Abstract:
A novel fluid delivery system includes a mounting panel, where the mounting panel includes channels that define the flow of fluid between any flow-control components mounted on the mounting panel. The mounting panel comprises a top plate and a bottom plate, and the channels are carved out of the underside of the top plate and are enclosed by the bottom plate. In a complex fluid delivery system having many fluid channels, the mounting panel may include one or more interior panels with additional channels carved out of the interior plates to accommodate all routing paths. The channels run in two or more directions to connect two or more gas/channel sticks together.
Abstract:
Integrated, electrically operable micro-valves are formed to control fluid flow and pressure. These valves convert electrical energy to mechanical energy through an energy conversion device (120) having a sealed cavity (100) with a flexible wall (200). The sealed cavity (100) contains a fluid (130) that expands and contracts as it is heated or cooled, thus causing the flexible wall (200) to move. Movement of this wall (200) or membrane is used to move a valve element (300) and dynamically control the opening or closing of a valve port (400) over a predetermined range.
Abstract:
A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be used with corrosive compounds, such as fluorine. A wetted path of a MEMS device is coated with either (1) an organic compound resistant to attack by atomic fluorine or (2) a material capable of being passivated by atomic fluorine. The device is then exposed to a gas that decomposes into active fluorine compounds when activated by a plasma discharge. One example of such a gas is CF4, an inert gas that is easier and safer to work with than volatile gases like CIF3. The gas will passivate the material (if applicable) and corrode any exposed silicon. The device is tested in such a manner that any unacceptable corrosion of the wetted path will cause the device to fail. If the device operates properly, the wetted path is deemed to be resistant to corrosion by fluorine or other corrosive compounds, as applicable.
Abstract:
Glass interposer panels and methods for forming the same are described herein. The interposer panels include a glass substrate core formed from an ion-exchangeable glass. A first layer of compressive stress may extend from a first surface of the glass substrate into the thickness T of the glass substrate core to a first depth of layer D1. A second layer of compressive stress may be spaced apart from the first layer of compressive stress and extending from a second surface of the glass substrate core into the thickness T of the glass substrate core to a second depth of layer D2. A plurality of through-vias may extend through the thickness T of the glass substrate core. Each through-via is surrounded by an intermediate zone of compressive stress that extends from the first layer of compressive stress to the second layer of compressive stress adjacent to a sidewall of each through-via.
Abstract:
The invention has two primary portions, a means to provide ultra-violet radiation and a means for adsorbing organic, inorganic and, optionally, pathogens. The means to provide ultra-violet radiation comprises ultra-violet light sources emitting, at least in part, in the spectrum around 265 nm. Light emitting devices, including light emitting diodes and other solid state light emitting devices are available in this range as well. The adsorbent portion comprises several different adsorbent media, including zeolites, titanium dioxide (TiO2), alumina, carbon, micro- and/or nano-porous carbon, other minerals with a naturally occurring micro- and/or nano- porous structure, synthetic, including organic, substrates with a micro- and/or nano-porous structure, and surface-modified variations of the preceding adsorbents.
Abstract:
An array ( 100 ) of honeycomb substrates ( 10 ) comprises honeycomb substrates ( 10 ), a plurality of which have, for each substrate, substrate cells extending from a first end of the respective substrate to a second end and substrate sides extending from the first end to the second end. The substrates of the plurality are arranged in an array with sides of respective substrates facing one another and cells of respective substrates extending in a common direction. One or more channels ( 12 ) are defined by facing substrate sides of two or more substrates of the plurality ( 100 ) and the one or more channels ( 12 ) extend in a direction perpendicular to the common direction.
Abstract:
Disclosed is a segmented modular solid oxide fuel cell device having a plurality of independently controllable electrical power producing segments disposed within a common thermal environment. Also disclosed are methods for selectively operating one or more segments of the disclosed segmented modular solid oxide fuel cell device. Also disclosed are methods for performing a maintenance process on one or more segments of a segmented modular fuel cell device during fuel cell operation.
Abstract:
A method, article of manufacture and apparatus are disclosed for binding successive layers of a "guest specie" such as an atom, cation, anion, organic molecule, and/or pathogen to a substrate or multiple different substrates. Possible substrates include materials with a porous nature; macro, micro and nano porous materials are all candidates. The adsorbent capacity of a substrate is extended by coordinating a layer of bi- or multi-functional ligand (L) to an adsorbed atom or ion or molecule or pathogen, which is then coordinate to a second layer of adsorbed atom or ion or molecule or pathogen.