Semiconductor device and method of fabricating the same

    公开(公告)号:US12089420B2

    公开(公告)日:2024-09-10

    申请号:US18312977

    申请日:2023-05-05

    CPC classification number: H10B61/22 H10N50/01 H10N50/80

    Abstract: A method of fabricating a semiconductor device including providing a substrate; forming first and second lower conductive patterns, the and second lower conductive patterns being buried in an interlayer dielectric layer; forming a capping layer on the interlayer dielectric layer and a dummy layer on the capping layer; etching an exposed upper portion of the first lower conductive pattern to form a trench; forming a metal layer that covers the interlayer dielectric layer and the dummy layer such that the metal layer fills the trench; forming a magnetic tunnel junction layer on the metal layer; performing a patterning process to form a memory cell; and forming a first protective layer that covers a lateral surface of the memory cell, wherein, in the patterning process, the metal layer on the top surface of the interlayer dielectric layer is etched to form a first bottom electrode in the trench.

    SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

    公开(公告)号:US20230309322A1

    公开(公告)日:2023-09-28

    申请号:US18312977

    申请日:2023-05-05

    CPC classification number: H10B61/22 H10N50/01 H10N50/80

    Abstract: A method of fabricating a semiconductor device including providing a substrate; forming first and second lower conductive patterns, the and second lower conductive patterns being buried in an interlayer dielectric layer; forming a capping layer on the interlayer dielectric layer and a dummy layer on the capping layer; etching an exposed upper portion of the first lower conductive pattern to form a trench; forming a metal layer that covers the interlayer dielectric layer and the dummy layer such that the metal layer fills the trench; forming a magnetic tunnel junction layer on the metal layer; performing a patterning process to form a memory cell; and forming a first protective layer that covers a lateral surface of the memory cell, wherein, in the patterning process, the metal layer on the top surface of the interlayer dielectric layer is etched to form a first bottom electrode in the trench.

    MAGNETIC MEMORY DEVICE
    6.
    发明申请

    公开(公告)号:US20210242396A1

    公开(公告)日:2021-08-05

    申请号:US17083943

    申请日:2020-10-29

    Abstract: A magnetic memory device includes a lower contact plug on a substrate and a data storage structure on the lower contact plug. The data storage structure includes a bottom electrode, a magnetic tunnel junction pattern, and a top electrode that are sequentially stacked on the lower contact plug. The lower contact plug and the data storage structure have a first thickness and a second thickness, respectively, in a first direction perpendicular to a top surface of the substrate. The first thickness of the lower contact plug is about 2.0 to 3.6 times the second thickness of the data storage structure.

    SEMICONDUCTOR DEVICE
    7.
    发明申请

    公开(公告)号:US20240431119A1

    公开(公告)日:2024-12-26

    申请号:US18405141

    申请日:2024-01-05

    Abstract: A semiconductor device may include a lower dielectric layer on a substrate, data storage patterns on the lower dielectric layer and spaced apart from each other in first and second directions, a cell dielectric layer on the lower dielectric layer and on the data storage patterns, voids in the cell dielectric layer and between ones of the data storage patterns, upper conductive contacts respectively on the data storage patterns and spaced apart from each other in the first and second directions, and upper conductive lines on the upper conductive contacts and spaced apart from each other in the second direction and extending in the first direction. Each of the upper conductive lines may be electrically connected to respective ones of the upper conductive contacts. The respective ones of the upper conductive contacts may be spaced apart from each other in the first direction.

    Magnetic memory device
    8.
    发明授权

    公开(公告)号:US12058941B2

    公开(公告)日:2024-08-06

    申请号:US17083943

    申请日:2020-10-29

    CPC classification number: H10N50/80 H10B61/20 H10N50/01

    Abstract: A magnetic memory device includes a lower contact plug on a substrate and a data storage structure on the lower contact plug. The data storage structure includes a bottom electrode, a magnetic tunnel junction pattern, and a top electrode that are sequentially stacked on the lower contact plug. The lower contact plug and the data storage structure have a first thickness and a second thickness, respectively, in a first direction perpendicular to a top surface of the substrate. The first thickness of the lower contact plug is about 2.0 to 3.6 times the second thickness of the data storage structure.

    MAGNETIC MEMORY DEVICE
    10.
    发明公开

    公开(公告)号:US20240349621A1

    公开(公告)日:2024-10-17

    申请号:US18752866

    申请日:2024-06-25

    CPC classification number: H10N50/80 H10B61/20 H10N50/01

    Abstract: A magnetic memory device includes a lower contact plug on a substrate and a data storage structure on the lower contact plug. The data storage structure includes a bottom electrode, a magnetic tunnel junction pattern, and a top electrode that are sequentially stacked on the lower contact plug. The lower contact plug and the data storage structure have a first thickness and a second thickness, respectively, in a first direction perpendicular to a top surface of the substrate. The first thickness of the lower contact plug is about 2.0 to 3.6 times the second thickness of the data storage structure.

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