Method for preparing cerium carbonate and cerium oxide
    3.
    发明授权
    Method for preparing cerium carbonate and cerium oxide 有权
    制备碳酸铈和氧化铈的方法

    公开(公告)号:US08637153B2

    公开(公告)日:2014-01-28

    申请号:US13021464

    申请日:2011-02-04

    Abstract: Disclosed is a method for preparing cerium carbonate that can improve yield or productivity of cerium carbonate and enables preparation of cerium carbonate having uniform diameter, cerium carbonate, and a method for preparing cerium oxide.The method for preparing cerium carbonate comprises mixing the cerium precursor with urea; and, elevating the temperature of the mixture to 50° C. or more in the absence of a separate reaction medium to react the cerium precursor with urea in the presence of a polymer dispersant.

    Abstract translation: 公开了一种制备可以提高碳酸铈的产率或生产率并能够制备直径均匀的碳酸铈,碳酸铈和制备氧化铈的方法。 制备碳酸铈的方法包括将铈前体与尿素混合; 并且在没有单独的反应介质的情况下将混合物的温度提高到50℃以上,以在聚合物分散剂存在下使铈前体与脲反应。

    Cerium oxide powder for abrasive and CMP slurry comprising the same
    4.
    发明授权
    Cerium oxide powder for abrasive and CMP slurry comprising the same 有权
    用于磨料的氧化铈粉末和包含其的CMP浆料

    公开(公告)号:US08333815B2

    公开(公告)日:2012-12-18

    申请号:US12598666

    申请日:2008-04-30

    Abstract: Disclosed are cerium oxide powder for an abrasive; CMP slurry including the same; and a shallow trench isolation (STI) process using the CMP slurry. At least two kinds of cerium oxides prepared by using cerium carbonates having different crystal structures are mixed in an appropriate ratio and used as an abrasive for CMP slurry, thereby adjusting required polishing properties of the CMP slurry. Also, in a disclosed method of preparing a cerium carbonate, the crystal structure of the cerium carbonate can be easily controlled. Based on the finding that in a cerium oxide for an abrasive, the kind of improved polishing property depends on the crystal structure of a cerium carbonate, at least one from among polishing properties, such as the polishing rate of a silicon oxide layer, the polishing rate of a silicon nitride layer, the polishing selectivity between the silicon oxide layer and the silicon nitride layer, and WIWNU, can be adjusted by using at least two kinds of cerium oxides selected from the group including (i) a cerium oxide prepared by using a lanthanite-(Ce) crystal structured cerium carbonate, (ii) a cerium oxide prepared by using an orthorhombic crystal structured cerium carbonate, and (iii) a cerium oxide prepared by using a hexagonal crystal structured cerium carbonate, as an abrasive for CMP slurry, and adjusting the mixing ratio of the cerium oxides.

    Abstract translation: 公开了用于研磨剂的氧化铈粉末; 包括CMP的CMP浆料; 和使用CMP浆料的浅沟槽隔离(STI)工艺。 通过使用具有不同晶体结构的碳酸铈制备的至少两种氧化铈以适当的比例混合,并用作CMP浆料的研磨剂,从而调节CMP浆料的所需抛光性能。 此外,在公开的碳酸铈的制备方法中,可以容易地控制碳酸铈的晶体结构。 基于在研磨剂的氧化铈中发现,改善的研磨性能的种类取决于碳酸铈的晶体结构,从抛光性能,例如氧化硅层的研磨速度,抛光 氮化硅层的速率,氧化硅层和氮化硅层之间的抛光选择性以及WIWNU可以通过使用选自以下的至少两种氧化铈来调节:(i)通过使用制备的氧化铈 (Ce)晶体结构的碳酸铈,(ii)通过使用正交晶体结构的碳酸铈制备的氧化铈,和(iii)通过使用六方晶结晶的碳酸铈制备的氧化铈作为CMP浆料的研磨剂 ,并调节氧化铈的混合比。

    Cerium salt, producing method thereof, cerium oxide and cerium based polishing slurry
    5.
    发明授权
    Cerium salt, producing method thereof, cerium oxide and cerium based polishing slurry 有权
    铈盐,其制造方法,氧化铈和铈系研磨浆

    公开(公告)号:US08323604B2

    公开(公告)日:2012-12-04

    申请号:US12886209

    申请日:2010-09-20

    Abstract: A cerium salt wherein, when 20 g of the cerium salt is dissolved in a mixed liquid of 12.5 g of 6N nitric acid and 12.5 g of a 30% hydrogen peroxide aqueous solution, a concentration of an insoluble component present in the solution is 5 ppm or less by mass ratio to the cerium salt before dissolution and cerium oxide produced by processing the cerium salt at high temperatures. Scratch on a surface to be polished can be reduced when a cerium based polishing slurry containing the cerium oxide particles is used, since an amount of impurities in cerium oxide particles and cerium salt particles, raw material thereof, is reduced for high purification.

    Abstract translation: 一种铈盐,其中当将20g铈盐溶解在12.5g 6N硝酸和12.5g 30%过氧化氢水溶液的混合液中时,溶液中存在的不溶性组分的浓度为5ppm 或更少的质量比与溶解前的铈盐和通过在高温下加工铈盐而产生的氧化铈。 由于使用含有氧化铈粒子的铈系研磨浆料,因为氧化铈粒子和铈盐粒子的原料的原料的原料数量减少,所以能够降低被研磨面上的擦伤。

    METHOD FOR PREPARING CERIUM CARBONATE POWDER
    6.
    发明申请
    METHOD FOR PREPARING CERIUM CARBONATE POWDER 有权
    制备碳酸钙粉末的方法

    公开(公告)号:US20100143233A1

    公开(公告)日:2010-06-10

    申请号:US12531450

    申请日:2008-03-14

    Abstract: In a method for preparing cerium carbonate powder by mixing a cerium precursor solution with a carbonate precursor solution and carrying out a precipitation reaction, wherein cerium carbonate is controlled to have an orthorhombic crystal structure, a hexagonal crystal structure or an orthorhombic/hexagonal mixed crystal structure, by using at least one type of organic solvent comprising at least two hydroxyl groups (OH) in molecular formula as a solvent for either or both the cerium precursor solution and the carbonate precursor solution, and varying a number of carbons or hydroxyl groups (OH) included in the molecular formula of the organic solvent. The method can easily and inexpensively obtain cerium carbonate powder with a desired crystal structure without the danger by high-temperature high-pressure and the need for an expensive system in hydrothermal synthesis.

    Abstract translation: 在通过将铈前体溶液与碳酸酯前体溶液混合并进行沉淀反应制备碳酸铈粉末的方法中,其中将碳酸铈控制为具有正交晶体结构,六方晶系结构或正交/六方晶系混合晶体结构 通过使用包含分子式中的至少两个羟基(OH)的至少一种类型的有机溶剂作为铈前体溶液和碳酸酯前体溶液中的任一种或两者的溶剂,并且改变多个碳或羟基(OH )包括在有机溶剂的分子式中。 该方法可以容易且廉价地获得具有所需晶体结构的碳酸铈粉末,而没有高温高压的危险和需要昂贵的水热合成系统。

    Cerium carbonate powder, cerium oxide powder, method for preparing the same, and CMP slurry comprising the same
    7.
    发明授权
    Cerium carbonate powder, cerium oxide powder, method for preparing the same, and CMP slurry comprising the same 有权
    碳酸铈粉末,氧化铈粉末,其制备方法和包含该碳酸钙的CMP浆料

    公开(公告)号:US07682584B2

    公开(公告)日:2010-03-23

    申请号:US11598100

    申请日:2006-11-13

    Abstract: Method of preparing cerium carbonate powder by mixing a cerium precursor solution with a carbonate precursor solution and subjecting the mixture solution to a precipitation reaction, wherein the concentration of cerium in the cerium precursor solution ranges from 1M to 10M, the molar concentration ratio of the cerium precursor to the carbonate precursor ranges from 1:1 to 1:7, and the cerium precursor solution contains at least one additive selected from the group consisting of carbonate compounds, acrylic compounds, and sulfate ion-containing compounds. The cerium carbonate powder has an orthorhombic crystal structure, a particle size of 0.05 to 1 μm, and an aspect ratio of 1 to 5. Moreover, disclosed are cerium oxide powder prepared from said cerium carbonate powder as a precursor, a preparation method thereof, and a CMP slurry containing said cerium oxide powder as an abrasive.

    Abstract translation: 通过将铈前体溶液与碳酸盐前体溶液混合并使混合溶液进行沉淀反应制备碳酸铈粉末的方法,其中铈前体溶液中铈的浓度范围为1M至10M,铈的摩尔浓度比 碳酸酯前体的前体的范围为1:1至1:7,并且铈前体溶液含有至少一种选自碳酸酯化合物,丙烯酸化合物和含硫酸根离子的化合物的添加剂。 碳酸铈粉末具有正交晶体结构,粒径为0.05〜1μm,长径比为1〜5。此外,作为前体的碳酸铈粉末制备的氧化铈粉末,其制备方法, 和含有所述氧化铈粉末作为研磨剂的CMP浆料。

    CERIUM OXIDE POWDER FOR ABRASIVE AND CMP SLURRY COMPRISING THE SAME
    8.
    发明申请
    CERIUM OXIDE POWDER FOR ABRASIVE AND CMP SLURRY COMPRISING THE SAME 有权
    用于磨料和CMP浆料的氧化铝粉末包括它

    公开(公告)号:US20100062687A1

    公开(公告)日:2010-03-11

    申请号:US12598666

    申请日:2008-04-30

    Abstract: Disclosed are cerium oxide powder for an abrasive; CMP slurry including the same; and a shallow trench isolation (STI) process using the CMP slurry. At least two kinds of cerium oxides prepared by using cerium carbonates having different crystal structures are mixed in an appropriate ratio and used as an abrasive for CMP slurry, thereby adjusting required polishing properties of the CMP slurry. Also, in a disclosed method of preparing a cerium carbonate, the crystal structure of the cerium carbonate can be easily controlled. Based on the finding that in a cerium oxide for an abrasive, the kind of improved polishing property depends on the crystal structure of a cerium carbonate, at least one from among polishing properties, such as the polishing rate of a silicon oxide layer, the polishing rate of a silicon nitride layer, the polishing selectivity between the silicon oxide layer and the silicon nitride layer, and WIWNU, can be adjusted by using at least two kinds of cerium oxides selected from the group including (i) a cerium oxide prepared by using a lanthanite-(Ce) crystal structured cerium carbonate, (ii) a cerium oxide prepared by using an orthorhombic crystal structured cerium carbonate, and (iii) a cerium oxide prepared by using a hexagonal crystal structured cerium carbonate, as an abrasive for CMP slurry, and adjusting the mixing ratio of the cerium oxides.

    Abstract translation: 公开了用于研磨剂的氧化铈粉末; 包括CMP的CMP浆料; 和使用CMP浆料的浅沟槽隔离(STI)工艺。 通过使用具有不同晶体结构的碳酸铈制备的至少两种氧化铈以适当的比例混合,并用作CMP浆料的研磨剂,从而调节CMP浆料的所需抛光性能。 此外,在公开的碳酸铈的制备方法中,可以容易地控制碳酸铈的晶体结构。 基于在研磨剂的氧化铈中发现,改善的研磨性能的种类取决于碳酸铈的晶体结构,从抛光性能,例如氧化硅层的研磨速度,抛光 氮化硅层的速率,氧化硅层和氮化硅层之间的抛光选择性以及WIWNU可以通过使用选自以下的至少两种氧化铈来调节:(i)通过使用制备的氧化铈 (Ce)晶体结构的碳酸铈,(ii)通过使用正交晶体结构的碳酸铈制备的氧化铈,和(iii)通过使用六方晶结晶的碳酸铈制备的氧化铈作为CMP浆料的研磨剂 ,并调节氧化铈的混合比。

    PROCESSES AND SYSTEMS FOR THE SEQUESTRATION OF CARBON DIOXIDE UTILIZING EFFLUENT STREAMS
    10.
    发明申请
    PROCESSES AND SYSTEMS FOR THE SEQUESTRATION OF CARBON DIOXIDE UTILIZING EFFLUENT STREAMS 审中-公开
    二氧化碳利用流化床序列的方法和系统

    公开(公告)号:US20070217981A1

    公开(公告)日:2007-09-20

    申请号:US11686619

    申请日:2007-03-15

    Abstract: Disclosed are processes and systems for sequestering carbon dioxide from a flue gas effluent from a parent process such as a coal-fired electric power plant. In one non-limiting embodiment of the invention, a mineral having a metal is dissolved with an acid to provide a solution having a predetermined pH. Carbon dioxide from the flue gas effluent and a base are added to the solution to provide a metal carbonate reaction to precipitate a metal carbonate, e.g., magnesium carbonate, from the solution. Heat, which may be supplied by the flue gas effluent, is used to power a base management system for recovering used base form the process.

    Abstract translation: 公开了用于从诸如燃煤电厂的母工艺的烟道气流出物中隔离二氧化碳的方法和系统。 在本发明的一个非限制性实施方案中,将具有金属的矿物与酸溶解以提供具有预定pH的溶液。 将来自烟道气流出物和碱的二氧化碳加入到溶液中以提供金属碳酸盐反应,以从溶液中沉淀金属碳酸盐,例如碳酸镁。 可以由烟道气流出物提供的热量用于为基础管理系统供电,用于从过程中回收使用的碱。

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