公开(公告)号：US11222804B2

公开(公告)日：2022-01-11

申请号：US16817627

申请日：2020-03-13

Applicant: Watlow Electric Manufacturing Company

Inventor： Brent Donald Alfred Elliot ,  Frank Balma ,  Michael Parker ,  Jason Stephens ,  Guleid Hussen

IPC: H01T23/00 ,  H01L21/683 ,  B23Q3/15 ,  B23K1/00 ,  C04B37/00 ,  H01L21/687 ,  B23K1/19 ,  B23K1/20 ,  B23K1/008 ,  B23K103/18 ,  B23K103/00 ,  B23K101/42

Abstract: An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C. The top surface may be sapphire. The top surface is attached to the lower portion of the electrostatic chuck using a braze layer able to withstand corrosive processing chemistries. A method of manufacturing an electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C.

公开(公告)号：US11648620B2

公开(公告)日：2023-05-16

申请号：US16203562

申请日：2018-11-28

Applicant: Watlow Electric Manufacturing Company

Inventor： Brent Elliot ,  Guleid Hussen ,  Jason Stephens ,  Michael Parker ,  Alfred Grant Elliot

IPC: B23K1/00 ,  B23B9/00 ,  C04B35/581 ,  B23K1/19 ,  B23K35/28 ,  C04B37/00 ,  H01L21/683 ,  H01L21/687 ,  B32B9/00 ,  H01L21/67 ,  B23K1/008 ,  C04B37/02 ,  B23K103/00

CPC classification number: B23K1/0016 ,  B23K1/008 ,  B23K1/19 ,  B23K35/286 ,  B32B9/005 ,  C04B35/581 ,  C04B37/005 ,  C04B37/026 ,  H01L21/67126 ,  H01L21/6833 ,  H01L21/68757 ,  H01L21/68785 ,  H01L21/68792 ,  B23K2103/52 ,  C04B2235/6581 ,  C04B2237/123 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/128 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/68 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/80 ,  C04B2237/84

Abstract: A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The ceramic pieces may be aluminum nitride or other ceramics, and the pieces may be brazed with Nickel and an alloying element, under controlled atmosphere. The completed joint will be fully or substantially Nickel with another element in solution. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the interior of a heater or electrostatic chuck. Semiconductor processing equipment comprising ceramic and joined with a nickel alloy and adapted to withstand processing chemistries, such as fluorine chemistries, as well as high temperatures.

公开(公告)号：US11183412B2

公开(公告)日：2021-11-23

申请号：US16102737

申请日：2018-08-14

Applicant: Watlow Electric Manufacturing Company

Inventor： Brent Elliot ,  Guleid Hussen ,  Jason Stephens ,  Michael Parker

IPC: B32B15/04 ,  H01L21/683 ,  H01L21/687 ,  B32B17/06 ,  B32B9/00 ,  B32B9/04 ,  B32B37/04 ,  H01J37/32

Abstract: A method for joining quartz pieces using metallic aluminum as the joining element. The aluminum may be placed between two quartz pieces and the assembly may be heated in the range of 500 C to 650 C. The joining atmosphere may be non-oxygenated. A method for the joining of quartz pieces which may include barrier layers on the quartz pieces. The barrier layers may be impervious to aluminum diffusion and may be of a metal oxide or metal nitride. The quartz pieces with the barrier layers may then be joined at temperatures higher than 650 C and less than 1200 C. A device such as an RF antenna or electrode in support of semiconductor processing using joined quartz pieces wherein the aluminum joining layer which has joined the pieces and also functions as antenna electrode.

公开(公告)号：US12020971B2

公开(公告)日：2024-06-25

申请号：US17532988

申请日：2021-11-22

Applicant: WATLOW ELECTRIC MANUFACTURING COMPANY

Inventor： Brent Elliot ,  Guleid Hussen ,  Jason Stephens ,  Michael Parker

IPC: B23K1/00 ,  B32B9/00 ,  B32B9/04 ,  B32B15/04 ,  B32B17/06 ,  H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  B32B37/04

CPC classification number: H01L21/6833 ,  B23K1/0008 ,  B23K1/0016 ,  B32B9/005 ,  B32B9/041 ,  B32B15/04 ,  B32B17/061 ,  H01J37/3255 ,  H01J37/32577 ,  H01J37/32715 ,  H01L21/68757 ,  H01L21/68785 ,  B32B37/04 ,  B32B2311/24 ,  B32B2318/00 ,  B32B2457/00

Abstract: A method for joining quartz pieces using metallic aluminum as the joining element. The aluminum may be placed between two quartz pieces and the assembly may be heated in the range of 500 C to 650 C. The joining atmosphere may be non-oxygenated. A method for the joining of quartz pieces which may include barrier layers on the quartz pieces. The barrier layers may be impervious to aluminum diffusion and may be of a metal oxide or metal nitride. The quartz pieces with the barrier layers may then be joined at temperatures higher than 650 C and less than 1200 C. A device such as an RF antenna or electrode in support of semiconductor processing using joined quartz pieces wherein the aluminum joining layer which has joined the pieces and also functions as antenna electrode.

公开(公告)号：US11993547B2

公开(公告)日：2024-05-28

申请号：US17342212

申请日：2021-06-08

Applicant: Watlow Electric Manufacturing Company

Inventor： Brent Elliot ,  Dennis George Rex ,  Guleid Hussen ,  Michael Parker ,  Jason Stephens

IPC: C04B37/02 ,  B32B1/08 ,  B32B15/04 ,  B32B15/20 ,  C04B37/00 ,  H02G3/22 ,  H05G2/00

CPC classification number: C04B37/021 ,  B32B1/08 ,  B32B15/04 ,  B32B15/20 ,  C04B37/00 ,  H02G3/22 ,  H05G2/00 ,  B32B2457/00 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/366 ,  C04B2237/402 ,  C04B2237/60 ,  C04B2237/74 ,  C04B2237/84

Abstract: An electrical termination unit or feedthrough which may be used for routing electrical conductors through a chamber wall, or otherwise across a barrier between isolated atmospheric conditions. The electrical termination unit may have aluminum as the interface material to the chamber interface and may utilize a ceramic insulator. The electrical termination unit may have the aluminum used as the interface brazed directly to a ceramic surface of the insulator. The aluminum that forms the chamber interface may be formed within a hollow ceramic tube in the same process step that brazes the aluminum to the ceramic tube with a hermetic joint. Machining subsequent to the brazing of the aluminum to the ceramic insulator may allow for achievement of the final form desired. A method for manufacturing such an electrical termination unit.

公开(公告)号：US12128494B2

公开(公告)日：2024-10-29

申请号：US18317571

申请日：2023-05-15

Applicant: WATLOW ELECTRIC MANUFACTURING COMPANY

Inventor： Brent Elliot ,  Guleid Hussen ,  Jason Stephens ,  Michael Parker ,  Alfred Grant Elliot

IPC: C04B35/581 ,  B23K1/00 ,  B23K1/008 ,  B23K1/19 ,  B23K35/28 ,  B32B9/00 ,  C04B37/00 ,  C04B37/02 ,  H01L21/67 ,  H01L21/683 ,  H01L21/687 ,  B23K103/00

CPC classification number: B23K1/0016 ,  B23K1/008 ,  B23K1/19 ,  B23K35/286 ,  B32B9/005 ,  C04B35/581 ,  C04B37/005 ,  C04B37/026 ,  H01L21/67126 ,  H01L21/6833 ,  H01L21/68757 ,  H01L21/68785 ,  H01L21/68792 ,  B23K2103/52 ,  C04B2235/6581 ,  C04B2237/123 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/128 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/68 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/80 ,  C04B2237/84

Abstract: A method for the joining of ceramic pieces includes applying a layer of titanium on a first ceramic piece and applying a layer of titanium on a second ceramic piece; applying a layer of nickel on each of the layers of titanium on the first ceramic piece and the second ceramic piece; applying a layer of nickel phosphorous to each of the layers of nickel on the first ceramic piece and the second ceramic piece; assembling the first ceramic piece and the second ceramic piece with the layers of titanium, nickel, and nickel phosphorous therebetween; pressing the layer of nickel phosphorous of the first ceramic piece against the layer of nickel phosphorous of the second ceramic piece; heating the first ceramic piece and the second ceramic piece to a joining temperature in a vacuum; and cooling the first ceramic piece and the second ceramic piece. A hermetic seal is formed between the first ceramic piece and the second ceramic piece.

公开(公告)号：US11028021B2

公开(公告)日：2021-06-08

申请号：US16169938

申请日：2018-10-24

Applicant: Watlow Electric Manufacturing Company

Inventor： Brent Elliot ,  Dennis George Rex ,  Guleid Hussen ,  Michael Parker ,  Jason Stephens

IPC: C04B37/02 ,  B32B1/08 ,  B32B15/04 ,  B32B15/20 ,  H02G3/22 ,  H05G2/00

Abstract: An electrical termination unit or feedthrough which may be used for routing electrical conductors through a chamber wall, or otherwise across a barrier between isolated atmospheric conditions. The electrical termination unit may have aluminum as the interface material to the chamber interface and may utilize a ceramic insulator. The electrical termination unit may have the aluminum used as the interface brazed directly to a ceramic surface of the insulator. The aluminum that forms the chamber interface may be formed within a hollow ceramic tube in the same process step that brazes the aluminum to the ceramic tube with a hermetic joint. Machining subsequent to the brazing of the aluminum to the ceramic insulator may allow for achievement of the final form desired. A method for manufacturing such an electrical termination unit.

公开(公告)号：US20230278123A1

公开(公告)日：2023-09-07

申请号：US18317571

申请日：2023-05-15

Applicant: WATLOW ELECTRIC MANUFACTURING COMPANY

Inventor： Brent Elliot ,  Guleid Hussen ,  Jason Stephens ,  Michael Parker ,  Alfred Grant Elliot

IPC: B23K1/00 ,  B23K1/19 ,  B23K35/28 ,  C04B35/581 ,  C04B37/00 ,  H01L21/683 ,  H01L21/687 ,  B32B9/00 ,  H01L21/67 ,  B23K1/008 ,  C04B37/02

CPC classification number: B23K1/0016 ,  B23K1/19 ,  B23K35/286 ,  C04B35/581 ,  C04B37/005 ,  H01L21/6833 ,  H01L21/68785 ,  H01L21/68792 ,  B32B9/005 ,  H01L21/67126 ,  B23K1/008 ,  H01L21/68757 ,  C04B37/026 ,  C04B2237/128 ,  C04B2237/708 ,  C04B2237/68 ,  C04B2237/80 ,  C04B2237/366 ,  C04B2237/72 ,  B23K2103/52

Abstract: A method for the joining of ceramic pieces includes applying a layer of titanium on a first ceramic piece and applying a layer of titanium on a second ceramic piece; applying a layer of nickel on each of the layers of titanium on the first ceramic piece and the second ceramic piece; applying a layer of nickel phosphorous to each of the layers of nickel on the first ceramic piece and the second ceramic piece; assembling the first ceramic piece and the second ceramic piece with the layers of titanium, nickel, and nickel phosphorous therebetween; pressing the layer of nickel phosphorous of the first ceramic piece against the layer of nickel phosphorous of the second ceramic piece; heating the first ceramic piece and the second ceramic piece to a joining temperature in a vacuum; and cooling the first ceramic piece and the second ceramic piece. A hermetic seal is formed between the first ceramic piece and the second ceramic piece.