公开(公告)号：WO2012032063A1

公开(公告)日：2012-03-15

申请号：PCT/EP2011/065414

申请日：2011-09-06

Applicant: FIANIUM LIMITED ,  BAIRD, Brian W ,  GERKE, Timothy D

Inventor： BAIRD, Brian W ,  GERKE, Timothy D

IPC: B23K26/073 ,  B23K26/06 ,  H01L31/18 ,  H01L21/268

CPC classification number: H01L31/0236 ,  B23K26/0624 ,  B23K26/0732 ,  B23K26/364 ,  B23K26/40 ,  B23K2203/172 ,  H01L21/268 ,  H01L21/78 ,  H01L31/046 ,  H01L31/0463 ,  H01L31/073 ,  H01L31/0749 ,  H01L31/18 ,  Y02E10/543

Abstract: A picosecond laser beam shaping assembly is disclosed for shaping a picosecond laser beam for use in patterning (e.g., scribing) semiconductor devices. The assembly comprises a pulsed fibre laser source of picosecond laser pulses, a harmonic conversion element for converting laser pulses at a first laser wavelength having a first spectral bandwidth to laser pulses at a second laser wavelength having a second spectral bandwidth, and a beam shaping apparatus for shaping the laser beam at the second laser wavelength, the beam shaping apparatus having a spectral bandwidth that substantially corresponds to the second spectral bandwidth so as to produce a laser beam having a substantially rectangular cross-sectional profile.

Abstract translation: 公开了一种皮秒激光束成形组件，用于成形用于图案化（例如划线）半导体器件的皮秒激光束。 组件包括皮秒激光脉冲的脉冲光纤激光源，用于将具有第一光谱带宽的第一激光波长的激光脉冲转换成具有第二光谱带宽的第二激光波长的激光脉冲的谐波转换元件，以及光束成形设备 为了在第二激光波长处成形激光束，光束成形装置具有基本对应于第二光谱带宽的光谱带宽，以便产生具有基本上矩形横截面轮廓的激光束。

公开(公告)号：WO2011075851A1

公开(公告)日：2011-06-30

申请号：PCT/CA2010/002067

申请日：2010-12-23

Applicant: INSTITUT NATIONAL D'OPTIQUE ,  TAILLON, Yves ,  DROLET, Mathieu ,  GAY, David ,  DESBIENS, Louis ,  BAIRD, Brian W.

Inventor： TAILLON, Yves ,  DROLET, Mathieu ,  GAY, David ,  DESBIENS, Louis ,  BAIRD, Brian W.

IPC: H01S5/0683

CPC classification number: B23K26/066

Abstract: Laser systems and methods for providing an output light beam having a target spatial pattern are provided. A light generating module generates an input light beam, whose spectral profile is then tailored by imposing thereon a controllable phase modulation. The obtained spectrally tailored light beam is dispersed, using at least one spatially- dispersive element to provide an output light beam having a spatial profile which is a function of the spectral profile of the spectrally tailored light beam, The phase modulation is selected in view of the spectral profile of the input light beam and of the dispersion characteristics of the at least one spatially-dispersive element so that the spatial pattern of the output light beam matches the target spatial pattern therefor.

Abstract translation: 提供了用于提供具有目标空间图案的输出光束的激光系统和方法。 光产生模块产生输入光束，其光谱轮廓然后通过在其上施加可控相位调制而被调整。 使用至少一个空间色散元件将获得的光谱定制的光束分散，以提供具有作为光谱定制的光束的光谱分布的函数的空间分布的输出光束。相位调制是根据 输入光束的光谱分布和至少一个空间色散元件的色散特性，使得输出光束的空间图案与目标空间图案匹配。

公开(公告)号：WO2009120918A3

公开(公告)日：2009-12-23

申请号：PCT/US2009038489

申请日：2009-03-27

Applicant: ELECTRO SCIENT IND INC ,  PENG XIAOYUAN ,  BAIRD BRIAN W ,  JORDENS WILLIAM J ,  HEMENWAY DAVID MARTIN

Inventor： PENG XIAOYUAN ,  BAIRD BRIAN W ,  JORDENS WILLIAM J ,  HEMENWAY DAVID MARTIN

IPC: H01S3/10 ,  H01S3/00

CPC classification number: H01S3/0057 ,  B23K26/0622 ,  G02F1/0327

Abstract: Laser pulse shaping techniques produce tailored laser pulse spectral output (64, 66). The laser pulses can be programmed to have desired pulse widths and pulse shapes (such as sub-nanosecond to 10 ns 20 ns pulse widths with 1 ns to several nanoseconds leading edge rise times). Preferred embodiments are implemented with one or more electro-optical modulators (250, 254) receiving drive signals that selectively change the amount of incident pulsed laser emission (106, 112, 114) to form a tailored pulse output. Triggering the drive signal from the pulsed laser emission suppresses jitter associated with other stages of the link processing system and substantially removes jitter associated with pulsed laser emission build up time.

Abstract translation: 激光脉冲整形技术产生定制的激光脉冲光谱输出（64,66）。 激光脉冲可以被编程为具有期望的脉冲宽度和脉冲形状（例如亚纳秒到10ns的20ns脉冲宽度，1ns至几纳秒前沿上升时间）。 优选实施例是用一个或多个电光调制器（250,254）来实现的，所述电光调制器（250,254）接收选择性地改变入射脉冲激光发射量（106,112,114）的驱动信号，以形成定制的脉冲输出。 从脉冲激光发射触发驱动信号抑制与链路处理系统的其他级相关联的抖动，并且基本上消除与脉冲激光发射建立时间相关联的抖动。

公开(公告)号：WO2006062766A2

公开(公告)日：2006-06-15

申请号：PCT/US2005/043112

申请日：2005-11-29

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  CUTLER, Donald, R. ,  BAIRD, Brian, W. ,  HARRIS, Richard, S. ,  HEMENWAY, David, M. ,  LO, Ho Wai ,  NILSEN, Brady, E. ,  OSAKO, Yasu ,  SUN, Lei ,  SUN, Yunlong ,  UNRATH, Mark, A.

Inventor： CUTLER, Donald, R. ,  BAIRD, Brian, W. ,  HARRIS, Richard, S. ,  HEMENWAY, David, M. ,  LO, Ho Wai ,  NILSEN, Brady, E. ,  OSAKO, Yasu ,  SUN, Lei ,  SUN, Yunlong ,  UNRATH, Mark, A.

IPC: H01S3/10 ,  H01S3/08

CPC classification number: B23K26/0673 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/082

Abstract: A laser beam switching system (50) employs a laser (52) coupled to a beam switching device (58) that causes a laser beam to switch between first and second beam positioning heads such that while the first beam positioning head (60) is directing the laser beam to process a workpiece target location, the second beam positioning head (62) is moving to another target location and vice versa. A preferred beam switching device includes first and second AOMs. When RF is applied to the first AOM (72), the laser beam is diffracted toward the first beam positioning head, and when RF is applied to the second AOM (74), the laser beam is diffracted toward the second beam positioning head. A workpiece processing system (120) employs a common modular imaged optics assembly (122) and an optional variable beam expander (94) for optically processing multiple laser beams.

Abstract translation: 激光束切换系统（50）采用耦合到光束切换装置（58）的激光器（52），该激光器使激光束在第一和第二光束定位头之间切换，使得当第一 射束定位头（60）引导激光束来处理工件目标位置，第二射束定位头（62）移动到另一个目标位置，反之亦然。 优选的射束切换装置包括第一和第二AOM。 当RF施加到第一AOM（72）时，激光束被朝向第一光束定位头衍射，并且当RF被施加到第二AOM（74）时，激光束被衍射向第二光束定位头。 工件处理系统（120）采用共同的模块化成像光学组件（122）和可选的可变光束扩展器（94），用于光学处理多个激光束。

公开(公告)号：WO2007140190A1

公开(公告)日：2007-12-06

申请号：PCT/US2007/069483

申请日：2007-05-22

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  BAIRD, Brian, W.

Inventor： BAIRD, Brian, W.

IPC: H01L21/301 ,  H01L21/268

CPC classification number: H01L21/268 ,  B23K26/0624 ,  B23K26/083 ,  B23K26/0876 ,  B23K26/40 ,  B23K2203/172 ,  B23K2203/42 ,  B23K2203/50 ,  H01L21/31105 ,  H01L21/31127 ,  H01L21/481

Abstract: Laser output including at least one laser pulse (32) having a wavelength greater than 1.1 µ m and shorter than 5 µ m (preferably at about 1.1 µ m) and having a pulsewidth shorter than 100 ps (preferably shorter than 10 ps) permits low -k dielectric material, such as SRO or SiCOH, to be removed without damaging the substrate. An oscillator module (12) in cooperation with an amplification module (16) are used to generate the laser output.

Abstract translation: 具有波长大于1.1μm且小于5μm（优选约1.1μm）并且具有短于100ps（优选地小于10ps）的脉冲宽度的至少一个激光脉冲（32））的激光输出允许低kk 材料如SRO或SiCOH被除去而不损坏基底。 与放大模块（16）配合的振荡器模块（12）用于产生激光输出。

公开(公告)号：WO2005016586A2

公开(公告)日：2005-02-24

申请号：PCT/US2004/026977

申请日：2004-08-18

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC ,  SUN, Yunlong ,  HARRIS, Richard S. ,  LO, Ho Wai ,  BAIRD, Brian W. ,  JOHNSON, Jay Christopher

Inventor： SUN, Yunlong ,  HARRIS, Richard S. ,  LO, Ho Wai ,  BAIRD, Brian W. ,  JOHNSON, Jay Christopher

IPC: B23K

CPC classification number: H01L23/5258 ,  B23K26/0613 ,  B23K26/0622 ,  B23K2201/40 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A laser pulse with a specially tailored temporal power profile, instead of a conventional temporal shape or substantially square shape, severs an IC link. The specially tailored laser pulse preferably has either an overshoot at the beginning of the laser pulse or a spike peak within the duration of the laser pulse. The timing of the spike peak is preferably set ahead of the time when the link is mostly removed. A specially tailored laser pulse power profile allows the use of a wider laser pulse energy range and shorter laser wavelengths, such as the green and UV, to sever the links without appreciable damage to the substrate and passivation structure material located on either side of and underlying the links.

Abstract translation: 具有特别定制的时间功率特性的激光脉冲，而不是传统的时间形状或基本上正方形的形状，切断了IC连接。 特别定制的激光脉冲优选地在激光脉冲的开始处具有过冲，或者在激光脉冲的持续时间内具有尖峰​​。 尖峰的定时优先设置在链路被大部分去除的时间之前。 特别定制的激光脉冲功率轮廓允许使用更宽的激光脉冲能量范围和更短的激光波长（例如绿色和紫外线）来切断连接，而不会对基板和钝化结构材料的任何一侧和底层 链接。

公开(公告)号：WO2012032064A3

公开(公告)日：2012-06-28

申请号：PCT/EP2011065416

申请日：2011-09-06

Applicant: FIANIUM LTD ,  BAIRD BRIAN W ,  GERKE TIMOTHY D

Inventor： BAIRD BRIAN W ,  GERKE TIMOTHY D

IPC: H01L27/142 ,  B23K26/06 ,  B23K26/073 ,  B23K26/36 ,  B23K26/40 ,  H01L31/0749

CPC classification number: H01L31/0236 ,  B23K26/0624 ,  B23K26/0732 ,  B23K26/364 ,  B23K26/40 ,  B23K2203/172 ,  H01L21/268 ,  H01L21/78 ,  H01L31/046 ,  H01L31/0463 ,  H01L31/073 ,  H01L31/0749 ,  H01L31/18 ,  Y02E10/543

Abstract: A method comprising providing a layer structure for a photovoltaic device, the layer structure comprising an electrode, a light absorber comprising a layer of chalcopyrite-type semiconductor material, such as copper indium gallium diselenide, disposed on the electrode and a transparent electrode disposed on the light absorber. The method also comprises delivering a spatially-shaped picosecond pulsed laser beam so as to remove material from a region of the transparent electrode so as to expose at least a portion of the light absorber.

Abstract translation: 一种方法，包括提供用于光伏器件的层结构，所述层结构包括电极，设置在电极上的黄铜矿型半导体材料如铜铟镓二硒化物层的光吸收体和设置在电极上的透明电极 光吸收器。 该方法还包括递送空间形状的皮秒脉冲激光束，以从透明电极的区域去除材料，以暴露光吸收体的至少一部分。

公开(公告)号：WO2012032064A2

公开(公告)日：2012-03-15

申请号：PCT/EP2011/065416

申请日：2011-09-06

Applicant: FIANIUM LIMITED ,  BAIRD, Brian W ,  GERKE, Timothy D

Inventor： BAIRD, Brian W ,  GERKE, Timothy D

IPC: H01L27/142

CPC classification number: H01L31/0236 ,  B23K26/0624 ,  B23K26/0732 ,  B23K26/364 ,  B23K26/40 ,  B23K2203/172 ,  H01L21/268 ,  H01L21/78 ,  H01L31/046 ,  H01L31/0463 ,  H01L31/073 ,  H01L31/0749 ,  H01L31/18 ,  Y02E10/543

Abstract: A method comprising providing a layer structure for a photovoltaic device, the layer structure comprising an electrode, a light absorber comprising a layer of chalcopyrite-type semiconductor material, such as copper indium gallium diselenide, disposed on the electrode and a transparent electrode disposed on the light absorber. The method also comprises delivering a spatially-shaped picosecond pulsed laser beam so as to remove material from a region of the transparent electrode so as to expose at least a portion of the light absorber.

Abstract translation: 包括提供用于光伏器件的层结构的方法，所述层结构包括电极，光吸收剂，所述光吸收剂包含黄铜矿型半导体材料层，例如铜铟镓二硒化物 电极和设置在光吸收体上的透明电极。 该方法还包括传送空间形状的皮秒脉冲激光束，以从透明电极的区域移除材料，以暴露光吸收器的至少一部分。

公开(公告)号：WO2009145986A1

公开(公告)日：2009-12-03

申请号：PCT/US2009/038170

申请日：2009-03-25

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  BAIRD, Brian, W. ,  BRULAND, Kelly, J. ,  VANDERGIESSEN, Clint, R. ,  UNRATH, Mark, A. ,  NILSEN, Brady ,  SWARINGEN, Steve

Inventor： BAIRD, Brian, W. ,  BRULAND, Kelly, J. ,  VANDERGIESSEN, Clint, R. ,  UNRATH, Mark, A. ,  NILSEN, Brady ,  SWARINGEN, Steve

IPC: H01L21/82 ,  B23K26/42

CPC classification number: H01S3/0007 ,  B23K26/042 ,  B23K26/0622 ,  B23K26/0853

Abstract: Processing a workpiece with a laser includes generating laser pulses at a first pulse repetition frequency. The first pulse repetition frequency provides reference timing for coordination of a beam positioning system and one or more cooperating beam position compensation elements to align beam delivery coordinates relative to the workpiece. The method also includes, at a second pulse repetition frequency that is lower than the first pulse repetition frequency, selectively amplifying a subset of the laser pulses. The selection of the laser pulses included in the subset is based on the first pulse repetition frequency and position data received from the beam positioning system. The method further includes adjusting the beam delivery coordinates using the one or more cooperating beam position compensation elements so as to direct the amplified laser pulses to selected targets on the workpiece.

Abstract translation: 用激光加工工件包括以第一脉冲重复频率产生激光脉冲。 第一脉冲重复频率提供用于协调光束定位系统和一个或多个配合光束位置补偿元件的参考定时，以相对于工件对准光束传送坐标。 该方法还包括在低于第一脉冲重复频率的第二脉冲重复频率下，选择性地放大激光脉冲的子集。 包括在子集中的激光脉冲的选择基于从波束定位系统接收的第一脉冲重复频率和位置数据。 该方法还包括使用一个或多个配合光束位置补偿元件来调整光束传送坐标，以便将放大的激光脉冲引导到工件上的选定目标。

公开(公告)号：WO2006009818A3

公开(公告)日：2007-03-01

申请号：PCT/US2005021406

申请日：2005-06-16

Applicant: ELECTRO SCIENT IND INC ,  BRULAND KELLY J ,  LO HO WAI ,  BAIRD BRIAN W ,  EVANS FRANK G ,  HARRIS RICHARD S ,  SUN YUNLONG ,  SWARINGEN STEPHEN N

Inventor： BRULAND KELLY J ,  LO HO WAI ,  BAIRD BRIAN W ,  EVANS FRANK G ,  HARRIS RICHARD S ,  SUN YUNLONG ,  SWARINGEN STEPHEN N

IPC: H01L21/26

CPC classification number: B23K26/067 ,  B23K26/0676 ,  B23K26/0853 ,  B23K2201/40 ,  G11C17/143 ,  G11C17/16 ,  G11C17/18 ,  G11C29/02 ,  G11C29/027 ,  H01L21/268 ,  H01L23/5258 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Methods and systems process electrically conductive links on or within a semiconductor substrate (740) using multiple laser beams. For example, a method utilizes N series of laser pulses to obtain a throughput benefit, wherein N = 2. The links are arranged in a plurality of substantially parallel rows extending in a generally lengthwise direction. The N series of laser pulses propagate along N respective beam axes until incident upon selected links. The pattern of resulting laser spots may be on links in N distinct rows, on distinct links in the same row, or on the same link, either partially or completely overlapping. The resulting laser spots may be offset from one another in the lengthwise direction of the rows or offset from one another in a direction perpendicular to the lengthwise direction of the rows, or both.

Abstract translation: 方法和系统使用多个激光束在半导体衬底（740）上或内部处理导电链路。 例如，一种利用N系列激光脉冲获得吞吐量优点的方法，其中N = 2。所述链路被布置成沿大致长度方向延伸的多个基本平行的行。 N系列激光脉冲沿着N个相应的波束轴传播，直到在所选择的链路上入射。 所产生的激光斑点的图案可以是N个不同行中的链接，在相同行中的不同链接上，或者在同一链接上，部分地或完全重叠。 所得到的激光点可以在行的长度方向上彼此偏移，或者在与行的长度方向垂直的方向上彼此偏移，或者两者偏离。