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公开(公告)号:US20240397712A1
公开(公告)日:2024-11-28
申请号:US18792499
申请日:2024-08-01
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hsueh-Chun Hsiao , Yi-Ning Peng , Tzu-Yun Chang
IPC: H10B41/30 , H01L21/28 , H01L29/423 , H01L29/66 , H01L29/78 , H01L29/788
Abstract: An array of programmable memory includes a first floating gate and a second floating gate disposed on a substrate along a first direction, two spacers disposed between and parallel to the first floating gate and the second floating gate, a first word line sandwiched by one of the spacers and the adjacent first floating gate, and a second word line sandwiched by the other one of the spacers and the adjacent second floating gate, and two first spacers disposed on the substrate, wherein one of the first spacer is disposed between the first word line and the first floating gate, and another spacer is disposed between the second word line and the second floating gate, wherein each spacer has substantially the same shape as each first spacer.
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公开(公告)号:US20230301083A1
公开(公告)日:2023-09-21
申请号:US18203054
申请日:2023-05-29
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hsueh-Chun Hsiao , Yi-Ning Peng , Tzu-Yun Chang
IPC: H10B41/30 , H01L29/423 , H01L29/78 , H01L29/66 , H01L21/28 , H01L29/788
CPC classification number: H10B41/30 , H01L29/42328 , H01L29/7833 , H01L29/66825 , H01L29/40114 , H01L29/66492 , H01L29/66545 , H01L29/7881
Abstract: An array of programmable memory includes a first floating gate and a second floating gate disposed on a substrate along a first direction, two spacers disposed between and parallel to the first floating gate and the second floating gate, a first word line sandwiched by one of the spacers and the adjacent first floating gate, and a second word line sandwiched by the other one of the spacers and the adjacent second floating gate, and two first spacers disposed on the substrate, wherein one of the first spacer is disposed between the first word line and the first floating gate, and another spacer is disposed between the second word line and the second floating gate, wherein each spacer has substantially the same shape as each first spacer.
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公开(公告)号:US09406771B1
公开(公告)日:2016-08-02
申请号:US14854161
申请日:2015-09-15
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Shih-Yin Hsiao , Hsueh-Chun Hsiao , Tzu-Yun Chang , Ching-Chung Yang
IPC: H01L29/78 , H01L29/49 , H01L29/423 , H01L29/08 , H01L29/06 , H01L21/28 , H01L21/265
CPC classification number: H01L29/4983 , H01L21/265 , H01L21/26513 , H01L21/28035 , H01L21/28105 , H01L29/0653 , H01L29/0847 , H01L29/42368 , H01L29/42372 , H01L29/4916 , H01L29/7833
Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes a substrate; a first and a second ion implantation regions of a first conductive type; a source and a drain diffusion regions formed in the first and the second ion implantation regions respectively; a channel diffusion region formed between the first and the second ion implantation regions; a gate layer disposed above the channel diffusion region and located between the source and the drain diffusion regions; and a third ion implantation region of a second conductive type formed in the gate layer, which extends in a first direction. The third ion implantation region is located above and covers two side portions of the channel diffusion region, the two side portions are adjacent to two edges, extending in a second direction perpendicular to the first direction, of the channel diffusion region.
Abstract translation: 提供半导体结构及其制造方法。 半导体结构包括基板; 第一导电类型的第一和第二离子注入区域; 在第一和第二离子注入区域中形成的源极和漏极扩散区域; 形成在第一和第二离子注入区之间的沟道扩散区; 栅极层,其设置在所述沟道扩散区域的上方且位于所述源极和漏极扩散区域之间; 以及形成在所述栅极层中的沿第一方向延伸的第二导电类型的第三离子注入区。 第三离子注入区域位于沟道扩散区域的上方并覆盖两个侧面部分,两个侧面部分与沟道扩散区域的垂直于第一方向的第二方向延伸的两个边缘相邻。
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公开(公告)号:US20240395929A1
公开(公告)日:2024-11-28
申请号:US18337396
申请日:2023-06-19
Applicant: United Microelectronics Corp.
Inventor: Chen-Yuan Lin , Yu-Cheng Lo , Tzu-Yun Chang
IPC: H01L29/78 , H01L29/06 , H01L29/40 , H01L29/423 , H01L29/66
Abstract: A semiconductor device includes a gate structure, a first doped region, a second doped region, an isolation structure, an insulating layer and a field plate. The gate structure is located on a substrate. The first doped region and the second doped region are located at two sides of the gate structure. The isolation structure is located in the substrate between the first doped region and the second doped region, and is separated from the gate structure by a non-zero distance. The insulating layer extends continuously from a portion of a top surface of the gate structure to a portion of a top surface of the isolation structure. The field plate is located on the insulating layer and has the same potential as the gate structure.
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公开(公告)号:US20240312527A1
公开(公告)日:2024-09-19
申请号:US18677836
申请日:2024-05-29
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yi-Ning Peng , Hsueh-Chun Hsiao , Tzu-Yun Chang
IPC: G11C16/24 , G11C16/08 , H01L29/788 , H10B41/10 , H10B41/27
CPC classification number: G11C16/24 , G11C16/08 , H01L29/7881 , H10B41/10 , H10B41/27
Abstract: A method for forming semiconductor structure with wave shaped erase gate, the method including the steps: forming a floating gate having staggered islands on a substrate, forming a erase gate having a wave shape on the substrate at a first side of the floating gate, and forming a word line having the wave shape on the substrate at a second side of the floating gate opposite to the first side.
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公开(公告)号:US20240282371A1
公开(公告)日:2024-08-22
申请号:US18180864
申请日:2023-03-09
Applicant: United Microelectronics Corp.
Inventor: Yi Ting Hung , Ko-Chi Chen , Tzu-Yun Chang
IPC: G11C13/00
CPC classification number: G11C13/0026 , G11C13/0028 , G11C13/0038 , G11C13/004 , G11C2013/0045
Abstract: A forming operation method of a resistive random access memory is provided. The method includes the following steps. A positive pulse and a negative pulse are sequentially applied, by a bit line/source line driver, to multiple resistive random access memory cells in a direction form a farthest location to a nearest location based on the bit line/source line driver through a bit line and a source line to break down a dielectric film of each of the resistive random access memory cells and generate a conductive filament of each of the resistive random access memory cells.
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公开(公告)号:US20220293679A1
公开(公告)日:2022-09-15
申请号:US17224140
申请日:2021-04-07
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Hsin Hsu , Ko-Chi Chen , Tzu-Yun Chang , Chung-Tse Chen
Abstract: A semiconductor memory device includes a substrate, a dielectric layer on the substrate, and a contact plug in the dielectric layer. An upper portion of the contact plug protrudes from a top surface of the dielectric layer. The upper portion of the contact plug acts as a first electrode. A buffer layer is disposed on the dielectric layer and beside the upper portion of the contact plug. A resistive-switching layer is disposed beside the buffer layer. A second electrode is disposed beside the resistive-switching layer.
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8.
公开(公告)号:US20150115461A1
公开(公告)日:2015-04-30
申请号:US14066845
申请日:2013-10-30
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chih-Chou Yu , Hsueh-Chun Hsiao , Tzu-Yun Chang
IPC: H01L23/538 , H01L21/768
CPC classification number: H01L21/76898 , H01L21/8221 , H01L23/544 , H01L24/94 , H01L25/0657 , H01L25/50 , H01L27/0688 , H01L2223/54493 , H01L2224/9202 , H01L2225/06541 , H01L2225/06593 , H01L2225/06596
Abstract: A semiconductor structure and a method for forming the same are provided. The method includes following steps. A first wafer is provided, which includes a first region, a second region, and a first semiconductor device disposed in the first region. No semiconductor device is disposed in the second region. A second wafer is provided, which includes a third region, a fourth region and a second semiconductor device disposed in the third region. No semiconductor device is disposed in the fourth region. The first region of the first wafer is overlapped with the fourth region of the second wafer. The second region of the first wafer is overlapped with the third region of the second wafer. A first conductive through via is formed to pass through the fourth region of the second wafer and the first region of the first wafer to electrically connect to the first semiconductor device.
Abstract translation: 提供半导体结构及其形成方法。 该方法包括以下步骤。 提供第一晶片,其包括第一区域,第二区域和设置在第一区域中的第一半导体器件。 在第二区域中不设置半导体器件。 提供第二晶片,其包括设置在第三区域中的第三区域,第四区域和第二半导体器件。 在第四区域中不设置半导体器件。 第一晶片的第一区域与第二晶片的第四区域重叠。 第一晶片的第二区域与第二晶片的第三区域重叠。 形成第一导电通孔以通过第二晶片的第四区域和第一晶片的第一区域以电连接到第一半导体器件。
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9.
公开(公告)号:US20220230689A1
公开(公告)日:2022-07-21
申请号:US17151226
申请日:2021-01-18
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yi-Ning Peng , Hsueh-Chun Hsiao , Tzu-Yun Chang
IPC: G11C16/24 , G11C16/08 , H01L29/788 , H01L27/11556 , H01L27/11519
Abstract: An electrically erasable programmable read only memory (EEPROM) includes a substrate, bit lines, a row of erase gate and a row of floating gates. The bit lines are defined in the substrate to extend in a first direction. The row of erase gate having a wave shape is disposed across the bit lines. The row of floating gates having staggered islands is disposed parallel to the row of erase gate. A method of forming said electrically erasable programmable read only memory (EEPROM) is also provided.
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公开(公告)号:US20210242282A1
公开(公告)日:2021-08-05
申请号:US17235785
申请日:2021-04-20
Applicant: United Microelectronics Corp.
Inventor: Chung-Tse Chen , Ko-Chi Chen , Tzu-Yun Chang
Abstract: A method for fabricating memory device is provided. The method includes forming a transistor on a substrate. Further, a contact structure is formed on a source/drain region of the transistor. A conductive layer is formed on the contact structure. Four memory structures are formed on the conductive layer to form a quadrilateral structure.
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