公开(公告)号：US4956789A

公开(公告)日：1990-09-11

申请号：US192135

申请日：1988-05-10

申请人： Yoosuke Hamada ,  Hiromu Hirai ,  Isao Kobayashi

发明人： Yoosuke Hamada ,  Hiromu Hirai ,  Isao Kobayashi

IPC分类号： G05B19/19

CPC分类号： G05B19/19 ,  G05B2219/37275 ,  G05B2219/37351 ,  G05B2219/41117 ,  G05B2219/41218 ,  G05B2219/41367 ,  G05B2219/41374 ,  G05B2219/42162 ,  G05B2219/45026

摘要： When a move command (data indicating to move a movable unit from one position to a target position) is issued, a movable unit is displaced in response to the move command. A target trajectory which is an aggregation of target positions varying with time is determined such that a residual vibration of a structure at and after the stop of displacement of the movable unit is minimized. Target positions at various times during the displacement of the movable unit are generated based on the target trajectory. The target positions at various times are supplied to a control unit which feeds back an actual position of the movable unit and produces a drive signal which makes a difference from the target position zero. The drive signal is supplied to an actuator so that a drive force is transmitted from the actuator to the movable unit which follows a change in the target position. As a result, the movable unit is moved to the target position and the vibration at and after the stop of movement is suppressed.

摘要翻译： 当发出移动指令（指示将可移动单元从一个位置移动到目标位置的数据）时，可移动单元响应于移动命令而移位。 确定作为时间变化的目标位置的聚集的目标轨迹，使得可移动单元的位移停止和停止之后的结构的残余振动最小化。 基于目标轨迹产生在移动单元的位移期间的不同时刻的目标位置。 不同时刻的目标位置被提供给控制单元，该控制单元反馈可移动单元的实际位置并产生与目标位置零差异的驱动信号。 驱动信号被提供给致动器，使得驱动力从致动器传递到跟随目标位置的改变的可移动单元。 结果，可移动单元移动到目标位置，并且抑制了停止移动时和之后的振动。

公开(公告)号：US5229896A

公开(公告)日：1993-07-20

申请号：US780783

申请日：1991-10-23

申请人： Souichi Tohyama ,  Hiromu Hirai ,  Haruaki Otsuki ,  Yoosuke Hamada

发明人： Souichi Tohyama ,  Hiromu Hirai ,  Haruaki Otsuki ,  Yoosuke Hamada

IPC分类号： G05B17/02 ,  G05D3/12 ,  G11B21/08 ,  G11B21/10

CPC分类号： G11B21/083

摘要： A disk drive has a data recording medium disk, a head disposed facing a recording surface of the disk, for reading and writing data, a positioning mechanism for supporting and moving the head, a position detector for detecting the position of the head and outputting a position detection signal, and a control unit for processing the position detection signal and outputting a position control signal to the positioning mechanism. The control unit calculates a target acceleration signal for a given target track so as to make a turnaround frequency of a frequency component of the target acceleration signal coincident with a resonance frequency of the head positioning mechanism, calculates a target position for a head positioning operation in accordance with the target acceleration signal, calculates a position command value by inputting the target position signal to a model (inverse model) of an approximate inverse system to a position control system which includes the head positioning mechanism and the position detector, and outputs a position tracking error to the positioning mechanism, the position tracking error being the difference between the position command value and the position detection signal of the head.

摘要翻译： 磁盘驱动器具有数据记录介质盘，朝向盘的记录表面设置的用于读取和写入数据的头，用于支撑和移动头部的定位机构，用于检测头部的位置并输出 位置检测信号，以及用于处理位置检测信号并向定位机构输出位置控制信号的控制单元。 控制单元计算用于给定目标轨道的目标加速度信号，以使目标加速度信号的频率分量的周转频率与头部定位机构的共振频率一致，计算头部定位操作的目标位置 根据目标加速度信号，通过将目标位置信号输入到包括头部定位机构和位置检测器的位置控制系统的近似逆系统的模型（逆模型）来计算位置指令值，并且输出位置 定位机构的跟踪误差，位置跟踪误差是位置指令值与头部位置检测信号之间的差值。

公开(公告)号：US4997177A

公开(公告)日：1991-03-05

申请号：US260772

申请日：1988-10-21

申请人： Kenji Mori ,  Hiromu Hirai ,  Isao Kobayashi ,  Tomoko Kumagae ,  Muneo Kawamoto

发明人： Kenji Mori ,  Hiromu Hirai ,  Isao Kobayashi ,  Tomoko Kumagae ,  Muneo Kawamoto

IPC分类号： B65G27/00 ,  B65G27/24 ,  H01L41/04 ,  H01L41/09

CPC分类号： H02N2/002 ,  B65G27/00 ,  B65G27/24 ,  H02N2/0025 ,  H02N2/026 ,  H02N2/065 ,  B65H2555/14

摘要： A vibrating-type driving unit employing a piezo-electric device is provided for conveying an object such as a sheet material. A follower roller is provided to be opposed to the vibrating-type driving unit, and A.C. power is supplied thereto so as to convey the object. In addition, a friction coefficient of surface of the follower roller is selected to be greater than friction coefficient of a driving head of the vibrating-type driving unit. With this selection, it is possible to convey the object efficiently and stably.

公开(公告)号：US5073912A

公开(公告)日：1991-12-17

申请号：US436036

申请日：1989-11-14

申请人： Isao Kobayashi ,  Yosuke Hamada ,  Kenji Mori ,  Hiromu Hirai

发明人： Isao Kobayashi ,  Yosuke Hamada ,  Kenji Mori ,  Hiromu Hirai

IPC分类号： B23Q1/00 ,  B23Q1/34 ,  B23Q1/44 ,  B23Q1/48 ,  B23Q1/56 ,  B23Q5/22 ,  B23Q5/28 ,  B23Q5/34 ,  B23Q5/36 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q80/00 ,  G03F7/20 ,  G05D3/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68

CPC分类号： G03F7/70425 ,  B23Q1/34 ,  B23Q1/48 ,  G03F7/70716 ,  G03F7/70733 ,  H01L21/681 ,  Y10S414/136

摘要： A sample moving apparatus for positioning wafers with high accuracy, which apparatus comprises a fine adjustment actuator having a drive stroke to finely move the wafer, a fine adjustment stage driven by the fine adjustment actuator, a coarse adjustment actuator having a drive stroke to relatively coarsely move the wafer, a coarse adjustment stage driven by the coarse adjustment actuator, and a holder arrangement for attractively holding the wafer onto the wafer bearing surfaces of the respective stages. Upon selective energization of the holder arrangement of the respective stages, the wafer is moved while being attracted to the coarse adjustment stage or while being attracted to the coarse adjustment stage.

摘要翻译： 一种用于高精度定位晶片的样品移动装置，该装置包括具有驱动行程以精细移动晶片的精细调节致动器，由微调致动器驱动的微调台，具有驱动行程的粗调调节致动器 移动晶片，由粗调调节致动器驱动的粗调调节台和用于将晶片吸引地保持在各个级的晶片承载表面上的保持器装置。 在各级的保持器布置选择性通电时，晶片在被吸引到粗调阶段或同时被吸引到粗调阶段的同时移动。

公开(公告)号：US07768225B2

公开(公告)日：2010-08-03

申请号：US11049706

申请日：2005-02-04

申请人： Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai ,  Makoto Iwasaki ,  Motohiro Kawafuku ,  Noriaki Hirose

发明人： Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai ,  Makoto Iwasaki ,  Motohiro Kawafuku ,  Noriaki Hirose

IPC分类号： G06F19/00 ,  B23K26/04

CPC分类号： B23K26/10 ,  B23K26/382 ,  B23K2103/50

摘要： A difference between each position command data outputted in a form of a step signal from a high-level controller and its corresponding detected position data of a movable body is integrated by an integral compensator to position the movable body. Assuming, for example, that the movable body is a steerable mirror, digital filters are arranged to compensate the value of an initial state of an angular displacement and the value of an initial state of an angular velocity, respectively, and respective impulse responses of the digital filters as additional input elements are added to an output terminal of the integral compensator. For higher effectiveness, internal state variables of the digital filters can desirably be cleared to zero whenever an angle (position) command data is received.

摘要翻译： 通过积分补偿器将来自高级别控制器的步进信号输出的每个位置指令数据和可移动体的对应检测位置数据之间的差积分在一起，以定位移动体。 假设例如可移动体是可转向反射镜，数字滤波器被布置成分别补偿角位移的初始状态的值和角速度的初始状态的值以及相应的脉冲响应 作为附加输入元件的数字滤波器被添加到积分补偿器的输出端子。 为了更高的有效性，每当接收到角度（位置）命令数据时，数字滤波器的内部状态变量可期望地被清除为零。

公开(公告)号：US20110087340A1

公开(公告)日：2011-04-14

申请号：US12920385

申请日：2009-02-26

申请人： Noriaki Hirose ,  Hiromu Hirai ,  Kenta Seki

发明人： Noriaki Hirose ,  Hiromu Hirai ,  Kenta Seki

IPC分类号： G05B13/02

CPC分类号： G05B11/36 ,  G05B19/19 ,  G05B2219/43178

摘要： In a case where a position command path for a control position of a load 5 that is equivalent to a moving object is set by issuing a position command Rc(z), a gain for one of a high-frequency component, a specified frequency, and a specified frequency width is constrained. This means that a resonant frequency can be constrained, and that after the position command Rc(z) arrives at a target position, a position detection signal Y(z) can also arrive at the target position in a set number of steps. It is therefore possible to perform positioning at high speed and with high precision by constraining a resonance mode of a mechanism that includes the moving object, and a feed-forward control can be performed that meets target positioning times that are set for various types of operating patterns.

摘要翻译： 在通过发出位置指令Rc（z）来设定与运动物体相当的载荷5的控制位置的位置指令路径的情况下，将高频分量，规定频率， 并且限制了指定的频率宽度。 这意味着可以限制谐振频率，并且在位置指令Rc（z）到达目标位置之后，位置检测信号Y（z）也可以以设定的步数到达目标位置。 因此，可以通过约束包括移动体的机构的共振模式，以高速，高精度地进行定位，并且可以执行前馈控制，该前馈控制满足针对各种操作设定的目标定位时间 模式。

公开(公告)号：US5189578A

公开(公告)日：1993-02-23

申请号：US543425

申请日：1990-06-26

申请人： Kenji Mori ,  Hiromu Hirai ,  Haruaki Otsuki ,  Tsuyoshi Takahashi ,  Jun Naruse ,  Yuji Nishimura ,  Muneo Kawamoto

发明人： Kenji Mori ,  Hiromu Hirai ,  Haruaki Otsuki ,  Tsuyoshi Takahashi ,  Jun Naruse ,  Yuji Nishimura ,  Muneo Kawamoto

IPC分类号： G11B5/55 ,  G11B5/58 ,  G11B7/085 ,  G11B7/09 ,  G11B7/12 ,  G11B11/105 ,  G11B19/20 ,  G11B21/08 ,  G11B21/10

CPC分类号： G11B19/20 ,  G11B11/10552 ,  G11B11/10567 ,  G11B11/10576 ,  G11B11/1058 ,  G11B21/08 ,  G11B21/106 ,  G11B5/5552 ,  G11B5/5565 ,  G11B5/58 ,  G11B7/0857 ,  G11B7/0946 ,  G11B7/122 ,  G11B5/4873

摘要： A magnetic disk system utilizes both of voice coil motor and a piezoelectric element provided on a head supporting arm to precisely position a head to a predetermined position on a disk. The piezoelectric element is built in the distal end portion of the head supporting arm and is restricted in respect of its movement by a resilient mechanism which has low rigidity in the driving direction of the piezoelectric element and high rigidity in the other directions. The resilient mechanism is formed by pairs of doubled parallel leaf springs so arranged that each pair is disposed on either side of the piezoelectric element.

摘要翻译： 磁盘系统利用设置在头部支撑臂上的音圈电动机和压电元件来精确地将磁头定位在盘上的预定位置。 压电元件内置在头部支撑臂的远端部分中，并且通过弹性机构限制其运动，该弹性机构在压电元件的驱动方向上具有低刚度并且在其它方向上具有高刚度。 弹性机构由成对的双平行板簧形成，使得每一对布置在压电元件的任一侧上。

公开(公告)号：US5164931A

公开(公告)日：1992-11-17

申请号：US682262

申请日：1991-04-08

申请人： Takashi Yamaguchi ,  Souichi Tohyama ,  Hiromu Hirai

发明人： Takashi Yamaguchi ,  Souichi Tohyama ,  Hiromu Hirai

IPC分类号： G11B21/10 ,  G05B19/23 ,  G05D3/12 ,  G11B7/085 ,  G11B21/08

CPC分类号： G05B19/232 ,  G11B21/083 ,  G11B7/08517 ,  G05B2219/42104

摘要： Method and apparatus for control of positioning of a recording/playback head or other controlled object. When a controlled object reaches the vicinity of a target position, the control system is switched from operation as a velocity control system to operation as a position control system. By using state variables of the controlled object at that time, coefficients corresponding to the detected state variables are determined from characteristics of the controlled object which are determined in advance. By using the determined coefficient values, initial values upon start of position control of the position control system are set, and positioning control is then carried out.

摘要翻译： 用于控制记录/重放头或其它受控对象的定位的方法和装置。 当受控对象到达目标位置附近时，控制系统作为速度控制系统从作为位置控制系统的操作切换。 通过使用该时刻的受控对象的状态变量，根据预先确定的受控对象的特性来确定与检测到的状态变量对应的系数。 通过使用确定的系数值，设置位置控制系统的位置控制开始时的初始值，然后进行定位控制。

公开(公告)号：US4418305A

公开(公告)日：1983-11-29

申请号：US292802

申请日：1981-08-14

申请人： Haruaki Otsuki ,  Hiromu Hirai

发明人： Haruaki Otsuki ,  Hiromu Hirai

IPC分类号： G05D3/12 ,  G05B19/23 ,  G05B5/01

CPC分类号： G05B19/232 ,  G05B2219/37313

摘要： A velocity feedback circuit for a position servomechanism operative to control the position of a controlled object on the basis of the signal indicative of the difference between the position error and the velocity fed back to the input, wherein a velocity calculating circuit is provided to calculate the velocity to be fed back to the input of the position servomechanism on the basis of the relation between the time required for the controlled variable of the controlled object to make a predetermined change and the predetermined change of the controlled variable.

摘要翻译： 一种用于位置伺服机构的速度反馈电路，其基于指示位置误差和反馈到输入的速度之间的差异的信号来控制受控对象的位置，其中提供速度计算电路以计算 基于受控对象的受控变量进行预定变化所需的时间与受控变量的预定变化之间的关系，将速度反馈到位置伺服机构的输入。

公开(公告)号：US08872064B2

公开(公告)日：2014-10-28

申请号：US11707153

申请日：2007-02-16

申请人： Takashi Ono ,  Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai

发明人： Takashi Ono ,  Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai

IPC分类号： B23K26/00 ,  G05B13/02 ,  G05B11/18 ,  G05B19/23

CPC分类号： G05B19/231 ,  G05B2219/41029 ,  G05B2219/41127 ,  G05B2219/45139

摘要： A positioning control system for positioning a moving element on a basis of position command data is provided with a feedback loop. The system is also provided with a loop gain modifier for determining a loop gain, which is to be used in a following positioning operation, on a basis of a difference between an amount of overshoot measured in a current positioning operation and a predetermined tolerance or on a basis of a difference between an amount of overshoot measured in a current positioning operation and a first predetermined tolerance and a difference between an amount of undershoot measured in the current positioning operation and a second predetermined tolerance. The first and second tolerances may preferably be the same in absolute value. The moving element may specifically be a steerable mirror for drilling holes in a work by reflecting a laser beam. Also disclosed is a laser drilling machine including the system.

摘要翻译： 基于位置指令数据定位移动元件的定位控制系统具有反馈回路。 该系统还设置有环路增益修正器，用于基于在当前定位操作中测量的过冲量与预定公差之间的差异或者在预定公差上基于在随后的定位操作中使用的环路增益来确定环路增益， 在当前定位操作中测量的过冲量与第一预定公差之间的差异与在当前定位操作中测量的下冲量之差与第二预定公差之间的差的基础。 第一和第二公差可以优选地具有相同的绝对值。 移动元件可以具体地是用于通过反射激光束在工件中钻孔的可操纵镜。 还公开了一种包括该系统的激光钻孔机。