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公开(公告)号：US11906363B2
公开(公告)日：2024-02-20
申请号：US17347470
申请日：2021-06-14
CPC分类号： G01J5/22 , H01L31/095 , H01L31/20 , G01J2005/204
摘要： An infrared sensor includes: a base substrate; a bolometer infrared receiver; a first beam; and a second beam. Each of the first and second beams has a connection portion connected to the base substrate and/or a member on the base substrate and a separated portion away from the base substrate, and is physically joined to the infrared receiver at the separated portion. The infrared receiver is supported by the first and second beams to be away from the base substrate. The infrared receiver includes a resistance change portion including a resistance change material the electrical resistance of which changes with temperature. The resistance change portion includes an amorphous semiconductor, and the first and second beams include a crystalline semiconductor made of the same base material as the resistance change material, and is electrically connected to the resistance change portion at the separated portion.
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2.发明公开公开(公告)号：US20240035893A1
公开(公告)日：2024-02-01
申请号：US18344358
申请日：2023-06-29
申请人： TDK CORPORATION
发明人： Tadao SENRIUCHI , Naoki OHTA , Kazuya MAEKAWA , Susumu AOKI , Maiko KOKUBO , Yusuke KIMOTO , Shinji HARA
CPC分类号： G01J5/14 , G01J5/22 , G01L1/22 , G01N22/00 , H03F3/45071
摘要： An element array circuit includes one or more first wiring lines, second wiring lines, impedance elements, one or more operational amplifiers, one or more conversion elements, and one or more switchers. The second wiring lines each extend in a direction different from a direction of extension of the first wiring lines. The impedance elements are each coupled to one each of the first and second wiring lines. The operational amplifiers each include a positive input terminal, a negative input terminal couplable to one of the second wiring lines, and an output terminal. The conversion elements are each coupled to the negative input terminal and the output terminal, and each convert a current flowing through the second wiring line coupled to the negative input terminal into a voltage. The switchers are each coupled to one of the conversion elements and come into a conducting state or a nonconducting state.
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公开(公告)号：US20230309407A1
公开(公告)日：2023-09-28
申请号：US18327935
申请日：2023-06-02
发明人： MASAKI FUJIKANE , KOUHEI TAKAHASHI , NAOKI TAMBO , YASUYUKI NAITO
IPC分类号： H10N10/851 , H10N10/17 , H10N10/82 , G01J5/14 , G01J5/22
CPC分类号： H10N10/8556 , H10N10/17 , H10N10/82 , G01J5/14 , G01J5/22
摘要： An infrared sensor includes a base substrate, an infrared light receiver, and a beam. The beam includes a separated portion separated from the base substrate to be suspended above the base substrate. The beam is connected at the separated portion to the infrared light receiver. The beam includes a p-type portion containing a p-type semiconductor and an n-type portion containing an n-type semiconductor. The p-type portion has a first three-dimensional structure including first recesses and a first solid portion formed between the first recesses. The first solid portion has, between the first recesses adjacent to each other in plan view, a smallest dimension of less than or equal to 100 nanometers in plan view. The n-type portion has a second three-dimensional structure including second recesses and a second solid portion formed between the second recesses. The second solid portion has, between the second recesses adjacent to each other in plan view, a smallest dimension of less than or equal to 100 nanometers in plan view. The beam satisfies at least one of following conditions (Ia) or (IIa): (Ia) the first solid portion includes a first portion having a Young's modulus of less than or equal to 80% of a Young's modulus of a first reference sample that is made of a material of a type identical to a type of a material constituting the first solid portion and that does not have recesses; and (IIa) the second solid portion includes a second portion having a Young's modulus of less than or equal to 80% of a Young's modulus of a second reference sample that is made of a material of a type identical to a type of a material constituting the second solid portion and that does not have recesses.
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公开(公告)号：US11719581B2
公开(公告)日：2023-08-08
申请号：US17731808
申请日：2022-04-28
申请人： NEC Corporation
发明人： Mayumi Kosaka
IPC分类号： G01J5/22
CPC分类号： G01J5/22
摘要： An object of the present invention is to provide a bolometer having a high TCR value and a low resistance, and a method for manufacturing the same.
The present invention relates to a bolometer manufacturing method including: fabricating a set of two carbon nanotube wires that are approximately parallel to each other at edges of a line shape, or fabricating a circular shape carbon nanotube wire at a circular circumference of a circular shape, by applying a semiconducting carbon nanotube dispersion liquid in the line shape or the circular shape on a substrate, and drying the dispersion liquid, a width of each wire being 5 μm or more; and connecting a part of each wire to a first electrode and a second electrode.-
公开(公告)号：US20230068316A1
公开(公告)日：2023-03-02
申请号：US17904359
申请日：2021-02-05
申请人： TRINAMIX GMBH
发明人： Celal Mohan OEGUEN , Robert GUST
摘要： Disclosed herein is a sensor system including four interconnected resistors, where two of the resistors are photoconductive detectors, where the photoconductive detectors are illuminated with light at least at two different wavelengths, where two of the resistors does not change their resistance due to the illumination, where an external voltage is applicable to the sensor system, where a differential voltage is measurable, which depends on the resistance changes of the illuminated photoconductive detectors, where the differential voltage gives a mathematical ratio of the four respective resistances.
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公开(公告)号：US20220333996A1
公开(公告)日：2022-10-20
申请号：US17687170
申请日：2022-03-04
摘要： An imaging system includes a focal plane array, readout electronics, and a computing system in which the number of active pixels is either set at a low-fraction of the total pixels thereby reducing the effect of radiation damage, or radiation damage over time is detected and automatically compensated. Machine learning is used to identify radiation damaged pixels and damaged regions which are subsequently eliminated and replaced by the computational system. The machine learning is used to identify changes in the fixed pattern signal/noise and/or noise of the system, and is then computationally corrected.
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公开(公告)号：US10989602B2
公开(公告)日：2021-04-27
申请号：US16454456
申请日：2019-06-27
摘要： A recessed carbon nanotube article includes a base; a substrate disposed on the base; wells disposed in the substrate and bounded by the base and a substrate wall; and a carbon nanotube element disposed in individual wells and including vertically aligned carbon nanotubes such that a longitudinal length of the vertically aligned carbon nanotubes is less than a depth of the well in which the carbon nanotube element is disposed. A recessed carbon nanotube bolometer includes a base; a substrate on the base; radiation wells in the substrate; carbon nanotubes in the wells; thermistors and heaters on the membrane arranged as an electrical substitution member. A process for making a recessed carbon nanotube bolometer includes forming a substrate on a base; forming a radiation well in the substrate; forming carbon nanotubes in the well; disposing a cover on the wells; and forming a thermistor and a heater on the base.
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公开(公告)号：US10834340B1
公开(公告)日：2020-11-10
申请号：US16438858
申请日：2019-06-12
申请人： RAYTHEON COMPANY
发明人： Ryan Boesch , Matthew C. Thomas , Jeffrey Mitchell
摘要： A thermal imaging system includes a pixel array having a plurality of pixel groups. Each pixel group including a plurality of pixel rows and a trigger sense circuit including a pixel group input line in signal communication with the plurality of bolometer pixels pixel row containing a plurality of bolometer pixels. The pixel group further includes a selector switch that selectively establishes an electrical connection between the pixel group and the trigger sense circuit. The selector switch operates in a first state to disconnect the pixel group from the pixel group input line while connecting the pixel group to the integration unit such that the integration unit generates the image, and a second state to disconnect the pixel group from the integration unit while connecting the pixel group to the pixel group input line such that the trigger sense circuit monitors the pixel group for a high temperature bolometer.
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公开(公告)号：US10127940B1
公开(公告)日：2018-11-13
申请号：US15342339
申请日：2016-11-03
摘要： A slider configured for heat-assisted magnetic recording comprises an optical sensor coupled to first and second bond pads. The optical sensor comprises a bolometer and a reference sensor. The bolometer is situated at a location of the slider that receives at least some of the light and exposed to an ambient temperature at the slider. The bolometer produces a signal in response to a change in the ambient temperature and the change in output optical power. The reference sensor is situated at a location of the slider unexposed to the light and exposed to the ambient temperature. The reference sensor is coupled to the bolometer and configured to produce a signal in response to the change in the ambient temperature. The optical sensor is configured to generate a sensor signal indicative of changes in output optical power of a laser source without contribution due to ambient temperature changes.
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公开(公告)号：US20180299329A1
公开(公告)日：2018-10-18
申请号：US15485942
申请日：2017-04-12
申请人： RAYTHEON COMPANY
发明人： Paolo Masini , John William Devitt
CPC分类号： G01J5/046 , B81B3/0081 , B81B2201/0207 , G01J5/0245 , G01J5/045 , G01J5/06 , G01J5/20 , G01J5/22 , G01J2005/065 , H01L31/02164
摘要： Methods and apparatus for preventing solar damage, and other heat-related damage, to uncooled microbolometer pixels. In certain examples, at least some of the pixels of an uncooled microbolometer are configured with a bimetallic thermal shorting structure that protects the pixel(s) from excessive heat damage. In other examples a thermochroic membrane that becomes highly reflective at temperatures above a certain threshold is applied over the microbolometer pixels to prevent the pixels from being damaged by excessive heat.
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