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    FILAMENT HOLDER FOR HOT CATHODE PECVD SOURCE
    1.
    发明申请
    FILAMENT HOLDER FOR HOT CATHODE PECVD SOURCE 有权
    用于热阴极PECVD源的FILAMENT HOLDER

    公开(公告)号：US20160163517A1

    公开(公告)日：2016-06-09

    申请号：US14939659

    申请日：2015-11-12

    Applicant: Seagate Technology LLC

    Inventor： Samuel Lewis Tanaka ,  Christopher L. Platt ,  Thomas Larson Greenberg

    IPC: H01J37/32 ,  H01K1/18

    CPC classification number: H01J37/32568 ,  C23C16/26 ,  C23C16/50 ,  H01J37/3233 ,  H01J37/32403 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32541 ,  H01J2237/032 ,  H01J2237/3321 ,  H01K1/18

    Abstract: A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor deposition source also includes a filament having a first end and a second end. The first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post. The chemical vapor deposition source further includes at least one filament holder electrically insulated from the at least one plate. The at least one filament holder holds a portion of the filament between the first end and the second end.

    Abstract translation: 化学气相沉积源，其包括至少一个板，第一和第二电连接柱与所述至少一个板连接。 化学气相沉积源还包括具有第一端和第二端的细丝。 灯丝的第一端电连接到第一电连接柱，灯丝的第二端电连接到第二电连接柱。 化学气相沉积源还包括与至少一个板电绝缘的至少一个灯丝架。 所述至少一个灯丝保持器将所述灯丝的一部分保持在所述第一端和所述第二端之间。

    POSITIONING APPARATUS
    2.
    发明申请
    POSITIONING APPARATUS 有权
    定位装置

    公开(公告)号：US20150165578A1

    公开(公告)日：2015-06-18

    申请号：US14105065

    申请日：2013-12-12

    Applicant: SEAGATE TECHNOLOGY LLC

    Inventor： Daniel Peinovich ,  Samuel Lewis Tanaka ,  Thomas Larson Greenberg

    IPC: B23Q3/18

    CPC classification number: H01L21/67703 ,  H01L21/67259 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68 ,  H01L21/68707 ,  Y10T29/49998

    Abstract: Provided herein is an apparatus including a loader configured to position a workpiece in a holding fixture. In some embodiments, the holding fixture includes an opening configured to removably receive the workpiece therein and hold the workpiece in a target position within the opening. The apparatus also includes position detecting means configured to translate a sensor to a predetermined location relative to the holding fixture and further configured to translate the workpiece by a predetermined increment relative to the predetermined location to position the workpiece in the target position.

    Abstract translation: 本文提供了一种装置，其包括装载器，其构造成将工件定位在保持夹具中。 在一些实施例中，保持夹具包括构造成可移除地将工件接收在其中并将工件保持在开口内的目标位置的开口。 该装置还包括位置检测装置，其被配置为相对于保持夹具将传感器平移到预定位置，并进一步构造成相对于预定位置使工件平移预定的增量，以将工件定位在目标位置。

    Positioning apparatus
    8.
    发明授权
    Positioning apparatus 有权

    公开(公告)号：US10541166B2

    公开(公告)日：2020-01-21

    申请号：US15484736

    申请日：2017-04-11

    Applicant: Seagate Technology LLC

    Inventor： Daniel Peinovich ,  Samuel Lewis Tanaka ,  Thomas Larson Greenberg

    IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

    Abstract: A method includes moving a sensor and an article at a first speed to position the sensor into a reference position relative to an article fixture. The sensor and the article are moved at a second speed as the sensor approaches the reference position. It is determined when the sensor is in the reference position, wherein the sensor is configured to be in the reference position when a contact is established between the sensor and a surface of the article fixture. The article is moved by a predetermined increment relative to the reference position to position the article in a target position in response to determining that the sensor is in the reference position.

    HELMHOLTZ COIL ASSISTED PECVD CARBON SOURCE
    10.
    发明申请
    HELMHOLTZ COIL ASSISTED PECVD CARBON SOURCE 审中-公开
    HELMHOLTZ线圈辅助PECVD碳源

    公开(公告)号：US20160035546A1

    公开(公告)日：2016-02-04

    申请号：US14448639

    申请日：2014-07-31

    Applicant: SEAGATE TECHNOLOGY LLC

    Inventor： Christopher Loren Platt ,  Zhaohui Fan ,  Samuel Lewis Tanaka ,  Chun Wai Joseph Tong ,  Thomas Larson Greenberg ,  Xiaoding Ma

    IPC: H01J37/34 ,  C23C14/35

    CPC classification number: C23C14/35 ,  C23C16/26 ,  C23C16/50 ,  H01J37/32422 ,  H01J37/32568 ,  H01J37/32669

    Abstract: The embodiments disclose an apparatus including at least two carbon source deposition tools for emitting electrons, at least two reflective polarity rear button permanent magnets integrated into the carbon source deposition tools for reflecting emitted electrons, and at least two paired polarity Helmholtz coils integrated into the carbon source deposition tools for forming uniform parallel magnetic field lines for confining the emitted electrons to uniformly deposit carbon onto the surfaces of a two-sided media disk.

    Abstract translation: 实施例公开了一种装置，其包括用于发射电子的至少两个碳源沉积工具，集成到用于反射发射电子的碳源沉积工具中的至少两个反射极性后按钮永磁体，以及集成到碳中的至少两个成对极性的亥姆霍兹线圈 源沉积工具，用于形成均匀的平行磁场线，用于限制发射的电子均匀地将碳均匀地沉积在双面介质盘的表面上。

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