公开(公告)号：US07864331B2

公开(公告)日：2011-01-04

申请号：US11941481

申请日：2007-11-16

申请人： Yuichi Teramura ,  Sadato Akahori ,  Yoshikatsu Morishima

发明人： Yuichi Teramura ,  Sadato Akahori ,  Yoshikatsu Morishima

IPC分类号： G01B9/02

CPC分类号： G01B9/02007 ,  A61B5/0066 ,  A61B5/0073 ,  A61B5/7257 ,  A61B2562/0242 ,  G01B9/02004 ,  G01B9/02027 ,  G01B9/02044 ,  G01B9/02087 ,  G01B9/02091 ,  G01B2290/45

摘要： A first light beam and a second light beam having discrete wavelength bands are emitted form a light source unit, and enter a light divider. The light divider separates each light beam into a measuring light beam and a reference light beam. The measuring light beams are irradiated on a measurement target, and reflected light beams, which are reflected at various depth positions of the measurement target, are caused to enter a combiner. The reference light beams propagate through optical fibers to enter the combiner. Interference light beams formed by the reflected light beams and the reference light beams for each of the first and second light beams are photoelectrically converted into interference signals. A tomographic image is obtained employing the interference signals for each of the first and second light beams.

摘要翻译： 具有离散波长带的第一光束和第二光束从光源单元发射，并进入分光器。 分光器将每个光束分离成测量光束和参考光束。 将测量光束照射在测量对象上，并将在测量对象的各个深度位置反射的反射光束进入组合器。 参考光束通过光纤传播进入组合器。 由反射光束形成的干涉光束和用于第一和第二光束中的每一个的参考光束被光电转换成干涉信号。 使用针对第一和第二光束中的每一个的干涉信号获得断层图像。

公开(公告)号：US07830524B2

公开(公告)日：2010-11-09

申请号：US11941601

申请日：2007-11-16

申请人： Yuichi Teramura ,  Sadato Akahori ,  Karin Kuroiwa

发明人： Yuichi Teramura ,  Sadato Akahori ,  Karin Kuroiwa

IPC分类号： G01B9/02

CPC分类号： G01B9/02057 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/02027 ,  G01B9/02069 ,  G01B9/02087 ,  G01B9/02091 ,  G01B2290/45 ,  G01N21/4795

摘要： An optical tomograph is equipped with: a light source unit for emitting a plurality of light beams, the wavelengths of which are swept within different predetermined wavelength bands respectively with the same period; light divider which divides each light beam into a measuring light beam and a reference light beam; light beam combiner which combines reflected light beams, which are the measuring light beams reflected by a measurement target when the measuring light beams are irradiated thereon, with a reference light. An interference light detector detects an interference light beam, which is formed by the reflected light beam and the reference light combined by the light beam combiner, for each of the light beams as an interference signal. A tomographic image processor generates a tomographic image of the measurement target employing the plurality of interference signals detected by the interference light detector.

摘要翻译： 光学断层摄影机配备有：用于发射多个光束的光源单元，其波长分别在相同的周期内在不同的预定波长带内扫描; 将每个光束分成测量光束和参考光束的光分离器; 光束组合器，其组合反射光束，其作为测量光束在其上照射时由测量目标物反射的测量光束。 干涉光检测器，对于每个光束，检测由反射光束和由光束组合器组合的参考光形成的干涉光束作为干涉信号。 断层图像处理器使用由干涉光检测器检测的多个干涉信号来生成测量对象的断层图像。

公开(公告)号：US07944568B2

公开(公告)日：2011-05-17

申请号：US12342618

申请日：2008-12-23

申请人： Yuichi Teramura ,  Satoshi Ozawa

发明人： Yuichi Teramura ,  Satoshi Ozawa

IPC分类号： G01B9/02

CPC分类号： G01B9/02069 ,  G01B9/02004 ,  G01B9/02083 ,  G01B9/02091 ,  G01B2290/70

摘要： When reflection light, reflected from a measurement target that has been irradiated with measurement light in such a manner to scan the measurement target, and reference light are combined in each wavelength sweep, interference light is detected as interference signals. When a thinning region in which the interference signals obtained by detecting the interference light in each wavelength sweep are thinned so that the interference signals that are used to produce the tomographic image remain is set, thinning is performed on the plurality of interference signals in the thinning region. Light intensity information about the measurement target in the thinning region is obtained, based on the interference signals for the respective wavelength sweeps, the interference signals remaining after thinning. The tomographic image in the thinning region is produced based on the obtained light intensity information.

摘要翻译： 当以每个波长扫描的方式组合在每次波长扫描中组合从被测量光照射的测量对象物以扫描测量对象的方式反射的反射光和参考光时，将干涉光检测为干扰信号。 当通过检测每个波长扫描中的干涉光获得的干扰信号的稀疏区域被减薄，使得用于产生断层图像的干扰信号保持不变时，对稀疏中的多个干扰信号进行稀疏化 地区。 基于各波长扫描的干涉信号，获得稀疏区域中的测量对象的光强度信息，减薄后剩余的干扰信号。 基于获得的光强度信息来生成稀疏区域中的断层图像。

公开(公告)号：US07724790B2

公开(公告)日：2010-05-25

申请号：US11994396

申请日：2006-07-03

申请人： Yuichi Teramura

发明人： Yuichi Teramura

IPC分类号： H01S3/13 ,  H01S3/00

CPC分类号： H01S5/32341 ,  H01L2224/48091 ,  H01S5/02248 ,  H01S5/02284 ,  H01S5/0617 ,  H01S5/06808 ,  H01S5/0683 ,  H01S5/4012 ,  H01S5/4031 ,  H01S5/4075 ,  H01L2924/00014

摘要： Semiconductor lasers are driven such that high output laser beams are stably obtained without a long start up time. A method for driving semiconductor lasers by automatic current control or automatic power control with a constant current source involves the steps of: generating a pattern of drive current values for the semiconductor lasers, which is defined according to the amount of time which has elapsed since initiating driving thereof, that enables obtainment of substantially the same light output as a target light output by the automatic current control or the automatic power control; and varying the drive current of the semiconductor lasers in stepwise increments according to the pattern for a predetermined period of time from initiation of drive thereof. A single pattern is used in common to drive the plurality of semiconductor lasers.

摘要翻译： 驱动半导体激光器，使得在没有长启动时间的情况下稳定地获得高输出激光束。 通过自动电流控制或通过恒定电流源进行的自动功率控制来驱动半导体激光器的方法包括以下步骤：产生半导体激光器的驱动电流值的模式，其根据从启动起经过的时间量来定义 其能够通过自动电流控制或自动电力控制获得与目标光输出大致相同的光输出; 以及根据所述图案逐步增加所述半导体激光器的驱动电流从其驱动开始起预定的一段时间。 共同使用单个图案来驱动多个半导体激光器。

公开(公告)号：US20070159639A1

公开(公告)日：2007-07-12

申请号：US11651959

申请日：2007-01-11

申请人： Yuichi Teramura ,  Kiichi Kato

发明人： Yuichi Teramura ,  Kiichi Kato

IPC分类号： A61B5/05 ,  G01B9/02

CPC分类号： G01B9/02091 ,  G01B9/02044 ,  G01B2290/70

摘要： A light source apparatus is equipped with at least three light sources each having a predetermined wavelength interval and different central wavelengths. At least one multiplexing means having wavelength selectivity, for multiplexing light emitted from each of a first group and a second group of the light sources is provided, the first group of light sources including odd ordered light sources and the second group of light sources including even ordered light sources when counted in order of lengths of the central wavelengths thereof. Multiplexing means not having wavelength selectivity, for multiplexing light emitted from the first group of light sources and the second group of light sources is also provided.

摘要翻译： 光源装置配备有至少三个光源，每个光源具有预定的波长间隔和不同的中心波长。 至少一个具有波长选择性的多路复用装置被提供用于复用从第一组和第二组光源中发射的光，第一组光源包括奇数有序光源和第二组光源，包括均匀 当按照其中心波长的长度的顺序计数有序的光源。 复用意味着不具有波长选择性，用于复用从第一组光源发射的光和第二组光源。

公开(公告)号：US20070147750A1

公开(公告)日：2007-06-28

申请号：US11708020

申请日：2007-02-20

申请人： Yuichi Teramura ,  Fusao Yamanaka ,  Yoji Okazaki

发明人： Yuichi Teramura ,  Fusao Yamanaka ,  Yoji Okazaki

IPC分类号： G02B6/04 ,  G02B6/06 ,  H01S3/30 ,  H01S3/10 ,  G02B6/32

CPC分类号： G03F7/70216 ,  G02B6/08 ,  G02B19/0014 ,  G02B19/0057 ,  G02B27/0994 ,  G03F7/70025 ,  H01S5/005 ,  H01S5/02216 ,  H01S5/02284 ,  H01S5/02292 ,  H01S5/4012 ,  H01S5/4025

摘要： In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation: cladding thickness ⁢   ⁢ h ≤ ( emission ⁢   ⁢ light ⁢   ⁢ amount of ⁢   ⁢ one ⁢   ⁢ laser ⁢   ⁢ module ⁢   ⁢ W required intensity ⁢   ⁢ C × packing ratio ⁢   ⁢ P - core diameter ⁢   ⁢ t ) ÷ 2 As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.

公开(公告)号：US20060222042A1

公开(公告)日：2006-10-05

申请号：US11392537

申请日：2006-03-30

申请人： Yuichi Teramura ,  Kazuhiko Nagano

发明人： Yuichi Teramura ,  Kazuhiko Nagano

IPC分类号： H01S3/08

CPC分类号： H01S5/02248 ,  G02B3/0006 ,  G02B7/025 ,  G02B27/0961 ,  H01S5/005 ,  H01S5/02208 ,  H01S5/02272 ,  H01S5/02284 ,  H01S5/02292 ,  H01S5/02469 ,  H01S5/32341 ,  H01S5/4012 ,  H01S5/4031

摘要： In a laser array unit in which a plurality of laser beams emitted from a laser array is received by a lens array, the lens holder for fixedly bonding the lens array is formed such that the length of the surface on which the lens array is bonded in the direction orthogonal to the optical axis direction of the lens is longer than the length of the surface to be bonded to a certain other fixing member in the same direction.

公开(公告)号：US20120010494A1

公开(公告)日：2012-01-12

申请号：US13257573

申请日：2010-03-03

申请人： Yuichi Teramura

发明人： Yuichi Teramura

IPC分类号： A61B6/00 ,  G06T15/00 ,  G01B11/24

CPC分类号： G01B9/02069 ,  A61B3/00 ,  A61B3/1005 ,  A61B3/102 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/0084 ,  A61B5/7203 ,  A61B5/7264 ,  G01B9/02004 ,  G01B9/02085 ,  G01B9/02088 ,  G01B9/02091 ,  G01B2290/65 ,  G01N21/4795

摘要： An optical three-dimensional structure measuring device including: optical three-dimensional structure information storing device (91) for storing optical three-dimensional structure information; specific layer extracting device (121) for comparing information values of the optical three-dimensional structure information stored in the optical three-dimensional structure information storing device with a predetermined threshold and extracting, as a specific layer area of the measurement target, an area equal to or greater than a predetermined range where the information values of the optical three-dimensional structure information equal to or greater than the predetermined threshold continue; missing area extracting device (122) for extracting, as missing areas, areas where the information values of the optical three-dimensional structure information are smaller than the predetermined threshold in the specific layer area; missing area range calculating device (123) for calculating sizes of ranges of the missing areas; and region-of-interest classifying device (124) for comparing the sizes of the ranges of the missing areas with a plurality of predetermined range determination reference values and classifying the missing areas into a plurality of types of regions of interest.

摘要翻译： 一种光学三维结构测量装置，包括：用于存储光学三维结构信息的光学三维结构信息存储装置（91）; 特征层提取装置（121），用于将存储在光学三维结构信息存储装置中的光学三维结构信息的信息值与预定阈值进行比较，并提取作为测量对象的特定层面积的区域相等 达到或大于光学三维结构信息的信息值等于或大于预定阈值的预定范围; 丢失区域提取装置（122），用于将特定层区域中的光学三维结构信息的信息值小于预定阈值的区域提取为缺失区域; 缺少区域范围计算装置（123），用于计算缺失区域的范围的大小; 和区域感兴趣分类装置（124），用于将缺失区域的范围的大小与多个预定范围确定参考值进行比较，并将缺失区域分类为多种类型的感兴趣区域。

公开(公告)号：US20090261240A1

公开(公告)日：2009-10-22

申请号：US12496273

申请日：2009-07-01

申请人： Daisuke WATANABE ,  Yuichi Teramura

发明人： Daisuke WATANABE ,  Yuichi Teramura

IPC分类号： G01D18/00 ,  G01B9/02

CPC分类号： G01B9/02072 ,  G01B9/02004 ,  G01B9/0205 ,  G01B9/02074 ,  G01B9/02083 ,  G01B9/02091 ,  G01D18/00 ,  G06F17/17

摘要： A calibration jig allowing simple and repeatable calibration of a probe optical tomographic apparatus is disclosed. The jig includes a holding member removably attachable to an attachment section of the apparatus and a reflective surface held by the holding member. The reflective surface reflects measurement light emitted from an emitting section of the attachment section and directs reflected light back to the emitting section. If a probe of the apparatus is covered with a sheath, the jig may include a light transmitting member, which generates the same dispersion as dispersion at the sheath, between the emitting section and the reflective surface. The reflective surface may be a single reflective surface disposed within an area corresponding to twice a coherence length of the laser light with a zero path position of the reflective surface being the center of the area.

摘要翻译： 公开了一种允许探针光学断层摄影装置的简单且可重复校准的校准夹具。 夹具包括可移除地附接到装置的附接部分的保持构件和由保持构件保持的反射表面。 反射表面反射从附接部分的发射部分发射的测量光并将反射光引导回发射部分。 如果装置的探针被护套覆盖，则夹具可以包括透光构件，其在发射部分和反射表面之间产生与护套处的分散体相同的色散。 反射表面可以是设置在对应于激光的相干长度的两倍的区域内的单个反射表面，反射表面的零路径位置是该区域的中心。

公开(公告)号：US07538884B2

公开(公告)日：2009-05-26

申请号：US11951689

申请日：2007-12-06

申请人： Yuichi Teramura ,  Karin Kuroiwa

发明人： Yuichi Teramura ,  Karin Kuroiwa

IPC分类号： G01B9/02

CPC分类号： G01B9/02057 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/02027 ,  G01B9/02069 ,  G01B9/02091 ,  G01B2290/45

摘要： An optical tomographic imaging apparatus capable of obtaining a high resolution tomographic image rapidly. Light beams swept in wavelength intermittently and repeatedly within first and second wavelength ranges respectively are outputted simultaneously from a light source unit. If the wavelength of either one of the light beams is within a fifth wavelength range, the other light beam is not outputted. The first or second wavelength range includes at least a portion of the fifth wavelength range. Each light beam is split into measuring and reference beams by a coupler. Wavelengths of reflected beams from a measuring object when the measuring beams are irradiated on the object and the reference beams are divided by a WDM coupler. The reflected beams and reference beams are combined by an optical coupler, and each interference beam produced thereby is detected with respect to each light beam as an interference signal.

摘要翻译： 一种能够快速获得高分辨率断层图像的光学层析成像装置。 从光源单元同时输出在第一和第二波长范围内间歇地和反复扫描的波长的光束。 如果光束中的任一个的波长在第五波长范围内，则不输出另一个光束。 第一或第二波长范围包括第五波长范围的至少一部分。 每个光束被耦合器分成测量和参考光束。 当测量光束照射在物体上时，来自测量对象的反射光束的波长和参考光束被WDM耦合器划分。 反射光束和参考光束通过光耦合器组合，并且由此产生的每个干涉光束相对于每个光束被检测为干扰信号。