Method for improving manufacturing process of self-aligned contact
    1.
    发明授权
    Method for improving manufacturing process of self-aligned contact 失效
    改善自对准接触制造工艺的方法

    公开(公告)号:US6165879A

    公开(公告)日:2000-12-26

    申请号:US426979

    申请日:1999-10-26

    IPC分类号: H01L21/60 H01L21/3205

    CPC分类号: H01L21/76897

    摘要: The invention is related to a method for increasing margin precision of a self-aligned contact. A semiconductor has at least a gate electrode and source/drain, and a gate spacer is formed on the sidewall of the gate electrode. A first silicon oxide layer is then formed on the semiconductor substrate. A hard mask layer is formed on the first silicon oxide layer. A second silicon oxide layer is then deposited over the hard mask layer. A chemical mechanical polishing is then performed to remove the second silicon oxide layer so that the hard mask layer is planarized. Thereafter, the hard mask layer and the first silicon oxide layer is etched to form a gap region on the first silicon oxide layer. A polysilicon layer is then deposited over the entire substrate including the gap region and the hard mask layer. Thereafter, the polysilicon layer is etched back to form a polysilicon spacer. Finally, the gap region of the first silicon oxide layer is etched to form a self-aligned contact.

    摘要翻译: 本发明涉及一种用于增加自对准接触的裕量精度的方法。 半导体至少具有栅电极和源极/漏极,并且栅极间隔物形成在栅电极的侧壁上。 然后在半导体衬底上形成第一氧化硅层。 在第一氧化硅层上形成硬掩模层。 然后在硬掩模层上沉积第二氧化硅层。 然后执行化学机械抛光以除去第二氧化硅层,使得硬掩模层被平坦化。 此后,蚀刻硬掩模层和第一氧化硅层,以在第一氧化硅层上形成间隙区域。 然后在包括间隙区域和硬掩模层的整个基板上沉积多晶硅层。 此后,多晶硅层被回蚀以形成多晶硅间隔物。 最后,蚀刻第一氧化硅层的间隙区域以形成自对准接触。

    LIQUID CRYSTAL DISPLAY PANEL
    2.
    发明申请
    LIQUID CRYSTAL DISPLAY PANEL 审中-公开
    液晶显示面板

    公开(公告)号:US20120002148A1

    公开(公告)日:2012-01-05

    申请号:US12869756

    申请日:2010-08-27

    IPC分类号: G02F1/1335

    摘要: A liquid crystal display panel including an active device array substrate, an opposite substrate, and a liquid crystal layer is provided. The active device array substrate includes a plurality of pixel electrodes and each of the pixel electrodes includes a plurality of sets of stripe patterns extending along different directions. Each of the stripe patterns has a width of L and a space between two neighboring stripe patterns is S. The opposite substrate is disposed over the active device array substrate. The liquid crystal layer is disposed between the active device array substrate and the opposite substrate. A cell gap between the active device array substrate and the opposite substrate is d, birefringence of the liquid crystal layer is Δn, and dielectric anisotropy of the liquid crystal layer is Δ∈, wherein S, d, Δn, and Δ∈ comply with the inequality: S/|Δ∈|≦2.8×Δn×d.

    摘要翻译: 提供了包括有源器件阵列基板,相对基板和液晶层的液晶显示面板。 有源器件阵列衬底包括多个像素电极,并且每个像素电极包括沿着不同方向延伸的多组条纹图案。 每个条纹图案具有L的宽度,并且两个相邻条纹图案之间的间隔为S.相对的衬底设置在有源器件阵列衬底上。 液晶层设置在有源器件阵列衬底和相对衬底之间。 有源器件阵列基板和相对基板之间的单元间隙为d,液晶层的双折射为&Dgr; n,液晶层的介电各向异性为&Dgr;∈,其中S,d,&Dgr; n和 &Dgr;∈符合不等式:S / |&Dgr;∈|≦̸ 2.8×&Dgr; n×d。

    Lens Film and Manufacturing Method Thereof
    4.
    发明申请
    Lens Film and Manufacturing Method Thereof 审中-公开
    镜片胶片及其制造方法

    公开(公告)号:US20130003011A1

    公开(公告)日:2013-01-03

    申请号:US13400163

    申请日:2012-02-20

    IPC分类号: G02F1/13 B29D11/00

    摘要: A lens film and a manufacturing method thereof are disclosed. The lens film manufacturing method includes the steps of: forming an alignment film on a glass substrate; rubbing the alignment film along a rubbing direction; dispersing a liquid crystal polymer (LCP) material between the alignment film of the glass substrate and a lens mold; rolling the lens mold along a rolling direction to make the LCP material to form a lens film. A plurality of liquid crystal molecules of the lens film is affected by the alignment film to align along the rubbing direction. The lens film and a base panel having a polarization direction are operated in a LCD apparatus. The angle between the rubbing direction and the polarization direction is less than 15°.

    摘要翻译: 公开了透镜膜及其制造方法。 透镜膜制造方法包括以下步骤:在玻璃基板上形成取向膜; 沿着摩擦方向摩擦取向膜; 将液晶聚合物(LCP)材料分散在玻璃基板的取向膜和透镜模具之间; 沿着滚动方向滚动镜片模具以使LCP材料形成透镜膜。 透镜膜的多个液晶分子受到取向膜的影响,沿着摩擦方向排列。 透镜膜和具有偏振方向的基板在LCD装置中操作。 摩擦方向与偏振方向之间的角度小于15°。

    Chip package
    10.
    发明授权
    Chip package 有权
    芯片封装

    公开(公告)号:US08581386B2

    公开(公告)日:2013-11-12

    申请号:US13350690

    申请日:2012-01-13

    IPC分类号: H01L23/04 H01L23/12

    摘要: An embodiment of the invention provides a chip package, which includes: a semiconductor substrate having a device region and a non-device region neighboring the device region; a package layer disposed on the semiconductor substrate; a spacing layer disposed between the semiconductor substrate and the package layer and surrounding the device region and the non-device region; a ring structure disposed between the semiconductor substrate and the package layer, and between the spacing layer and the device region, and surrounding a portion of the non-device region; and an auxiliary pattern including a hollow pattern formed in the spacing layer or the ring structure, a material pattern located between the spacing layer and the device region, or combinations thereof.

    摘要翻译: 本发明的一个实施例提供了一种芯片封装,其包括:半导体衬底,具有与器件区域相邻的器件区域和非器件区域; 封装层,设置在所述半导体衬底上; 间隔层,设置在所述半导体衬底和所述封装层之间并且围绕所述器件区域和所述非器件区域; 设置在所述半导体衬底和所述封装层之间以及所述间隔层和所述器件区域之间并围绕所述非器件区域的一部分的环形结构; 以及包括形成在间隔层或环结构中的中空图案的辅助图案,位于间隔层和器件区域之间的材料图案,或其组合。