摘要:
A charged particle beam exposure system comprising: a charged particle beam emitting device which generates charged particle beams with which a substrate is irradiated, the charged particle beam emitting device generating the charged particle beams at an accelerating voltage which is lower than that at which an influence of a proximity effect occurs; an illumination optical system which adjusts a beam diameter of the charged particle beams so that density of the charged particle beams is uniform; an character aperture in which an aperture hole is formed in a shape corresponding to a desired pattern to be written; a first deflector which deflects the charged particle beams by an electrostatic field that the charged particle beams have a desired sectional shape and travel towards a desired aperture hole and which returns the charged particle beams passing through the aperture hole to an optical axis thereof; a reducing projecting optical system which forms a multi-pole lens field so that the charged particle beams passing through the character aperture substantially reduce at the same demagnification both in X and Y directions when the optical axis extends in Z directions and form an image on the substrate without forming any crossover between the character aperture and the substrate; and a second deflector which deflects the charged particle beams passing through the character aperture by means of an electrostatic field to scan the substrate with the charged particle beams.
摘要:
A charged particle beam lithography system includes a charged particle beam emitter which emits a charged particle beam to a wafer at an acceleration voltage lower than a voltage causing a proximity effect; an illumination optical system which adjusts a beam radius of the charged beam; a cell aperture having a cell pattern corresponding to a desired pattern to be written; a first deflector which deflects the charged particle beam with a first electric field to enter a desired cell pattern of the cell aperture; a demagnification projection optical system which demagnifies the charged particle beam form the cell aperture with a second electric field to form an image on the wafer; and a second deflector which deflects the charged particle beam from the cell aperture with a third electric field to adjust an irradiation position of the charged particle beam on the wafer.
摘要:
An electronic endoscopic apparatus of the present invention can improve the usage efficiency of a circuit of a control section therein and can improve the reliability of operations of the circuit. The electronic endoscopic apparatus is an electronic endoscopic apparatus having multiple operation modes to be executed exclusively, the apparatus internally including an FPGA 1 that internally includes a CPU 10 and peripheral circuits and controls the execution of the operation modes and a switching request detecting section that detects a request for switching to the operation mode to be executed, wherein the internal configuration of the FPGA 1 is changed based on the detection result by the switching request detecting section.
摘要:
According to one embodiment, a magnetic head includes a reproducing section. The reproducing section detects a medium magnetic field recorded in a magnetic recording medium. The reproducing section includes a stacked film and a magnetic field application unit. The stacked film includes a first magnetization layer and a second magnetization layer. The first magnetization layer has a perpendicular magnetic anisotropy. A magnetization of the first magnetization layer being is fixed. The second magnetization layer is stacked with the first magnetization layer and oscillates. The magnetic field application unit is stacked with the stacked film and applies a bias magnetic field having a component along the first axis to the stacked film. A resistance of the stacked film changes in accordance with the medium magnetic field when a current not less than a value at which the second magnetization layer oscillates is passed.
摘要:
A paper feeding device includes a stacking plate for stacking sheets. The stacking plate is movable vertically within a range from a lower limit position to a pick-up position. The stacking plate has a first surface facing the lower limit position and a second surface facing the pick-up position. The paper feeding device also includes a driving device for driving the stacking plate. The paper feeding device has a locking member for locking the staking plate in the lower limit position. The locking member has a deformable section for contact with the second surface of the stacking plate. The deformable section becomes deformed by a driving force applied through the stacking plate as locked in the lower limit position by the driving device, to unlock the stacking plate.
摘要:
A magnetoresistance effect element, comprising a nonmagnetic spacer layer, first and second ferromagnetic layers separated by the nonmagnetic spacer layer, the first ferromagnetic layer having a magnetization direction at an angle relative to a magnetization direction of the second ferromagnetic layer at zero applied magnetic field, the magnetization of the first ferromagnetic layer freely rotating in a magnetic field signal, a magnetoresistance effect-improving layer comprising a plurality of metal films and disposed in contact with the first ferromagnetic layer so that the first ferromagnetic layer is disposed between the nonmagnetic spacer layer and the magnetoresistance effect-improving layer, one of the plurality of metal films disposed in contact with the first ferromagnetic layer contains metal element of not solid solution with metal element of the first ferromagnetic layer and a nonmagnetic underlayer or a nonmagnetic protecting layer disposed in contact with the magnetoresistance effect-improving layer so that the magnetoresistance effect-improving layer is disposed between the first ferromagnetic layer and the nonmagnetic underlayer or the nonmagnetic protecting layer.
摘要:
An example magnetoresistive effect element includes a magnetoresistive effect film including a magnetization pinned layer, a magnetization free layer, and an intermediate layer interposed therebetween and having a magnetic region and a nonmagnetic region whose electrical resistance is higher than the magnetic region. A sense current is passed to the magnetoresistive effect film in a direction substantially perpendicular to the film plane thereof. The magnetic region of the intermediate layer penetrates the nonmagnetic region locally and extends in the direction substantially perpendicular to the film plane. The nonmagnetic region contains a nonmagnetic metallic element having a larger surface energy than a magnetic metallic element contained in the magnetic region.
摘要:
A magnetoresistive element has a first magnetic layer and a second magnetic layer separate from each other, the first magnetic layer and the second magnetic layer each having a magnetization whose direction is substantially pinned, and a non-magnetic conductive layer formed in contact with the first magnetic layer and the second magnetic layer and electrically connecting the first and second magnetic layers, the non-magnetic conductive layer forming a path of spin-polarized electrons from one of the magnetic layer to the other magnetic layer, the non-magnetic conductive layer comprising a portion located between the first magnetic layer and the second magnetic layer, the portion being a sensing area.
摘要:
A magnetoresistive effect element includes a magnetization pinned layer, a magnetization free layer; a nonmagnetic metal layer disposed between the magnetization pinned layer and the magnetization free layer, a resistance increasing layer, a spin filter layer, and a pair of electrodes. The resistance increasing layer includes a insulation portion and is disposed in at least one of the magnetization pinned layer, the magnetization free layer, and the nonmagnetic metal layer. The spin filter layer is disposed to be adjacent to the magnetization free layer and has a thickness in a range of 5 nm to 20 nm. The magnetization free layer is disposed between the spin filter layer and the nonmagnetic metal layer. The magnetization pinned layer, the magnetization free layer, the nonmagnetic layer, the resistance increasing layer, and the spin filter layer are disposed between the electrodes.
摘要:
Mechanism unit(s) functioning as automatic-feed cassette(s) and mechanism unit(s) functioning as manual-feed tray(s) together form a single integral module, constituting a hybrid paper supply module. In such constitution, paper transport path(s) may be formed between or among first guide member(s) provided at automatic-feed cassette mechanism unit(s) and second guide member(s) provided at manual-feed mechanism unit(s), and manual-feed mechanism unit(s) may be pulled outward and to side(s) of apparatus(es) so as to cause paper transport path(s) to be opened up to the exterior, facilitating removal of jammed paper. Furthermore, given such constitution, a plurality of hybrid paper supply modules may be stacked together to constitute a paper supply mechanism. Manual-feed tray(s) with which manual-feed mechanism unit(s) of respective hybrid paper supply module(s) is or are provided may be collapsible so as to permit extension and/or retraction. This will permit manual-feed tray(s) to be able to accommodate a plurality of types of recording media.