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    METHOD AND SYSTEM FOR OPTICAL CHARACTERIZATION OF PATTERNED SAMPLES
    2.
    发明公开
    METHOD AND SYSTEM FOR OPTICAL CHARACTERIZATION OF PATTERNED SAMPLES 审中-公开

    公开(公告)号：US20240337590A1

    公开(公告)日：2024-10-10

    申请号：US18426319

    申请日：2024-01-29

    Applicant: NOVA LTD.

    Inventor： Dror SHAFIR ,  Gilad BARAK ,  Shay WOLFLING ,  Michal Haim YACHINI ,  Matthew SENDELBACH ,  Cornel BOZDOG

    IPC: G01N21/21 ,  G01N21/47

    CPC classification number: G01N21/21 ,  G01N21/211 ,  G01N2021/4792 ,  G01N2201/061 ,  G01N2201/0683

    Abstract: A method and system are presented for use in measuring on patterned samples, aimed at determining asymmetry in the pattern. A set of at least first and second measurements on a patterned region of a sample is performed, where each of the measurements comprises: directing illuminating light onto the patterned region along an illumination channel and collecting light reflected from the illuminated region propagating along a collection channel to be detected, such that detected light from the same patterned region has different polarization states which are different from polarization of the illuminating light, and generating a measured data piece indicative of the light detected in the measurement. Thus, at least first and second measured data pieces are generated for the at least first and second measurements on the same patterned region. The at least first and second measured data pieces are analyzed and output data is generated being indicative of a condition of asymmetry in the patterned region.

    ACCURATE RAMAN SPECTROSCOPY
    6.
    发明公开
    ACCURATE RAMAN SPECTROSCOPY 审中-公开

    公开(公告)号：US20240085333A1

    公开(公告)日：2024-03-14

    申请号：US18452494

    申请日：2023-08-18

    Applicant: NOVA LTD.

    Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon YALOV ,  Gilad BARAK

    IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

    CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/4412 ,  G01N2201/06113 ,  G01N2201/0636

    Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

    OPTICAL PHASE MEASUREMENT SYSTEM AND METHOD
    7.
    发明申请
    OPTICAL PHASE MEASUREMENT SYSTEM AND METHOD 有权

    公开(公告)号：US20230130231A1

    公开(公告)日：2023-04-27

    申请号：US17935930

    申请日：2022-09-27

    Applicant: NOVA LTD.

    Inventor： Gilad BARAK ,  Dror SHAFIR ,  Yanir HAINICK ,  Shahar Gov

    IPC: G01N21/956 ,  G03F7/20 ,  G01N21/95

    Abstract: A method for use in optical measurements on patterned structures, the method including performing a number of optical measurements on a structure with a measurement spot configured to provide detection of light reflected from an illuminating spot at least partially covering at least two different regions of the structure, the measurements including detecting light reflected from the at least part of the at least two different regions within the measurement spot, the detected light including interference of at least two complex electric fields reflected from the at least part of the at least two different regions, and being therefore indicative of a phase response of the structure, carrying information about properties of the structure.

    METROLOGY TECHNIQUE FOR SEMICONDUCTOR DEVICES
    8.
    发明公开
    METROLOGY TECHNIQUE FOR SEMICONDUCTOR DEVICES 审中-公开

    公开(公告)号：US20240271926A1

    公开(公告)日：2024-08-15

    申请号：US18566919

    申请日：2022-06-03

    Applicant: NOVA LTD.

    Inventor： Dror SHAFIR ,  Zvi Gorohovsky ,  Jacob Ofek ,  Daphna Peimer ,  Tal Heilpern ,  Dana Szafranek ,  Gilad BARAK ,  Smadar Ferber

    IPC: G01B11/06

    CPC classification number: G01B11/06

    Abstract: A method for semiconductor device metrology. The method may include creating a time-domain representation of wavelength-domain measurement data of light reflected by a three dimensional (3D) patterned structure of a semiconductor device; selecting one or more relevant peaks of the time-domain representation and at least one irrelevant portion of the time-domain representation. One or more relevant peaks occur during one or more relevant time periods; and are associated with corresponding relevant reference peaks that are associated with different versions of a reference 3D patterned structure.

    METHOD AND SYSTEM FOR BROADBAND PHOTOREFLECTANCE SPECTROSCOPY
    9.
    发明申请
    METHOD AND SYSTEM FOR BROADBAND PHOTOREFLECTANCE SPECTROSCOPY 有权

    公开(公告)号：US20230003637A1

    公开(公告)日：2023-01-05

    申请号：US17757224

    申请日：2020-12-08

    Applicant: NOVA LTD.

    Inventor： Yonatan OREN ,  Gilad BARAK

    IPC: G01N21/17 ,  G01N21/25

    Abstract: Photoreflectance (PR) spectroscopy system and method for accumulating separately a “pump on” light beam and a “pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is alternatingly a “pump on” light beam and a “pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the “pump on” light beam and the “pump off light beam to the at least one spectrometer, and (f) a computer.

    ACCURATE RAMAN SPECTROSCOPY
    10.
    发明公开
    ACCURATE RAMAN SPECTROSCOPY 审中-公开

    公开(公告)号：US20240210322A1

    公开(公告)日：2024-06-27

    申请号：US18402708

    申请日：2024-01-02

    Applicant: NOVA LTD.

    Inventor： Eyal Hollander ,  Gilad BARAK ,  Elad Schleifer ,  Yonatan OREN ,  Amir Shayari

    IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

    CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/4412 ,  G01N2201/06113 ,  G01N2201/0636

    Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up

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