公开(公告)号：US11706988B2

公开(公告)日：2023-07-18

申请号：US16777926

申请日：2020-01-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Tetsuya Kimura ,  Katsumi Fujimoto ,  Yutaka Kishimoto ,  Fumiya Kurokawa

IPC: H01L41/09 ,  H10N30/20 ,  H10N30/045 ,  H10N30/50 ,  H10N30/87 ,  H10N30/88 ,  H10N30/00

CPC classification number: H10N30/20 ,  H10N30/045 ,  H10N30/1051 ,  H10N30/50 ,  H10N30/871 ,  H10N30/883

Abstract: A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.

公开(公告)号：US11832522B2

公开(公告)日：2023-11-28

申请号：US17205062

申请日：2021-03-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Fumiya Kurokawa ,  Shinsuke Ikeuchi ,  Yoichi Mochida ,  Seiji Umezawa ,  Nobuyoshi Adachi ,  Yutaka Kishimoto

IPC: H10N30/20 ,  H10N30/88 ,  H10N30/30 ,  H10N30/853 ,  H10N30/04

CPC classification number: H10N30/2041 ,  H10N30/304 ,  H10N30/8542 ,  H10N30/88 ,  H10N30/04

Abstract: A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.

公开(公告)号：US11784629B2

公开(公告)日：2023-10-10

申请号：US17161727

申请日：2021-01-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Katsumi Fujimoto ,  Tetsuya Kimura ,  Fumiya Kurokawa

IPC: H03H9/17 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/174 ,  H03H3/02 ,  H03H9/02031 ,  H03H9/02228 ,  H03H9/13 ,  H03H9/176 ,  H03H2003/023

Abstract: A piezoelectric device includes a membrane portion and a piezoelectric layer made of single crystal of a piezoelectric body. At least a portion of the piezoelectric layer is included in the membrane portion. An electrode is provided on a surface of the piezoelectric layer in the membrane portion. The piezoelectric layer includes a first polarization region in a first polarization state and a second polarization region in a second polarization state, and the first polarization region and the second polarization region are spaced apart from each other in a thickness direction or an in-plane direction.

公开(公告)号：US11605775B2

公开(公告)日：2023-03-14

申请号：US16907400

申请日：2020-06-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Masayuki Suzuki ,  Fumiya Kurokawa

IPC: H01L41/083 ,  H01L41/047 ,  H01L41/18

Abstract: In a piezoelectric device, electrode layers are spaced apart from each other in the direction of the normal thereto. A first piezoelectric layer is interposed between two electrode layers of electrode layers in the direction of the normal. A second piezoelectric layer is provided on an opposite side of the first piezoelectric layer from a base portion. The second piezoelectric layer is interposed between two electrode layers of the electrode layers in the direction of the normal. The half-width of a rocking curve measured by X-ray diffraction for a lattice plane of the first piezoelectric layer substantially parallel to a first main surface is smaller than a half-width for the second piezoelectric layer. The piezoelectric constant of a material defining the first piezoelectric layer is smaller than the piezoelectric constant of a material defining the second piezoelectric layer.

公开(公告)号：US12275040B2

公开(公告)日：2025-04-15

申请号：US17507845

申请日：2021-10-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Seiji Umezawa ,  Shinsuke Ikeuchi ,  Fumiya Kurokawa ,  Nobuyoshi Adachi ,  Masayuki Suzuki

IPC: B06B1/06

Abstract: A piezoelectric device includes a substrate, a piezoelectric element, and a lid. The piezoelectric element includes a base portion and a membrane portion. The base portion is on a first main surface and has an annular outer shape when viewed from a normal direction of the first main surface. The membrane portion is at an inner side portion of the base portion when viewed from the normal direction. The lid is on the first main surface, covers the piezoelectric element, and is spaced apart from the piezoelectric element on the first main surface side. In the substrate, a first through hole extending from the first main surface to a second main surface is facing the membrane portion. The membrane portion includes a through slit.

公开(公告)号：US11495728B2

公开(公告)日：2022-11-08

申请号：US16777925

申请日：2020-01-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Tetsuya Kimura ,  Katsumi Fujimoto ,  Yutaka Kishimoto ,  Fumiya Kurokawa ,  Yuzo Kishi

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/08 ,  H01L41/083 ,  H01L41/09 ,  H01L41/297

Abstract: A piezoelectric device includes a piezoelectric body at least a portion of which can bend and vibrate, an upper electrode on an upper surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, a lower electrode on a lower surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, and a support substrate below the piezoelectric body, in which a recess extending from a lower surface of the support substrate toward the lower surface of the piezoelectric device is provided.

公开(公告)号：US20220241817A1

公开(公告)日：2022-08-04

申请号：US17724523

申请日：2022-04-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Seiji Umezawa ,  Fumiya Kurokawa ,  Masayuki Suzuki

IPC: B06B1/06 ,  H01L41/053 ,  H01L41/113 ,  H01L41/187

Abstract: A piezoelectric device includes an outer base, a protruding base, and only one cantilevered portion. A protruding base includes a protrusion and a tip portion. The protrusion protrudes from an internal circumferential surface of the outer base toward a center of a ring shape. The tip portion is connected to the protrusion and located at the center. The cantilevered portion is connected to the tip portion, and extends while being spaced apart from the protrusion. The cantilevered portion includes a fixed end portion and a free periphery. The fixed end portion is connected to the tip portion. The free periphery is located along the internal circumferential surface. The protrusion is located between a first end and a second end of the free periphery.

公开(公告)号：US11979713B2

公开(公告)日：2024-05-07

申请号：US17853979

申请日：2022-06-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Seiji Umezawa ,  Matti Liukku ,  Ville-Pekka Rytkönen ,  Anssi Blomqvist ,  Shinsuke Ikeuchi ,  Fumiya Kurokawa ,  Masayuki Suzuki

IPC: H04R17/02 ,  H10N30/853

CPC classification number: H04R17/02 ,  H10N30/8542

Abstract: A piezoelectric device includes a connecting section connecting a pair of beam sections adjacent to each other. The connecting section is connected to one of the pair of beam sections at a first end portion. The connecting section is connected to another of the pair of beam sections at a second end portion. The second end portion faces the first end portion in a direction in which the pair of beam sections are aligned. A second coupling portion is located along a first coupling portion. The connecting section includes only one first end portion. The connecting section includes only one second end portion. Each of the first end portion and the second end portion is closer to a tip end portion than to a fixed end portion of each of the pair of beam sections.

公开(公告)号：US11856365B2

公开(公告)日：2023-12-26

申请号：US17830501

申请日：2022-06-02

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Seiji Umezawa ,  Masayuki Suzuki ,  Fumiya Kurokawa

IPC: H04R17/02 ,  H10N30/853

CPC classification number: H04R17/02 ,  H04R2400/01 ,  H10N30/8542

Abstract: A transducer includes a base, beams, and a coupler. The beams each include a piezoelectric layer, a first electrode layer, and a second electrode layer. The coupler is fitted in slits between adjacent beams to define a connection between the beams. The coupler extends from an upper portion of the base into each of the slits without a break. A Young's modulus of the material of the coupler is lower than a Young's modulus of the material of the piezoelectric layer. A maximum thickness of the coupler in the upper portion of the base in the direction of the central axis of the base is greater than a thickness of each of the beams.

公开(公告)号：US11746000B2

公开(公告)日：2023-09-05

申请号：US17161724

申请日：2021-01-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Katsumi Fujimoto ,  Tetsuya Kimura ,  Fumiya Kurokawa

IPC: B81B3/00 ,  B81B7/02

CPC classification number: B81B3/00 ,  B81B7/02 ,  B81B2201/0271 ,  B81B2203/04

Abstract: A MEMS device includes a membrane portion, a piezoelectric layer made of a piezoelectric single crystal, a first electrode on a first surface of the piezoelectric layer, a second electrode on a second surface of the piezoelectric layer opposite to the first direction, and a first layer covering the first surface of the piezoelectric layer. At least a portion of the piezoelectric layer is included in the membrane portion. Each of the first electrode and the second electrode has a tapered cross-sectional shape with a width which decreases with increasing distance from the piezoelectric layer on a cross section along a plane vertical to the surface in the first direction.