Abstract:
In described examples, water molecule infiltration from water vapor in the ambient is effectively reduced by a moisture barrier (320) including a layer of aluminum oxide formed by an atomic layer deposition (ALD) process. A microelectronic device (300) includes a capacitor (306) with organic polymer material (314) in the capacitor dielectric (310) and a moisture barrier (320) with a layer of aluminum oxide formed by an ALD process.
Abstract:
In described examples, a heated capacitor (100) removes moisture from a moisture-sensitive insulating layer (114) of the heated capacitor (100) that lies between and touches a lower metal plate (112) and an upper metal plate (116) of the heated capacitor (100) with the heat that is generated by the resistance to a current that passes through or near the heated capacitor (100).
Abstract:
An integrated circuit (IC) (100) includes a substrate having a semiconductor surface layer (102) with functional circuitry for realizing at least one circuit function, with an inter level dielectric (ILD) layer (112) on a metal layer (118) that is above the semiconductor surface layer (102). A thin film resistor (TFR) including a TFR layer is on the ILD layer. At least one vertical metal wall (108) is on at least two sides of the TFR. The metal walls include at least 2 metal levels coupled by filled vias (126). The functional circuitry is outside the metal walls.
Abstract:
One aspect of the invention provides an integrated circuit(IC) [400b]. The IC comprises transistors [410b] and contact fuses [422b]. The contact fuses each comprise a conducting layer [424b], a frustum-shaped contact [426b] has a narrower end that contacts the conducting layer and a first metal layer [427b] that is located over the conducting layer. A wider end of the frustum- shaped contact contacts the first metal layer. The frustum-shaped contact has a ratio of an opening of the wider end to the narrower end that is at least about 1.2. The contact fuses each further include a heat sink [432b] that is located over and contacts the first metal layer.
Abstract:
The present invention defines a system for impeding corrosive egress from a metallic trench structure (206) during the production of a semiconductor device segment (200). The system of the present invention provides a first non-metallic structure (212) and a second non-metallic structure (214). The metallic trench structure is interposed between the first and second non-metallic structures. The device segment is cleaned, after which an upper exposed surface (220) of the metallic structure is recessed (226) from an upper exposed surface (216) of the first or second non-metallic structure by a desired amount.