摘要:
An apparatus and method for providing image acquisition and/or image display in a limited region of interest (ROI). The apparatus comprises a micro-electro-mechanical system (MEMS), preferably integrating a light source, a cantilever, a lens, an actuator, a light detector, and a position sensor. The light source provides light for illuminating the ROI, displaying an image, providing a therapy, and/or performing other functions. The cantilever comprises a resin waveguide with a fixed end attached to a substrate that supports many or all other components. A free end of the cantilever is released from the substrate during fabrication and includes the lens. The actuator scans the free end in orthogonal directions to illuminate the ROI or display an image. The position sensors detect the position of the free end for control. The light detector receives light backscattered from the ROI separate from, or at the fixed end of the cantilever.
摘要:
An apparatus and method for providing image acquisition and/or image display in a limited region of interest (ROI). The apparatus comprises a micro electro-mechanical system (MEMS), preferably integrating a light source, a cantilever, a lens, an actuator, a light detector, and a position sensor. The light source provides light for illuminating the ROI, displaying an image, providing a therapy, and/or performing other functions. The cantilever comprises a resin waveguide with a fixed end attached to a substrate that supports many or all other components. A free end of the cantilever is released from the substrate during fabrication and includes the lens. The actuator scans the free end in orthogonal directions to illuminate the ROI or display an image. The position sensors detect the position of the free end for control. The light detector receives light backscattered from the ROI separate from, or at the fixed end the cantilever.
摘要:
Small, rugged scanners micro-fabricated from commercial optical fibers to form waveguides or other structures. The scanning waveguide has a distal portion on which is formed a non-linear taper with a diameter that decreases toward a distal end. Optionally, a hinge portion having a reduced diameter can be formed in the distal portion, improving the scanning properties of the waveguide. A micro-lens can be integrally formed at the distal tip of the waveguide with either a droplet of an optical adhesive, or by using an energy beam to melt the material of the waveguide to form a droplet. The droplet is shaped with an externally applied force. When mechanically driven in vibratory resonance, the tip of the optical waveguides moves in linear or two-dimensional scan patterns of relatively high amplitude and frequency, and large field of view. The scanner can be used either for image acquisition or image display.