Detector of infrared radiation having a bi-material transducer
    7.
    发明授权
    Detector of infrared radiation having a bi-material transducer 有权
    红外辐射检测器具有双材料传感器

    公开(公告)号:US07580175B2

    公开(公告)日:2009-08-25

    申请号:US11766414

    申请日:2007-06-21

    IPC分类号: G02B26/00 G01J5/00

    CPC分类号: G01J5/40

    摘要: A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a temperature difference between the plate and the substrate generated by the incident IR radiation, the suspension arm deforms and changes the offset distance for the plate. In one embodiment, the suspension arm has three rod-shaped bimorph transducers that lie within a plane that is parallel to the substrate. The transducers are also parallel to one another, with the transducer that is attached to an anchor of the suspension arm being located between the two transducers that are attached to the plate.

    摘要翻译: 本发明的代表性实施例提供一种红外(IR)检测器,其具有通过悬架臂与基板偏移距离支撑的可移动板。 响应于由入射的IR辐射产生的板和衬底之间的温度差,悬架臂变形并改变板的偏移距离。 在一个实施例中,悬架臂具有位于平行于基板的平面内的三个棒状双压电晶片换能器。 换能器也彼此平行,其中附接到悬架臂的锚定件的换能器位于连接到板的两个换能器之间。

    DETECTOR OF INFRARED RADIATION HAVING A BI-MATERIAL TRANSDUCER
    9.
    发明申请
    DETECTOR OF INFRARED RADIATION HAVING A BI-MATERIAL TRANSDUCER 有权
    具有双材料传感器的红外辐射探测器

    公开(公告)号:US20080315099A1

    公开(公告)日:2008-12-25

    申请号:US11766414

    申请日:2007-06-21

    IPC分类号: G01J5/00

    CPC分类号: G01J5/40

    摘要: A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a temperature difference between the plate and the substrate generated by the incident IR radiation, the suspension arm deforms and changes the offset distance for the plate. In one embodiment, the suspension arm has three rod-shaped bimorph transducers that lie within a plane that is parallel to the substrate. The transducers are also parallel to one another, with the transducer that is attached to an anchor of the suspension arm being located between the two transducers that are attached to the plate.

    摘要翻译: 本发明的代表性实施例提供一种红外(IR)检测器,其具有通过悬架臂与基板偏移距离支撑的可移动板。 响应于由入射的IR辐射产生的板和衬底之间的温度差,悬架臂变形并改变板的偏移距离。 在一个实施例中,悬架臂具有位于平行于基板的平面内的三个棒状双压电晶片换能器。 换能器也彼此平行,其中附接到悬架臂的锚定件的换能器位于连接到板的两个换能器之间。

    Micro-electro-mechanical optical device
    10.
    发明授权
    Micro-electro-mechanical optical device 有权
    微机电光学装置

    公开(公告)号:US06392221B1

    公开(公告)日:2002-05-21

    申请号:US09390158

    申请日:1999-09-03

    IPC分类号: G02B2600

    摘要: A micro-electro-mechanical optical device is disclosed. The micro-electro-mechanical optical device includes a micro-electro-mechanical structure coupled with an optical device. Both the micro-electro-mechanical structure and the optical device are disposed on a substrate surface. The micro-electro-mechanical structure lifts the optical device a predetermined distance above the plane of the substrate surface. Thereafter, the lifted optical device is moveable relative to the plane of the substrate surface in response to an electrostatic field generated between the optical device and the substrate.

    摘要翻译: 公开了一种微机电光学装置。 微机电光学器件包括与光学器件耦合的微电子机械结构。 微电子机械结构和光学装置均设置在基板表面上。 微电子机械结构将光学装置提升到衬底表面平面上方一预定的距离。 此后,响应于在光学器件和衬底之间产生的静电场,提升的光学器件可相对于衬底表面的平面移动。