公开(公告)号：US20150179927A1

公开(公告)日：2015-06-25

申请号：US14449408

申请日：2014-08-01

Applicant: Jin-Hye BAE ,  Won-Jun LEE ,  Sung-Yoon CHUNG ,  Taek-Dong CHUNG

Inventor： Jin-Hye BAE ,  Won-Jun LEE ,  Sung-Yoon CHUNG ,  Taek-Dong CHUNG

IPC: H01L43/12 ,  H01L43/10

CPC classification number: H01L43/12 ,  G11C11/161 ,  H01L27/228 ,  H01L43/10

Abstract: In a method of detecting an etch by-product, the method including forming a magnetic layer including palladium (Pd) on a substrate; etching the magnetic layer to form a magnetic layer pattern; depositing a mixture including an alkyl bromide compound on a surface of the magnetic layer pattern; and measuring a current difference between the substrate and the mixture to detect an etch by-product on the surface of the magnetic layer pattern.

Abstract translation: 在检测蚀刻副产物的方法中，所述方法包括在基底上形成包括钯（Pd）的磁性层; 蚀刻磁性层以形成磁性层图案; 在所述磁性层图案的表面上沉积包含烷基溴化合物的混合物; 并测量衬底和混合物之间的电流差以检测磁性层图案表面上的蚀刻副产物。

公开(公告)号：US20130112914A1

公开(公告)日：2013-05-09

申请号：US13617160

申请日：2012-09-14

Applicant: Choong-Ho HAN ,  Sang-Kyun KIM ,  Ye-Hwan KIM ,  Joon-Sang PARK ,  Jin-Woo BAE ,  Won-Jun LEE ,  Kyoung-Moon KANG ,  Jae-Dong LEE

Inventor： Choong-Ho HAN ,  Sang-Kyun KIM ,  Ye-Hwan KIM ,  Joon-Sang PARK ,  Jin-Woo BAE ,  Won-Jun LEE ,  Kyoung-Moon KANG ,  Jae-Dong LEE

IPC: C09K13/00

CPC classification number: C09K3/1463 ,  C09G1/02 ,  C09K3/1472 ,  H01L27/2436 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/143 ,  H01L45/144 ,  H01L45/148 ,  H01L45/1683

Abstract: A slurry composition includes an abrasive agent, an oxidizing agent, and a first adsorption inhibitor including a polyethylene oxide copolymer. A method of manufacturing a phase change memory device may include providing a substrate including an interlayer insulating film having a trench and a phase change material layer on the interlayer insulating film filling the trench, and performing chemical mechanical polishing on the phase change material layer using the slurry composition to form a phase change material pattern layer.

Abstract translation: 浆料组合物包括研磨剂，氧化剂和包含聚环氧乙烷共聚物的第一吸附抑制剂。 制造相变存储器件的方法可以包括在填充沟槽的层间绝缘膜上提供包括具有沟槽和相变材料层的层间绝缘膜的衬底，并且使用相变材料层对相变材料层进行化学机械抛光 浆料组成以形成相变材料图案层。

公开(公告)号：US20110306173A1

公开(公告)日：2011-12-15

申请号：US13084657

申请日：2011-04-12

Applicant: Jun-Soo BAE ,  Suk-Hun CHOI ,  Won-Jun LEE ,  Joon-Sang PARK

Inventor： Jun-Soo BAE ,  Suk-Hun CHOI ,  Won-Jun LEE ,  Joon-Sang PARK

IPC: H01L21/02

CPC classification number: H01L45/1683 ,  H01L45/06 ,  H01L45/141

Abstract: A method of fabricating a phase change memory device includes the use of first, second and third polishing processes. The first polishing process forms a first contact portion using a first sacrificial layer and the second polishing process forms a phase change material pattern using a second sacrificial layer. After removing the first and second sacrificial layers to expose resultant protruding structures of the first contact portion and the phase change material pattern, a third polishing process is used to polish the resultant protruding structures using an insulation layer as a polishing stopper layer.

Abstract translation: 制造相变存储器件的方法包括使用第一，第二和第三抛光工艺。 第一抛光工艺使用第一牺牲层形成第一接触部分，并且第二抛光工艺使用第二牺牲层形成相变材料图案。 在去除第一和第二牺牲层以暴露第一接触部分的相应突出结构和相变材料图案之后，使用第三抛光工艺来使用绝缘层作为抛光停止层来抛光所得的突出结构。

公开(公告)号：US20170148979A1

公开(公告)日：2017-05-25

申请号：US15259198

申请日：2016-09-08

Applicant: Ho-Young KIM ,  Jin-Hye BAE ,  Hoon HAN ,  Won-Jun LEE ,  Chang-Kyu LEE ,  Geun-Joo BAEK ,  Jung-Ig JEON

Inventor： Ho-Young KIM ,  Jin-Hye BAE ,  Hoon HAN ,  Won-Jun LEE ,  Chang-Kyu LEE ,  Geun-Joo BAEK ,  Jung-Ig JEON

IPC: H01L43/08 ,  H01L27/22 ,  G11C11/16 ,  H01L43/10 ,  H01L43/12 ,  H01L43/02

CPC classification number: H01L43/08 ,  G11C11/161 ,  H01L27/228 ,  H01L43/02 ,  H01L43/10 ,  H01L43/12

Abstract: A composition for cleaning a magnetic pattern, a method of manufacturing a magnetic memory device, a method of forming a magnetic pattern, and a magnetic memory device, the composition including a glycol ether-based organic solvent; a decomposing agent that includes an aliphatic amine; and at least one of a chelating agent, or a cleaning accelerator that includes an organic alkaline compound, wherein the composition is devoid of water.

公开(公告)号：US20080102595A1

公开(公告)日：2008-05-01

申请号：US11969105

申请日：2008-01-03

Applicant: Won-Jun LEE ,  Byoung-Moon YOON ,  In-Seak HWANG ,  Yong-Sun KO

Inventor： Won-Jun LEE ,  Byoung-Moon YOON ,  In-Seak HWANG ,  Yong-Sun KO

IPC: H01L21/02

CPC classification number: H01L28/91 ,  H01L21/31111

Abstract: A wafer having a dielectric layer and an electrode partially protruding from the top surface of the dielectric layer is provided. The dielectric layer is etched with a chemical solution such as LAL. Prior to etching, the protruding portion of the electrode is removed or reduced to prevent any bubbles included in the chemical solution from adhering to the electrode. Thus, the chemical solution can etch the dielectric layers without being blocked by any bubbles included in a chemical solution.

Abstract translation: 提供具有电介质层和从电介质层的顶表面部分突出的电极的晶片。 用诸如LAL的化学溶液蚀刻电介质层。 在蚀刻之前，电极的突出部分被去除或减少，以防止化学溶液中包含的任何气泡粘附到电极上。 因此，化学溶液可以蚀刻介电层而不被包含在化学溶液中的任何气泡所阻挡。

公开(公告)号：US20070030124A1

公开(公告)日：2007-02-08

申请号：US11461012

申请日：2006-07-31

Applicant: Won-Jun LEE

Inventor： Won-Jun LEE

IPC: H04Q5/22

CPC classification number: H04B1/006

Abstract: A mobile communication terminal includes a first transceiver that transmits and receives signals, an RFID transceiver that transmits and receives signals, and a controller that stops the first transceiver while it is performing signal communication, and activates the RFID transceiver.

Abstract translation: 移动通信终端包括发送和接收信号的第一收发器，发送和接收信号的RFID收发器，以及在执行信号通信时停止第一收发器并且激活RFID收发器的控制器。