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    COATING APPARATUS AND METHOD FOR REAL-TIMELY MONITORING THICKNESS CHANGE OF COATING FILM
    1.
    发明申请
    COATING APPARATUS AND METHOD FOR REAL-TIMELY MONITORING THICKNESS CHANGE OF COATING FILM 审中-公开
    涂层装置和方法，用于实时监测涂膜厚度的变化

    公开(公告)号：US20120279447A1

    公开(公告)日：2012-11-08

    申请号：US13552933

    申请日：2012-07-19

    申请人： Yu-Chia TSAO ,  Chung-Pei Lee ,  Ko-Shao Chen ,  Jia-Huey Tsao ,  Chun-Chih Lin ,  Ren-Kun Liang

    发明人： Yu-Chia TSAO ,  Chung-Pei Lee ,  Ko-Shao Chen ,  Jia-Huey Tsao ,  Chun-Chih Lin ,  Ren-Kun Liang

    IPC分类号： B05C11/00

    CPC分类号： C23C16/44 ,  G01N21/553

    摘要： A method for real-timely monitoring thickness change of a coating film is disclosed. In the method, a coating module having a chamber and a film thickness-monitoring module containing an SPR optical fiber sensor, a light source, a light-receiving detector, and optical fibers are first provided. The optical fibers are used to connect the SPR optical fiber sensor with the light source and the light-receiving detector. The SPR optical fiber sensor has a sensing area and is arranged in the chamber. The light source provides the SPR optical fiber sensor with light. Then, a substrate is put into the chamber. While coating process is performed on the substrate, a film is also formed on the sensing area of the SPR optical fiber sensor. The light-receiving detector receives signals output from the sensing area of the SPR optical fiber sensor and then outputs signals of light-intensity change.

    摘要翻译： 公开了一种用于实时监测涂膜厚度变化的方法。 在该方法中，首先提供具有室的涂布模块和包含SPR光纤传感器，光源，光接收检测器和光纤的膜厚监视模块。 光纤用于将SPR光纤传感器与光源和光接收检测器连接。 SPR光纤传感器具有感测区域，并且布置在腔室中。 光源为SPR光纤传感器提供光源。 然后，将基板放入室中。 虽然在基板上进行涂布处理，但是也在SPR光纤传感器的感测区域上形成膜。 光接收检测器接收从SPR光纤传感器的感测区域输出的信号，然后输出光强变化的信号。

    Method for real-time monitoring thickness chance of coating film
    2.
    发明授权
    Method for real-time monitoring thickness chance of coating film 有权
    实时监测涂膜厚度变化的方法

    公开(公告)号：US08377503B2

    公开(公告)日：2013-02-19

    申请号：US12662546

    申请日：2010-04-22

    申请人： Yu-Chia Tsao ,  Chung-Pei Lee ,  Ko-Shao Chen ,  Jia-Huey Tsao ,  Chun-Chih Lin ,  Ren-Kun Liang

    发明人： Yu-Chia Tsao ,  Chung-Pei Lee ,  Ko-Shao Chen ,  Jia-Huey Tsao ,  Chun-Chih Lin ,  Ren-Kun Liang

    IPC分类号： C23C14/54

    CPC分类号： C23C16/44 ,  G01N21/553

    摘要： A method for real-timely monitoring thickness change of a coating film is disclosed. In the method, a coating module having a chamber and a film thickness-monitoring module containing an SPR optical fiber sensor, a light source, a light-receiving detector, and optical fibers are first provided. The optical fibers are used to connect the SPR optical fiber sensor with the light source and the light-receiving detector. The SPR optical fiber sensor has a sensing area and is arranged in the chamber. The light source provides the SPR optical fiber sensor with light. Then, a substrate is put into the chamber. While coating process is performed on the substrate, a film is also formed on the sensing area of the SPR optical fiber sensor. The light-receiving detector receives signals output from the sensing area of the SPR optical fiber sensor and then outputs signals of light-intensity change.

    摘要翻译： 公开了一种用于实时监测涂膜厚度变化的方法。 在该方法中，首先提供具有室的涂布模块和包含SPR光纤传感器，光源，光接收检测器和光纤的膜厚监测模块。 光纤用于将SPR光纤传感器与光源和光接收检测器连接。 SPR光纤传感器具有感测区域，并且布置在腔室中。 光源为SPR光纤传感器提供光源。 然后，将基板放入室中。 虽然在基板上进行涂布处理，但是也在SPR光纤传感器的感测区域上形成膜。 光接收检测器接收从SPR光纤传感器的感测区域输出的信号，然后输出光强变化的信号。

    Coating apparatus and method for real-timely monitoring thickness change of coating film
    3.
    发明申请
    Coating apparatus and method for real-timely monitoring thickness change of coating film 有权
    涂膜设备及实时监测涂膜厚度变化的方法

    公开(公告)号：US20110151107A1

    公开(公告)日：2011-06-23

    申请号：US12662546

    申请日：2010-04-22

    申请人： Yu-Chia Tsao ,  Chung-Pei Lee ,  Ko-Shao Chen ,  Jia-Huey Tsao ,  Chun-Chih Lin ,  Ren-Kun Liang

    发明人： Yu-Chia Tsao ,  Chung-Pei Lee ,  Ko-Shao Chen ,  Jia-Huey Tsao ,  Chun-Chih Lin ,  Ren-Kun Liang

    IPC分类号： C23C16/44 ,  C23C16/00

    CPC分类号： C23C16/44 ,  G01N21/553

    摘要： A method for real-timely monitoring thickness change of a coating film is disclosed. In the method, a coating module having a chamber and a film thickness-monitoring module containing an SPR optical fiber sensor, a light source, a light-receiving detector, and optical fibers are first provided. The optical fibers are used to connect the SPR optical fiber sensor with the light source and the light-receiving detector. The SPR optical fiber sensor has a sensing area and is arranged in the chamber. The light source provides the SPR optical fiber sensor with light. Then, a substrate is put into the chamber. While coating process is performed on the substrate, a film is also formed on the sensing area of the SPR optical fiber sensor. The light-receiving detector receives signals output from the sensing area of the SPR optical fiber sensor and then outputs signals of light-intensity change.

    摘要翻译： 公开了一种用于实时监测涂膜厚度变化的方法。 在该方法中，首先提供具有室的涂布模块和包含SPR光纤传感器，光源，光接收检测器和光纤的膜厚监视模块。 光纤用于将SPR光纤传感器与光源和光接收检测器连接。 SPR光纤传感器具有感测区域，并且布置在腔室中。 光源为SPR光纤传感器提供光源。 然后，将基板放入室中。 虽然在基板上进行涂布处理，但是也在SPR光纤传感器的感测区域上形成膜。 光接收检测器接收从SPR光纤传感器的感测区域输出的信号，然后输出光强变化的信号。

    Polyallylamine conjugates and applications thereof for biological signal amplification
    8.
    发明申请
    Polyallylamine conjugates and applications thereof for biological signal amplification 有权
    聚烯丙胺共轭物及其在生物信号扩增中的应用

    公开(公告)号：US20050106649A1

    公开(公告)日：2005-05-19

    申请号：US10964713

    申请日：2004-10-15

    申请人： Chao-Yun Tsao ,  Li-Te Yin ,  Su-Fung Chiou ,  Chung-We Pan ,  Jia-Huey Tsao

    发明人： Chao-Yun Tsao ,  Li-Te Yin ,  Su-Fung Chiou ,  Chung-We Pan ,  Jia-Huey Tsao

    IPC分类号： C12N9/00 ,  C12Q1/37 ,  C12Q1/66 ,  G01N33/50 ,  G01N33/53

    CPC分类号： G01N33/5306

    摘要： Polyallylamine conjugates and applications thereof for biological signal amplification are provided by utilizing the essential amino group of polyallylamine to covalently bind with capture agents and signal molecules having the functional groups selected from a group consisting of —NHS, —CO, —S═O2 and —C═O—C═O. The resulting conjugates having more than one signaling entities can be further implemented for biological expression with enhancing effect on biological signal intensity, such that the sensitivity of detection for the variation between biological interactions is largely increased.

    摘要翻译： 通过利用聚烯丙胺的必需氨基与捕获剂和具有选自-NHS，-CO，-SO 2的官能团的信号分子共价结合的聚烯丙基胺共轭物及其应用来提供生物信号扩增 和-COCO。 具有多于一个信号实体的所得缀合物可以进一步实现用于生物表达，对生物信号强度具有增强的作用，使得检测对生物相互作用之间变化的敏感性大大增加。