A method of making a microfluidic device
    136.
    发明公开
    A method of making a microfluidic device 有权
    一种制造微流体装置的方法

    公开(公告)号:EP2554510A3

    公开(公告)日:2014-07-23

    申请号:EP12177755.1

    申请日:2012-07-25

    Abstract: A microfabricated device is fabricated by depositing a first metal layer on a substrate to provide a first electrode of an electrostatic actuator, depositing a first structural polymer layer over the first metal layer, depositing a second metal layer over said first structural polymer layer to form a second electrode of the electrostatic actuator, depositing an insulating layer over said first structural polymer layer, planarizing the insulating layer, etching the first structural polymer layer through the insulating layer and the second metal layer to undercut the second metal layer, providing additional pre-formed structural polymer layers, at least one of which has been previously patterned, and finally bonding the additional structural layers in the form of a stack over the planarized second insulating layer to one or more microfluidic channels. The technique can also be used to make cross over channels in devices without electrostatic actuators, in which case the metal layers can be omitted.

    LEITERPLATTENSENSOR UND VERFAHREN ZUR HERSTELLUNG DESSELBEN
    139.
    发明公开
    LEITERPLATTENSENSOR UND VERFAHREN ZUR HERSTELLUNG DESSELBEN 审中-公开
    PCB传感器和方法生产同样

    公开(公告)号:EP2550233A2

    公开(公告)日:2013-01-30

    申请号:EP11714504.5

    申请日:2011-03-22

    Abstract: The invention relates to a circuit board sensor (1) for measuring physical variables, comprising a substrate board (2) and a second board (3) both made of glass, wherein at least the second board (3) is designed such that said board is elastically deformable, wherein the substrate board (2) and the second board (3) each comprise a first and a second side (2a, 2b, 3a, 3b), wherein the second side (2b) of the substrate board (2) and the first side (3a) of the second board (3) are disposed opposite each other, and wherein a spacer element (7) is disposed between the substrate board (2) and the second board (3) and holds the substrate board (2) and the second board (3) at a mutual distance, wherein the substrate board (2) and the second board (3) extend in particular parallel to each other, wherein the second side (2b) of the substrate board (2) comprises a first metal or polymer surface (5a) and the first side (3a) of the second board (3) comprises a second metal or polymer surface (5b), and wherein the first and second metal or polymer surfaces (5a, 5b) are disposed at least partially opposite each other, and wherein conductors (4) are attached on the first side of the substrate board (2), and wherein the substrate board (2) comprises at least one first and one second through-plating (9) disposed such that the first through-plating (9a) electrically conductively connects the conductors (4) to the first metal or polymer surface (5a), and such that the second through-plating (9b) electrically conductively connects the conductor (4) to the second metal or polymer surface (5b).

    MIKROELEKTROMECHANISCHES HALBLEITERBAUELEMENT SENSOR
    140.
    发明公开
    MIKROELEKTROMECHANISCHES HALBLEITERBAUELEMENT SENSOR 有权
    微机电半导体传感器元

    公开(公告)号:EP2524390A2

    公开(公告)日:2012-11-21

    申请号:EP11700636.1

    申请日:2011-01-10

    Inventor: DOELLE, Michael

    Abstract: The micro-electromechanical semiconductor component is provided with a semiconductor substrate (4, 5), a reversibly deformable bending element (8a) made of semiconductor material, and at least one transistor that is sensitive to mechanical stresses, said transistor being designed as an integrated component in the bending element (8a). The transistor is arranged in an implanted active region pan (78a) that is made of a semiconductor material of a first conducting type and is introduced in the bending element (8a). Two mutually spaced, implanted drain and source regions (79, 80) made of a semiconductor material of a second conducting type are designed in the active region pan (78a), a channel region extending between said two regions. Implanted feed lines made of a semiconductor material of the second conducting type lead to the drain and source regions (79, 80). The upper face of the active region pan (78a) is covered by a gate oxide (81a). In the area of the channel region, a gate electrode (81) made of polysilicon is located on the gate oxide (81a), a feed line likewise made of polysilicon leading to said gate electrode.

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