公开(公告)号：US20230313380A1

公开(公告)日：2023-10-05

申请号：US18200497

申请日：2023-05-22

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Kenichi OHNO ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  David A. BRITZ ,  Pravin K. NARWANKAR ,  Thomas KNISLEY ,  Mark SALY ,  Jeffrey ANTHIS

IPC: C23C16/56 ,  C22C19/03 ,  C23C16/40

CPC classification number: C23C16/56 ,  C22C19/03 ,  C23C16/405

Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, an aerospace component has a body containing a nickel superalloy, a metal oxide template layer disposed on the body, and an aluminum oxide layer disposed between the body of the aerospace component and the metal oxide template layer. The metal oxide template layer contains chromium oxide, chromium oxide hydroxide, or a combination thereof. The aluminum oxide layer contains α-Al2O3. The metal oxide template layer and the aluminum oxide layer have a corundum crystal structure and have crystal structures with a lattice mismatch of about 0.1% to about 10%.

公开(公告)号：US20230167546A1

公开(公告)日：2023-06-01

申请号：US18159529

申请日：2023-01-25

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  David Alexander BRITZ ,  Thomas KNISLEY ,  Kenichi OHNO ,  Pravin K. NARWANKAR

IPC: C23C16/40 ,  C23C16/455 ,  C23C28/02 ,  C23C16/56

CPC classification number: C23C16/403 ,  C23C16/56 ,  C23C16/405 ,  C23C16/45525 ,  C23C28/02 ,  B64F5/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes depositing one or more layers on a surface of the aerospace component using an atomic layer deposition or chemical vapor deposition process, and performing a partial oxidation and annealing process to convert the one or more layers to a coalesced layer having a preferred phase crystalline assembly. During oxidation cycles, an aluminum depleted region is formed at the surface of the aerospace component, and an aluminum oxide region is formed between the aluminum depleted region and the coalesced layer. The coalesced layer forms a protective coating, which decreases the rate of aluminum depletion from the aerospace component and the rate of new aluminum oxide scale formation.

公开(公告)号：US20220154335A1

公开(公告)日：2022-05-19

申请号：US16951837

申请日：2020-11-18

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  David Alexander BRITZ ,  Lance A. SCUDDER

IPC: C23C16/455 ,  C23C16/40 ,  B64C1/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, an aerospace component containing a protective coating is provided and contains a superalloy substrate and a bond coating disposed on the superalloy substrate. The protective coating also contains a thermal barrier coating containing yttria-stabilized zirconia disposed on the bond coating, an oxide coating disposed on the thermal barrier coating, and an optional capping layer disposed on the oxide coating. The oxide coating contains a film stack containing two or more pairs of a first film and a second film, where the first film contains a first metal oxide and the second film contains a second metal oxide, and the first metal oxide has a different composition than the second metal oxide. The capping layer contains aluminum oxide, calcium oxide, magnesium oxide, or any combination thereof.

公开(公告)号：US20210254222A1

公开(公告)日：2021-08-19

申请号：US17313847

申请日：2021-05-06

Applicant: Applied Materials, Inc.

Inventor： David BRITZ ,  Pravin K. NARWANKAR ,  David THOMPSON ,  Yuriy MELNIK ,  Sukti CHATTERJEE

IPC: C23C28/00 ,  F01D5/28 ,  F01D5/18 ,  C23C16/455

Abstract: Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof and can have a thickness from 1 nm to 3,000 nm.

公开(公告)号：US20210156267A1

公开(公告)日：2021-05-27

申请号：US16821427

申请日：2020-03-17

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Lance A. SCUDDER ,  David Alexander BRITZ ,  Kenichi OHNO

IPC: F01D5/28 ,  F01D5/00

Abstract: Embodiments of the present disclosure generally relate to protective coatings on turbine blades, turbine disks, and other aerospace components and methods for depositing the protective coatings. In one or more embodiments, a turbine blade includes a blade portion and a root coupled to the blade portion, where the root contains a protective coating disposed thereon. The protective coating is or contains one or more deposited crystalline film containing at least one of a metal oxide, a metal nitride, or a metal oxynitride and has a thickness of about 100 nm to about 10 μm. In some examples, a turbine blade assembly includes a disk and a plurality of the turbine blades coupled to the disk. The protective coating is disposed on the root on the turbine blade and/or a receiving surface on the turbine disk.

公开(公告)号：US20200340107A1

公开(公告)日：2020-10-29

申请号：US16850856

申请日：2020-04-16

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  David A. BRITZ ,  Thomas KNISLEY ,  Kenichi OHNO ,  Pravin K. NARWANKAR

IPC: C23C16/40 ,  C23C16/455 ,  C23C16/56 ,  C23C28/02

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes depositing one or more layers on a surface of the aerospace component using an atomic layer deposition or chemical vapor deposition process, and performing a partial oxidation and annealing process to convert the one or more layers to a coalesced layer having a preferred phase crystalline assembly. During oxidation cycles, an aluminum depleted region is formed at the surface of the aerospace component, and an aluminum oxide region is formed between the aluminum depleted region and the coalesced layer. The coalesced layer forms a protective coating, which decreases the rate of aluminum depletion from the aerospace component and the rate of new aluminum oxide scale formation.

公开(公告)号：US20190284686A1

公开(公告)日：2019-09-19

申请号：US16356688

申请日：2019-03-18

Applicant: Applied Materials, Inc.

Inventor： Yuriy MELNIK ,  Sukti CHATTERJEE ,  Kaushal GANGAKHEDKAR ,  Jonathan FRANKEL ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR ,  David Alexander BRITZ ,  Thomas KNISLEY ,  Mark SALY ,  David THOMPSON

IPC: C23C16/30 ,  C23C16/455 ,  C23C16/56 ,  F01D5/28 ,  F01D9/02 ,  F01D25/12 ,  F01D25/14 ,  F01D25/28 ,  F23R3/28

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a chemical vapor deposition (CVD) process or a first atomic layer deposition (ALD) process and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second ALD process, where the first deposited layer and the second deposited layer have different compositions from each other.

公开(公告)号：US20180148832A1

公开(公告)日：2018-05-31

申请号：US15800249

申请日：2017-11-01

Applicant: APPLIED MATERIALS, INC.

Inventor： Sukti CHATTERJEE ,  LANCE SCUDDER ,  ERIC H. LIU ,  PRAVIN K. NARWANKAR ,  PRAMIT MANNA ,  ABHIJIT MALLICK

IPC: C23C16/26 ,  C23C16/48 ,  H01L21/02

CPC classification number: C23C16/26 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  H01L21/02115 ,  H01L21/02118 ,  H01L21/02205 ,  H01L21/02277 ,  H01L21/02337 ,  H01L21/02348

Abstract: In some embodiments, a method of processing a substrate disposed within a processing volume of a hot wire chemical vapor deposition (HWCVD) process chamber, includes: (a) providing a carbon containing precursor gas into the processing volume, the carbon containing precursor gas being provided into the processing volume from an inlet located a first distance above a surface of the substrate; (b) breaking hydrogen-carbon bonds within molecules of the carbon containing precursor via introduction of hydrogen radicals to the processing volume to deposit a flowable carbon layer atop the substrate, wherein the hydrogen radicals are formed by flowing a hydrogen containing gas over a plurality of filaments disposed within the processing volume above the substrate and the inlet.

公开(公告)号：US20240175119A1

公开(公告)日：2024-05-30

申请号：US18071391

申请日：2022-11-29

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Yuriy MELNIK ,  Lance A. SCUDDER

IPC: C23C16/02 ,  C23C16/40 ,  C23C16/455

CPC classification number: C23C16/0272 ,  C23C16/40 ,  C23C16/405 ,  C23C16/45527

Abstract: Embodiments of the present disclosure relate generally to aerospace components containing protective coatings and methods for depositing the protective coatings. The protective coatings can be anti-coking coatings to reduce or suppress coke formation when the aerospace component is heated in the presence of a fuel in a reducing environment. In one or more embodiments, a method for depositing a protective coating on an aerospace component includes depositing a barrier layer on a surface of the aerospace component and depositing a carbon oxidation catalyst layer on the barrier layer. The barrier layer can be or include one or more metal oxides, such as chromium oxide, tungsten oxide, titanium oxide, vanadium oxide, alloys thereof, or any combination thereof. The carbon oxidation catalyst layer can be or include cerium oxide or doped cerium oxide or one or more oxygen storage materials.

公开(公告)号：US20240076776A1

公开(公告)日：2024-03-07

申请号：US17767392

申请日：2020-07-17

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  David Alexander BRITZ

IPC: C23C16/455 ,  C23C16/02 ,  C23C16/40 ,  C23C28/04

CPC classification number: C23C16/45555 ,  C23C16/0272 ,  C23C16/403 ,  C23C16/45527 ,  C23C28/042

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. The protective coating can be anti-coking coatings to reduce or suppress coke formation when the aerospace component is heated in the presence of a fuel. In one or more embodiments, a method for depositing a protective coating on an aerospace component includes depositing an optional barrier layer on a surface of the aerospace component and depositing a catalytic oxidation layer on the barrier layer and/or directly on the aerospace component. The barrier layer can be or include aluminum oxide, magnesium-doped aluminum oxide, dopants thereof, or any combination thereof. The catalytic oxidation layer can be or include cerium oxide or one or more oxygen storage materials.