Charged-particle beam instrument
    2.
    发明授权
    Charged-particle beam instrument 有权
    带电粒子束仪

    公开(公告)号:US07521688B2

    公开(公告)日:2009-04-21

    申请号:US11640693

    申请日:2006-12-18

    申请人: Kazuya Goto

    发明人: Kazuya Goto

    IPC分类号: H01J1/50

    摘要: A charged-particle beam instrument is offered which can cancel out deflection aberrations arising from a first deflector or oblique incidence on the surface of a workpiece without (i) increasing the electrode length, (ii) reducing the inside diameter of the electrode, or (iii) increasing the deflection voltage too much. The instrument has an electron source for producing an electron beam, a demagnifying lens for condensing the beam, an objective lens for focusing the condensed beam onto the surface of the workpiece, the first deflector located behind the demagnifying lens, and a second deflector located ahead of the demagnifying lens. The first deflector determines the beam position on the surface of the workpiece. The second deflector cancels out deflection aberrations arising from the first deflector.

    摘要翻译: 提供一种带电粒子束仪器,其可以消除由第一偏转器产生的偏转像差或倾斜入射到工件的表面上,而不会(i)增加电极长度,(ii)减小电极的内径,或( iii)增加偏转电压太多。 仪器具有用于产生电子束的电子源,用于聚光的缩小透镜,用于将凝聚的光束聚焦到工件的表面上的物镜,位于缩小透镜后面的第一偏转器和位于前方的第二偏转器 的减光透镜。 第一偏转器确定工件表面上的光束位置。 第二偏转器抵消由第一偏转器产生的偏转像差。

    Drilling control apparatus of rock drill
    5.
    发明授权
    Drilling control apparatus of rock drill 失效
    凿岩钻机控制装置

    公开(公告)号:US5844133A

    公开(公告)日:1998-12-01

    申请号:US915223

    申请日:1997-08-20

    CPC分类号: E21B44/00

    摘要: A drilling control apparatus for automatically controlling the drilling operation of a rock drill includes a control unit for storing known criteria drilling patterns for various rock properties. A specific drilling pattern is selected based upon a collaring procedure for operation of the rock drill. A detector continually monitors variables such as rotational pressure, feed pressure and flushing pressure during the drilling process to determine a change in condition of the rock for determination of automatic selection of another more appropriate drilling pattern.

    摘要翻译: 用于自动控制凿岩机钻孔操作的钻孔控制装置包括用于存储用于各种岩石特性的已知标准钻孔图案的控制单元。 基于钻凿操作的碰撞过程来选择特定钻孔图案。 检测器在钻井过程中连续监测诸如旋转压力,进料压力和冲洗压力之类的变量,以确定岩石状态的变化,以确定另一种更合适的钻孔模式的自动选择。

    Method for efficiently recovering carbon dioxide in gas
    6.
    发明授权
    Method for efficiently recovering carbon dioxide in gas 有权
    有效回收气体二氧化碳的方法

    公开(公告)号:US08419831B2

    公开(公告)日:2013-04-16

    申请号:US12452223

    申请日:2008-06-24

    IPC分类号: B01D53/14

    摘要: Disclosed is a method for recovering carbon dioxide from a gas containing carbon dioxide, comprising the step (1) of bringing a gas containing carbon dioxide into contact with an aqueous solution containing 2-isopropylaminoethanol and at least one substance selected from the group consisting of piperazines and alkanolamines to absorb carbon dioxide into the aqueous solution; and the step (2) of heating the aqueous solution containing carbon dioxide absorbed therein, which is obtained in the step (1), to separate and recover carbon dioxide from the solution.

    摘要翻译: 公开了一种从含有二氧化碳的气体中回收二氧化碳的方法,其包括使含有二氧化碳的气体与含有2-异丙基氨基乙醇的水溶液和至少一种选自哌嗪类的物质接触的步骤(1) 和链烷醇胺将二氧化碳吸收到水溶液中; 以及在步骤(1)中获得的加热其中吸收的二氧化碳的水溶液的步骤(2)从溶液中分离和回收二氧化碳。

    Method of calibrating beam position in charged-particle beam system
    7.
    发明授权
    Method of calibrating beam position in charged-particle beam system 有权
    在带电粒子束系统中校准光束位置的方法

    公开(公告)号:US08193511B2

    公开(公告)日:2012-06-05

    申请号:US12351276

    申请日:2009-01-09

    申请人: Kazuya Goto

    发明人: Kazuya Goto

    IPC分类号: G01D18/00

    摘要: A method of calibrating the beam position in a charged-particle beam system starts with finding a focus deviation on the material surface for each point within a deflection field. A focus correction voltage VF necessary to cancel out the focus deviation is determined. A beam position deviation fi per unit focus correction voltage is found. The deflection voltage is corrected so as to cancel out the product fi·VF. The deflection voltage is corrected so as to cancel out the sum of the product fi·VF and the measured deflection field distortion while correcting the focus based on the voltage VF.

    摘要翻译: 在带电粒子束系统中校准光束位置的方法从在偏转场内的每个点的材料表面上发现聚焦偏差开始。 确定消除聚焦偏差所需的聚焦校正电压VF。 找到单位聚焦校正电压的光束位置偏差fi。 校正偏转电压以抵消产品fi·VF。 校正偏转电压,以便在校正基于电压VF的焦点的同时抵消乘积fi·VF和测得的偏转场失真之和。

    Charged-particle beam system
    8.
    发明授权
    Charged-particle beam system 有权
    带电粒子束系统

    公开(公告)号:US07820978B2

    公开(公告)日:2010-10-26

    申请号:US11959966

    申请日:2007-12-19

    申请人: Kazuya Goto

    发明人: Kazuya Goto

    IPC分类号: H01J3/14

    摘要: A charged-particle beam system has a demagnifying lens for reducing the dimensions of an electron beam produced from an electron beam source, an objective lens for focusing the demagnified beam onto the surface of a target, a first deflector located before the demagnifying lens, a second deflector placed such that the deflection field produced by it is totally or partially superimposed on the objective lens field, and a third deflector located in a stage following the second deflector. An image of the light source is created by the demagnifying lens. An image of the light source image is formed on the target by the objective lens.

    摘要翻译: 带电粒子束系统具有用于减小从电子束源产生的电子束的尺寸的缩小透镜,用于将缩小的光束聚焦到目标表面上的物镜,位于缩小透镜之前的第一偏转器, 第二偏转器被放置成使得其产生的偏转场全部或部分地叠加在物镜视场上,而第三偏转器位于跟随第二偏转器的阶段中。 光源的图像由缩小透镜产生。 通过物镜在目标上形成光源图像的图像。

    Electrostatic deflector
    10.
    发明授权
    Electrostatic deflector 有权
    静电导流板

    公开(公告)号:US07473905B2

    公开(公告)日:2009-01-06

    申请号:US11528942

    申请日:2006-09-28

    申请人: Kazuya Goto

    发明人: Kazuya Goto

    摘要: There is disclosed an electrostatic deflector having four pillar-like identical electrodes spaced from each other by 90°. An even number of pillar-like electrodes are disposed in each space between the four electrodes. Spaces are formed on both sides of each one of the first electrodes and have bent portions. The even number of electrodes are arranged symmetrically relative to a third or fourth vertical plane including an axis spaced from the X-axis by 45° or −45°, respectively. Holes are formed across each of the third and fourth vertical planes. Rod-like members are inserted in the holes.

    摘要翻译: 公开了一种静电偏转器,其具有彼此间隔90°的四个柱状相同电极。 在四个电极之间的每个空间中设置偶数个柱状电极。 空间形成在每个第一电极的两侧上并且具有弯曲部分。 偶数个电极相对于包括分别与X轴分开45°或-45°的轴线的第三或第四垂直平面对称地布置。 在第三和第四垂直平面中的每一个上形成孔。 棒状构件插入孔中。