤素原子与碱金属氟化物反应，卤代烯烃与 碱金属氟化物在具有碳 - 碳单键的有机含卤素化合物，碳或碳具有至少一个除氟原子以外的卤素原子的存在下进行。

公开(公告)号：US5110218A

公开(公告)日：1992-05-05

申请号：US666812

申请日：1991-03-08

申请人： Atsushi Aizawa ,  Yoshinori Matsumoto ,  Kenji Hara ,  Toshiro Yamada

发明人： Atsushi Aizawa ,  Yoshinori Matsumoto ,  Kenji Hara ,  Toshiro Yamada

IPC分类号： B21B37/00 ,  B21B38/00 ,  B21C51/00 ,  G01K13/06

CPC分类号： G01K13/06 ,  B21B38/006

摘要： A plurality of thermocouples are embedded close to each other with individually different depth in a temperature detecting block. One or more of the temperature detecting block are attached to the surface of a thermal sensor roll. When the thermal sensor roll is held in contact with a metal strip being rolled, temperatures in the thermal sensor roll are measured at a plurality of points. The temperature of the metal strip in contact with the surface of the thermal sensor roll is calculated from the graduation of a temperature in the thermal sensor roll along a direction vertical to the surface of the thermal sensor roll, without the influence of disturbances. The obtained temperature value of the metal strip being rolled is compared with an experimentally obtained temperature of heat streak formation, to predict the formation of heat streaks with high accuracy.

摘要翻译： 多个热电偶在温度检测块中以彼此不同的深度彼此靠近地嵌入。 温度检测块中的一个或多个附接到热传感器辊的表面。 当热传感器辊与被轧制的金属带保持接触时，在多个点处测量热传感器辊中的温度。 与热传感器辊的表面接触的金属带的温度是从热传感器辊中的温度沿垂直于热传感器辊表面的方向的刻度而计算的，而不受干扰的影响。 将获得的被轧制的金属带的温度值与实验获得的热条纹形成温度进行比较，以高精度地预测热条纹的形成。

公开(公告)号：US4626800A

公开(公告)日：1986-12-02

申请号：US740813

申请日：1985-06-03

申请人： Yoshikazu Murakami ,  Seigo Ito ,  Toshiro Yamada

发明人： Yoshikazu Murakami ,  Seigo Ito ,  Toshiro Yamada

IPC分类号： H03B9/14 ,  H01P1/215 ,  H01P7/00 ,  H03B1/00 ,  H03B5/18

CPC分类号： H03B5/1888 ,  H01P1/215 ,  H03B2201/0241 ,  H03B5/1847

摘要： A tuned oscillator is disclosed which comprises an active element, a resonator electrically connected to the active element and made of a magnetic material using ferro-magnetic resonance phenomenon, and a magnetic circuit for applying a magnetic field to the resonator. The resonator is made of an YIG (yttrium, iron and garnet) thin film magnetic resonance element formed by a thin film forming technique and utilizes an uniform mode ferro-magnetic resonance in the YIG thin film, and operating under the application of magnetic field of the magnetic circuit.

摘要翻译： 公开了一种调谐振荡器，其包括有源元件，电连接到有源元件并由使用铁磁共振现象的磁性材料制成的谐振器和用于向谐振器施加磁场的磁路的谐振器。 谐振器由YIG（钇，铁和石榴石）薄膜磁共振元件制成，通过薄膜形成技术形成，并在YIG薄膜中利用均匀模式的铁磁共振，并在施加磁场的作用下 磁路。

公开(公告)号：US07704893B2

公开(公告)日：2010-04-27

申请号：US10568461

申请日：2004-08-12

申请人： Yasuo Kobayashi ,  Kohei Kawamura ,  Tadahiro Ohmi ,  Akinobu Teramoto ,  Tatsuya Sugimoto ,  Toshiro Yamada ,  Kimiaki Tanaka

发明人： Yasuo Kobayashi ,  Kohei Kawamura ,  Tadahiro Ohmi ,  Akinobu Teramoto ,  Tatsuya Sugimoto ,  Toshiro Yamada ,  Kimiaki Tanaka

IPC分类号： H01L21/31

CPC分类号： H01L21/3127 ,  H01L21/0212 ,  H01L21/02274 ,  H01L21/3146

摘要： The present invention relates to a semiconductor device comprising an insulation film consisting of a fluoridation carbon film that has been subjected to thermal history of 420° C. or lower. The feature of the present invention is that an amount of hydrogen atoms included in the fluoridation carbon film is 3 atomic % or less before the fluoridation carbon film is subjected to the thermal history.

摘要翻译： 本发明涉及一种半导体器件，其包括由经历420℃或更低的热历史的氟化碳膜构成的绝缘膜。 本发明的特征在于，在氟化碳膜经受热历史之前，包含在氟化碳膜中的氢原子数量为3原子％以下。

公开(公告)号：US07449415B2

公开(公告)日：2008-11-11

申请号：US11078349

申请日：2005-03-14

申请人： Toshinobu Hirayama ,  Toshiro Yamada ,  Tatsuya Sugimoto ,  Mitsuru Sugawara

发明人： Toshinobu Hirayama ,  Toshiro Yamada ,  Tatsuya Sugimoto ,  Mitsuru Sugawara

IPC分类号： B01D15/00

CPC分类号： H01L21/32137 ,  C07C17/208 ,  C07C17/38 ,  C07C17/383 ,  C07C17/389 ,  C07C23/08 ,  H01L21/0212 ,  H01L21/02274 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/3127

摘要： A high-purity gas for plasma reaction having an octafluorocyclopentene purity of at least 99.9% by volume based on the total volume of the gas for plasma reaction, wherein the total content of nitrogen gas and oxygen gas, contained as trace gaseous ingredients of the remainder, is not larger than 200 ppm by volume. This high-purity gas for plasma reaction can be produced by (1) a process of distilling crude octafluorocyclopentene in an inert gas of group 0, or (2) a process of distilling crude octafluorocyclopentene into a purity of at least 99.9% by volume, and then, removing an impurity remainder.

摘要翻译： 用于等离子体反应的高纯度气体，其基于用于等离子体反应的气体的总体积具有至少99.9体积％的八氟环戊烯纯度，其中氮气和氧气的总含量作为余量的微量气体成分 ，不大于200ppm（体积）。 这种用于等离子体反应的高纯度气体可以通过以下方法制备：（1）在0组的惰性气体中蒸馏粗制八氟环戊烯的方法，或（2）将粗制八氟环戊烷蒸馏至99.9体积％以上的纯度的方法， 然后除去杂质余量。

公开(公告)号：US07341764B2

公开(公告)日：2008-03-11

申请号：US10493225

申请日：2002-10-31

申请人： Mitsuru Sugawara ,  Toshiro Yamada ,  Tatsuya Sugimoto ,  Kimiaki Tanaka

发明人： Mitsuru Sugawara ,  Toshiro Yamada ,  Tatsuya Sugimoto ,  Kimiaki Tanaka

IPC分类号： C08J5/18 ,  C08J7/18

CPC分类号： C07C21/22 ,  C07C17/25 ,  C23C16/26 ,  C23C16/30 ,  C23F4/00 ,  H01L21/3065 ,  H01L21/31116

摘要： A gas for plasma reaction comprising a chainlike perfluoroalkyne having 5 or 6 carbon atoms, preferably perfluoro-2-pentyne. This plasma reaction gas is suitable for dry etching for formation of a fine pattern, for plasma CVD for formation of a thin film, and for plasma ashing. The plasma reaction gas is synthesized by contacting a dihydrofluoroalkane compound or a monohydrofluoroalkene compound with a basic compound.

摘要翻译： 一种用于等离子体反应的气体，包括具有5或6个碳原子的链状全氟炔烃，优选全氟-2-戊炔。 这种等离子体反应气体适用于形成精细图案的干蚀刻，用于形成薄膜的等离子体CVD和等离子体灰化。 通过使二氢氟烷烃化合物或单氢氟烯烃化合物与碱性化合物接触来合成等离子体反应气体。

公开(公告)号：US20050080303A1

公开(公告)日：2005-04-14

申请号：US10680257

申请日：2003-10-08

申请人： Akira Sekiya ,  Masanori Tamura ,  Toshiro Yamada

发明人： Akira Sekiya ,  Masanori Tamura ,  Toshiro Yamada

IPC分类号： B01J23/58 ,  B01J27/138 ,  B01J32/00 ,  B01J35/10 ,  C07C17/23 ,  C07C17/10

CPC分类号： B01J23/58 ,  B01J27/138 ,  B01J32/00 ,  B01J35/10 ,  B01J35/1014 ,  B01J35/1019 ,  C07C17/23 ,  C07C23/08

摘要： Porous calcium fluoride having a large surface area, a method for producing the same, a catalyst (for hydrogenation reaction in particular) using the porous calcium fluoride as a carrier with superior activity, selectivity, and durability, and a method for producing trihydrofluorocarbon using the catalyst. The porous calcium fluoride having a BET surface area of 20 m2/g to 200 m2/g is prepared by reacting soda lime with hydrogen fluoride. The carried cataryst (for hydrogenation reaction in particurar) is obtained by causing a metal or metal compound to be carried on carrier formed of the porous calcium fluoride. Trihydrofluorocarbon (2) is produced by causing a fluooroalkene (1) to contact hydrogen in the presence of the catalyst for hydrogenation reaction. wherein X denotes a halogen atom, Rf1 and Rf2 individually denote a fluorine or a parafluoroalkyl group, and Rf1 may be bonded to Rf2 to form a ring.

摘要翻译： 具有大表面积的多孔氟化钙，其制备方法，使用多孔氟化钙作为载体的催化剂（特别是用于氢化反应）具有优异的活性，选择性和耐久性，以及使用 催化剂。 通过钠钙与氟化氢反应制备BET表面积为20m 2 / g至200m 2 / g的多孔氟化钙。 携带的催化剂（特别是用于氢化反应）通过使金属或金属化合物承载在由多孔氟化钙形成的载体上而获得。 通过在氢化反应催化剂存在下使氟烯烃（1）与氢接触来制备三氢氟化碳（2）。 其中X表示卤素原子，Rf1和Rf2分别表示氟或对氟烷基，Rf1可以键合到Rf2上形成环。