摘要:
Deterioration of the degree of vacuum in a vacuum chamber is prevented while securing adequate cooling performance by gas cooling. A substrate 21 is provided in a vacuum, and the cooling body 1 is provided close to a film non-formation surface of the substrate 21. A thin film is formed by depositing a film forming material on a film formation surface of the substrate 21 while introducing a cooling gas into between the substrate 21 and the cooling body 1. At this time, a gas which reacts with the film forming material is introduced as the cooling gas.
摘要:
To accelerate a film formation rate in forming a negative electrode active material film by vapor deposition using an evaporation source containing Si as a principal component, and to provide an electrode for lithium batteries which is superior in productivity, and keeps the charge and discharge capacity at high level are contemplated. The method of manufacturing an electrode for lithium batteries of the present invention includes the steps of: providing an evaporation source containing Si and Fe to give a molar ratio of Fe/(Si+Fe) being no less than 0.0005 and no greater than 0.15; and vapor deposition by melting the evaporation source and permitting evaporation to allow for vapor deposition on a collector directly or through an underlying layer. The electrode for lithium batteries of the present invention includes a collector, and a negative electrode active material film which includes SiFeyOx (wherein, 0
摘要:
Deterioration of the degree of vacuum in a vacuum chamber is prevented while securing adequate cooling performance by gas cooling. A substrate 21 is provided in a vacuum, and the cooling body 1 is provided close to a film non-formation surface of the substrate 21. A thin film is formed by depositing a film forming material on a film formation surface of the substrate 21 while introducing a cooling gas into between the substrate 21 and the cooling body 1. At this time, a gas which reacts with the film forming material is introduced as the cooling gas.
摘要:
Includes the steps of preparing a sheet-like current collector 4 having a plurality of bumps 4A on a surface thereof, the plurality of bumps having a height of 3 μm or greater and 10 μm or less; and forming an active material body having a stacked structure on each of the bumps 4A of the current collector 4. The step of forming the active material body includes a first layer vapor deposition step of causing a vaporized vapor deposition material to be incident on the surface of the current collector 4 in a direction inclined with respect to the normal H to the current collector 4 to form a first layer 101a of the active material body on each bump 4A, the first layer 101a being located closest to the current collector; and a second layer vapor deposition step of causing the vaporized vapor deposition material to be incident on the surface of the current collector 4 in a direction inclined, with respect to the normal H to the current collector 4, opposite to the incidence direction of the vapor deposition material in the first layer vapor deposition step to form a second layer 102a on at least a part of the first layer 101a. In the first layer vapor deposition step, vapor deposition is performed while moving the current collector 4 in a direction in which the incidence angle ω of the vapor deposition material with respect to the normal H to the current collector 4 is decreased.
摘要:
To accelerate a film formation rate in forming a negative electrode active material film by vapor deposition using an evaporation source containing Si as a principal component, and to provide an electrode for lithium batteries which is superior in productivity, and keeps the charge and discharge capacity at high level are contemplated. The method of manufacturing an electrode for lithium batteries of the present invention includes the steps of: providing an evaporation source containing Si and Fe to give a molar ratio of Fe/(Si+Fe) being no less than 0.0005 and no greater than 0.15; and vapor deposition by melting the evaporation source and permitting evaporation to allow for vapor deposition on a collector directly or through an underlying layer. The electrode for lithium batteries of the present invention includes a collector, and a negative electrode active material film which includes SiFeyOx (wherein, 0
摘要:
A fastening device includes a cylindrical shell with an opening extending over the entire length of the cylindrical shell, a gripping member formed on the periphery of the cylindrical shell by extending outward and a pair of hooks linked with the tip end of the cylindrical shell via hinges. A fastening method using the foregoing fastening device includes the steps of passing the pair of hooks through a hole for fastening of a packing box formed of an upper box and a lower box, having the pair of hooks opened outward to bring the holding members thereof into contact with the back side surface of the packing box and at the same time having the pair of hooks engaged with each other firmly. At this time, the gripping member is in contact with the front side surface of the packing box. Accordingly, both surfaces located at each respective rim of the hole for fastening are sandwiched between the pair of hooks and the gripping member. Furthermore, the fastening device is structured to make the position of engagement between the pair of hooks changeable, thereby allowing the angle of each respective hook against the cylindrical shell to change and allowing consequently the sandwiching distance between the gripping member and the pair of hooks to change.
摘要:
A piezoelectric driving device of the present invention prevents a short circuit from occurring between electrode metallic films even if bonding-wire is performed. The piezoelectric driving device is a piezoelectric driving device in which a piezoelectric thin plate is joined to one side of a substrate, and a terminal electrode for applying a signal for expanding or contracting the piezoelectric thin plate is further formed on the plane. The terminal electrode is formed on one side of the substrate via a piezoelectric-member pedestal separated from the piezoelectric thin plate.
摘要:
A first counter electrode and a second counter electrode, for electrically coupling a first piezoelectric element unit and a second piezoelectric element unit, for composing a thin film piezoelectric element are common floating electrodes. A first principal electrode film and a second principal electrode film of each piezoelectric element unit are connected, and a voltage is applied between the two piezoelectric element units. As a result, by the wiring of two terminals only without using grounding electrode wiring, the first piezoelectric element unit and second piezoelectric element unit can be driven, so that the wiring process may be substantially simplified.
摘要:
A thin film piezoelectric element including a first structure having a sequential stack of layers, a first main electrode layer, a first opposed electrode layer and a first piezoelectric thin film having a first polarizing direction located between the first electrode layers, a second structure having as a sequential stack of layers, a second main electrode layer, a second opposed electrode layer and a second piezoelectric thin film having a second polarizing direction located between the second electrode layers, an insulating resin layer covering peripheral portions of the first and second structures, and at least one connecting electrode pad located at a side of one of the first and second structures, for connecting the main electrode layer and the opposed electrode layer of the structures to external equipment, wherein each first and second structures has a cross-sectional shape such that the piezoelectric thin film is tapered, diminishing in width, from a portion near the main electrode layer to a portion near the opposed electrode layer, and the first and second opposed electrode layers of adjacent structures are bonded to each other, and each polarizing direction of the piezoelectric thin films is identical to the direction of each opposed electrode layer.
摘要:
A thin film piezoelectric element including a first structure having a sequential stack of layers, a first main electrode layer, a first opposed electrode layer and a first piezoelectric thin film having a first polarizing direction located between the first electrode layers, a second structure having as a sequential stack of layers, a second main electrode layer, a second opposed electrode layer and a second piezoelectric thin film having a second polarizing direction located between the second electrode layers, an insulating resin layer covering peripheral portions of the first and second structures, and at least one connecting electrode pad located at a side of one of the first and second structures, for connecting the main electrode layer and the opposed electrode layer of the structures to external equipment, wherein each first and second structures has a cross-sectional shape such that the piezoelectric thin film is tapered, diminishing in width, from a portion near the main electrode layer to a portion near the opposed electrode layer, and the first and second opposed electrode layers of adjacent structures are bonded to each other, and each polarizing direction of the piezoelectric thin films is identical to the direction of each opposed electrode layer.