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公开(公告)号：US20230366667A1
公开(公告)日：2023-11-16
申请号：US18246670
申请日：2021-09-14
发明人： Yu ZHU , Leijie WANG , Ziwen GUO , Ming ZHANG , Rong CHENG , Weinan YE , Zhaokui CHENG
IPC分类号： G01B9/02002
CPC分类号： G01B9/02002 , G01B2290/70
摘要： Disclosed is a heterodyne grating interferometry system based on secondary diffraction, including a single-frequency laser, an input optical fiber, an acousto-optic modulator, a reading head, and a measurement grating, an output optical fiber, a photoelectric conversion unit and an electronic signal processing unit, wherein the single-frequency laser emits a single-frequency laser, which enters the acousto-optic modulator through the input optical fiber, and is divided into a reference light and measurement light to be input to the reading head, wherein the reading head and the measurement grating convert the reference light and measurement light into a reference interference optical signal and a measurement interference optical signal and send them to the photoelectric conversion unit through the output optical fiber and wherein the photoelectric conversion unit converts the measurement interference optical signal and the reference interference optical signal into a measurement interference electrical signal and a reference interference electrical signal.
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公开(公告)号：US20180273212A1
公开(公告)日：2018-09-27
申请号：US15760540
申请日：2016-07-18
发明人： Yu ZHU , Anlin CHEN , Ming ZHANG , Kaiming YANG , Rong CHENG
CPC分类号： B64G1/285 , G01C19/24 , H02K5/1282 , H02K16/00 , H02K16/04 , H02K41/031 , H02K2201/18
摘要： Disclosed is a magnetic-fluid momentum sphere, which is used for satellite attitude adjustment. The magnetic-fluid momentum sphere comprises stators and a spherical shell. The stators are classified into three groups, axes of the three groups of stators are orthogonal to each other, each group comprises two stators arranged symmetrically about the center of the spherical shell, and the inner surfaces of the stators are spherical surfaces. The spherical shell is formed by combining two hemispherical shells, the material of the spherical shell is a non-ferromagnetic material, the inner surfaces of the stators closely adhere to the outer surface of the spherical shell, there is no relative movement between the spherical shell and the inner surfaces of the stators, and the spherical shell is filled with magnetic fluid. The magnetic-fluid momentum sphere achieves a small size and mass, low costs, and small coupling among the axes.
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公开(公告)号：US20150338205A1
公开(公告)日：2015-11-26
申请号：US14441821
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Ming ZHANG , Yu ZHU , Leijie WANG , Jinchun HU , Longmin CHEN , Kaiming YANG , Dengfeng XU , Wensheng YIN , Haihua MU
CPC分类号： G01B11/14 , G01B9/02002 , G01B9/02007 , G01B9/02011 , G01B2290/70 , G01D5/266 , G01D5/38
摘要： A displacement measurement system of heterodyne grating interferometer, comprises a reading head, a measurement grating and an electronic signal processing component. Laser light emitted from the laser tube is collimated, passes through the first polarization spectroscope, and then emits two light beams with a vertical polarization direction and a vertical propagation direction; the two light beams pass through two acousto-optic modulators and respectively generate two first-order diffraction light beams with different frequencies, which are later divided into reference light and measurement light; two parallel reference light beams form a beat frequency electric signal with positive and negative first-order diffraction measurement light respectively after passing through a measurement signal photo-electric conversion unit; the beat frequency signals are transmitted to the electronic signal processing component for signal processing, thus the output of linear displacement in two directions is realized.
摘要翻译： 外差光栅干涉仪的位移测量系统，包括读头，测量光栅和电子信号处理部件。 从激光管发射的激光被准直，通过第一偏振光谱仪，然后发射具有垂直偏振方向和垂直传播方向的两个光束; 两个光束通过两个声光调制器，并分别产生两个不同频率的一级衍射光束，后来分为参考光和测量光; 两个平行参考光束在通过测量信号光电转换单元之后分别形成具有正和负一阶衍射测量光的拍频电信号; 拍频信号被发送到用于信号处理的电子信号处理部件，从而实现两个方向上的线性位移的输出。
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4.发明公开公开(公告)号：US20230280658A1
公开(公告)日：2023-09-07
申请号：US18004083
申请日：2021-07-01
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Rong CHENG , Yuezhu YANG , Xin LI , Kaiming YANG
CPC分类号： G03F7/7055 , G01B11/002 , G03F7/70408 , G03F7/70025 , G03F7/7015 , G03F7/70208 , G02B27/126 , G02B26/0816
摘要： A device and a method for regulating and controlling an incident angle of a light beam in a laser interference lithography process are disclosed. The device comprises: a beam splitter prism between a first lens and a second lens, a first position detector, a first decoupling lens between the first position detector and the beam splitter prism, a feedback control system connected to the first position detector and a first universal reflecting mirror. The beam splitter prism reflects first incident light passing through the first universal reflecting mirror, the first decoupling lens enables a first reflected light enter into the first position detector, the first position detector measures the light beam position, the feedback control system outputs a control command according to the measurement result to regulate a mirror base of the first universal reflecting mirror, thereby regulating and controlling an incident angle of an exposure light beam.
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5.发明申请公开(公告)号：US20220196383A1
公开(公告)日：2022-06-23
申请号：US17601179
申请日：2020-04-02
申请人： TSINGHUA UNIVERSITY
发明人： Yu ZHU , Jinchun HU , Rujin HAN , Chang TIAN , Ming ZHANG , Wensheng YIN , Rong CHENG , Dengfeng XU
IPC分类号： G01B9/02015 , G01B11/02
摘要： A high-resolution phase detection method and system based on a plane grating laser interferometer. The method uses a dual-frequency interferometer to measure the displacement, and the measurement signal processing comprises an integral part and a decimal portion, a phase equation set of a displacement measurement signal is constructed according to a measurement optical path principle of a heterodyne plane grating laser interferometer; a non-linear equation set for which the unknowns are instantaneous phase, interval phase and signal amplitude is established; and the equation sets above are solved by using the least squares method, so as to realize phase discrimination, thereby realizing precise displacement measurement. The method can solve the problems in the traditional time measurement-based phase detection technology, such as low measurement accuracy, and failing to satisfy small measuring range measurement. The measurement method can be applied to systems such as precision manufacturing equipment and lithography machine.
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公开(公告)号：US20220025972A1
公开(公告)日：2022-01-27
申请号：US17311341
申请日：2019-10-22
申请人： TSINGHUA UNIVERSITY
发明人： Rong CHENG , Yu ZHU , Kaiming YANG , Xiangbo LIU
IPC分类号： F16J15/08
摘要： The present disclosure relates to a sealing technology, and in particular relates to a high-vacuum or ultrahigh-vacuum seal gasket (301) for a flat plate structure and a sealing structure. The seal gasket (301) comprises a seal ring (302) and multiple metal wires (303) extending outwards from the seal ring (302). The flat plate sealing structure comprises two flat plates (401, 404), the seal gasket (301) is fixed to one flat plate (401) via the multiple extending metal wires (303) so as to accurately position the seal ring (302). Accurate positioning can be achieved by virtue of an extern force without structure improvement on flat plate workpieces, thereby ensuring that no malposition occurs after the installation of the seal gasket (301).
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公开(公告)号：US20210033383A1
公开(公告)日：2021-02-04
申请号：US16759294
申请日：2018-10-25
申请人： TSINGHUA UNIVERSITY
发明人： Yu ZHU , Jinchun HU , Shengwu DU , Enyao SHANG , Ming ZHANG , Wensheng YIN , Kaiming YANG , Rong CHENG
摘要： Provided is a method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system, including: adding one or more redundant interferometers in a laser interferometer displacement measurement system; then establishing displacement calculating equations containing installation error of the laser interferometer and obtaining redundant measurement information by continuously measuring displacement information of multiple points, wherein the number of the combined displacement calculating equations is equal to the number of unknown quantities; and further solving the equation set to obtain the installation error of the interferometer. With a redundant arrangement of the laser interferometer, self-calibration of the installation error thereof can be achieved. A problem of difficulty in calibration of the installation error of the multi-axis interferometer in industrial application can be solved without assistance of other displacement sensors with higher precision.
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公开(公告)号：US20170115580A1
公开(公告)日：2017-04-27
申请号：US15307752
申请日：2015-04-17
发明人： Yu ZHU , Ming ZHANG , Fan ZHI , Zhao LIU , Rong CHENG , Kaiming YANG , Li ZHANG , Huichao QIN , Yanpo ZHAO , Li TIAN , Weinan YE , Jin ZHANG , Wensheng YIN , Haihua MU , Jinchun HU
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70725 , G03F7/70733 , G03F7/70758 , G03F7/70766 , G03F7/70775
摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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公开(公告)号：US20240264534A1
公开(公告)日：2024-08-08
申请号：US17767416
申请日：2020-10-23
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Jitao XU , Rong CHENG , Jiankun HAO , Kaiming YANG , Xin LI , Siqi GAO , Yujiao FAN
IPC分类号： G03F7/00
CPC分类号： G03F7/70408 , G03F7/70025 , G03F7/70191 , G03F7/7085
摘要： Disclosed is a scanning interference photolithography system, comprising a heterodyne optical path, a first interference optical path, a second interference optical path, a motion platform and a control subsystem, wherein a substrate is carried on the motion platform, a displacement measurement interferometer is used to measure the displacement of the motion platform, a first light beam and a second light beam are focused on the substrate for interference exposure; the control subsystem generates instructions according to various measurement information, adjusts angles of corresponding devices or the phase of a light beam, and locks the phase shift of interference exposure fringes of the first light beam and the second light beam. The system has a high precision of fringe pattern locking and a high laser utilization rate, and can be used for producing a large-area high-precision dense grating line gradient periodic grating.
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10.发明公开公开(公告)号：US20240061352A1
公开(公告)日：2024-02-22
申请号：US17767399
申请日：2020-10-23
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Jitao XU , Rong CHENG , Xin LI , Kaiming YANG , Jinchun HU
CPC分类号： G03F7/7085 , G03F7/2006 , G03F7/70408
摘要： An exposure light beam phase measurement method for laser interference photolithography comprises: separating a measurement light from an exposure light beam and inputting light into a laser phase measurement interferometer to carry out phase measurement on the exposure light beam; inputting a reference light beam homologous with the exposure light beam into the laser phase measurement interferometer; processing the reference light beam to form an interference measurement optical signal; calculating to obtain the phase of the exposure light beam. A laser interference photolithography system using the method comprises a laser phase measurement interferometer, a controller and phase modulators, the laser phase measurement interferometer measures whether the phase of an exposure light beam drifts, the controller controls phase modulators to carry out phase modulation, to achieve locking of exposure stripe phase drift and manufacturing of a high-precision variable-period optical grating.
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