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    Method and equipment for plasma processing
    2.
    发明授权
    Method and equipment for plasma processing 失效
    等离子体处理方法和设备

    公开(公告)号：US5401356A

    公开(公告)日：1995-03-28

    申请号：US922487

    申请日：1992-07-31

    申请人： Hiromichi Enami ,  Kiyomi Yagi ,  Masanori Katsuyama ,  Akihiko Konno

    发明人： Hiromichi Enami ,  Kiyomi Yagi ,  Masanori Katsuyama ,  Akihiko Konno

    IPC分类号： C23C16/50 ,  C23C16/44 ,  C23C16/511 ,  C23F4/00 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31 ,  H01L21/311 ,  H01L21/3213 ,  H05H1/46 ,  H01L21/306

    CPC分类号： H01J37/32871 ,  C23C16/4401 ,  H01L21/31116 ,  H01L21/32136 ,  H01L21/32137

    摘要： The amount of dust particles deposited on a semiconductor wafer during plasma etching or CVD in manufacturing a semiconductor integrated circuit is decreased by second plasma generating electrode 28 disposed around a lower electrode 15 in a plasma etching chamber 4a. High frequency voltage is applied to the second plasma generating electrode 18 just before the stop of plasma discharge to form a sub-plasma of high density along the outer periphery of the lower electrode 15, there is formed a sub-potential distribution acting to push out negatively charged dust particles stagnating near the main surface of a semiconductor substrate 7 toward the outer periphery of the wafer. The negatively charged dust particles thus pushed out from the vicinity of the main surface of the wafer 7 are moved to the second plasma generating electrode 28 and exhausted by a vacuum pump through an exhaust port 25.

    摘要翻译： 在制造半导体集成电路的等离子体蚀刻或CVD期间沉积在半导体晶片上的尘埃颗粒的量由在等离子体蚀刻室4a中的下部电极15周围设置的第二等离子体产生电极28而降低。 在等离子体放电停止之前将高频电压施加到第二等离子体产生电极18，以形成沿着下电极15的外周的高密度的亚等离子体，形成用于推出的次电位分布 滞留在半导体衬底7的主表面附近的带负电的灰尘颗粒朝向晶片的外周。 从晶片7的主表面附近推出的带负电的灰尘颗粒被移动到第二等离子体产生电极28，并通过排气口25由真空泵排出。

    Removing damage caused by plasma etching and high energy implantation using hydrogen
    3.
    发明授权
    Removing damage caused by plasma etching and high energy implantation using hydrogen 失效
    消除等离子体蚀刻造成的损伤和使用氢的高能量注入

    公开(公告)号：US5543336A

    公开(公告)日：1996-08-06

    申请号：US348108

    申请日：1994-11-25

    申请人： Hiromichi Enami ,  Kiyomi Katsuyama ,  Masanori Katsuyama

    发明人： Hiromichi Enami ,  Kiyomi Katsuyama ,  Masanori Katsuyama

    IPC分类号： H01L21/302 ,  H01L21/00 ,  H01L21/265 ,  H01L21/30 ,  H01L21/3065 ,  H01L21/324 ,  H01L21/266

    CPC分类号： H01L21/67167 ,  H01L21/3003 ,  H01L21/67069 ,  H01L21/67213

    摘要： A chamber 103 for introducing hydrogen without causing serious damage to a semiconductor wafer and a chamber 104 for eliminating the hydrogen introduced into the semiconductor wafer at relatively low temperature are installed at the succeeding stage of a plasma etching unit for effectively correcting the damage caused by plasma etching and ion implantation to a semiconductor substrate or an ion implanting unit. In order to introduce hydrogen into the semiconductor wafer without serious damage, a mixture of hydrocarbon gas and oxygen gas for accelerating the decomposition of the hydrocarbon gas is used for forming hydrogen radicals in a plasma and the hydrogen radicals are supplied to the semiconductor wafer at room temperature by a downstream system. The semiconductor wafer is heat-treated in an atmosphere of a vacuum or inactive gas in a temperature region of 200.degree.-500.degree. C. to eliminate the hydrogen introduced into the semiconductor wafer.

    摘要翻译： 在等离子体蚀刻单元的后续阶段安装有用于引入氢而不对半导体晶片造成严重损坏的室103和用于消除在较低温度下引入到半导体晶片中的氢的室104，用于有效地校正由等离子体 蚀刻和离子注入到半导体衬底或离子注入单元。 为了在没有严重损坏的情况下将氢气引入半导体晶片中，使用用于加速烃气体分解的烃气体和氧气的混合物在等离子体中形成氢自由基，并且在室内将氢自由基供应到半导体晶片 温度由下游系统。 半导体晶片在真空或惰性气体气氛中在200-500℃的温度范围内进行热处理，以消除引入到半导体晶片中的氢。

    DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF
    4.
    发明申请
    DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF 有权
    显示装置及其制造方法

    公开(公告)号：US20110187960A1

    公开(公告)日：2011-08-04

    申请号：US13020132

    申请日：2011-02-03

    申请人： Setsuo KOBAYASHI ,  Akira Ishii ,  Masanori Katsuyama ,  Shinji Tanabe ,  Kiyoshi Sento

    发明人： Setsuo KOBAYASHI ,  Akira Ishii ,  Masanori Katsuyama ,  Shinji Tanabe ,  Kiyoshi Sento

    IPC分类号： G02F1/1333 ,  H01J9/20

    CPC分类号： G02F1/1333 ,  H01J9/20

    摘要： Disclosed is a display device in which reliable bonding strength and high reparability are compatible when a panel-like member is bonded to a display panel.The display device comprises: a display panel; and a panel-like member bonded to the display panel with an adhesive made of an ultraviolet curable resin; wherein the adhesive includes a first adhesive portion and a second adhesive portion, the first adhesive portion being provided outside of a display area of the display panel and formed in a circular shape to surround the display area, the second adhesive portion prevailing in an area surrounded by the first adhesive portion, the first adhesive portion being different in a modulus of elasticity from the second adhesive portion, and wherein the modulus of elasticity of the second adhesive portion is smaller than the modulus of elasticity of the first adhesive portion.

    摘要翻译： 公开了一种显示装置，其中当面板状构件接合到显示面板时，其可靠的接合强度和高可修复性是兼容的。 显示装置包括：显示面板; 以及由紫外线固化树脂制成的粘合剂粘合到显示面板上的面板状构件; 其中所述粘合剂包括第一粘合剂部分和第二粘合剂部分，所述第一粘合剂部分设置在所述显示面板的显示区域的外部并且形成为围绕所述显示区域的圆形形状，所述第二粘合剂部分在包围的区域中占优势 通过第一粘合部分，第一粘合剂部分的弹性模量与第二粘合部分不同，并且其中第二粘合剂部分的弹性模量小于第一粘合剂部分的弹性模量。

    DISPLAY DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
    6.
    发明申请
    DISPLAY DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    显示装置和液晶显示装置及其制造方法

    公开(公告)号：US20110205472A1

    公开(公告)日：2011-08-25

    申请号：US13029207

    申请日：2011-02-17

    申请人： Setsuo KOBAYASHI ,  Akira Ishii ,  Masanori Katsuyama ,  Shinji Tanabe ,  Kiyoshi Sento ,  Takeharu Furusawa

    发明人： Setsuo KOBAYASHI ,  Akira Ishii ,  Masanori Katsuyama ,  Shinji Tanabe ,  Kiyoshi Sento ,  Takeharu Furusawa

    IPC分类号： G02F1/1335 ,  B32B37/12

    CPC分类号： B32B37/1284 ,  B32B17/06 ,  B32B2037/1253 ,  B32B2307/412 ,  B32B2307/546 ,  B32B2310/0831 ,  B32B2315/08 ,  B32B2457/202 ,  G02F1/133308 ,  G02F2001/133331 ,  G02F2202/28

    摘要： A liquid crystal display panel including liquid crystal sandwiched between a pair of substrates is prepared. A light-transmitting reinforcing plate is prepared. A photocuring resin is provided between the liquid crystal display panel and the reinforcing plate. Light is irradiated to a side surface of a laminated body constituted of the liquid crystal display panel, the reinforcing plate and the photocuring resin. The photocuring resin is arranged to face the liquid crystal in an opposed manner. The light is allowed to advance to the inside of the photocuring resin from an edge portion of the photocuring resin. The light is allowed to advance to the inside of the reinforcing plate from an edge portion of the reinforcing plate, is propagated in the inside of the reinforcing plate, and is irradiated to the photocuring resin from the reinforcing plate at a position away from the edge portion of the reinforcing plate.

    摘要翻译： 准备包含夹在一对基板之间的液晶的液晶显示面板。 制备透光加强板。 在液晶显示面板和加强板之间设置光固化树脂。 照射到由液晶显示面板，加强板和光固化树脂构成的层叠体的侧面。 光固化树脂以相对的方式布置成面对液晶。 允许光从光固化树脂的边缘部分前进到光固化树脂的内部。 允许光从加强板的边缘部分前进到加强板的内侧，在加强板的内部传播，并且在远离边缘的位置处从加强板照射到光固化树脂 加强板的一部分。

    Display device and manufacturing method thereof
    7.
    发明授权
    Display device and manufacturing method thereof 有权
    显示装置及其制造方法

    公开(公告)号：US08610837B2

    公开(公告)日：2013-12-17

    申请号：US13020132

    申请日：2011-02-03

    申请人： Setsuo Kobayashi ,  Akira Ishii ,  Masanori Katsuyama ,  Shinji Tanabe ,  Kiyoshi Sento

    发明人： Setsuo Kobayashi ,  Akira Ishii ,  Masanori Katsuyama ,  Shinji Tanabe ,  Kiyoshi Sento

    IPC分类号： G02F1/1335 ,  G02F1/1333 ,  G02F1/1339

    CPC分类号： G02F1/1333 ,  H01J9/20

    摘要： Disclosed is a display device in which reliable bonding strength and high reparability are compatible when a panel-like member is bonded to a display panel.The display device comprises: a display panel; and a panel-like member bonded to the display panel with an adhesive made of an ultraviolet curable resin; wherein the adhesive includes a first adhesive portion and a second adhesive portion, the first adhesive portion being provided outside of a display area of the display panel and formed in a circular shape to surround the display area, the second adhesive portion prevailing in an area surrounded by the first adhesive portion, the first adhesive portion being different in a modulus of elasticity from the second adhesive portion, and wherein the modulus of elasticity of the second adhesive portion is smaller than the modulus of elasticity of the first adhesive portion.

    摘要翻译： 公开了一种显示装置，其中当面板状构件接合到显示面板时，其可靠的接合强度和高可修复性是兼容的。 显示装置包括：显示面板; 以及由紫外线固化树脂制成的粘合剂粘合到显示面板上的面板状构件; 其中所述粘合剂包括第一粘合剂部分和第二粘合剂部分，所述第一粘合剂部分设置在所述显示面板的显示区域的外部并且形成为围绕所述显示区域的圆形形状，所述第二粘合剂部分在包围的区域中占优势 通过第一粘合部分，第一粘合剂部分的弹性模量与第二粘合部分不同，并且其中第二粘合剂部分的弹性模量小于第一粘合剂部分的弹性模量。