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公开(公告)号：US20220283081A1
公开(公告)日：2022-09-08
申请号：US17637617
申请日：2020-08-31
Applicant: FUJIKIN INCORPORATED
Inventor： Masaaki NAGASE , Masahiko TAKIMOTO , Kazuteru TANAKA , Kouji NISHINO , Nobukazu IKEDA
Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, a first light-transmission member 11 for transmitting light from the light source to the measurement cell, a second light transmission member 12 for transmitting light from the measurement cell to the photodetector, a lens 3A provided in the fluid unit, the lens 3A being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensor 5 for measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuit 28 for detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.
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公开(公告)号：US20220197316A1
公开(公告)日：2022-06-23
申请号：US17605948
申请日：2020-04-16
Applicant: FUJIKIN INCORPORATED
Inventor： Kaoru HIRATA , Keisuke IDEGUCHI , Shinya OGAWA , Katsuyuki SUGITA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA , Hiroyuki ITO
Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
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公开(公告)号：US20210356346A1
公开(公告)日：2021-11-18
申请号：US17282016
申请日：2019-10-02
Applicant: FUJIKIN INCORPORATED
Inventor： Atsushi HIDAKA , Takatoshi NAKATANI , Nobukazu IKEDA , Kouji NISHINO , Ryousuke DOHI
Abstract: A pressure sensor includes a cylindrical member configured to be attached to a body having a fluid passage, and a pressure sensor unit connected to the cylindrical member for detecting a pressure of a fluid flowing through the fluid passage, wherein the cylindrical member is made of a nickel-molybdenum-chromium alloy material or a stainless steel material, wherein the pressure sensor unit includes a sensor body closed at one end with a diaphragm and a pressure detecting element for outputting displacement of the diaphragm as pressure, and wherein the sensor body is made of a cobalt-nickel alloy material, and is connected at an opening side end portion to one end portion of the cylindrical member.
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公开(公告)号：US20210240208A1
公开(公告)日：2021-08-05
申请号：US16972157
申请日：2019-06-19
Applicant: FUJIKIN INCORPORATED
Inventor： Kaoru HIRATA , Shinya OGAWA , Katsuyuki SUGITA , Kouji NISHINO , Nobukazu IKEDA
Abstract: A flow rate control method performed in a flow control device 100 having a first control valve 6 provided in the flow path, a second control valve 8 provided downstream of the first control valve, and a pressure sensor 3 for measuring a fluid pressure upstream of the first control valve and downstream of the second control valve, comprises, at the time of flow rate raise, a step (a) of determining a pressure remaining downstream of the first control valve by using a pressure sensor in a state of closing the second control valve, and a step (b) of controlling the pressure remaining downstream of the first control valve by adjusting the opening degree of the second control valve on the basis of the output from the pressure sensor, and flowing a fluid at the first flow rate downstream the second control valve.
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5.发明申请公开(公告)号：US20200088561A1
公开(公告)日：2020-03-19
申请号：US16471768
申请日：2017-12-22
Applicant: FUJIKIN INCORPORATED
Inventor： Atsushi HIDAKA , Takatoshi NAKATANI , Satoru YAMASHITA , Katsuyuki SUGITA , Kaoru HIRATA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA
IPC: G01F23/22 , B01J4/02 , C23C16/448 , H01L21/67 , G05D9/12
Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level. The liquid level detecting unit detects the change in the relative position of the liquid level relative to the resistive temperature detector by determining whether a change width of the current value flowing through the resistive temperature detector during a predetermined period of time is positive or negative, and whether the change width is not less than a predetermined value. As a result, the position of the liquid level can be accurately detected without being affected by the variation in the characteristics of the resistive temperature detector.
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Patent Agency Ranking
公开(公告)号：US20190250648A1
公开(公告)日：2019-08-15
申请号：US16317692
申请日：2017-07-25
Applicant: FUJIKIN INCORPORATED
Inventor： Kaoru HIRATA , Katsuyuki SUGITA , Nobukazu IKEDA , Kouji NISHINO
IPC: G05D7/06
CPC classification number: G05D7/0635 , G05D7/06
Abstract: A pressure-type flow rate control device includes a control valve; a pressure sensor provided downstream of the control valve; an orifice-built-in valve provided downstream of the pressure sensor; and a control unit connected to the control valve and pressure sensor. The built-in orifice valve has a valve mechanism comprising a valve seat body and a valve element for opening/closing a flow path; a drive mechanism for driving the valve mechanism, and an orifice member provided in the vicinity of the valve mechanism. The pressure-type flow rate control device further includes an opening/closing-detection mechanism for detecting the open/closed state of the valve mechanism, the control unit being configured to receive a detection signal from the opening/closing-detection mechanism.
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7.发明申请公开(公告)号：US20190017855A1
公开(公告)日：2019-01-17
申请号：US16069126
申请日：2017-01-12
Applicant: FUJIKIN INCORPORATED
Inventor： Yohei SAWADA , Nobukazu IKEDA , Kouji NISHINO , Masaaki NAGASE
Abstract: A gas supply system includes a flow controller, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage branching from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensor that detects a pressure in a flow passage surrounded by the first, second, and third shutoff valves, a temperature sensor that detects a temperature in the flow passage, a volume measuring tank having a known volume connected downstream of the third shutoff valve, and a controller that obtains a volume of the flow passage by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate using the passage volume and outputs of the pressure and temperature sensors.
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8.发明申请公开(公告)号：US20170268919A1
公开(公告)日：2017-09-21
申请号：US15531889
申请日：2015-11-24
Applicant: FUJIKIN INCORPORATED
Inventor： Kaoru HIRATA , Katsuyuki SUGITA , Atsushi HIDAKA , Kouji NISHINO , Nobukazu IKEDA
IPC: G01F23/24
CPC classification number: G01F23/246 , G01F23/241 , G01F23/243
Abstract: A liquid level meter includes a first resistive temperature detector; a first temperature measuring body a liquid level detection section a temperature detection section detecting the temperatures of the first resistive temperature detector and the first temperature measuring body; a current control section determining a value of a current to apply to the first resistive temperature detector such that a difference between the temperatures of the first resistive temperature detector and the first temperature measuring body detected by the temperature detection section to be a first constant value; and a power supply unit supplying a current of the determined current value to the first resistive temperature detector; wherein the liquid level detection section determines whether the first resistive temperature detector is present in a liquid or outside of the liquid using the value of the current applied to the first resistive temperature detector.
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9.发明申请PRESSURE-TYPE FLOW CONTROL DEVICE AND METHOD FOR PREVENTING OVERSHOOTING AT START OF FLOW CONTROL PERFORMED BY SAID DEVICE 有权压力型流量控制装置及在设备开始流动控制时防止过冲的方法公开(公告)号：US20160327963A1
公开(公告)日：2016-11-10
申请号：US15110208
申请日：2015-01-15
Applicant: FUJIKIN INCORPORATED
Inventor： Kaoru HIRATA , Nobukazu IKEDA , Kouji NISHINO , Ryousuke DOHI , Katsuyuki SUGITA , Masaaki NAGASE
CPC classification number: G05D7/0635 , F16K7/14 , F16K7/16 , F16K31/004 , F16K31/02 , F16K31/06 , F16K31/12 , G05D7/0641 , H01L21/67253
Abstract: The pressure-type flow control device includes: a main body provided with a fluid channel communicating between a fluid inlet and a fluid outlet and an exhaust channel communicating between the fluid channel and an exhaust outlet; a pressure control valve fixed to a fluid inlet side of the main body for opening or closing the upstream side of the fluid channel; a first pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; an on/off valve for opening or closing the fluid channel on the downstream side of the first pressure sensor; and an exhaust valve for opening or closing the exhaust channel.
Abstract translation: 压力型流量控制装置包括：主体，设置有在流体入口和流体出口之间连通的流体通道和在流体通道和排气出口之间连通的排气通道; 固定到主体的流体入口侧的压力控制阀，用于打开或关闭流体通道的上游侧; 第一压力传感器，用于检测控制阀下游侧的流体通道的内部压力; 设置在排气通道的分支点的下游侧的流体通道中的孔口; 用于打开或关闭第一压力传感器下游侧的流体通道的开/关阀; 以及用于打开或关闭排气通道的排气阀。
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公开(公告)号：US20230121563A1
公开(公告)日：2023-04-20
申请号：US17906064
申请日：2021-03-18
Applicant: FUJIKIN INCORPORATED
Inventor： Takatoshi NAKATANI , Atsushi HIDAKA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA
IPC: G01F22/02 , G05D7/06 , G05B19/416
Abstract: A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.
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