SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

    公开(公告)号:US20240431102A1

    公开(公告)日:2024-12-26

    申请号:US18414551

    申请日:2024-01-17

    Abstract: A semiconductor device according to an embodiment includes: a gate stacking structure that comprises a first stacking structure and a second stacking structure on the first stacking structure, the first stacking structure and the second stacking structure each comprising a plurality of gate electrodes; a channel structure that extends into the gate stacking structure; and a plurality of gate contact portions that are respectively connected to the plurality of gate electrodes of a first pad area of the first stacking structure and a second pad area of the second stacking structure; where the first stacking structure comprises a buffer insulating portion that comprises a boundary portion that is adjacent to the second pad area, where the buffer insulating portion comprises a first section, a second section, and an inner section that is between the first section and the second section in a first direction.

    SEMICONDUCTOR DEVICE
    4.
    发明申请

    公开(公告)号:US20250159867A1

    公开(公告)日:2025-05-15

    申请号:US18662164

    申请日:2024-05-13

    Abstract: A semiconductor device includes an active pattern, a gate structure that extends in a first direction on the active pattern, a bit line electrically connected to the active pattern and extending in a second direction, a gate contact electrically connected to the gate structure, a dummy line between the gate contact and the bit line, and a dummy dielectric layer at least partially surrounded by the dummy line, where the dummy line includes: a first dummy line part between the dummy dielectric layer and the bit line, a second dummy line part spaced apart from the first dummy line part, and a plurality of connection parts that electrically connect the first and second dummy line parts to each other, and where the dummy dielectric layer is between the first dummy line part and the second dummy line part and is between the plurality of connection parts.

    GRINDING WHEEL, BACK-GRINDING APPARATUS INCLUDING THE SAME, ABRASIVE ARTICLE MANUFACTURING METHOD

    公开(公告)号:US20250041996A1

    公开(公告)日:2025-02-06

    申请号:US18425770

    申请日:2024-01-29

    Abstract: Disclosed are grinding wheels, back-grinding apparatuses, and abrasive article manufacturing methods. The grinding wheel comprises a wheel body having a disk shape and an abrasive article combined with one surface of the wheel body. The abrasive article includes an abrasive body and a plurality of grinding particles in the abrasive body. The abrasive body provides a groove hole that is recessed in a first direction as a horizontal direction on a lateral surface of the abrasive body. A length in the first direction of the groove hole is less than a width in the first direction of the abrasive body.

    BRUSH ASSEMBLY AND WAFER CLEANING DEVICE INCLUDING THE SAME

    公开(公告)号:US20240290637A1

    公开(公告)日:2024-08-29

    申请号:US18237547

    申请日:2023-08-24

    Abstract: A brush assembly includes a first brush including a first body that is cylindrical, and a first vertical gear connected to a surface of the cylindrical first body that faces a third body, the first vertical gear being configured to rotate in a first vertical direction, a second brush including a first horizontal gear configured to rotate in a first horizontal direction and a second body connected to a lower portion of the first horizontal gear and rotatably connected to the first body, and a third brush including a second vertical gear connected to a surface of the third body that faces the first body, the second vertical gear being configured to rotate in a second vertical direction that is opposite to the first vertical direction, where the first horizontal gear is engaged with a lower portion of the first vertical gear.

    SUBSTRATE CLEANING APPARATUS
    8.
    发明申请

    公开(公告)号:US20250132173A1

    公开(公告)日:2025-04-24

    申请号:US18736256

    申请日:2024-06-06

    Abstract: An example substrate cleaning apparatus includes a roll brush that cleans a surface of a substrate. The roll brush includes a drive shaft with a predetermined length and a plurality of brush members positioned around an outside circumference of the drive shaft. One of the plurality of the brush members is provided with a rotation speed lower than the others.

    SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

    公开(公告)号:US20250126788A1

    公开(公告)日:2025-04-17

    申请号:US18653158

    申请日:2024-05-02

    Abstract: A semiconductor device includes a substrate including a circuit region and a cell region. The cell region includes a gate stacking structure, a channel structure that extends into the gate stacking structure and is on the cell array region, a through-gate contact portion that extends into the gate stacking structure and is electrically connected to a connection gate electrode, and an upper gate contact portion that is electrically connected to an upper gate electrode, where the upper gate electrode is separated from the substrate by a first distance, the connection gate electrode is separated from the substrate by a second distance, and where the second distance is less than the first distance, and where the upper gate contact portion includes a first portion and a second portion, and a boundary between the first portion and the second portion has a step shape.

    SUBSTRATE POLISHING APPARATUS AND METHOD OF POLISHING SUBSTRATE

    公开(公告)号:US20240261930A1

    公开(公告)日:2024-08-08

    申请号:US18536321

    申请日:2023-12-12

    CPC classification number: B24B37/015

    Abstract: A substrate polishing apparatus includes a platen having a surface configured polish through relative movement between the platen and a semiconductor substrate, a slurry supply configured to supply slurry to the platen, wherein the slurry flows to a location between the semiconductor substrate and the platen, a substrate holder configured to grip and fix the semiconductor substrate to be in contact with the platen such that the platen contacts the surface of the semiconductor substrate to be polished, a temperature controller having a thermal conductive body that is configured to contact the surface of the platen to transfer heat between the thermal conductive body and the platen to control the temperature of the platen, and a first cleaner having an ultrasonic transducer and at least one probe, the ultrasonic transducer configured to generate ultrasonic waves and the probe configured to transmit the ultrasonic waves to an outer surface of the thermal conductive body.

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