Metal line, method for fabricating the metal line, thin film transistor employing the metal line and display device
    3.
    发明授权
    Metal line, method for fabricating the metal line, thin film transistor employing the metal line and display device 有权
    金属线,制造金属线的方法,采用金属线的薄膜晶体管和显示装置

    公开(公告)号:US06770978B2

    公开(公告)日:2004-08-03

    申请号:US09795832

    申请日:2001-02-28

    IPC分类号: H01L2348

    摘要: There is provided is a metal line structure in which no defect of blistering occurs on a surface of a Cu/Ni film or a Cu/Au/Ni film even if an Ni plating thickness is reduced. According to this metal line 1, in a Cu/Au/Ni film structure in which an Au film 13 and a Cu film 15 are successively laminated by electroless plating on an Ni film 12 formed by electroless plating, the Ni film 12 has a phosphorus content x of 10 wt %≦x≦15 wt %. It was discovered through experiments that the so-called high phosphorus content type Ni film 12 having a phosphorus content x of 10 to 15 percent by weight became a fine smooth film under a condition of a film thickness of 0.1 &mgr;m or greater.

    摘要翻译: 提供了即使Ni镀层厚度减小也不会在Cu / Ni膜或Cu / Au / Ni膜的表面上发生起泡缺陷的金属线结构。 根据该金属线1,在通过无电解电镀连续层叠Au膜13和Cu膜15的Cu / Au / Ni膜结构中,Ni膜12具有磷 含量x为10重量%<= x <= 15重量%。 通过实验发现,在膜厚为0.1μm以上的条件下,磷含量x为10〜15重量%的所谓高磷含量型Ni膜12成为微细的平滑膜。

    HEAT SHIELD PLATE FOR SUBSTRATE ANNEALING APPARATUS
    4.
    发明申请
    HEAT SHIELD PLATE FOR SUBSTRATE ANNEALING APPARATUS 有权
    基板退火装置用热屏板

    公开(公告)号:US20090029308A1

    公开(公告)日:2009-01-29

    申请号:US12280811

    申请日:2007-03-15

    IPC分类号: F27D23/00

    CPC分类号: H01L21/324 H01L21/67103

    摘要: A heat shield plate for a substrate annealing apparatus is provided with a horizontally supported flat-plate-like substrate 1, a heater 5 positioned above the substrate to heat the upper surface of the substrate with radiation heat, and a heat shield plate 10 horizontally movable between a shielding position where the substrate is shielded from heater and an open position out of the shielding position. The heat shield plate 10 is composed of a structural member 12 made of a low thermal expansion material (carbon composite material) which is hardly deformed due to a temperature difference in the shielding position, and a heat insulating member 14 which covers the upper surface of the structural member and keeps the surface at an allowable temperature or below.

    摘要翻译: 用于基板退火装置的隔热板设置有水平支撑的平板状基板1,位于基板上方的加热器5,以用辐射热加热基板的上表面,并且隔热板10水平移动 在基板被屏蔽的屏蔽位置和屏蔽位置之间的打开位置之间。 隔热板10由由遮蔽位置的温度差异而几何变形的低热膨胀性材料(碳复合材料)构成的结构体12,覆盖上述表面的绝热构件14 结构件并将表面保持在允许的温度或更低的温度。

    Exhaust gas purification apparatus for engine
    6.
    发明申请
    Exhaust gas purification apparatus for engine 有权
    发动机废气净化装置

    公开(公告)号:US20050011182A1

    公开(公告)日:2005-01-20

    申请号:US10650917

    申请日:2003-08-29

    摘要: The invention provides an exhaust gas purification apparatus which can efficiently purify HC in exhaust gas of an engine upon cold starting of the engine. The exhaust gas purification apparatus for an engine comprises a catalytic converter provided in an exhaust path of the engine and including a carrier, an HC absorbent, an HC purifying catalyst, and a transition metal, and a control apparatus for controlling operation of the engine, the control apparatus including an HC desorption timing estimation section for estimating a timing at which the HC is desorbed from the HC absorbent and a control section for controlling an air fuel ratio upon starting of the engine to a ratio richer than a stoichiometric air fuel ratio to start operation of the engine and changing over the air fuel ratio to a ratio leaner than the stoichiometric air fuel ratio at the timing at which the HC is desorbed based on an output of the HC desorption timing estimation section.

    摘要翻译: 本发明提供了一种排气净化装置,其可以在发动机冷起动时有效地净化发动机的排气中的HC。 用于发动机的排气净化装置包括设置在发动机的排气路径中并包括载体,HC吸收剂,HC净化催化剂和过渡金属的催化转化器,以及用于控制发动机的运转的控制装置, 所述控制装置包括HC解吸定时估计部,用于估计HC从HC吸收剂解吸的时刻;以及控制部,用于控制发动机起动时的空燃比至比理论空燃比高的比 基于HC解吸定时估计部的输出,在HC解吸的时刻,将发动机的起动运转和空燃比变化为比理论空燃比简化的比例。

    Exhaust gas purification apparatus for engine
    8.
    发明授权
    Exhaust gas purification apparatus for engine 有权
    发动机废气净化装置

    公开(公告)号:US07059122B2

    公开(公告)日:2006-06-13

    申请号:US10650917

    申请日:2003-08-29

    IPC分类号: F01N3/00

    摘要: The exhaust gas purification apparatus for an engine comprises, a catalytic converter provided in an exhaust path of the engine and including a carrier, an HC absorbent, an HC purifying catalyst, and a transition metal, and a control apparatus for controlling operation of the engine, the control apparatus including an HC desorption timing estimation section for estimating a timing at which the HC is desorbed from the HC absorbent and a control section for controlling an air fuel ratio upon starting of the engine to a ratio richer than a stoichiometric air fuel ratio to start operation of the engine and changing over the air fuel ratio to a ratio leaner than the stoichiometric air fuel ratio at the timing at which the HC is desorbed based on an output of the HC desorption timing estimation section.

    摘要翻译: 用于发动机的排气净化装置包括:设置在发动机的排气路径中并包括载体,HC吸收剂,HC净化催化剂和过渡金属的催化转化器,以及用于控制发动机的运转的控制装置 ,所述控制装置包括HC解吸定时估计部,用于估计HC从HC吸收剂中解吸的时刻;以及控制部,用于控制发动机起动时的空燃比至比理论空燃比 基于HC解吸定时估计部的输出,开始发动机的运转并将空燃比变更为比HC理论解吸时刻的理论空燃比。

    Heat shield plate for substrate annealing apparatus
    9.
    发明授权
    Heat shield plate for substrate annealing apparatus 有权
    基板退火装置用隔热板

    公开(公告)号:US08118591B2

    公开(公告)日:2012-02-21

    申请号:US12280811

    申请日:2007-03-15

    IPC分类号: F27D5/00

    CPC分类号: H01L21/324 H01L21/67103

    摘要: A heat shield plate for a substrate annealing apparatus is provided with a horizontally supported flat-plate-like substrate 1, a heater 5 positioned above the substrate to heat the upper surface of the substrate with radiation heat, and a heat shield plate 10 horizontally movable between a shielding position where the substrate is shielded from heater and an open position out of the shielding position. The heat shield plate 10 is composed of a structural member 12 made of a low thermal expansion material (carbon composite material) which is hardly deformed due to a temperature difference in the shielding position, and a heat insulating member 14 which covers the upper surface of the structural member and keeps the surface at an allowable temperature or below.

    摘要翻译: 用于基板退火装置的隔热板设置有水平支撑的平板状基板1,位于基板上方的加热器5,以用辐射热加热基板的上表面,并且隔热板10水平移动 在基板被屏蔽的屏蔽位置和屏蔽位置之间的打开位置之间。 隔热板10由由遮蔽位置的温度差异而几何变形的低热膨胀性材料(碳复合材料)构成的结构体12,覆盖上述表面的绝热构件14 结构件并将表面保持在允许的温度或更低的温度。