公开(公告)号：US07901045B2

公开(公告)日：2011-03-08

申请号：US12022741

申请日：2008-01-30

申请人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

发明人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

IPC分类号： B41J2/14 ,  H01L23/488

CPC分类号： B41J2/1603 ,  B41J2/14072 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1643 ,  B41J2/1645 ,  H01L2224/05001 ,  H01L2224/05022 ,  H01L2224/05027 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05572 ,  H01L2224/10126 ,  H01L2224/13565 ,  H01L2924/00014 ,  H01L2924/12044 ,  H01L2924/00 ,  H01L2224/05599

摘要： The present invention provides an ink jet recording head which includes a substrate, an energy generating element which is disposed on the substrate and generates energy for discharging a liquid, an electrode which is disposed on the substrate and is electrically connected to the energy generating element, a passage-forming member which is disposed on the substrate, an adhesion layer which is disposed on the substrate and facilitates adhesion between the passage-forming member and the substrate, and a bump disposed on the electrode. The area of an upper surface of the bump is larger than the area of a lower surface of the bump, the lower surface being located on the substrate side, the upper surface being located opposite the lower surface, and a side face of the bump is covered with the adhesion layer. Thereby, a protective film is formed around the bump.

摘要翻译： 本发明提供了一种喷墨记录头，其包括基板，设置在基板上并产生用于排出液体的能量的能量产生元件，设置在基板上并电连接到能量产生元件的电极， 设置在基板上的通道形成部件，设置在基板上的粘合层，并且促进通道形成部件和基板之间的粘合，以及设置在电极上的凸块。 凸块的上表面的面积大于凸块的下表面的面积，下表面位于基板侧，上表面与下表面相对，凸块的侧面为 覆盖着粘附层。 由此，在凸块周围形成保护膜。

公开(公告)号：US20080180487A1

公开(公告)日：2008-07-31

申请号：US12022741

申请日：2008-01-30

申请人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

发明人： Kazuya Abe ,  Kenji Ono ,  Toshiyasu Sakai ,  Hiroyuki Abo ,  Noriyasu Ozaki ,  Mitsuru Chida

IPC分类号： B41J2/14 ,  G11B5/127

CPC分类号： B41J2/1603 ,  B41J2/14072 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1643 ,  B41J2/1645 ,  H01L2224/05001 ,  H01L2224/05022 ,  H01L2224/05027 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05184 ,  H01L2224/05572 ,  H01L2224/10126 ,  H01L2224/13565 ,  H01L2924/00014 ,  H01L2924/12044 ,  H01L2924/00 ,  H01L2224/05599

摘要： The present invention provides an ink jet recording head which includes a substrate, an energy generating element which is disposed on the substrate and generates energy for discharging a liquid, an electrode which is disposed on the substrate and is electrically connected to the energy generating element, a passage-forming member which is disposed on the substrate, an adhesion layer which is disposed on the substrate and facilitates adhesion between the passage-forming member and the substrate, and a bump disposed on the electrode. The area of an upper surface of the bump is larger than the area of a lower surface of the bump, the lower surface being located on the substrate side, the upper surface being located opposite the lower surface, and a side face of the bump is covered with the adhesion layer. Thereby, a protective film is formed around the bump.

摘要翻译： 本发明提供了一种喷墨记录头，其包括基板，设置在基板上并产生用于排出液体的能量的能量产生元件，设置在基板上并电连接到能量产生元件的电极， 设置在基板上的通道形成部件，设置在基板上的粘合层，并且促进通道形成部件和基板之间的粘合，以及设置在电极上的凸块。 凸块的上表面的面积大于凸块的下表面的面积，下表面位于基板侧，上表面与下表面相对，凸块的侧面为 覆盖着粘附层。 由此，在凸块周围形成保护膜。

公开(公告)号：US08366950B2

公开(公告)日：2013-02-05

申请号：US12204802

申请日：2008-09-05

申请人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

发明人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

IPC分类号： G01D15/00

CPC分类号： B41J2/14145 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645

摘要： A method for manufacturing a liquid-ejection head substrate including a silicon substrate having a supply port for supplying liquid is provided. The method includes: forming an etching mask layer on a surface of the silicon substrate, the etching mask layer having an opening in a portion corresponding to the supply port; forming a first recess in the surface of the silicon substrate by anisotropically etching the silicon substrate through the opening in the etching mask layer; forming a second recess that extends toward the other surface of the silicon substrate, in a surface of the first recess in the silicon substrate; and forming the supply port by anisotropically etching the silicon substrate from the surface provided with the second recess.

摘要翻译： 提供一种制造包括具有用于供应液体的供给口的硅基板的液体喷射头基板的方法。 该方法包括：在硅衬底的表面上形成蚀刻掩模层，该蚀刻掩模层在与供给口对应的部分中具有开口; 通过在蚀刻掩模层中的开口各向异性蚀刻硅衬底，在硅衬底的表面中形成第一凹槽; 形成在所述硅衬底的所述第一凹部的表面中朝向所述硅衬底的另一表面延伸的第二凹部; 以及通过从设置有所述第二凹部的表面各向异性地蚀刻所述硅衬底而形成所述供给口。

公开(公告)号：US20090065474A1

公开(公告)日：2009-03-12

申请号：US12204802

申请日：2008-09-05

申请人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

发明人： Mitsuru Chida ,  Toshiyasu Sakai ,  Noriyasu Ozaki ,  Hiroyuki Abo ,  Kazuya Abe ,  Kenji Ono

IPC分类号： B41J2/16

CPC分类号： B41J2/14145 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645

摘要： A method for manufacturing a liquid-ejection head substrate including a silicon substrate having a supply port for supplying liquid is provided. The method includes: forming an etching mask layer on a surface of the silicon substrate, the etching mask layer having an opening in a portion corresponding to the supply port; forming a first recess in the surface of the silicon substrate by anisotropically etching the silicon substrate through the opening in the etching mask layer; forming a second recess that extends toward the other surface of the silicon substrate, in a surface of the first recess in the silicon substrate; and forming the supply port by anisotropically etching the silicon substrate from the surface provided with the second recess.

摘要翻译： 提供一种制造包括具有用于供应液体的供给口的硅基板的液体喷射头基板的方法。 该方法包括：在硅衬底的表面上形成蚀刻掩模层，该蚀刻掩模层在与供给口对应的部分中具有开口; 通过在蚀刻掩模层中的开口各向异性蚀刻硅衬底，在硅衬底的表面中形成第一凹槽; 形成在所述硅衬底的所述第一凹部的表面中朝向所述硅衬底的另一表面延伸的第二凹部; 以及通过从设置有所述第二凹部的表面各向异性地蚀刻所述硅衬底而形成所述供给口。

公开(公告)号：US08057017B2

公开(公告)日：2011-11-15

申请号：US12878339

申请日：2010-09-09

申请人： Toshiyasu Sakai ,  Shuji Koyama ,  Kenji Ono ,  Jun Yamamuro

发明人： Toshiyasu Sakai ,  Shuji Koyama ,  Kenji Ono ,  Jun Yamamuro

IPC分类号： B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645 ,  H01L21/76898

摘要： A manufacturing method for a substrate for an ink jet head, including formation of an ink supply port in a silicon substrate, the method includes a step of forming, on one side of the substrate, an etching mask layer having an opening at a position corresponding ink supply port; a step of forming unpenetrated holes through the opening of the etching mask layer in at least two rows in a longitudinal direction of the opening; and a step of forming the ink supply port by crystal anisotropic etching of the substrate in the opening.

摘要翻译： 一种用于喷墨头的基​​板的制造方法，包括在硅基板中形成供墨口，该方法包括以下步骤：在基板的一侧上形成在相应位置具有开口的蚀刻掩模层 供墨口; 通过蚀刻掩模层的开口沿开口的纵向至少两行形成未穿透孔的步骤; 以及通过在开口中的基板的晶体各向异性蚀刻形成供墨口的步骤。

公开(公告)号：US07591071B2

公开(公告)日：2009-09-22

申请号：US11340467

申请日：2006-01-27

申请人： Satoshi Ibe ,  Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Kazuaki Shibata ,  Toshiyasu Sakai

发明人： Satoshi Ibe ,  Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Kazuaki Shibata ,  Toshiyasu Sakai

IPC分类号： B21D53/76 ,  H01L21/70

CPC分类号： B41J2/1603 ,  B41J2/14072 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1643 ,  B41J2/1646 ,  H01L24/03 ,  H01L24/05 ,  H01L24/81 ,  H01L2224/02371 ,  H01L2224/04042 ,  H01L2224/08137 ,  H01L2224/16137 ,  H01L2224/45124 ,  H01L2224/4847 ,  H01L2224/8592 ,  H01L2924/10253 ,  Y10T29/49155 ,  Y10T29/49401 ,  Y10T29/49798 ,  H01L2924/00

摘要： A semiconductor device includes a lateral end surface and a connection electrode for external electrical connection. The connection electrode is exposed at the side surface. A manufacturing method of the semiconductor device includes steps of forming a linear recess in a silicon substrate between adjacent semiconductor devices, forming, on an inner surface of the recess, the electrode for external electrical connection of one of the semiconductor devices, and a step of separating the one semiconductor device from another on the silicon substrate by cutting the silicon substrate along the linear recess. Forming the electrode includes steps of forming a metal thin film astride a cutting line at which the silicon substrate is to be cut, forming a resist layer and patterning the resist layer on the metal thin film, growing metal at a portion not having the patterned resist layer, and removing the patterned resist layer and the metal thin film below the patterned resist layer. The connection electrode is provided by the metal grown in the growing step.

摘要翻译： 半导体器件包括用于外部电连接的侧端面和连接电极。 连接电极在侧面露出。 半导体器件的制造方法包括以下步骤：在相邻的半导体器件之间的硅衬底中形成线性凹槽，在凹部的内表面上形成用于半导体器件之一的外部电连接的电极，以及 通过沿着线状凹部切割硅衬底，将硅衬底上的一个半导体器件与另一个半导体器件分离。 形成电极包括跨越切割线切割硅衬底的切割线形成金属薄膜的步骤，形成抗蚀剂层并在金属薄膜上图案化抗蚀剂层，在不具有图案化抗蚀剂的部分上生长金属 层，并且去除图案化的抗蚀剂层和在图案化的抗蚀剂层下方的金属薄膜。 连接电极由生长步骤中生长的金属提供。

公开(公告)号：US20070120902A1

公开(公告)日：2007-05-31

申请号：US11561058

申请日：2006-11-17

申请人： TERUO OZAKI ,  Ichiro Saito ,  Kenji Ono ,  Satoshi Ibe ,  Toshiyasu Sakai ,  Sakai Yokoyama ,  Kazuaki Shibata

发明人： TERUO OZAKI ,  Ichiro Saito ,  Kenji Ono ,  Satoshi Ibe ,  Toshiyasu Sakai ,  Sakai Yokoyama ,  Kazuaki Shibata

IPC分类号： B41J2/175

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  Y10T29/49401

摘要： An ink jet recording head includes a substrate provided with an energy generating element to generate energy used for discharging ink, a discharge port through which the ink is discharged, a supply port for supplying the ink, and an ink path formed on the substrate for making the discharge port and the supply port communicate with each other, wherein wall members forming the ink path are made of an inorganic material, and a space between adjacent ink paths is filled up by a metal layer.

摘要翻译： 喷墨记录头包括具有能量产生元件以产生用于排出墨水的能量的基底，排出墨水的排出口，用于供应墨水的供给口以及形成在该基底上的油墨通路， 排出口和供给口彼此连通，其中形成墨水通道的壁构件由无机材料制成，并且相邻墨水路径之间的空间被金属层填充。

公开(公告)号：US20060033780A1

公开(公告)日：2006-02-16

申请号：US11203129

申请日：2005-08-15

申请人： Kenji Ono ,  Teruo Ozaki ,  Toshiyasu Sakai ,  Ichiro Saito ,  Satoshi Ibe ,  Sakai Yokoyama ,  Kazuaki Shibata

发明人： Kenji Ono ,  Teruo Ozaki ,  Toshiyasu Sakai ,  Ichiro Saito ,  Satoshi Ibe ,  Sakai Yokoyama ,  Kazuaki Shibata

IPC分类号： B41J2/05

CPC分类号： B41J2/1628 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/1603

摘要： An ink jet head circuit board is provided which has heaters to generate thermal energy for ejecting ink as they are energized. This circuit board is so constructed as to reduce wire resistances for the heaters while at the same time preventing an increase in the size of the board and realizing a high-density integration of the heaters required for high resolution printing. This construction is made possible by forming electrode wires of first and second electrode wire layers to reduce an area that the wire patterns for the heater occupy on the circuit board. In reducing the effective thickness of protective insulation layer formed on the heater to prevent a possible degradation of thermal efficiency, one of the protective insulation layers over the electrode wires is removed from the heater, depending on the thickness of the electrode wires.

摘要翻译： 提供了一种喷墨头电路板，其具有加热器以产生用于在通电时喷射墨水的热能。 该电路板被构造成降低加热器的导线电阻，同时防止板的尺寸增加，并实现高分辨率印刷所需的加热器的高密度集成。 通过形成第一电极线层和第二电极线层的电极线，能够减小加热器的电线图案在电路基板上的占有面积。 在减小加热器上形成的保护绝缘层的有效厚度以防止热效率可能降低的情况下，根据电极线的厚度，从加热器上除去电极线上的保护绝缘层之一。

公开(公告)号：US07727411B2

公开(公告)日：2010-06-01

申请号：US11681411

申请日：2007-03-02

申请人： Jun Yamamuro ,  Shuji Koyama ,  Kenji Ono ,  Toshiyasu Sakai

发明人： Jun Yamamuro ,  Shuji Koyama ,  Kenji Ono ,  Toshiyasu Sakai

IPC分类号： B41J2/16

CPC分类号： B41J2/1603 ,  B41J2/14145 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/49401

摘要： The present invention provides a manufacturing method of a substrate for an ink jet head including forming an ink supply opening to a silicon substrate, including (a) forming, at the back surface of the silicon substrate, an etching mask layer, which has an opening that is asymmetric with a center line, extending in the longitudinal direction, of an area on the surface of the silicon substrate where the ink supply opening is to be formed; (b) forming a non-through hole on the silicon substrate via the opening on the etching mask layer; and (c) forming the ink supply opening by performing a crystal anisotropic etching to the silicon substrate from the opening.

摘要翻译： 本发明提供一种喷墨头用基板的制造方法，其特征在于，包括：（a）在所述硅基板的背面形成有具有开口部的蚀刻掩模层 在硅基板的要形成供墨口的表面上的区域的沿长度方向延伸的中心线是不对称的; （b）通过蚀刻掩模层上的开口在硅衬底上形成非通孔; 和（c）通过从开口对硅衬底进行结晶各向异性蚀刻来形成供墨口。

公开(公告)号：US07681993B2

公开(公告)日：2010-03-23

申请号：US11203129

申请日：2005-08-15

申请人： Kenji Ono ,  Teruo Ozaki ,  Toshiyasu Sakai ,  Ichiro Saito ,  Satoshi Ibe ,  Sakai Yokoyama ,  Kazuaki Shibata

发明人： Kenji Ono ,  Teruo Ozaki ,  Toshiyasu Sakai ,  Ichiro Saito ,  Satoshi Ibe ,  Sakai Yokoyama ,  Kazuaki Shibata

IPC分类号： B41J2/05

CPC分类号： B41J2/1628 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/1603

摘要： An ink jet head circuit board is provided which has heaters to generate thermal energy for ejecting ink as they are energized. This circuit board is so constructed as to reduce wire resistances for the heaters while at the same time preventing an increase in the size of the board and realizing a high-density integration of the heaters required for high resolution printing. This construction is made possible by forming electrode wires of first and second electrode wire layers to reduce an area that the wire patterns for the heater occupy on the circuit board. In reducing the effective thickness of protective insulation layer formed on the heater to prevent a possible degradation of thermal efficiency, one of the protective insulation layers over the electrode wires is removed from the heater, depending on the thickness of the electrode wires.

摘要翻译： 提供了一种喷墨头电路板，其具有加热器以产生用于在通电时喷射墨水的热能。 该电路板被构造成降低加热器的导线电阻，同时防止板的尺寸增加，并实现高分辨率印刷所需的加热器的高密度集成。 通过形成第一电极线层和第二电极线层的电极线，能够减小加热器的电线图案在电路基板上的占有面积。 在减小加热器上形成的保护绝缘层的有效厚度以防止热效率可能降低的情况下，根据电极线的厚度，从加热器上除去电极线上的保护绝缘层之一。