Dielectric separation of partial GAA FETs

    公开(公告)号:US10566330B2

    公开(公告)日:2020-02-18

    申请号:US15977949

    申请日:2018-05-11

    Abstract: A CMOS system on chip including a series of partial gate-all-around field effect transistors. Each partial GAA FET includes a fin having a stack of channel regions, source and drain regions on opposite sides of the fin, a dielectric separation region including a dielectric material between first and second channel regions, a gate stack on the fin, and a pair of sidewall spacers on opposite sides of the gate stack. A portion of the dielectric separation region has a length from an outer edge of the dielectric separation region to an inner edge of a respective sidewall spacer. The length of the portion of the dielectric separation region of one of the partial GAA FETs is different than the length of the portion of the dielectric separation region of another one of the partial GAA FETs.

    DIELECTRIC SEPARATION OF PARTIAL GAA FETS
    9.
    发明申请

    公开(公告)号:US20190181140A1

    公开(公告)日:2019-06-13

    申请号:US15977949

    申请日:2018-05-11

    Abstract: A CMOS system on chip including a series of partial gate-all-around field effect transistors. Each partial GAA FET includes a fin having a stack of channel regions, source and drain regions on opposite sides of the fin, a dielectric separation region including a dielectric material between first and second channel regions, a gate stack on the fin, and a pair of sidewall spacers on opposite sides of the gate stack. A portion of the dielectric separation region has a length from an outer edge of the dielectric separation region to an inner edge of a respective sidewall spacer. The length of the portion of the dielectric separation region of one of the partial GAA FETs is different than the length of the portion of the dielectric separation region of another one of the partial GAA FETs.

    Composite piezoelectric capacitor
    10.
    发明授权

    公开(公告)号:US11217392B2

    公开(公告)日:2022-01-04

    申请号:US16417346

    申请日:2019-05-20

    Abstract: A circuit element. In some embodiments, the circuit element includes a first terminal, a second terminal, and a layered structure. The layered structure may include a first conductive layer connected to the first terminal, a first piezoelectric layer on the first conductive layer, a second piezoelectric layer on the first piezoelectric layer, and a second conductive layer connected to the second terminal. The first piezoelectric layer may have a first piezoelectric tensor and a first permittivity tensor, and the second piezoelectric layer may have a second piezoelectric tensor and a second permittivity tensor, one or both of the second piezoelectric tensor and a second permittivity tensor differing, respectively, from the first piezoelectric tensor and the first permittivity tensor.

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