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公开(公告)号：US07188525B2
公开(公告)日：2007-03-13
申请号：US10126750
申请日：2002-04-22
IPC分类号： G01P9/04
CPC分类号： G01C19/5607
摘要： An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.
摘要翻译： 提供了一种角速度传感器，其包括将振荡器连接到框架的框架，振荡器和扭杆。 通过在基板的厚度方向上蚀刻材料基板，将框架，振荡器和扭杆形成为一体。 以H形式构成的振荡器包括支撑件，两个第一臂和两个第二臂。 这些臂从支撑件沿与基板的厚度方向垂直的臂延伸方向延伸。 振荡器包括安装表面，该安装表面设置有用于产生振荡器的平面内振荡的压电驱动器，以及用于检测振荡器的平面外振荡的压电检测器。
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公开(公告)号：US06732415B2
公开(公告)日：2004-05-11
申请号：US09984418
申请日：2001-10-30
IPC分类号： H01L4108
CPC分类号： H03H9/173 , H03H3/02 , H03H2003/021 , Y10T29/42
摘要： A film bulk acoustic resonator is fabricated in the following manner. First, a base layer is formed on an insulating substrate. Then, a resonator assembly is formed on the base layer. The resonator assembly includes a first electrode held in contact with the base layer, a second electrode, and a piezoelectric layer held between the first and the second electrodes. Then, a resist layer is formed to cover the resonator assembly and the base layer. Then, a through-hole is formed in the resist layer so that the base layer is exposed via the through-hole. Then, etchant is supplied via the through-hole to make a space in the base layer under the resonator assembly. Finally, the resist layer is removed.
摘要翻译： 以下列方式制造膜体声波谐振器。 首先，在绝缘基板上形成基层。 然后，在基底层上形成谐振器组件。 谐振器组件包括与基极层保持接触的第一电极，第二电极和保持在第一和第二电极之间的压电层。 然后，形成抗蚀剂层以覆盖谐振器组件和基底层。 然后，在抗蚀剂层中形成通孔，使得基底层通过通孔露出。 然后，通过通孔提供蚀刻剂，以在谐振器组件下面的基底层中形成空间。 最后，去除抗蚀剂层。
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3.发明授权Surface acoustic wave device for band-pass filter having small insertion loss and predetermined pass-band characteristics for broad band 失效带通滤波器的表面声波装置具有小的插入损耗和宽带的预定通带特性
公开(公告)号：US5300902A
公开(公告)日：1994-04-05
申请号：US850835
申请日：1992-03-13
CPC分类号： H03H9/1455
摘要： A surface acoustic wave device comprises a pair of multiple-electrode surface acoustic wave elements that are mirror-symmetrically arranged and disposed on a piezoelectric substrate. Each of the multiple-electrode surface acoustic wave elements comprises a plurality of input/output inter-digital transducers and connected inter-digital transducers. The number of the input/output inter-digital transducers is equal to or smaller by one, than the number of the connected inter-digital transducers, so that insertion loss of the surface acoustic wave device can be reduced without increasing the size of the device.
摘要翻译： 表面声波装置包括一对反射对称地设置在压电基板上的多电极表面声波元件。 多电极表面声波元件中的每一个包括多个输入/输出数字间换能器和连接的数字间换能器。 输入/输出的数字间换能器的数量等于或小于所连接的数字间换能器的数目之一，从而可以在不增加装置的尺寸的情况下降低弹性表面波装置的插入损耗 。
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公开(公告)号：US06949990B2
公开(公告)日：2005-09-27
申请号：US10665209
申请日：2003-09-22
CPC分类号： H03H9/0547 , H03H9/0523 , H03H9/564 , H03H9/568
摘要： A filter device includes a filter element that has piezoelectric thin-film resonators arranged in series arms and parallel arms, and a package that houses the filter element in a face-down state. In this filter device, the filter element and the package are electrically connected to each other through bumps. The package includes first pad parts on which the bumps are placed, and transmission paths that electrically connect the first pad parts to the outside. The filter element includes second pad parts that are electrically connected to the first pad parts through the bumps, and wiring parts that electrically connect the second pads to the piezoelectric thin-film resonators and electrically connect the piezoelectric thin-film resonators to one another. In this structure, inductances formed with the transmission paths are connected in series to the piezoelectric thin-film resonators.
摘要翻译： 滤波器装置包括具有布置成串联臂和平行臂的压电薄膜谐振器的滤波器元件和以面朝下的状态容纳滤波元件的封装。 在该过滤器装置中，过滤元件和封装通过凸块彼此电连接。 该包装包括其上放置有凸块的第一垫片部分和将第一垫片部分电连接到外部的传输路径。 滤波器元件包括通过凸块电连接到第一焊盘部分的第二焊盘部分，以及将第二焊盘电连接到压电薄膜谐振器并将压电薄膜谐振器彼此电连接的布线部分。 在该结构中，形成有传输路径的电感与压电薄膜谐振器串联连接。
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公开(公告)号：USRE37375E1
公开(公告)日：2001-09-18
申请号：US09158074
申请日：1998-09-22
IPC分类号： H03H964
CPC分类号： H03H9/6436 , H03H9/0576 , H03H9/1071 , H03H9/6433 , H03H9/6483 , H03H9/72 , H03H9/725 , H03H2250/00
摘要： A SAW filter includes a first SAW resonator having a pair of terminals and a predetermined resonance frequency (frp), the first SAW resonator being provided in a parallel arm of the SAW filter. A second SAW resonator has a pair of terminals and a predetermined resonance frequency (frs) approximately equal to a predetermined antiresonance frequency of the first SAW resonator (fap). The second SAW resonator is provided in a series arm of the SAW filter. An inductance element is connected in series to the first SAW resonator.
摘要翻译： SAW滤波器包括具有一对端子和预定谐振频率（frp）的第一SAW谐振器，第一SAW谐振器设置在SAW滤波器的并联臂中。 第二SAW谐振器具有大约等于第一SAW谐振器（fap）的预定反谐振频率的一对端子和预定谐振频率（frs）。 第二SAW谐振器设置在SAW滤波器的串联臂中。 电感元件与第一SAW谐振器串联连接。
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公开(公告)号：US5325573A
公开(公告)日：1994-07-05
申请号：US70176
申请日：1993-06-02
申请人： Tsutomu Miyashita , Yoshio Satoh
发明人： Tsutomu Miyashita , Yoshio Satoh
CPC分类号： H03H9/02921 , H03H3/08 , H03H9/1455 , Y10T29/42
摘要： A surface-acoustic-wave device comprises a substrate of a piezoelectric material for providing a passage of surface acoustic waves at an upper major surface of the substrate, a plurality of interdigital electrodes provided on the piezoelectric substrate in a row in correspondence to the passage of surface acoustic waves such that the electrodes are aligned in the propagating direction of the surface acoustic waves, each of the plurality of interdigital electrodes having a first part connected to a bonding pad on the substrate for external electric connection and having a plurality of finger electrodes extending parallel with each other in a direction crossing the propagating surface acoustic waves, and a second part separated from the first part and having a plurality of finger electrodes extending parallel with each other in a direction opposite to the direction of the finger electrodes of the first part. An interconnection pattern is provided on the surface of the substrate in correspondence to a region offset from the passage of the surface acoustic waves for connecting the second parts of adjacent interdigital electrodes with each other.
摘要翻译： 表面声波装置包括：压电材料的基板，用于在基板的上主表面处提供表面声波的通过;多个指状电极，其设置在压电基板上， 表面声波，使得电极在表面声波的传播方向上对齐，多个叉指电极中的每一个具有连接到用于外部电连接的基板上的焊盘的第一部分，并且具有多个指状电极延伸 在与第一部分相交的方向上彼此平行，并且具有与第一部分的指状电极的方向相反的方向彼此平行延伸的多个指状电极的第二部分， 。 对应于与用于连接相邻叉指电极的第二部分的表面声波的通过偏移的区域，在基板的表面上提供互连图案。
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公开(公告)号：US4445200A
公开(公告)日：1984-04-24
申请号：US303588
申请日：1981-09-18
IPC分类号： G11C19/08
CPC分类号： G11C19/0866
摘要： A current stretch detection method for a bubble device in which bubbles are written at least one bit apart. A stretch pulse is applied to a stretch conductor so that when a bubble is detected, it is maintained stretched, even though the bubble following it has moved one bit. Preferably the stretch pulse is of a convex-shape. A bubble device has a hairpin stretch conductor and a detecting element disposed centrally in the conductor. The terminal of the detecting element on the higher potential side is arranged so that it does not cross the stretch conductor. The contiguous propagation pattern is provided with a notch at a position in which the stretch conductor is located.
摘要翻译： 气泡装置的当前拉伸检测方法，其中气泡被写入至少一个位。 拉伸脉冲施加到拉伸导体，使得当检测到气泡时，即使其跟随的气泡移动一位，也保持拉伸。 优选地，拉伸脉冲是凸形的。 气泡装置具有发夹拉伸导体和设置在导体中心的检测元件。 高电位侧的检测元件的端子被布置成不与伸展导体交叉。 连续传播图案在拉伸导体位于的位置处设有凹口。
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公开(公告)号：US06967546B2
公开(公告)日：2005-11-22
申请号：US10685704
申请日：2003-10-16
CPC分类号： H03H9/1071 , H03H9/02984 , H03H9/6483
摘要： A surface acoustic wave filter includes series-arm resonators and parallel-arm resonators that are connected in a ladder-like fashion. This surface acoustic wave filter satisfies conditions expressed as: 1×106≦4π2f02R2CopCos≦3.1×106 where Cop is the electrostatic capacitance of the parallel-arm resonators, Cos is the electrostatic capacitance of the series-arm resonators, f0 is the center frequency, and R is the nominal impedance.
摘要翻译： 表面声波滤波器包括串联臂谐振器和并联臂谐振器，其以梯形方式连接。 该表面声波滤波器满足表示为：<？in-line-formula description =“In-line formula”end =“lead”→> 1×10 6 <= 4pi 2 / 0＆gt;＆lt; 2＆gt; 2＆lt; 2＆gt; CopCos＆lt;＆gt;＆gt;＆lt; “在线公式”end =“tail”？>其中Cop是并联臂谐振器的静电电容，Cos是串联臂谐振器的静电电容，f <0>是中心 频率，R为标称阻抗。
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9.发明授权Surface acoustic wave device with improved junction bonding and package miniaturization 失效表面声波器件具有改进的接合和封装小型化
公开(公告)号：US5281883A
公开(公告)日：1994-01-25
申请号：US787432
申请日：1991-11-04
CPC分类号： H03H9/1071 , H03H9/059 , H03H9/1085 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/01039 , H01L2924/01079 , H01L2924/3011 , H01L2924/3025
摘要： A surface acoustic wave device in which a surface acoustic wave device element is arranged with interdigital electrodes on a piezoelectric substrate is packaged in a package provided in a metal pattern. Metal bumps are formed on a bonding pad section of the surface wave device element and the metal bumps are contact connected with the metal pattern of the package.
摘要翻译： 将表面声波元件元件在压电基板上配置有叉指电极的弹性表面波器件封装在以金属图案形式设置的封装中。 金属凸块形成在表面波元件元件的接合焊盘部分上，并且金属凸块与封装的金属图案接触连接。
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公开(公告)号：US4462087A
公开(公告)日：1984-07-24
申请号：US468707
申请日：1983-02-22
CPC分类号： H01F41/28 , B41J2/25 , G11C19/0816 , H01F10/24
摘要： Ion-implanted bubble device comprises a magnetic layer in which bubble propagation paths are formed by ion-implantation. The bubble propagation path has an inside turn including a cusp of which the summit deviates toward a direction of bubble propagation with respect to a cusp center line. Such a bubble propagation path permits the ion-implanted bubble device adopting a folded minor loop organization to be realized.
摘要翻译： 离子注入气泡装置包括通过离子注入形成气泡传播路径的磁性层。 气泡传播路径具有内转，其包括峰顶相对于尖点中心线朝向气泡传播方向偏离的尖点。 这种气泡传播路径允许实现采用折叠的小环组织的离子注入气泡装置。
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