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    PIEZOELECTRIC ELEMENT, AND RESONATOR USING PIEZOELECTRIC ELEMENT
    1.
    发明申请
    PIEZOELECTRIC ELEMENT, AND RESONATOR USING PIEZOELECTRIC ELEMENT 审中-公开

    公开(公告)号：US20190280181A1

    公开(公告)日：2019-09-12

    申请号：US16419219

    申请日：2019-05-22

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yasuhiro Aida ,  Daiki Murauchi

    IPC: H01L41/047 ,  H01L41/08 ,  H01L41/083

    Abstract: A piezoelectric element that includes a substrate, a lower electrode layer on the substrate, an intermediate layer on the lower electrode layer, and an upper electrode layer on the intermediate layer. The intermediate layer includes a first piezoelectric layer including an aluminum nitride as a main component thereof and located between the lower electrode layer and the upper electrode layer, a first buffer layer including an aluminum nitride as a main component and located between the first piezoelectric layer and the upper electrode layer, a first intermediate electrode layer located between the first buffer layer and the upper electrode layer, and a second piezoelectric layer located between the first intermediate electrode layer and the upper electrode layer.

    Ultrasonic transducer
    2.
    发明授权
    Ultrasonic transducer 有权

    公开(公告)号：US12138658B2

    公开(公告)日：2024-11-12

    申请号：US17894217

    申请日：2022-08-24

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Fumiya Kurokawa ,  Yasuhiro Aida ,  Shinsuke Ikeuchi ,  Seiji Umezawa ,  Masayuki Suzuki

    IPC: B06B1/02 ,  G10K11/02

    Abstract: An ultrasonic transducer includes first and second acoustic transducers and a housing with a bottomed tubular shape. The second acoustic transducer includes an annular section supporting a second membrane section and contacting an entire periphery of the second membrane section, and an acoustic matching plate facing the second membrane section and spaced apart from the second membrane section. The acoustic matching plate is connected to a surrounding wall portion defining a sealed space with the housing. An ultrasonic transmission path sandwiched between the first membrane section and the second membrane section is provided in the sealed space. A maximum inner width of the ultrasonic transmission path is smaller than a maximum inner width of the surrounding wall portion.

    Piezoelectric element, and resonator using piezoelectric element
    5.
    发明授权
    Piezoelectric element, and resonator using piezoelectric element 有权

    公开(公告)号：US11495726B2

    公开(公告)日：2022-11-08

    申请号：US16419219

    申请日：2019-05-22

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yasuhiro Aida ,  Daiki Murauchi

    IPC: H01L41/047 ,  H01L41/08 ,  H01L41/083 ,  H01L41/187 ,  H01L41/09 ,  H01L41/113

    Abstract: A piezoelectric element that includes a substrate, a lower electrode layer on the substrate, an intermediate layer on the lower electrode layer, and an upper electrode layer on the intermediate layer. The intermediate layer includes a first piezoelectric layer including an aluminum nitride as a main component thereof and located between the lower electrode layer and the upper electrode layer, a first buffer layer including an aluminum nitride as a main component and located between the first piezoelectric layer and the upper electrode layer, a first intermediate electrode layer located between the first buffer layer and the upper electrode layer, and a second piezoelectric layer located between the first intermediate electrode layer and the upper electrode layer.

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