公开(公告)号：US20250006630A1

公开(公告)日：2025-01-02

申请号：US18342130

申请日：2023-06-27

Applicant: Intel Corporation

Inventor： Carla Moran Guizan ,  Peter Baumgartner ,  Thomas Wagner ,  Georg Seidemann ,  Michael Langenbuch ,  Mamatha Yakkegondi Virupakshappa ,  Jonathan Jensen ,  Roshini Sachithanandan ,  Philipp Riess

IPC: H01L23/522 ,  H01L23/00 ,  H01L23/528 ,  H01L25/065

Abstract: Described herein are integrated circuit devices that include conductive structures formed by direct bonding of different components, e.g., direct bonding of two dies, or of a die to a wafer. The conductive structures are formed from a top metallization layer of each of the components. For example, elongated conductive structures at the top metallization layer may be patterned and bonded to form large interconnects for high-frequency and/or high-power signals. In another example, the bonded conductive structures may form radio frequency passive devices, such as inductors or transformers.

公开(公告)号：US20230197615A1

公开(公告)日：2023-06-22

申请号：US17557134

申请日：2021-12-21

Applicant: Intel Corporation

Inventor： Peter Baumgartner ,  Bernd Waidhas ,  Wolfgang Molzer ,  Klaus Herold ,  Joachim Singer ,  Michael Langenbuch ,  Thomas Wagner

IPC: H01L23/528 ,  H01L23/64 ,  H01L23/522

CPC classification number: H01L23/5286 ,  H01L23/645 ,  H01L23/5226

Abstract: IC devices including transformers that includes two electrically conductive layers are disclosed. An example IC device includes a transformer that includes a first coil, a second coil, and a magnetic core coupled to the two coils. The first coil includes a portion or the whole electrically conductive layers at the backside of a support structure. The second coil includes a portion or the whole electrically conductive layers at either the frontside or the backside of the support structure. The two coils may have a lateral coupling, vertical coupling, or other types of couplings. The transformer is coupled to a semiconductor device over or at least partially in the support structure. The semiconductor device may be at the frontside of the support structure. The transformer can be coupled to the semiconductor device by TSVs. The IC device may also include BPRs that facilitate backside power delivery to the semiconductor device.

公开(公告)号：US20230068318A1

公开(公告)日：2023-03-02

申请号：US17459986

申请日：2021-08-27

Applicant: Intel Corporation

Inventor： Richard Geiger ,  Georgios Panagopoulos ,  Luis Felipe Giles ,  Peter Baumgartner ,  Harald Gossner ,  Sansaptak Dasgupta ,  Marko Radosavljevic ,  Han Wui Then

IPC: H01L29/207 ,  H01L29/20 ,  H01L27/06 ,  H01L29/66

Abstract: Disclosed herein are IC devices, packages, and device assemblies that include III-N diodes with n-doped wells and capping layers. An example IC device includes a support structure and a III-N layer, provided over a portion of the support structure, the III-N layer including an n-doped well of a III-N semiconductor material having n-type dopants with a dopant concentration of at least 5×1017 dopants per cubic centimeter. The IC device further includes a first and a second electrodes and at least one capping layer. The first electrode interfaces a first portion of the n-doped well. The capping layer interfaces a second portion of the n-doped well and includes a semiconductor material with a dopant concentration below 1017 dopants per cubic centimeter. The second electrode is provided so that the capping layer is between the second portion of the n-doped well and the second electrode.

公开(公告)号：US12034085B2

公开(公告)日：2024-07-09

申请号：US17848275

申请日：2022-06-23

Applicant: Intel Corporation

Inventor： Harald Gossner ,  Peter Baumgartner ,  Uwe Hodel ,  Domagoj Siprak ,  Stephan Leuschner ,  Richard Geiger ,  Han Wui Then ,  Marko Radosavljevic ,  Sansaptak Dasgupta

IPC: H01L29/66 ,  H01L29/06 ,  H01L29/20 ,  H01L29/778 ,  H01L29/93

CPC classification number: H01L29/93 ,  H01L29/0649 ,  H01L29/2003 ,  H01L29/778

Abstract: A variable capacitance III-N device having multiple two-dimensional electron gas (2DEG) layers are described. In some embodiments, the device comprises a first source and a first drain; a first polarization layer adjacent to the first source and the first drain; a first channel layer coupled to the first source and the first drain and adjacent to the first polarization layer, the first channel layer comprising a first 2DEG region; a second source and a second drain; a second polarization layer adjacent to the second source and the second drain; and a second channel layer coupled to the second source and the second drain and adjacent to the second polarization layer, the second channel layer comprising a second 2DEG region, wherein the second channel layer is over the first polarization layer.

公开(公告)号：US20230197598A1

公开(公告)日：2023-06-22

申请号：US17554004

申请日：2021-12-17

Applicant: Intel Corporation

Inventor： Georgios Panagopoulos ,  Richard Geiger ,  Peter Baumgartner ,  Harald Gossner ,  Uwe Hodel ,  Michael Langenbuch ,  Johannes Xaver Rauh ,  Alexander Bechtold ,  Richard Hudeczek ,  Carla Moran Guizan

IPC: H01L23/522 ,  H01L21/8238 ,  H01L23/528 ,  H01L23/535 ,  H01L27/092

CPC classification number: H01L23/5226 ,  H01L21/823821 ,  H01L21/823871 ,  H01L23/5286 ,  H01L23/535 ,  H01L27/0924

Abstract: IC devices including inductors or transformers formed based on BPRs are disclosed. An example IC device includes semiconductor structures of one or more transistors, an electrically conductive layer, a support structure comprising a semiconductor material, and an inductor. The inductor includes an electrical conductor constituted by a power rail buried in the support structure. The inductor also includes a magnetic core coupled to the electrical conductor. The magnetic core includes magnetic rails buried in the support structure, magnetic TSVs buried in the support structure, and a magnetic plate at the backside of the support structure. The magnetic core includes a magnetic material, such as Fe, NiFe, CoZrTa, etc. In some embodiments, the IC device includes another power rail that is buried in the support structure and constitutes another electrical conductor coupled to the magnetic core. The two power rails and magnetic core can constitute a transformer.

公开(公告)号：US11380806B2

公开(公告)日：2022-07-05

申请号：US16641222

申请日：2017-09-28

Applicant: INTEL CORPORATION

Inventor： Harald Gossner ,  Peter Baumgartner ,  Uwe Hodel ,  Domagoj Siprak ,  Stephan Leuschner ,  Richard Geiger ,  Han Wui Then ,  Marko Radosavljevic ,  Sansaptak Dasgupta

IPC: H01L29/93 ,  H01L29/06 ,  H01L29/20 ,  H01L29/778

Abstract: A variable capacitance III-N device having multiple two-dimensional electron gas (2DEG) layers are described. In some embodiments, the device comprises a first source and a first drain; a first polarization layer adjacent to the first source and the first drain; a first channel layer coupled to the first source and the first drain and adjacent to the first polarization layer, the first channel layer comprising a first 2DEG region; a second source and a second drain; a second polarization layer adjacent to the second source and the second drain; and a second channel layer coupled to the second source and the second drain and adjacent to the second polarization layer, the second channel layer comprising a second 2DEG region, wherein the second channel layer is over the first polarization layer.

公开(公告)号：US20200220030A1

公开(公告)日：2020-07-09

申请号：US16641222

申请日：2017-09-28

Applicant: INTEL CORPORATION

Inventor： Harald Gossner ,  Peter Baumgartner ,  Uwe Hodel ,  Domagoj Siprak ,  Stephan Leuschner ,  Richard Geiger ,  Han Wui Then ,  Marko Radosavljevic ,  Sansaptak Dasgupta

IPC: H01L29/93 ,  H01L29/20 ,  H01L29/06 ,  H01L29/778

Abstract: A variable capacitance III-N device having multiple two-dimensional electron gas (2DEG) layers are described. In some embodiments, the device comprises a first source and a first drain; a first polarization layer adjacent to the first source and the first drain; a first channel layer coupled to the first source and the first drain and adjacent to the first polarization layer, the first channel layer comprising a first 2DEG region; a second source and a second drain; a second polarization layer adjacent to the second source and the second drain; and a second channel layer coupled to the second source and the second drain and adjacent to the second polarization layer, the second channel layer comprising a second 2DEG region, wherein the second channel layer is over the first polarization layer.

公开(公告)号：US20240387353A1

公开(公告)日：2024-11-21

申请号：US18320763

申请日：2023-05-19

Applicant: Intel Corporation

Inventor： Michael Langenbuch ,  Carla Moran Guizan ,  Mamatha Yakkegondi Virupakshappa ,  Roshini Sachithanandan ,  Philipp Riess ,  Jonathan Jensen ,  Peter Baumgartner ,  Georg Seidemann

IPC: H01L23/522 ,  H01L23/66

Abstract: Methods and apparatus are disclosed for implementing capacitors in semiconductor devices. An example semiconductor die includes a first dielectric material disposed between a first metal interconnect and a second metal interconnect; and a capacitor positioned within a via extending through the first dielectric material between the first and second metal interconnects, the capacitor including a second dielectric material disposed in the via between the first and second metal interconnects.

公开(公告)号：US20230187313A1

公开(公告)日：2023-06-15

申请号：US17550335

申请日：2021-12-14

Applicant: Intel Corporation

Inventor： Carla Moran Guizan ,  Peter Baumgartner ,  Richard Geiger ,  Alexander Bechtold ,  Uwe Hodel ,  Richard Hudeczek ,  Walther Lutz ,  Georgios Panagopoulos ,  Johannes Xaver Rauh ,  Roshini Sachithanandan

IPC: H01L23/48 ,  H01L23/66 ,  H01L23/528 ,  H01L27/088

CPC classification number: H01L23/481 ,  H01L23/66 ,  H01L23/5286 ,  H01L27/0886 ,  H01L2223/6616

Abstract: IC devices including transmission lines are disclosed. An example IC device includes two electrically conductive layers (first and second layers) and a support structure between the two electrically conductive layers. The first layer is coupled to transistors over or at least partially in the support structure. A shield of a transmission is placed in the first layer. Conductors of the transmission line are placed in the second layer and are coupled to the first layer by TSVs. Another example IC device includes three electrically conductive layers (first, second, and third layers). The first layer is coupled to transistors over or at least partially in the support structure. A shield of a transmission line is placed in the second layer and conductors of the transmission line are placed in the third layer. The conductors are coupled to the first layer by TSVs and coupled to the second layer by vias.

公开(公告)号：US11545586B2

公开(公告)日：2023-01-03

申请号：US16643929

申请日：2017-09-29

Applicant: INTEL CORPORATION

Inventor： Harald Gossner ,  Peter Baumgartner ,  Uwe Hodel ,  Domagoj Siprak ,  Stephan Leuschner ,  Richard Geiger ,  Han Wui Then ,  Marko Radosavljevic ,  Sansaptak Dasgupta

IPC: H01L29/872 ,  H01L29/20 ,  H01L29/66 ,  H01L29/205

Abstract: A Group III-Nitride (III-N) device structure is provided which comprises: a heterostructure having three or more layers comprising III-N material, an anode within a recess that extends through two or more of the layers, wherein the anode is in electrical contact with the first layer, a cathode comprising donor dopants, wherein the cathode is on the first layer of the heterostructure; and a conducting region in the first layer in direct contact to the cathode and conductively connected to the anode. Other embodiments are also disclosed and claimed.