Lithographic template and method of formation and use
    1.
    发明申请
    Lithographic template and method of formation and use 失效
    光刻模板及其形成和使用方法

    公开(公告)号:US20040033424A1

    公开(公告)日:2004-02-19

    申请号:US10222734

    申请日:2002-08-15

    摘要: This invention relates to semiconductor devices, microelectronic devices, micro electro mechanical devices, microfluidic devices, photonic devices, and more particularly to a lithographic template, a method of forming the lithographic template and a method for forming devices with the lithographic template. The lithographic template (10) is formed having a substrate (12), a transparent conductive layer (16) formed on a surface (14) of the substrate (12) by low pressure sputtering to a thickness that allows for preferably 90% transmission of ultraviolet light therethrough, and a patterning layer (20) formed on a surface (18) of the transparent conductive layer (16). The template (10) is used in the fabrication of a semiconductor device (30) for affecting a pattern in device (30) by positioning the template (10) in close proximity to semiconductor device (30) having a radiation sensitive material formed thereon and applying a pressure to cause the radiation sensitive material to flow into the relief image present on the template. Radiation is then applied through the template so as to cure portions of the radiation sensitive material and define the pattern in the radiation sensitive material. The template (10) is then removed to complete fabrication of semiconductor device (30).

    摘要翻译: 本发明涉及半导体器件,微电子器件,微电子机械器件,微流体器件,光子器件,更具体地涉及光刻模板,形成光刻模板的方法和用光刻模板形成器件的方法。 光刻模板(10)形成为具有基板(12),通过低压溅射形成在基板(12)的表面(14)上的透明导电层(16)至允许优选90%透射率的厚度 紫外光,以及形成在透明导电层(16)的表面(18)上的图形层(20)。 模板(10)用于通过将模板(10)定位成紧邻其上形成有辐射敏感材料的半导体器件(30)而影响器件(30)中的图案的半导体器件(30)的制造,以及 施加压力以使辐射敏感材料流入存在于模板上的浮雕图像。 然后通过模板施加辐射,以便固化辐射敏感材料的部分并限定辐射敏感材料中的图案。 然后移除模板(10)以完成半导体器件(30)的制造。

    Gray level imaging masks, optical imaging apparatus for gray level imaging masks and methods for encoding and using gray level imaging masks
    2.
    发明申请
    Gray level imaging masks, optical imaging apparatus for gray level imaging masks and methods for encoding and using gray level imaging masks 有权
    灰度成像掩模,用于灰度成像掩模的光学成像装置和用于编码和使用灰度成像掩模的方法

    公开(公告)号:US20040009413A1

    公开(公告)日:2004-01-15

    申请号:US10464017

    申请日:2003-06-18

    发明人: Todd E. Lizotte

    摘要: A grayscale mask for imaging operations, including a substrate layer and a mask layer having a plurality of apertures forming a mask pattern to form a grayscale image. Each edge of each aperture includes a plurality segments forming a serrated edge, resulting in mixed edge diffraction. The apertures may be in an irregular and non-symmetric pattern and may be of variable size. A random diffusing layer may be in proximity to or integral with the substrate layer. The grayscale mask may be used for generating an optical element by printing the initial grayscale mask onto a photoresist layer and transferring the photoresist pattern onto a transparent layer and the mask may include areas or layers of variable transmission. Also described are methods for diffractive intensity averaging, diffractive error diffusion, diffractive spatial dithering, and diffractive intensity averaging.

    摘要翻译: 一种用于成像操作的灰度掩模,包括基底层和具有形成掩模图案的多个孔的掩模层以形成灰度图像。 每个孔的每个边缘包括形成锯齿状边缘的多个段,导致混合的边缘衍射。 孔可以是不规则和非对称的图案并且可以具有可变的尺寸。 随机扩散层可以与衬底层接近或一体。 灰度掩模可以用于通过将初始灰度掩模印刷到光致抗蚀剂层上并将光致抗蚀剂图案转印到透明层上而生成光学元件,并且掩模可以包括可变透射率的区域或层。 还描述了衍射强度平均,衍射误差扩散,衍射空间抖动和衍射强度平均的方法。

    POLYMERIZABLE COMPOSITION AND OPTICAL ARTICLES USING THE SAME
    4.
    发明申请
    POLYMERIZABLE COMPOSITION AND OPTICAL ARTICLES USING THE SAME 失效
    可聚合组合物和使用该组合物的光学制品

    公开(公告)号:US20020004574A1

    公开(公告)日:2002-01-10

    申请号:US09354975

    申请日:1999-07-16

    IPC分类号: G02B001/12

    摘要: A polymerizable composition comprising an effective amount of at least one tetrafunctional acrylate monomer. In one embodiment of the invention, a polymerizable composition is a compound comprising of at least 50 percent by weight of at least one tetrafunctional acrylate monomer, from 5 to 20 percent by weight of at least one modified bisphenol A epoxy diacrylate monomer, from 0 to 25 percent by weight of at least one acrylate monomer selected from aliphatic difunctional and polyfunctional acrylates, from 0 to 3 percent by weight of at least one UV absorber, and a source of free radicals. The lens-forming material resulted from the polymerizable composition is introduced to a lens mold with a mold cavity having a configuration conforming to the optical lens to be molded. A radiation energy source is used to cure the lens-forming material in the filled mold. The radiation energy source comprises a U-shaped UV light. The U-shaped UV light has a first arm capable of delivering UV light in a first direction and a second arm capable of delivering UV light in an opposite second direction. The first and second arms are spaced apart and substantially parallel to each other, thereby defining a space therebetween. The filled mold is placed at the center of the space therebetween the first and second arms to receive the radiations from the first and second directions for curing. The resultant lens has an inherently integrated nullhard-soft-hardnull structure cross-sectionally.

    摘要翻译: 一种包含有效量的至少一种四官能丙烯酸酯单体的可聚合组合物。 在本发明的一个实施方案中,可聚合组合物是包含至少50重量%的至少一种四官能丙烯酸酯单体,5至20重量%的至少一种改性双酚A环氧二丙烯酸酯单体的化合物,其为0至 25重量%的至少一种选自脂族二官能和多官能丙烯酸酯的丙烯酸酯单体,0-3重量%的至少一种UV吸收剂和自由基源。 由可聚合组合物产生的透镜形成材料被引入到具有与待模制的光学透镜相符的构造的模具腔的透镜模具中。 辐射能源用于固化填充模具中的透镜形成材料。 辐射能源包括U形紫外光。 U形紫外光具有能够沿第一方向输送UV光的第一臂和能够沿相反的第二方向输送UV光的第二臂。 第一和第二臂间隔开并且基本上彼此平行,从而在它们之间形成一个空间。 填充的模具放置在第一和第二臂之间的空间的中心,以接收从第一和第二方向进行固化的辐射。 所得透镜在横截面上具有固有的“硬 - 软硬”结构。

    Tinted, high Dk ophthalmic molding and a method for making same

    公开(公告)号:US20040246436A1

    公开(公告)日:2004-12-09

    申请号:US10881572

    申请日:2004-06-30

    IPC分类号: G02B001/12

    摘要: The invention relates to ophthalmic molding formulations and to tinted, high Dk ophthalmic moldings. This invention also relates to a method for making a tinted ophthalmic molding. The method comprises: (a) providing a polymer precursor having cross-linkable or polymerizable groups; (b) providing a pigment dispersion comprising an inorganic or organic pigment and a dispersing agent; (c) mixing the pigment dispersion with the polymer precursor to form a tinted prepolymer mixture; (d) dispensing the tinted prepolymer mixture into a mold; and (e) forming a tinted ophthalmic molding from the tinted prepolymer mixture, the molding comprising a polymer matrix having the pigment entrapped therein. With this method, tinted ophthalmic moldings, particularly edge-to-edge soft, tinted contact lenses having improved properties, are prepared with an improved efficiency.

    Method for manufacturing sealing tool sterilized with gaseous hydrogen peroxide
    8.
    发明申请
    Method for manufacturing sealing tool sterilized with gaseous hydrogen peroxide 审中-公开
    用气态过氧化氢灭菌的密封工具的制造方法

    公开(公告)号:US20030049165A1

    公开(公告)日:2003-03-13

    申请号:US10031083

    申请日:2002-01-16

    摘要: It is an object to establish a sterilization condition and means for decreasing the amount of a remaining sterilization agent as much as possible after sterilizing a rubbery sealing tool. In a sterilizing method using gaseous hydrogen peroxide, a filling rate of a sample in a sterilization bag for a normal type is set to 45% or more and a sterilization condition is set to a hydrogen peroxide treatment of 3 pulses and an aeration pulse of 20 pulses, thereby carrying out a sterilization treatment. Furthermore, it is preferable that a volume rate in a bag of an outer bag accommodating the sterilization bag should be set to 55 to 12%. By such setting, a survival ratio of 0/10 of a bacteria cell could be realized at first to fifth times of repetition of the sterilization treatment.

    摘要翻译: 本发明的目的是建立消毒条件,并且在消毒橡胶密封工具之后尽可能多地减少剩余的灭菌剂的量。 在使用气态过氧化氢的灭菌方法中,正常型灭菌袋中的样品的填充率设定为45%以上,灭菌条件设定为3脉冲的过氧化氢处理,通气脉冲为20 脉冲,从而进行灭菌处理。 此外,优选将容纳消毒袋的外袋的袋体积率设定为55〜12%。 通过这样的设定,可以在灭菌处理的重复的一到五次时实现细菌细胞的存活率0/10。

    Intraocular lens manufacturing process

    公开(公告)号:US20020082690A1

    公开(公告)日:2002-06-27

    申请号:US10084694

    申请日:2002-02-27

    IPC分类号: G02B001/12

    CPC分类号: B29D11/023 Y10S425/808

    摘要: A method of cast molding an intraocular implant from two or more dissimilar materials using disposable molds. The subject cast molding method is particularly useful in the production of intraocular lenses manufactured from dissimilar materials. It is desirable to produce intraocular lenses from dissimilar materials in order to optimize the optical characteristics of the intraocular lens optic portion and to optimize stability and flexibility characteristics of the intraocular lens haptic elements.