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公开(公告)号：US20100227133A1
公开(公告)日：2010-09-09
申请号：US12400438
申请日：2009-03-09
申请人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
发明人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
CPC分类号： C23C20/04 , B41M5/262 , B41M5/267 , B44F1/10 , C23C14/28 , C23C14/3435 , G02B26/101 , Y10T428/24802 , Y10T428/24917
摘要： A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.
摘要翻译： 公开了使用脉冲激光在透明基板上形成图案的方法。 各种实施例包括超短脉冲激光器，对激光波长透明的衬底和靶板。 激光束被引导通过透明基板并聚焦在目标表面上。 目标材料被激光烧蚀并沉积在相对的基板表面上。 通过相对于目标扫描激光束来形成例如灰度图像的图案。 激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质，产生灰度的视觉效果。 在一些实施例中，可以在制造过程期间在微电子器件的一部分上形成图案。 在一些实施例中，高重复率皮秒和纳秒源被配置为产生图案。
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公开(公告)号：US08663754B2
公开(公告)日：2014-03-04
申请号：US12400438
申请日：2009-03-09
申请人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
发明人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
CPC分类号： C23C20/04 , B41M5/262 , B41M5/267 , B44F1/10 , C23C14/28 , C23C14/3435 , G02B26/101 , Y10T428/24802 , Y10T428/24917
摘要： A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.
摘要翻译： 公开了使用脉冲激光在透明基板上形成图案的方法。 各种实施例包括超短脉冲激光器，对激光波长透明的衬底和靶板。 激光束被引导通过透明基板并聚焦在目标表面上。 目标材料被激光烧蚀并沉积在相对的基板表面上。 通过相对于目标扫描激光束来形成例如灰度图像的图案。 激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质，产生灰度的视觉效果。 在一些实施例中，可以在制造过程期间在微电子器件的一部分上形成图案。 在一些实施例中，高重复率皮秒和纳秒源被配置为产生图案。
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3.发明授权Production of metal and metal-alloy nanoparticles with high repetition rate ultrafast pulsed laser ablation in liquids 有权在液体中生产金属和金属合金纳米粒子，具有高重复率超快脉冲激光烧蚀公开(公告)号：US08246714B2
公开(公告)日：2012-08-21
申请号：US12320617
申请日：2009-01-30
申请人： Bing Liu , Zhendong Hu , Makoto Murakami , Yong Che
发明人： Bing Liu , Zhendong Hu , Makoto Murakami , Yong Che
CPC分类号： B02C19/18 , B01J13/0043 , B01J19/121 , B22F1/0022 , B22F9/04 , B22F2999/00 , B82Y30/00 , B22F2202/11
摘要： Various embodiments include a method of producing chemically pure and stably dispersed metal and metal-alloy nanoparticle colloids with ultrafast pulsed laser ablation. A method comprises irradiating a metal or metal alloy target submerged in a liquid with ultrashort laser pulses at a high repetition rate, cooling a portion of the liquid that includes an irradiated region, and collecting nanoparticles produced with the laser irradiation and liquid cooling. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beams, a metal or metal alloy target submerged in a liquid, and a liquid circulating system to cool the laser focal volume and collect the nanoparticle products. By controlling various laser parameters, and with optional liquid flow movement, the method provides stable colloids of dispersed metal and metal-alloy nanoparticles. In various embodiments additional stabilizing chemical agents are not required.
摘要翻译： 各种实施方案包括用超快速脉冲激光烧蚀制备化学纯的和稳定分散的金属和金属合金纳米颗粒胶体的方法。 一种方法包括以高重复率以超短激光脉冲辐射淹没在液体中的金属或金属合金靶，冷却包括辐射区域的液体的一部分，以及收集通过激光照射和液体冷却产生的纳米颗粒。 该方法可以用高重复率超快脉冲激光源，用于聚焦和移动脉冲激光束的光学系统，浸没在液体中的金属或金属合金靶和液体循环系统来实现，以冷却激光聚焦体积， 收集纳米颗粒产品。 通过控制各种激光参数，并具有可选的液流运动，该方法提供分散金属和金属合金纳米粒子的稳定胶体。 在各种实施方案中，不需要另外的稳定化学试剂。
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4.发明申请Production of metal and metal-alloy nanoparticles with high repetition rate ultrafast pulsed laser ablation in liquids 有权在液体中生产金属和金属合金纳米粒子，具有高重复率超快脉冲激光烧蚀公开(公告)号：US20100196192A1
公开(公告)日：2010-08-05
申请号：US12320617
申请日：2009-01-30
申请人： Bing Liu , Zhendong Hu , Makoto Murakami , Yong Che
发明人： Bing Liu , Zhendong Hu , Makoto Murakami , Yong Che
CPC分类号： B02C19/18 , B01J13/0043 , B01J19/121 , B22F1/0022 , B22F9/04 , B22F2999/00 , B82Y30/00 , B22F2202/11
摘要： Various embodiments include a method of producing chemically pure and stably dispersed metal and metal-alloy nanoparticle colloids with ultrafast pulsed laser ablation. A method comprises irradiating a metal or metal alloy target submerged in a liquid with ultrashort laser pulses at a high repetition rate, cooling a portion of the liquid that includes an irradiated region, and collecting nanoparticles produced with the laser irradiation and liquid cooling. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beams, a metal or metal alloy target submerged in a liquid, and a liquid circulating system to cool the laser focal volume and collect the nanoparticle products. By controlling various laser parameters, and with optional liquid flow movement, the method provides stable colloids of dispersed metal and metal-alloy nanoparticles. In various embodiments additional stabilizing chemical agents are not required.
摘要翻译： 各种实施方案包括用超快速脉冲激光烧蚀制备化学纯的和稳定分散的金属和金属合金纳米颗粒胶体的方法。 一种方法包括以高重复率以超短激光脉冲辐射淹没在液体中的金属或金属合金靶，冷却包括辐射区域的液体的一部分，以及收集通过激光照射和液体冷却产生的纳米颗粒。 该方法可以用高重复率超快脉冲激光源，用于聚焦和移动脉冲激光束的光学系统，浸没在液体中的金属或金属合金靶和液体循环系统来实现，以冷却激光聚焦体积， 收集纳米颗粒产品。 通过控制各种激光参数，并具有可选的液流运动，该方法提供分散金属和金属合金纳米粒子的稳定胶体。 在各种实施方案中，不需要另外的稳定化学试剂。
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公开(公告)号：US20090246530A1
公开(公告)日：2009-10-01
申请号：US12401967
申请日：2009-03-11
申请人： Makoto Murakami , Zhendong Hu , Yong Che , Bing Liu , Yuzuru Uehara , Zhenlin Liu
发明人： Makoto Murakami , Zhendong Hu , Yong Che , Bing Liu , Yuzuru Uehara , Zhenlin Liu
CPC分类号： C23C14/08 , C23C14/083 , C23C14/086 , C23C14/14 , C23C14/28 , C23C14/54 , Y10T428/31504
摘要： A method of pulsed laser deposition (PLD) capable of continuously tuning formed-film morphology from that of a nanoparticle aggregate to a smooth thin film free of particles and droplets. The materials that can be synthesized using various embodiments of the invention include, but are not limited to, metals, alloys, metal oxides, and semiconductors. In various embodiments a ‘burst’ mode of ultrashort pulsed laser ablation and deposition is provided. Tuning of the film morphology is achieved by controlling the burst-mode parameters such as the number of pulses and the time-spacing between the pulses within each burst, the burst repetition rate, and the laser fluence. The system includes an ultrashort pulsed laser, an optical system for delivering a focused onto the target surface with an appropriate energy density, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.
摘要翻译： 脉冲激光沉积（PLD）的方法，其能够将形成膜的形态从纳米颗粒聚集体的形态连续调节到没有颗粒和液滴的平滑薄膜。 可以使用本发明的各种实施方案合成的材料包括但不限于金属，合金，金属氧化物和半导体。 在各种实施例中，提供了超短脉冲激光烧蚀和沉积的“突发”模式。 通过控制脉冲串模式参数，例如脉冲数和每个脉冲之间的脉冲之间的时间间隔，脉冲串重复频率和激光能量密度来实现电影形态的调整。 该系统包括超短脉冲激光器，用于以适当的能量密度传递聚焦到目标表面上的光学系统，以及真空室，其中靶和基底被安装在其中，背景气体及其压力被适当地调整。
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6.发明授权公开(公告)号：US08858676B2
公开(公告)日：2014-10-14
申请号：US12951423
申请日：2010-11-22
申请人： Bing Liu , Zhendong Hu , Yong Che , Makoto Murakami
发明人： Bing Liu , Zhendong Hu , Yong Che , Makoto Murakami
CPC分类号： B01J19/121 , B22F1/0018 , B22F9/04 , B22F2999/00 , Y10S977/889 , B22F2202/11
摘要： A method for generating nanoparticles in a liquid comprises generating groups of ultrafast laser pulses, each pulse in a group having a pulse duration of from 10 femtoseconds to 200 picoseconds, and each group containing a plurality of pulses with a pulse separation of 1 to 100 nanoseconds and directing the groups of pulses at a target material in a liquid to ablate it. The multiple pulse group ablation produces nanoparticles with a reduced average size, a narrow size distribution, and improved production efficiency compared to prior pulsed ablation systems.
摘要翻译： 用于在液体中产生纳米颗粒的方法包括产生超快激光脉冲组，组中的每个脉冲具有10飞秒至200皮秒的脉冲持续时间，并且每组包含脉冲间隔为1至100纳秒的多个脉冲 并将脉冲组定向在液体中的目标材料以烧蚀它。 与先前的脉冲消融系统相比，多脉冲组消融产生具有降低的平均尺寸，窄尺寸分布和提高的生产效率的纳米颗粒。
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公开(公告)号：US20090246413A1
公开(公告)日：2009-10-01
申请号：US12254076
申请日：2008-10-20
申请人： Makoto Murakami , Zhendong Hu , Yong Che , Bing Liu
发明人： Makoto Murakami , Zhendong Hu , Yong Che , Bing Liu
CPC分类号： C23C14/28 , C23C14/08 , C23C14/564 , H01S3/0057 , H01S3/0085 , H01S3/2308
摘要： A method of ultrashort pulsed laser deposition (PLD) capable of continuously tuning formed-film morphology from that of a nanoparticle aggregate to a smooth thin film completely free of particles and droplets. The materials that can be synthesized using various embodiments of the invention include, but are not limited to, metals, alloys, metal oxides, and semiconductors. A ‘burst’ mode of ultrashort pulsed laser ablation and deposition is provided, where each ‘burst’ contains a train of laser pulses. Tuning of the film morphology is achieved by controlling the burst-mode parameters such as the number of pulses and the time-spacing between the pulses within each burst, the burst repetition rate, and the laser fluence. The system includes an ultrashort pulsed laser, an optical setup for delivering the laser beam such that the beam is focused onto the target surface with an appropriate average energy density (fluence), and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.
摘要翻译： 一种超短脉冲激光沉积（PLD）的方法，其能够将形成膜的形态从纳米颗粒聚集体的形态连续调节到完全没有颗粒和液滴的光滑薄膜。 可以使用本发明的各种实施方案合成的材料包括但不限于金属，合金，金属氧化物和半导体。 提供了超短脉冲激光烧蚀和沉积的“突发”模式，其中每个“脉冲串”包含一系列激光脉冲。 通过控制脉冲串模式参数，例如脉冲数和每个脉冲之间的脉冲之间的时间间隔，脉冲串重复频率和激光能量密度来实现电影形态的调整。 该系统包括超短脉冲激光器，用于传送激光束的光学装置，使得光束以适当的平均能量密度（能量密度）聚焦到目标表面上;以及真空室，其中安装有靶和基底; 背景气体及其压力得到适当调整。
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公开(公告)号：US08836941B2
公开(公告)日：2014-09-16
申请号：US12951524
申请日：2010-11-22
申请人： Makoto Murakami , Yong Che , Bing Liu , Yuki Ichikawa
发明人： Makoto Murakami , Yong Che , Bing Liu , Yuki Ichikawa
CPC分类号： G01N21/658 , B82Y30/00 , B82Y40/00 , C23C14/083 , C23C14/3435
摘要： An device for Raman spectroscopy such as surface enhanced Raman spectroscopy (SERS) is disclosed herein. Various embodiments may be utilized to prepare a SERS substrate using several deposition techniques such as pulsed laser deposition. Some embodiments optimize coverage, volume, or elements of SERS active metals. The method is a single step inexpensive method for preparing a SERS active substrate. In some embodiments a coating layer underneath the SERS active metals is utilized for additional enhancements.
摘要翻译： 本文公开了一种用于拉曼光谱的装置，例如表面增强拉曼光谱（SERS）。 可以使用多种沉积技术例如脉冲激光沉积来制备SERS衬底的各种实施例。 一些实施例优化SERS活性金属的覆盖，体积或元素。 该方法是用于制备SERS活性基底的单步廉价方法。 在一些实施方案中，SERS活性金属下面的涂层用于额外的增强。
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9.发明授权Stable colloidal gold nanoparticles with controllable surface modification and functionalization 有权稳定的胶体金纳米粒子具有可控的表面改性和功能化公开(公告)号：US08697129B2
公开(公告)日：2014-04-15
申请号：US13038788
申请日：2011-03-02
申请人： Wei Qian , Makoto Murakami , Yuki Ichikawa , Yong Che
发明人： Wei Qian , Makoto Murakami , Yuki Ichikawa , Yong Che
CPC分类号： A61K49/0002 , A61K9/0019 , A61K9/1688 , A61K41/0057 , A61K47/10 , B01J13/0034 , B01J13/0043 , B82Y5/00 , B82Y30/00 , B82Y40/00 , G01N21/64 , G01N21/658 , G01N33/531 , G01N33/54346 , G01N2021/3595
摘要： In the present invention, a method of producing stable bare colloidal gold nanoparticles is disclosed. The nanoparticles can subsequently be subjected to partial or full surface modification. The method comprises preparation of colloidal gold nanoparticles in a liquid by employing a top-down nanofabrication method using bulk gold as a source material. The surface modification of these nanoparticles is carried out by adding one or multiple types of ligands each containing functional groups which exhibit affinity for gold nanoparticle surfaces to produce the conjugates. Because of the high efficiency and excellent stability of the nanoparticles produced by this method, the fabricated gold nanoparticle conjugates can have surface coverage with functional ligands which can be tuned to be any percent value between 0 and 100%.
摘要翻译： 在本发明中，公开了一种制备稳定的裸胶体金纳米颗粒的方法。 随后可以对纳米颗粒进行部分或全面修饰。 该方法包括使用以大块金为原料的自顶向下纳米制造方法在液体中制备胶体金纳米颗粒。 这些纳米颗粒的表面改性是通过添加一种或多种类型的配体，每个配体包含对金纳米颗粒表面具有亲和性以产生共轭物的官能团。 由于通过该方法制备的纳米颗粒的高效率和优异的稳定性，所制备的金纳米颗粒共轭物可以具有表面覆盖的功能性配体，其可被调整为0至100％之间的任何百分比值。
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公开(公告)号：US20120168669A1
公开(公告)日：2012-07-05
申请号：US12983534
申请日：2011-01-03
申请人： Yong CHE , Makoto Murakami , Wei Guo
发明人： Yong CHE , Makoto Murakami , Wei Guo
CPC分类号： C04B35/62695 , B22F1/0018 , B22F1/02 , B22F9/04 , B22F2999/00 , B82Y30/00 , C01G49/04 , C01G49/08 , C01P2004/04 , C01P2004/62 , C01P2004/64 , C01P2004/80 , C04B2235/5436 , C04B2235/5445 , C04B2235/5454 , C09C1/62 , C22C29/00 , C22C32/00 , H01F1/0054 , Y10T428/2982 , Y10T428/2991 , B22F2202/11
摘要： A composite nanoparticle, for example a nanoparticle containing one or a plurality of cores embedded in another material. A composite nanoparticle can be formed by a one step process that includes: ejecting material from a bulk target material using physical energy source, with the bulk target material disposed in a liquid. Composite nanoparticles are formed by cooling at least a portion of the ejected material in the liquid. The composite fine particles may then be collected from the liquid. A product that includes composite fine particles may be formed with laser ablation, and ultrashort laser ablation may be utilized so as to preserve composite nanoparticle stoichiometry. For applications of the composite fine particles, optical properties and/or magnetic properties may be exploited for various applications.
摘要翻译： 复合纳米颗粒，例如含有嵌入另一材料中的一个或多个芯的纳米颗粒。 复合纳米颗粒可以通过一步法形成，该方法包括：使用物理能源从大量目标材料中喷射材料，其中大量目标材料设置在液体中。 复合纳米颗粒通过冷却至少一部分喷射的液体中的材料形成。 然后可以从液体中收集复合细颗粒。 可以通过激光烧蚀形成包括复合细颗粒的产品，并且可以利用超短激光烧蚀以保持复合纳米颗粒的化学计量。 对于复合细颗粒的应用，可以利用光学性质和/或磁性来进行各种应用。
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