公开(公告)号：US08748216B2

公开(公告)日：2014-06-10

申请号：US13198744

申请日：2011-08-05

申请人： Wei Guo ,  Yu Jin ,  Bing Liu ,  Yong Che ,  Kevin V. Hagedorn

发明人： Wei Guo ,  Yu Jin ,  Bing Liu ,  Yong Che ,  Kevin V. Hagedorn

IPC分类号： H01L31/18 ,  H01L31/032

CPC分类号： H01L21/02628 ,  H01L21/02568 ,  H01L21/02601 ,  H01L21/02614 ,  H01L31/0322 ,  H01L31/0749 ,  Y02E10/541

摘要： The present invention provides a non-vacuum method of depositing a photovoltaic absorber layer based on electrophoretic deposition of a mixture of nanoparticles with a controlled atomic ratio between the elements. The nanoparticles are first dispersed in a liquid medium to form a colloidal suspension and then electrophoretically deposited onto a substrate to form a thin film photovoltaic absorber layer. The absorber layer may be subjected to optional post-deposition treatments for photovoltaic absorption.

摘要翻译： 本发明提供了一种非真空方法，其基于在元件之间具有受控原子比的纳米颗粒的混合物的电泳沉积来沉积光伏吸收层。 首先将纳米颗粒分散在液体介质中以形成胶体悬浮液，然后电泳沉积到基底上以形成薄膜光伏吸收层。 可以对吸收层进行用于光伏吸收的任选的后沉积处理。

公开(公告)号：US20120098032A1

公开(公告)日：2012-04-26

申请号：US13198744

申请日：2011-08-05

申请人： Wei GUO ,  Yu Jin ,  Bing Liu ,  Yong Che ,  Kevin V. Hagedorn

发明人： Wei GUO ,  Yu Jin ,  Bing Liu ,  Yong Che ,  Kevin V. Hagedorn

IPC分类号： H01L31/18 ,  H01L31/032

CPC分类号： H01L21/02628 ,  H01L21/02568 ,  H01L21/02601 ,  H01L21/02614 ,  H01L31/0322 ,  H01L31/0749 ,  Y02E10/541

摘要： The present invention provides a non-vacuum method of depositing a photovoltaic absorber layer based on electrophoretic deposition of a mixture of nanoparticles with a controlled atomic ratio between the elements. The nanoparticles are first dispersed in a liquid medium to form a colloidal suspension and then electrophoretically deposited onto a substrate to form a thin film photovoltaic absorber layer. The absorber layer may be subjected to optional post-deposition treatments for photovoltaic absorption.

摘要翻译： 本发明提供了一种非真空方法，其基于在元件之间具有受控原子比的纳米颗粒的混合物的电泳沉积来沉积光伏吸收层。 首先将纳米颗粒分散在液体介质中以形成胶体悬浮液，然后电泳沉积到基底上以形成薄膜光伏吸收层。 可以对吸收层进行用于光伏吸收的任选的后沉积处理。

公开(公告)号：US20120097224A1

公开(公告)日：2012-04-26

申请号：US12910929

申请日：2010-10-25

申请人： Wei GUO ,  Yu Jin ,  Bing Liu ,  Yong Che

发明人： Wei GUO ,  Yu Jin ,  Bing Liu ,  Yong Che

IPC分类号： H01L31/0352 ,  H01L31/18 ,  B82Y99/00 ,  B82Y40/00

CPC分类号： H01L31/0322 ,  B82Y30/00 ,  C25D13/02 ,  H01L31/0749 ,  Y02E10/541

摘要： The present invention provides a non-vacuum method of depositing a photovoltaic absorber layer based on electrophoretic deposition of a mixture of nanoparticles with a controlled atomic ratio between the elements. The nanoparticles are first dispersed in a liquid medium to form a colloidal suspension and then electrophoretically deposited onto a substrate to form a thin film photovoltaic absorber layer. The absorber layer may be subjected to optional post-deposition treatments for photovoltaic absorption.

公开(公告)号：US08409906B2

公开(公告)日：2013-04-02

申请号：US12910929

申请日：2010-10-25

申请人： Wei Guo ,  Yu Jin ,  Bing Liu ,  Yong Che

发明人： Wei Guo ,  Yu Jin ,  Bing Liu ,  Yong Che

IPC分类号： H01L21/00

CPC分类号： H01L31/0322 ,  B82Y30/00 ,  C25D13/02 ,  H01L31/0749 ,  Y02E10/541

摘要： The present invention provides a non-vacuum method of depositing a photovoltaic absorber layer based on electrophoretic deposition of a mixture of nanoparticles with a controlled atomic ratio between the elements. The nanoparticles are first dispersed in a liquid medium to form a colloidal suspension and then electrophoretically deposited onto a substrate to form a thin film photovoltaic absorber layer. The absorber layer may be subjected to optional post-deposition treatments for photovoltaic absorption.

摘要翻译： 本发明提供了一种非真空方法，其基于在元件之间具有受控原子比的纳米颗粒的混合物的电泳沉积来沉积光伏吸收层。 首先将纳米颗粒分散在液体介质中以形成胶体悬浮液，然后电泳沉积到基底上以形成薄膜光伏吸收层。 可以对吸收层进行用于光伏吸收的任选的后沉积处理。

公开(公告)号：US20120100660A1

公开(公告)日：2012-04-26

申请号：US13053441

申请日：2011-03-22

申请人： Kevin V. Hagedorn ,  Wei Guo ,  Bing Liu

发明人： Kevin V. Hagedorn ,  Wei Guo ,  Bing Liu

IPC分类号： H01L31/0352

CPC分类号： H01L31/035281 ,  C25D5/48 ,  C25D15/02 ,  H01L31/0322 ,  H01L31/03923 ,  H01L31/0747 ,  Y02E10/541

摘要： Methods for fabricating a photovoltaic device on complexly shaped fabricated objects, such as car bodies are disclosed. Preferably the photovoltaic device includes absorber layers comprising Copper, Indium, Gallium, Selenide (CIGS) or Copper, Zinc, Tin, Sulfide (CZTS). The method includes the following steps: a colloidal suspension of metal surface-charged nanoparticles is formed; electrophoretic deposition is used to deposit the nanopartieles in a metal thin film onto a complexly shaped surface of the substrate; the metal thin film is heated in the presence of a chalcogen source to convert the metal thin film into a metal chalcogenide thin film layer; a buffer layer is formed on the metal chalcogenide thin film layer using a chemical bath deposition; an intrinsic zinc oxide insulating layer is formed adjacent to a side of the buffer layer, opposite the metal chalcogenide thin film layer, by chemical vapor deposition; and finally, a transparent conducting oxide is formed adjacent to a side of the intrinsic zinc oxide, opposite the buffer layer, by chemical vapor deposition.

摘要翻译： 公开了在复杂形状的制造物体（例如车体）上制造光伏器件的方法。 优选地，光伏器件包括包含铜，铟，镓，硒化物（CIGS）或铜，锌，锡，硫化物（CZTS）的吸收层。 该方法包括以下步骤：形成金属表面带电的纳米颗粒的胶态悬浮液; 电泳沉积用于将金属薄膜中的纳米颗粒沉积到基底的复杂形状的表面上; 金属薄膜在硫属元素源的存在下被加热，以将金属薄膜转化为金属硫族化物薄膜层; 使用化学浴沉积在金属硫族化物薄膜层上形成缓冲层; 通过化学气相沉积与金属硫族化物薄膜层相对的缓冲层侧面形成本征氧化锌绝缘层; 最后，通过化学气相沉积在本征氧化锌的与缓冲层相对的一侧附近形成透明的导电氧化物。

公开(公告)号：US20130101830A1

公开(公告)日：2013-04-25

申请号：US13660033

申请日：2012-10-25

申请人： Kevin V. Hagedorn ,  Bing Liu

发明人： Kevin V. Hagedorn ,  Bing Liu

IPC分类号： C25D15/00 ,  B32B5/16 ,  B82Y30/00

CPC分类号： C25D13/02 ,  B82Y30/00 ,  C25D13/10 ,  Y10T428/25 ,  Y10T428/31678

摘要： Disclosed is a process for electrophoretic deposition of colloidal suspensions of nanoparticles, especially from aprotic solvents, onto a variety of substrates. The process provides chemical additives that can be used to improve thin films deposited from colloidal suspensions by increasing the rate of deposition and the smoothness of the deposited film. In this process, a chemical additive is used to improve the properties of the deposited thin films. The chemical additive comprises a redox couple, an organometallic complex, a metallocene, a ferrocene, or a nickelocene. The colloidal suspension can be composed of semiconductor, metal or ceramic nanoparticles suspended in an aprotic polar solvent such as acetone, acetonitrile, or pyridine. The process also improves the properties of thin films deposited from protic solvents. The particles have at least one dimension ranging from 0.1 nanometers (nm) to 500 nm.

摘要翻译： 公开了一种将纳米粒子，特别是非质子溶剂的胶体悬浮液电泳沉积到各种基底上的方法。 该方法提供化学添加剂，其可用于通过增加沉积速率和沉积膜的平滑度来改善由胶体悬浮液沉积的薄膜。 在该方法中，使用化学添加剂来改善沉积的薄膜的性质。 化学添加剂包括氧化还原对，有机金属络合物，茂金属，二茂铁或二茂镍。 胶态悬浮液可以由悬浮在非质子极性溶剂如丙酮，乙腈或吡啶中的半导体，金属或陶瓷纳米颗粒组成。 该方法还改善了由质子溶剂沉积的薄膜的性质。 颗粒具有0.1纳米（nm）至500nm的至少一个维度。

公开(公告)号：US08663754B2

公开(公告)日：2014-03-04

申请号：US12400438

申请日：2009-03-09

申请人： Bing Liu ,  Zhendong Hu ,  Makoto Murakami ,  Jingzhou Xu ,  Yong Che

发明人： Bing Liu ,  Zhendong Hu ,  Makoto Murakami ,  Jingzhou Xu ,  Yong Che

IPC分类号： C23C14/28 ,  C08J7/04 ,  B05D5/06 ,  B05D5/12 ,  B23K26/00

CPC分类号： C23C20/04 ,  B41M5/262 ,  B41M5/267 ,  B44F1/10 ,  C23C14/28 ,  C23C14/3435 ,  G02B26/101 ,  Y10T428/24802 ,  Y10T428/24917

摘要： A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.

摘要翻译： 公开了使用脉冲激光在透明基板上形成图案的方法。 各种实施例包括超短脉冲激光器，对激光波长透明的衬底和靶板。 激光束被引导通过透明基板并聚焦在目标表面上。 目标材料被激光烧蚀并沉积在相对的基板表面上。 通过相对于目标扫描激光束来形成例如灰度图像的图案。 激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质，产生灰度的视觉效果。 在一些实施例中，可以在制造过程期间在微电子器件的一部分上形成图案。 在一些实施例中，高重复率皮秒和纳秒源被配置为产生图案。

公开(公告)号：US08609205B2

公开(公告)日：2013-12-17

申请号：US12497205

申请日：2009-07-02

申请人： Zhendong Hu ,  Yong Che ,  Bing Liu

发明人： Zhendong Hu ,  Yong Che ,  Bing Liu

IPC分类号： H05B7/00 ,  C23C14/14

CPC分类号： C30B23/08 ,  C23C14/083 ,  C23C14/28 ,  C30B29/16

摘要： A one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of metal oxides such as crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation of Titania or metal titanium target. The system includes a pulsed laser with a pulse duration ranging from a few femtoseconds to a few tens of picoseconds, an optical setup for processing the laser beam such that the beam is focused onto the target surface with an appropriate average energy density and an appropriate energy density distribution, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.

摘要翻译： 使用二氧化钛或金属钛靶的超快速脉冲激光烧蚀将金属氧化物如结晶二氧化钛（TiO 2）的纳米颗粒或纳米复合材料（纳米颗粒组装的）膜沉积到基底表面上的一步和室温方法。 该系统包括脉冲激光，其脉冲持续时间范围从几飞秒到几十皮秒，用于处理激光束的光学设置，使得光束以适当的平均能量密度和适当的能量聚焦到目标表面上 密度分布，以及真空室，其中安装了目标物和基质，背景气体及其压力被适当调节。

公开(公告)号：US07608308B2

公开(公告)日：2009-10-27

申请号：US11405020

申请日：2006-04-17

申请人： Bing Liu ,  Zhendong Hu ,  Yong Che ,  Yuzuru Uehara

发明人： Bing Liu ,  Zhendong Hu ,  Yong Che ,  Yuzuru Uehara

IPC分类号： C23C14/30 ,  H05B7/00 ,  C23C8/00

CPC分类号： C23C14/22 ,  C23C14/083 ,  C23C14/28

摘要： A p-type semiconductor zinc oxide (ZnO) film and a process for preparing the film are disclosed. The film is co-doped with phosphorous (P) and lithium (Li). A pulsed laser deposition scheme is described for use in growing the film. Further described is a process of pulsed laser deposition using transparent substrates which includes a pulsed laser source, a substrate that is transparent at the wavelength of the pulsed laser, and a multi-target system. The optical path of the pulsed laser is arranged in such a way that the pulsed laser is incident from the back of the substrate, passes through the substrate, and then focuses on the target. By translating the substrate towards the target, this geometric arrangement enables deposition of small features utilizing the root of the ablation plume, which can exist in a one-dimensional transition stage along the target surface normal, before the angular width of the plume is broadened by three-dimensional adiabatic expansion. This can provide small deposition feature sizes, which can be similar in size to the laser focal spot, and provides a novel method for direct deposition of patterned materials.

摘要翻译： 公开了一种p型半导体氧化锌（ZnO）膜及其制备方法。 该膜与磷（P）和锂（Li）共掺杂。 描述脉冲激光沉积方案用于生长膜。 进一步描述的是使用透明衬底的脉冲激光沉积过程，其包括脉冲激光源，在脉冲激光的波长处是透明的衬底和多目标系统。 脉冲激光器的光路布置成使得脉冲激光从衬底的背面入射，穿过衬底，然后聚焦在靶上。 通过将基板朝向目标平移，这种几何布置可以在羽流的角宽度扩大之前利用消融羽流的根部沉积小特征，其可以沿着目标表面法线存在于一维过渡阶段中 三维绝热膨胀。 这可以提供小的沉积特征尺寸，其尺寸可以与激光焦点类似，并且提供用于直接沉积图案化材料的新颖方法。

公开(公告)号：US20070243328A1

公开(公告)日：2007-10-18

申请号：US11405020

申请日：2006-04-17

申请人： Bing Liu ,  Zhendong Hu ,  Yong Che ,  Yuzuru Uehara

发明人： Bing Liu ,  Zhendong Hu ,  Yong Che ,  Yuzuru Uehara

IPC分类号： C23C16/00 ,  C23C14/30

CPC分类号： C23C14/22 ,  C23C14/083 ,  C23C14/28

摘要： A p-type semiconductor zinc oxide (ZnO) film and a process for preparing the film are disclosed. The film is co-doped with phosphorous (P) and lithium (Li). A pulsed laser deposition scheme is described for use in growing the film. Further described is a process of pulsed laser deposition using transparent substrates which includes a pulsed laser source, a substrate that is transparent at the wavelength of the pulsed laser, and a multi-target system. The optical path of the pulsed laser is arranged in such a way that the pulsed laser is incident from the back of the substrate, passes through the substrate, and then focuses on the target. By translating the substrate towards the target, this geometric arrangement enables deposition of small features utilizing the root of the ablation plume, which can exist in a one-dimensional transition stage along the target surface normal, before the angular width of the plume is broadened by three-dimensional adiabatic expansion. This can provide small deposition feature sizes, which can be similar in size to the laser focal spot, and provides a novel method for direct deposition of patterned materials.

摘要翻译： 公开了一种p型半导体氧化锌（ZnO）膜及其制备方法。 该膜与磷（P）和锂（Li）共掺杂。 描述脉冲激光沉积方案用于生长膜。 进一步描述的是使用透明衬底的脉冲激光沉积过程，其包括脉冲激光源，在脉冲激光的波长处是透明的衬底和多目标系统。 脉冲激光器的光路布置成使得脉冲激光从衬底的背面入射，穿过衬底，然后聚焦在靶上。 通过将基板朝向目标平移，这种几何布置可以在羽流的角宽度扩大之前利用消融羽流的根部沉积小特征，其可以沿着目标表面法线存在于一维过渡阶段中 三维绝热膨胀。 这可以提供小的沉积特征尺寸，其尺寸可以与激光焦点类似，并且提供用于直接沉积图案化材料的新颖方法。