摘要:
A method of selectively depositing tungsten upon a silicon semiconductor substrate. A silicon substrate is coated with a masking film of PSG or SiO.sub.2 that is patterned to provide an opening for forming an electrode or wiring. On a portion of the substrate in the opening, a layer of tungsten having a thickness of approximately 2000 .ANG. is deposited by a CVD method from an atomosphere containing a gaseous mixture of WF.sub.6 and H.sub.2 . During this processing, tungsten nucleuses deposit on the surface of the masking film as well. Before such nucleuses form a film, the deposition processing is discontinued and H.sub.2 gas is fed into the CVD apparatus to produce HF, which etches the surface of the masking film, and thus tungsten nucleuses are removed. The deposition and removal steps are repeated several times until the height of the deposited tungsten and the thickness of the masking film are essentially equal to present a flat surface. Aluminum film is deposited on the flat surface and patterned by lithography. The flat aluminum deposition allows fabrication of accurate and reliable wirings and facilitates production of VLSI of sub-micron order.
摘要:
A method of producing a semiconductor device comprising the steps of: forming a window or contact hole in an insulating layer to expose a portion of a semiconductor substrate or a lower conductor line; forming semiconductor material (silicon) in the window; substituting the material with a metal (tungsten) by reaction of the semiconductor material with a metal compound (WF.sub.6 gas); and forming a conductor line over the metal within the window.
摘要:
The invention is aimed to provide a core-sheath type composite filament, in which a functional component is hardly lost due to volatilization during the melt forming; bleeding of the internally added functional component is effectively inhibited; the internally added functional component does not adversely affect spinning properties, stretching properties, strength and dimensional stability; the use of the functional component can be greatly reduced, leading to a reduction of production cost; superior functionalities of deodorizing properties and antimicrobial properties can be exhibited to a maximum extent; even when contacting with water, the functionalities can be kept over a long time; and the composite filament is highly safe to a human body. The invention is also aimed to provide a process for the production of the core-sheath type composite filament as well as a heat fused article obtained from the composite filament. The core-sheath type composite filament of the invention is composed of a core component X and a sheath component Y, wherein the core component X is formed from a first polyolefin resin (H), and the sheath component Y is formed from a second polyolefin resin (L) compounded with at least one functional component (A) selected from the group consisting of a catechin, a saponin, a tea-leaf powder, a tea-leaf extract, and tannin (tannic acid), and a ceramics component (C).
摘要:
A joining type composite molding is disclosed, containing an internal component X and an external component Y, wherein the internal component X is formed from a first resin (H); the external component Y is formed from a second resin (L) compounded with at least one functional component (A) selected from the group consisting of a catechin, a saponin, a tea-leaf powder, a tea-leaf extract and tannin (tannic acid), and a ceramics component (C); and the first resin (H) and the second resin (L) are resins falling into different categories respectively, or a resin of the same category of a non-polyolefinic resin.
摘要:
This invention provides a compound having both IL-4 production inhibitory activity and PDE (IV) inhibitory activity, represented by formula (I): and a pharmaceutical composition or a therapeutic agent for acute and chronic inflammatory diseases and an anti-allergic or anti-inflammatory agent, each of which comprising an effective amount of the compound and a pharmacological carrier. It also provides use of the compound of formula (I) for the production of the aforementioned pharmaceutical composition or therapeutic agent for acute and chronic inflammatory diseases and anti-allergic or anti-inflammatory agent, and a method for treating acute and chronic inflammatory diseases.
摘要:
A flow rate/liquid type detecting method for detecting the flow rate of a fluid and, at the same time, detecting any one of or both the type of the fluid and the concentration of the fluid, characterized in that: by using a flow rate/liquid type detecting apparatus comprising a main passage through which a fluid to be detected flows, an auxiliary passage branched from the main passage, and a flow rate/liquid type detecting sensor device provided in the auxiliary passage, is provided, and in conducting any one of or both the detection of the type of the fluid to be detected and the detection of the concentration of the fluid to be detected, an auxiliary passage opening/closing valve is closed, and the fluid to be detected is allowed to temporarily stay within the flow rate/liquid type detecting sensor device to conduct any one of or both the detection of the liquid type and the detection of the concentration, and in detecting the flow rate of the fluid to be detected, the auxiliary passage opening/closing valve is opened to allow the fluid to be detected to flow into the flow rate/liquid type detecting sensor device to detect the flow rate.
摘要:
A functional form according to the present invention is disclosed, containing a melt form of a forming resin (Y) compounded with a functional component (a) having antimicrobial properties or deodorizing properties, selected from the group consisting of a catechin, a saponin, a tea-leaf powder, a tea-leaf extract, and tannin (tannic acid), and a ceramics component (b). A process for the production of a functional form is also disclosed, including melt forming a forming resin (Y) compounded with a functional component (a) having antimicrobial properties or deodorizing properties, selected from the group consisting of a catechin, a saponin, a tea-leaf powder, a tea-leaf extract, and tannin (tannic acid), and a ceramics component (b). According to the present invention, the elution of functional components (such as catechins and saponins) can be controlled even after water washing and their functionalities can be maintained (such as antimicrobial properties or deodorizing properties) over a long period of time.
摘要:
A method for forming alkyl silicate easily at low costs. The method comprises a reaction step of mixing and reacting an aqueous solution of sodium silicate, and a solution of alcohol or alkyl halide in a water-insoluble organic solvent, in the presence of a catalyst; and an isolating step of separating an organic layer from the reactive mixed solution and isolating a reaction product from the organic layer.
摘要:
A flow rate/liquid type detecting method for detecting the flow rate of a fluid and, at the same time, detecting any one of or both the type of the fluid and the concentration of the fluid, characterized in that, by using a flow rate/liquid type detecting apparatus comprising: a main passage through which a fluid to be detected flows, an auxiliary passage branched from the main passage, and a flow rate/liquid type detecting sensor device provided in the auxiliary passage, is provided, and in conducting any one of or both the detection of the type of the fluid and the detection of the concentration of the fluid, the auxiliary passage opening/closing valve is closed, and the fluid is allowed to temporarily stay within the flow rate/liquid type detecting sensor device to conduct any one of or both the detection of the liquid type and the detection of the concentration, and in detecting the flow rate of the fluid detected, the auxiliary passage opening/closing valve is opened to allow the fluid to flow into the flow rate/liquid type detecting sensor device to detect the flow rate.
摘要:
A flow rate/liquid type detecting method for detecting the flow rate of a fluid and, at the same time, detecting any one of or both the type of the fluid and the concentration of the fluid, characterized in that, by using a flow rate/liquid type detecting apparatus comprising: a main passage through which a fluid to be detected flows, an auxiliary passage branched from the main passage, and a flow rate/liquid type detecting sensor device provided in the auxiliary passage, is provided, and in conducting any one of or both the detection of the type of the fluid and the detection of the concentration of the fluid, the auxiliary passage opening/closing valve is closed, and the fluid is allowed to temporarily stay within the flow rate/liquid type detecting sensor device to conduct any one of or both the detection of the liquid type and the detection of the concentration, and in detecting the flow rate of the fluid detected, the auxiliary passage opening/closing valve is opened to allow the fluid to flow into the flow rate/liquid type detecting sensor device to detect the flow rate.