OPTICAL MEASUREMENT SYSTEM
    11.
    发明公开
    OPTICAL MEASUREMENT SYSTEM 审中-公开
    光学测量系统

    公开(公告)号:EP3215816A1

    公开(公告)日:2017-09-13

    申请号:EP15801885.3

    申请日:2015-11-05

    CPC classification number: G01J3/26 G01J3/0202 G01J3/0256 G01J3/0286

    Abstract: The present invention concerns an optical measurement system comprising an electrically tunable Peltier element, a detector for detecting radiation from a radiation source in a measurement area, the detector being in thermal connection with the Peltier element, an electrically tunable Fabry-Perot interferometer placed in the path of the radiation prior to the detector, the Fabry-Perot interferometer being in thermal connection with the Peltier element, and control electronics circuitry configured to control the Peltier element, the interferometer, and the detector. The present invention further concerns a method for analyzing the spectrum of an object.

    Abstract translation: 本发明涉及包括电可调珀耳帖元件(11),用于检测来自测量区域(26)中的辐射源(25)的辐射的检测器(23)的光学测量系统(1),检测器(23) 在与珀耳帖元件(11)热连接的情况下,在检测器(23)之前放置在辐射(16)的路径中的电可调法布里珀罗干涉仪(10),法布里珀罗干涉仪(10)处于热 与珀耳帖元件(11)的连接以及配置成控制珀耳帖元件(11),干涉仪(10)和检测器(23)的控制电子电路。 本发明还涉及用于分析对象的光谱的方法。

    SPECTROMETER, AND SPECTROMETER PRODUCTION METHOD
    13.
    发明公开
    SPECTROMETER, AND SPECTROMETER PRODUCTION METHOD 审中-公开
    光谱仪和光谱仪生产方法

    公开(公告)号:EP3104146A1

    公开(公告)日:2016-12-14

    申请号:EP15745980.1

    申请日:2015-02-03

    Abstract: A spectrometer 1A includes a light detection element 20 provided with a light passing part 21 and a light detection part 22, a support 30 fixed to the light detection element 20 such that a space S is formed between the light passing part 21 and the light detection part 22, a first reflection part 11 provided in the support 30 and configured to reflect light L1 passing through the light passing part 21 in the space S, a second reflection part 12 provided in the light detection element 20 and configured to reflect the light L1 reflected by the first reflection part 11 in the space S, and a dispersive part 40 provided in the support 30 and configured to disperse and reflect the light L1 reflected by the second reflection part 12 to the light detection part 22 in the space S.

    Abstract translation: 光谱仪1A包括设置有光通过部分21和光检测部分22的光检测元件20,固定到光检测元件20上的支撑件30,使得在光通过部分21和光检测器之间形成空间S 部分22,第一反射部分11,其设置在支撑件30中并且被配置为将穿过光通过部分21的光L1反射到空间S中;第二反射部分12,其设置在光检测元件20中并且被配置为反射光L1 由空间S中的第一反射部分11反射的色散部分40以及设置在支撑件30中并且被配置为将在第二反射部分12反射的光L1分散并反射到空间S中的光检测部分22的色散部分40。

    SPECTROMETER
    14.
    发明公开
    SPECTROMETER 审中-公开
    光谱仪

    公开(公告)号:EP3088854A1

    公开(公告)日:2016-11-02

    申请号:EP16171746.7

    申请日:2008-06-09

    Abstract: In a state that the body portion 4 is regulated by inner wall planes 27, 29, 28 of the package 3 so as not to move in parallel or perpendicularly with respect to the rear plane 4b, the spectroscopic module is directly supported by the package 3, thereby when the spectrometer is downsized, the spectroscopic module 2 can be supported securely and also there is provided securely a positional accuracy between the light incident opening 22a of the package 3, the spectroscopic portion 6 of the spectroscopic module 2 and the light detecting element 7. Further, the lead 23 is buried into the package 3 to give derivation and support by the lead deriving portion 26, thereby the lead deriving portion 26 in itself of the package 3 is allowed to act as a base when wire bonding is conducted to electrically connect the lead 23 with the light detecting element 7, thus preventing breakage and deviation of the spectroscopic module 2.

    Abstract translation: 在主体部分4被封装3的内壁面27,29,28调节成不相对于后平面4b平行或垂直移动的状态下,分光模块直接由封装3支撑 因此当光谱仪小型化时,可以牢固地支撑分光模块2,并且还牢固地提供了封装3的入射开口22a,分光模块2的分光部6和光检测元件之间的位置精度 此外,引线23被埋入封装3中以由引线导出部分26导出和支撑,由此当引线接合被引导到封装3本身的引线导出部分26时,可以作为基底 将引线23与光检测元件7电连接,从而防止分光模块2的断裂和偏离。

    Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same
    20.
    发明公开
    Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same 审中-公开
    米克罗姆机械公司法布里 - 珀罗 - 干涉仪和Herstellungsverfahrendafür

    公开(公告)号:EP2672243A1

    公开(公告)日:2013-12-11

    申请号:EP13170194.8

    申请日:2013-06-03

    CPC classification number: G01J3/26 G01J3/0286 G02B5/284 G02B26/001

    Abstract: The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. The prior art interferometers have a temperature drift which causes inaccuracy and requirement for complicated packaging. According to the invention the interferometer arrangement has both an electrically tuneable interferometer and a reference interferometer on the same substrate. The temperature drift is measured with the reference interferometer and this information is used for compensating the measurement with the tuneable interferometer. The measurement accuracy and stability can thus be improved and requirements for packaging are lighter.

    Abstract translation: 本发明涉及用微机械(MEMS)技术生产的可控法布里 - 珀罗干涉仪。 现有技术的干涉仪具有温度漂移,这导致复杂包装的不准确性和要求。 根据本发明,干涉仪装置在同一衬底上具有电可调干涉仪和参考干涉仪。 温度漂移用参考干涉仪测量,该信息用于用可调谐干涉仪补偿测量。 因此可以提高测量精度和稳定性,并且对包装的要求更轻。

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