公开(公告)号：US10991585B2

公开(公告)日：2021-04-27

申请号：US16072013

申请日：2017-01-23

Applicant: UNIVERSITY OF SOUTHAMPTON

Inventor： David John Thomson ,  Graham Trevor Reed ,  Robert Topley

IPC: H01L21/265 ,  G02B6/134 ,  H01L21/268 ,  H01L21/324 ,  H01L21/67 ,  H01L21/66 ,  G02B6/12

Abstract: A method of trimming the refractive index of material forming at least part of one or more structures integrated in one or more pre-fabricated devices, the method comprising: implanting one or more first regions of material of one or more pre-fabricated devices, encompassing at least partially one or more device structures, with ions to alter the crystal form of the material within the one or more first regions and change the refractive index of the material within the one or more first regions; and heat treating one or more second regions of material of the one or more devices, encompassing at least partially the one or more first regions, to alter the crystal form of the material within the one or more first regions encompassed by the one or more second regions and change the refractive index thereof, thereby trimming the refractive index of the material of at least part of the one or more device structures, such that the one or more device structures provide one or more predetermined device outputs.

公开(公告)号：US11198951B2

公开(公告)日：2021-12-14

申请号：US15316555

申请日：2015-06-05

Applicant: University of Southampton

Inventor： Frederic Yannick Gardes ,  Graham Trevor Reed ,  Callum George Littlejohns

IPC: C30B29/52 ,  H01L21/02 ,  C30B11/00 ,  C30B13/14 ,  C30B13/22 ,  C30B13/34 ,  C30B29/06 ,  C30B29/08 ,  C30B29/18

Abstract: A method of fabricating at least one single-crystal alloy semiconductor structure. At least one seed, containing an alloying material, on a substrate for growth of at least one single-crystal alloy semiconductor structure is formed. At least one structural form, formed of a host material, on the substrate is crystallized to form the at least one single-crystal alloy semiconductor structure. The at least one structural form is heated such that the material of the at least one structural form has a liquid state. Also, the at least one structural form is cooled, such that the material of the at least one structural form nucleates at the least one seed and crystallizes as a single crystal to provide at least one single-crystal alloy semiconductor structure, with a growth front of the single crystal propagating in a main body of the respective structural form away from the respective seed.

公开(公告)号：US20200088943A1

公开(公告)日：2020-03-19

申请号：US16580298

申请日：2019-09-24

Applicant: University of Southampton

Inventor： Xia Chen ,  Milan Milosevic ,  Graham Trevor Reed ,  David John Thomson

IPC: G02B6/134 ,  C23C14/48 ,  G01M11/00

Abstract: The disclosure provides a method of forming an erasable optical coupler in a photonic device comprising a conventional optical waveguide formed in a crystalline wafer. The method comprises selectively implanting ions in a localized region of the wafer material adjacent to the conventional waveguide of the photonic device, to cause modification of the crystal lattice structure of, and a change in refractive index in, the ion implanted region of the wafer material to thereby form an ion implanted waveguide optically coupled to the adjacent conventional waveguide to couple light out therefrom, or in thereto. The crystalline wafer material and ion implanted waveguide are such that the crystal lattice structure or composition can be modified to adjust or remove the optical coupling with the conventional waveguide by further modification of the refractive index in the ion implanted region.

公开(公告)号：US11418264B2

公开(公告)日：2022-08-16

申请号：US17436192

申请日：2020-02-26

Applicant: University of Southampton

Inventor： Graham Trevor Reed ,  Ke Li ,  Sheghao Liu ,  David John Thomson

IPC: H04B10/2507 ,  H04B10/54 ,  H04B10/2513 ,  H04B10/079

Abstract: An optical modulation system comprises a signal source configured to generate an amplitude modulated electrical signal having a bandwidth and divided into frequency components comprising at least a first frequency component covering a first portion of the bandwidth and a second frequency component covering a second portion of the bandwidth; and an electro-optic modulator for receiving an input optical signal, the modulator having a first optical path and a second optical path, the input optical signal being divided between the first optical path and the second optical path and recombined after propagation along the first optical path and the second optical path to produce an output optical signal, and at least one of the first optical path and the second optical path comprising a phase shifter comprising a pair of electrodes in which each electrode is configured to receive a driving signal; wherein the or each phase shifter is coupled to the signal source to receive at least one of said frequency components as a driving signal for an electrode, and the phase shifters are arranged such that the or each phase shifter receives a different pair of driving signals.

公开(公告)号：US09494741B2

公开(公告)日：2016-11-15

申请号：US14392048

申请日：2013-12-03

Applicant: University of Southampton

Inventor： Frederic Yannick Gardes ,  David John Thomson ,  Graham Trevor Reed ,  Harold Meng Hoon Chong ,  Scott Ashley Reynolds

IPC: G02B6/34 ,  G02B6/30 ,  G02B6/36 ,  G02B6/42 ,  G02B6/12

CPC classification number: G02B6/30 ,  G02B6/12 ,  G02B6/34 ,  G02B6/3636 ,  G02B6/3652 ,  G02B6/3692 ,  G02B6/4214 ,  G02B6/4224 ,  G02B6/423 ,  G02B6/4269 ,  G02B2006/12107

Abstract: Apparatus comprising at least one optical device (106) optically coupled to at least one waveguide (111) on an optical chip (100), characterized in that: (i) the optical device (106) is optically aligned with the waveguide (111) by aligning means (114, 116); (ii) the aligning means (114, 116) comprises at least one male member (114) and at least one female (116) member which locate together; (iii) one of the male member (114) and the female member (116) is positioned on the optical chip (100); (iv) the other one of the male member (114) and the female member (116) is positioned on a capping chip (102); and (v) the apparatus includes a mirror (108) for reflecting light from the optical device (106) to the waveguide (111).

Abstract translation: 包括光学耦合到光学芯片（100）上的至少一个波导（111）的至少一个光学装置（106）的装置，其特征在于：（i）光学装置（106）与波导（111）光学对准， 通过对准装置（114,116）; （ii）对准装置（114,116）包括位于一起的至少一个阳构件（114）和至少一个阴（116）构件; （iii）阳构件（114）和阴构件（116）中的一个位于光学芯片（100）上; （iv）阳构件（114）和阴构件（116）中的另一个定位在封盖芯片（102）上; 和（v）该装置包括用于将来自光学装置（106）的光反射到波导（111）的反射镜（108）。

公开(公告)号：US11209593B2

公开(公告)日：2021-12-28

申请号：US16580298

申请日：2019-09-24

Applicant: University of Southampton

Inventor： Xia Chen ,  Milan Milosevic ,  Graham Trevor Reed ,  David John Thomson

IPC: G02B6/34 ,  G02B6/134 ,  C23C14/48 ,  G01M11/00 ,  G02B6/12

Abstract: The disclosure provides a method of forming an erasable optical coupler in a photonic device comprising a conventional optical waveguide formed in a crystalline wafer. The method comprises selectively implanting ions in a localized region of the wafer material adjacent to the conventional waveguide of the photonic device, to cause modification of the crystal lattice structure of, and a change in refractive index in, the ion implanted region of the wafer material to thereby form an ion implanted waveguide optically coupled to the adjacent conventional waveguide to couple light out therefrom, or in thereto. The crystalline wafer material and ion implanted waveguide are such that the crystal lattice structure or composition can be modified to adjust or remove the optical coupling with the conventional waveguide by further modification of the refractive index in the ion implanted region.

公开(公告)号：US20170175294A1

公开(公告)日：2017-06-22

申请号：US15316555

申请日：2015-06-05

Applicant: University of Southampton

Inventor： Frederic Yannick Gardes ,  Graham Trevor Reed ,  Callum George Johns

IPC: C30B29/52 ,  C30B13/14 ,  C30B29/08 ,  C30B13/34 ,  C30B29/06 ,  C30B29/18 ,  H01L21/02 ,  C30B13/22

CPC classification number: C30B29/52 ,  C30B11/002 ,  C30B13/14 ,  C30B13/22 ,  C30B13/34 ,  C30B29/06 ,  C30B29/08 ,  C30B29/18 ,  H01L21/02381 ,  H01L21/0245 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02546 ,  H01L21/02587 ,  H01L21/02625 ,  H01L21/02647 ,  H01L21/02667 ,  H01L21/02675

Abstract: A method of fabricating at least one single-crystal alloy semiconductor structure, comprising: forming at least one seed on a substrate for growth of at least one single-crystal alloy semiconductor structure, the at least one seed containing an alloying material; providing at least one structural form on the substrate which is crystallized to form the at least one single-crystal alloy semiconductor structure, the at least one structural form being formed of a host material and comprising a main body which extends from the at least one seed and a plurality of elements which are connected in spaced relation to the main body; heating the at least one structural form such that the material of the at least one structural form has a liquid state; and cooling the at least one structural form, such that the material of the at least one structural form nucleates at the least one seed and crystallizes as a single crystal to provide at least one single-crystal alloy semiconductor structure, with a growth front of the single crystal propagating in the main body of the respective structural form away from the respective seed; wherein the plurality of elements of each structural form provide reservoirs of the alloying material in liquid state, such that successive ones of the plurality of elements act to maintain, in liquid state, an available supply of the alloying material to the growth front of the single crystal in the main body of the respective structural form.

公开(公告)号：US20160018601A1

公开(公告)日：2016-01-21

申请号：US14392048

申请日：2013-12-03

Applicant: University of Southampton

Inventor： Frederic Yannick Gardes ,  David John Thomson ,  Graham Trevor Reed ,  Harold Meng Hoon Chong ,  Scott Ashley Reynolds

IPC: G02B6/30 ,  G02B6/34 ,  G02B6/12 ,  G02B6/36

CPC classification number: G02B6/30 ,  G02B6/12 ,  G02B6/34 ,  G02B6/3636 ,  G02B6/3652 ,  G02B6/3692 ,  G02B6/4214 ,  G02B6/4224 ,  G02B6/423 ,  G02B6/4269 ,  G02B2006/12107

Abstract: Apparatus comprising at least one optical device (106) optically coupled to at least one waveguide (111) on an optical chip (100), characterised in that: (i) the optical device (106) is optically aligned with the waveguide (111) by aligning means (114, 116); (ii) the aligning means (114, 116) comprises at least one male member (114) and at least one female (116) member which locate together; (iii) one of the male member (114) and the female member (116) is positioned on the optical chip (100); (iv) the other one of the male member (114) and the female member (116) is positioned on a capping chip (102); and (v) the apparatus includes a mirror (108) for reflecting light from the optical device (106) to the waveguide (111).

Abstract translation: 包括光学耦合到光学芯片（100）上的至少一个波导（111）的至少一个光学器件（106）的装置，其特征在于：（i）光学器件（106）与波导（111）光学对准， 通过对准装置（114,116）; （ii）对准装置（114,116）包括位于一起的至少一个阳构件（114）和至少一个阴（116）构件; （iii）阳构件（114）和阴构件（116）中的一个位于光学芯片（100）上; （iv）阳构件（114）和阴构件（116）中的另一个定位在封盖芯片（102）上; 和（v）该装置包括用于将来自光学装置（106）的光反射到波导（111）的反射镜（108）。