摘要:
The invention is related to a method for increasing margin precision of a self-aligned contact. A semiconductor has at least a gate electrode and source/drain, and a gate spacer is formed on the sidewall of the gate electrode. A first silicon oxide layer is then formed on the semiconductor substrate. A hard mask layer is formed on the first silicon oxide layer. A second silicon oxide layer is then deposited over the hard mask layer. A chemical mechanical polishing is then performed to remove the second silicon oxide layer so that the hard mask layer is planarized. Thereafter, the hard mask layer and the first silicon oxide layer is etched to form a gap region on the first silicon oxide layer. A polysilicon layer is then deposited over the entire substrate including the gap region and the hard mask layer. Thereafter, the polysilicon layer is etched back to form a polysilicon spacer. Finally, the gap region of the first silicon oxide layer is etched to form a self-aligned contact.
摘要:
A liquid crystal display panel including an active device array substrate, an opposite substrate, and a liquid crystal layer is provided. The active device array substrate includes a plurality of pixel electrodes and each of the pixel electrodes includes a plurality of sets of stripe patterns extending along different directions. Each of the stripe patterns has a width of L and a space between two neighboring stripe patterns is S. The opposite substrate is disposed over the active device array substrate. The liquid crystal layer is disposed between the active device array substrate and the opposite substrate. A cell gap between the active device array substrate and the opposite substrate is d, birefringence of the liquid crystal layer is Δn, and dielectric anisotropy of the liquid crystal layer is Δ∈, wherein S, d, Δn, and Δ∈ comply with the inequality: S/|Δ∈|≦2.8×Δn×d.
摘要:
A polymerizable monomer adopted to a display panel is represented as following chemical formula: wherein, m≧0; “Z” is selected from oxygen, sulfur, carbonyl, caroboxyl, methyoxy, methylthio, thio, ethenylcarbonyl, carbonylethenyl, difluoromethoxy, difluoro methylthio, ethyl, difluoroethane, 1,2 difluoroethane, vinylene, difluoroethenylene, ethynyl, or single bond. “X1” and “X2” are independently selected from oxygen, sulfur, methyoxy, carbonyl, caroboxyl, -carbamoyl, methylthio, ethenylcarbonyl, carbonylethenyl, or single bond. “Sp1” and “Sp2” are independently a spacer or single bond. “P1” and “P2” are independently a polymerizable group.
摘要:
A lens film and a manufacturing method thereof are disclosed. The lens film manufacturing method includes the steps of: forming an alignment film on a glass substrate; rubbing the alignment film along a rubbing direction; dispersing a liquid crystal polymer (LCP) material between the alignment film of the glass substrate and a lens mold; rolling the lens mold along a rolling direction to make the LCP material to form a lens film. A plurality of liquid crystal molecules of the lens film is affected by the alignment film to align along the rubbing direction. The lens film and a base panel having a polarization direction are operated in a LCD apparatus. The angle between the rubbing direction and the polarization direction is less than 15°.
摘要:
A barrier layer stack. The barrier layer stack includes a semiconductor process wafer comprising an exposed conductive region, a first barrier layer stack comprising at least one TiN and one Ti layers overlying and contacting the conductive region, wherein the TiN layer is contacted with the Ti layer, and an overlying aluminum alloy layer in contact with the first barrier layer stack.
摘要:
A polymerizable monomer adopted to a display panel is represented as following chemical formula: wherein, m≧0; “Z” is selected from oxygen, sulfur, carbonyl, caroboxyl, methyoxy, methylthio, thio, ethenylcarbonyl, carbonylethenyl, difluoromethoxy, difluoro methylthio, ethyl, difluoroethane, 1,2 difluoroethane, vinylene, difluoroethenylene, ethynyl, or single bond. “X1” and “X2” are independently selected from oxygen, sulfur, methyoxy, carbonyl, caroboxyl, -carbamoyl, methylthio, ethenylcarbonyl, carbonylethenyl, or single bond. “Sp1” and “Sp2” are independently a spacer or single bond. “P1” and “P2” are independently a polymerizable group.
摘要:
A method of fabricating a semiconductor stacked package is provided. A singulation process is performed on a wafer and a substrate, on which the wafer is stacked. A portion of the wafer on a cutting region is removed, to form a stress concentrated region on an edge of a chip of the wafer. The wafer and the substrate are then cut, and a stress is forced to be concentrated on the edge of the chip of the wafer. As a result, the edge of the chip is warpaged. Therefore, the stress is prevented from extending to the inside of the chip. A semiconductor stacked package is also provided.
摘要:
A barrier layer stack. The barrier layer stack includes a semiconductor process wafer comprising an exposed conductive region, a first barrier layer stack comprising at least one TiN and one Ti layers overlying and contacting the conductive region, wherein the TiN layer is contacted with the Ti layer, and an overlying aluminum alloy layer in contact with the first barrier layer stack.
摘要:
A method for fabricating a polymer stabilized alignment liquid crystal display panel including: filling a liquid crystal layer between a first substrate and a second substrate, the liquid crystal layer including liquid crystal molecules, monomer with single functional group and monomer with multiple functional groups; polymerizing the monomer with single functional groups to form two alignment layers over inner surfaces of the first substrate and the second substrate; and polymerizing the monomer with multiple functional groups to form a polymer capable of pre-tilting the liquid crystal molecules.
摘要:
An embodiment of the invention provides a chip package, which includes: a semiconductor substrate having a device region and a non-device region neighboring the device region; a package layer disposed on the semiconductor substrate; a spacing layer disposed between the semiconductor substrate and the package layer and surrounding the device region and the non-device region; a ring structure disposed between the semiconductor substrate and the package layer, and between the spacing layer and the device region, and surrounding a portion of the non-device region; and an auxiliary pattern including a hollow pattern formed in the spacing layer or the ring structure, a material pattern located between the spacing layer and the device region, or combinations thereof.