Thin film deposition apparatus
    98.
    发明授权
    Thin film deposition apparatus 有权
    薄膜沉积设备

    公开(公告)号:EP2264213B1

    公开(公告)日:2014-11-12

    申请号:EP10250962.7

    申请日:2010-05-24

    IPC分类号: C23C14/24 H05B33/10

    摘要: A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. The thin film deposition apparatus comprises: a deposition source arranged to discharge a deposition material; a first nozzle disposed downstream of the deposition source and including a plurality of first openings arranged in a first direction; a second nozzle disposed downstream of the first nozzle and including a plurality of second openings arranged in the first direction; a barrier wall assembly including a plurality of barrier walls arranged in the first direction between the first nozzle and the second nozzle so as to partition a space between the first nozzle and the second nozzle into a plurality of sub-deposition spaces.