公开(公告)号：US4514638A

公开(公告)日：1985-04-30

申请号：US643108

申请日：1984-08-22

申请人： Burkhard Lischke ,  Juergen Frosien ,  Klaus Anger ,  Erich Plies

发明人： Burkhard Lischke ,  Juergen Frosien ,  Klaus Anger ,  Erich Plies

IPC分类号： H01J37/28 ,  H01J37/063 ,  H01J37/09 ,  H01J37/141 ,  H01J37/30 ,  H01J37/305 ,  H01L21/027 ,  H01J37/145

CPC分类号： H01J37/063 ,  H01J37/09 ,  H01J37/141 ,  H01J37/3007

摘要： An electron-optical system with a variable-shaped beam for generating and measuring microstructures, such as circuits on a semiconductor substrate, generates the variable-shaped electron beam by the use of electron-optical shadow projection imaging and has a remote focus multipole Wehnelt electrode for adjusting, focusing, and controlling the intensity of the electron beam. The system also has a ferrite polecylinder in the beam projections lens with field attenuation or may have a beam projection lens with an external air gap. The length of the electron beam is approximately 60 centimeters.

摘要翻译： 具有用于产生和测量微结构的可变形光束的电子 - 光学系统，例如半导体衬底上的电路，通过使用电子 - 光学阴影投影成像产生可变形电子束，并具有远程聚焦多极Wehnelt电极 用于调整，聚焦和控制电子束的强度。 该系统在具有场衰减的束投影透镜中还具有铁氧体吸收柱，或者可以具有具有外部气隙的束投影透镜。 电子束的长度约为60厘米。

公开(公告)号：US4393308A

公开(公告)日：1983-07-12

申请号：US240881

申请日：1981-03-05

申请人： Klaus Anger ,  Juergen Frosien ,  Burkhard Lischke ,  Erich Plies ,  Klaus Tonar

发明人： Klaus Anger ,  Juergen Frosien ,  Burkhard Lischke ,  Erich Plies ,  Klaus Tonar

IPC分类号： H01J37/063 ,  H01J37/06 ,  H01J37/153 ,  H01L21/027 ,  H01J37/00

CPC分类号： H01J37/06

摘要： A high current electron source with a narrow energy band of the type employed in an electron beam printer has a beam generating system consisting of a cathode and focusing electrodes and an anode with at least one electrode functioning to astigmatically focus at least one electron crossover in the low velocity range. For varying the position and shape of the crossover in a simple manner for adaptation to particular use conditions of the high current electron source, the Wehnelt electrode of the electron source consists of one or more cylinder lenses or of an electrostatic multipole element, or an electromagnetic multipole element is disposed in the plane of a conventional non-ferromagnetic Wehnelt electrode with a circular aperture for the electron beam. By pole reversal of the Wehnelt voltage or of the coil current and by changing the size of the current, the shape and azimuth position of the first crossover in the cathode space can be varied to any configuration. By so doing, an energy spread of the electrons is prevented and an optimum illumination of surfaces to be imaged is achieved.

摘要翻译： 具有在电子束打印机中使用的类型的窄能带的高电流电子源具有由阴极和聚焦电极组成的光束产生系统，以及具有至少一个电极的阳极，其功能是使至少一个电子交叉点在 低速范围 为了以简单的方式改变交叉的位置和形状以适应高电流电子源的特定使用条件，电子源的Wehnelt电极由一个或多个圆柱透镜或静电多极元件或电磁 多极元件设置在具有用于电子束的圆形孔的常规非铁磁Wehnelt电极的平面中。 通过Wehnelt电压或线圈电流的极点反转以及通过改变电流的大小，阴极空间中的第一交叉点的形状和方位角度可以变化到任何构造。 通过这样做，可以防止电子的能量扩散，并实现要成像的表面的最佳照明。

公开(公告)号：US4238680A

公开(公告)日：1980-12-09

申请号：US39878

申请日：1979-05-17

申请人： Klaus Anger ,  Juergen Frosien ,  Burkhard Lischke

发明人： Klaus Anger ,  Juergen Frosien ,  Burkhard Lischke

IPC分类号： H01J37/153 ,  H01J37/21 ,  H01J37/30 ,  H01L21/027 ,  G01K1/08

CPC分类号： H01J37/153 ,  H01J37/21 ,  H01J37/3007

摘要： A method and device for correcting errors and setting the focus of an electron optical condenser of a microprojector which condenser produces a bundle of axially parallel electron rays for illuminating a large surface transmission mask to create an image which is projected by means of an electron optical lens system on a surface of a wafer characterized by placing an annular field stop or diaphragm which passes a bundle of rays having a ring-shaped or annular cross section and recording the image in a plane preferably adjacent the surface of the wafer. The recording can be accomplished by utilizing a photographic plate or by utilizing a detector arrangement. When the image on the recording unit is the same size and shape as the annular field stop, then the electron optical condenser has the correct focal length and the source is disposed on the front focal plane.

摘要翻译： 一种用于校正误差并设置微型喷射器的电子光学冷凝器的焦点的方法和装置，该冷凝器产生一束轴向平行的电子射线，用于照射大的表面透射掩模以产生通过电子光学透镜投影的图像 系统，其特征在于放置通过具有环形或环形横截面的一束光线的环形场阻挡件或隔膜，并将图像记录在优选地邻近晶片表面的平面中。 记录可以通过利用照相板或利用检测器装置来实现。 当记录单元上的图像与环形场停止的尺寸和形状相同时，电子光学聚光器具有正确的焦距，并且源设置在前焦平面上。

公开(公告)号：US4985681A

公开(公告)日：1991-01-15

申请号：US813875

申请日：1985-12-27

申请人： Matthias Brunner ,  Juergen Frosien ,  Reinhold Schmitt ,  Burkhard Lischke

发明人： Matthias Brunner ,  Juergen Frosien ,  Reinhold Schmitt ,  Burkhard Lischke

IPC分类号： G01N23/225 ,  G01R31/02 ,  G01R31/302 ,  G01R31/305 ,  H01L21/66

CPC分类号： G01R31/024 ,  G01R31/305

摘要： For testing an interconnect network for shorts and interruptions, a point of the network to be tested is charged with a particle beam. Subsequently, a potential at least one further contact point is read with the same particle beam and an unaltered primary energy. An identification of potential occurs by documenting the secondary electrons triggered at the contact points. In order to avoid a disturbing change of potential during the measuring phase, the measuring time is only a fraction of the time for charging the network.

摘要翻译： 为了测试短路和中断的互连网络，要测试的网络的一点充满了粒子束。 随后，用相同的粒子束和未改变的一次能量读取潜在的至少一个另外的接触点。 通过记录在接触点处触发的二次电子来发生电位的识别。 为了避免测量阶段电位的干扰变化，测量时间只是网络充电时间的一小部分。

公开(公告)号：US4677296A

公开(公告)日：1987-06-30

申请号：US766504

申请日：1985-08-19

申请人： Burkhard Lischke ,  Juergen Frosien

发明人： Burkhard Lischke ,  Juergen Frosien

IPC分类号： G01B15/00 ,  G01R31/305 ,  H01J37/28 ,  G01N23/00

CPC分类号： G01R31/305 ,  G01B15/00 ,  H01J37/28

摘要： A method and apparatus for measuring lengths in a scanning particle microscope employ a device for generating a particle beam directed toward a specimen stage on which a specimen is mounted. A second stage is placed over the specimen stage above the specimen, the second stage carrying a calibrated grid structure covering the region of the specimen to be measured. The grid structure is disposed a distance from the specimen which is less than or equal to the depth of focus of the apparatus. The grid structure is of known dimensions, and is utilized to provide bench marks for measuring distances on the specimen, and can be displaced as needed to measure longer distances.

摘要翻译： 用于测量扫描粒子显微镜中的长度的方法和装置使用一种用于产生指向试样的样品台上的粒子束的装置。 第二阶段放置在样品上方的样品台上，第二阶段承载覆盖待测样品区域的校准网格结构。 栅格结构与试样的距离设置为小于或等于设备的焦深。 网格结构具有已知的尺寸，并且用于提供用于测量样本上的距离的基准点，并且可以根据需要移位以测量更长的距离。

公开(公告)号：US4785176A

公开(公告)日：1988-11-15

申请号：US30964

申请日：1987-03-27

申请人： Juergen Frosien ,  Erich Plies

发明人： Juergen Frosien ,  Erich Plies

IPC分类号： H01J37/12 ,  G01Q30/02 ,  H01J37/10 ,  H01J37/141 ,  H01J37/145 ,  H01J49/06

CPC分类号： H01J37/10 ,  H01J37/145

摘要： An electrostatic-magnetic lens is provided having either a symmetrical or asymmetrical magnetic lens which is overlaid with an electrostatic immersion lens. One electrode of the immersion lens is formed as a hollow cylinder, which is within an upper pole piece of the magnetic lens concentrically relative to the axis of symmetry thereof and extending into the region of the pole piece gap. The lower pole piece of the magnetic lens is preferably at a ground potential and clad with the beam guiding tube for protection against contamination and forming the lower electrode of the electrostatic immersion lens.

摘要翻译： 提供具有与静电浸没透镜重叠的对称或非对称磁性透镜的静电磁透镜。 浸没透镜的一个电极形成为中空圆柱体，其位于磁性透镜的上极片内，相对于其对称轴线同心并延伸到极片间隙的区域中。 磁透镜的下极片优选为接地电位，并与光束引导管一起包围以防止污染并形成静电浸没透镜的下电极。

公开(公告)号：US4335309A

公开(公告)日：1982-06-15

申请号：US172085

申请日：1980-07-24

申请人： Klaus Anger ,  Juergen Frosien

发明人： Klaus Anger ,  Juergen Frosien

IPC分类号： G21K1/087 ,  H01J37/147 ,  H01L21/027 ,  H05H7/00 ,  H01J37/00

CPC分类号： H01J37/1474

摘要： In an exemplary system, a two stage deflection system responds to a first control signal of low frequency such that extra-axial chromatic errors due to electrostatic and magnetic deflection are made equal and opposite. The magnetic and electrostatic deflection systems may be arranged in either order along the beam path just so the low frequency electrostatic deflection is one-half the magnetic deflection and is in an opposite direction at the target. A second higher frequency control signal controls only the electrostatic deflection system. Preferably the deflection velocities at the target produced by the two control signals are equal, with the higher frequency being an integral multiple of the lower frequency and with the control signals being poled to provide opposite deflections. When the two deflection velocities are superimposed, the resultant is then a step type deflection as a function of time.

摘要翻译： 在示例性系统中，两级偏转系统响应于低频的第一控制信号，使得由于静电和磁偏转引起的异轴色差误差相等而相反。 磁性和静电偏转系统可以沿着光束路径以任何顺序布置，因此低频静电偏转是磁偏转的一半，并且在目标处是相反的方向。 第二高频控制信号仅控制静电偏转系统。 优选地，由两个控制信号产生的目标处的偏转速度相等，其中较高的频率是较低频率的整数倍，并且控制信号极化以提供相反的偏转。 当两个偏转速度叠加时，所得到的是随时间变化的阶梯型偏转。

公开(公告)号：US07851768B2

公开(公告)日：2010-12-14

申请号：US12133147

申请日：2008-06-04

申请人： Juergen Frosien

发明人： Juergen Frosien

IPC分类号： H01J49/10 ,  H01J27/26 ,  H01J27/02

CPC分类号： H01J37/265 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/244 ,  H01J2237/24507 ,  H01J2237/24535

摘要： A focused ion beam device is described comprising a gas field ion source with an emitter emitting an ion beam including ions of gas, an ion beam column and a beam current control loop comprising a beam current measurement device. Furthermore, the focused ion beam device may have a sample charge control comprising measuring the sample charge. A method of operating a focused ion beam device is provided comprising applying a voltage between an emitter an electrode, applying gas to the emitter, emitting ions of a gas from the emitter and controlling a beam current by measuring the beam current with a beam current measurement device.

摘要翻译： 描述了一种聚焦离子束装置，其包括具有发射包括气体离子的离子束的发射体的气体场离子源，离子束列和包括束电流测量装置的束流控制回路。 此外，聚焦离子束装置可以具有包括测量样品电荷的样品电荷控制。 提供了一种操作聚焦离子束装置的方法，包括在发射极与电极之间施加电压，向发射体施加气体，从发射极发射气体的离子，并通过用束电流测量来测量束电流来控制束电流 设备。

公开(公告)号：US07675042B2

公开(公告)日：2010-03-09

申请号：US10578206

申请日：2004-11-04

申请人： Juergen Frosien

发明人： Juergen Frosien

IPC分类号： H01J29/02

CPC分类号： H01J9/18 ,  H01J37/02 ,  H01J37/10 ,  H01J2237/036

摘要： The present invention relates to a beam optical component (1, 201) for acting on a charged particle beam (63) including a first element (3; 203) having a first opening (9; 209) for acting on the charged particle beam (63), at least a second element (5; 205) for acting on the charged particle beam (63); at least one distance piece (20a, 20b, 20c) positioned between the first element (3; 203) and the second element (5; 205) to define a minimum distance between the first element (3; 203) and the second element (5; 205); and a first holding piece (30a; 30b; 30c) for abutting the first element (3) to the at least one distance piece (20a, 20b, 20c), whereby the first holding piece (30a; 30b; 30c) is attached to the at least one distance piece (20a, 20b, 20c). First and second elements (3; 203; 5; 205) are preferably electrodes or pole pieces to act on the charged particle beam by an electrostatic or magnetic force. With the first holding piece (30a; 30b; 30c) attached to the at least one distance piece, distorting mechanical forces on the first and second elements (3, 5) are reduced which improves the performance of the respective beam optical components (1; 201).

摘要翻译： 本发明涉及一种用于作用在带电粒子束（63）上的束光学部件（1,201），其包括具有用于作用在带电粒子束上的第一开口（9; 209）的第一元件（3; 203） 至少一个用于作用在带电粒子束（63）上的第二元件（5; 205）; 位于第一元件（3; 203）和第二元件（5; 205）之间的至少一个距离件（20a，20b，20c），以限定第一元件（3; 203）和第二元件 5; 205）; 以及用于将所述第一元件（3）抵接到所述至少一个距离片（20a，20b，20c）的第一保持片（30a; 30b; 30c），由此所述第一保持片（30a; 30b; 30c） 所述至少一个距离件（20a，20b，20c）。 第一和第二元件（3; 203; 5; 205）优选地是通过静电或磁力作用在带电粒子束上的电极或极片。 在第一固定件（30a; 30b; 30c）附接到至少一个距离件上，使第一和第二元件（3,5）上的机械力变形减小，这改善了各个光束组件（1; 201）。

公开(公告)号：US20080230694A1

公开(公告)日：2008-09-25

申请号：US10587105

申请日：2004-12-13

申请人： Juergen Frosien

发明人： Juergen Frosien

IPC分类号： G01N23/00 ,  H01J3/14

CPC分类号： H01J37/14 ,  H01J37/12 ,  H01J37/15 ,  H01J2237/1501

摘要： The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a first opening for focusing the charged particle beam; a second element having a second opening for focusing the charged particle beam and first driving means connected with at least one of the first element and the second element for aligning the first opening with respect to the second opening. With the first driving means, the first opening and the second opening can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focusing. The present invention also relates to a charged particle beam device that uses said beam optical component for focusing the charged particle beam, and a method to align first opening and second opening with respect to each other.

摘要翻译： 本发明涉及一种包括用于聚焦带电粒子束的带电粒子透镜的束光学部件，该带电粒子透镜包括具有用于聚焦带电粒子束的第一开口的第一元件; 第二元件具有用于聚焦带电粒子束的第二开口和与第一元件和第二元件中的至少一个连接的第一驱动装置，用于相对于第二开口对准第一开口。 利用第一驱动装置，第一开口和第二开口可以在光束操作期间相对于彼此对准，以提供光束光学部件的优良对准以获得更好的光束聚焦。 本发明还涉及使用所述光束光学部件来聚焦带电粒子束的带电粒子束装置，以及使第一开口和第二开口相对于彼此对准的方法。