-
公开(公告)号：US11815420B2
公开(公告)日：2023-11-14
申请号：US18160632
申请日：2023-01-27
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
IPC: G01L9/00
CPC classification number: G01L9/0072
Abstract: A resonant pressure sensor with improved linearity includes: a substrate including a substrate-separated portion separated from a housing-fixed portion; a first resonator that: is disposed in the substrate-separated portion; and detects a change of a first resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a second resonator that: is disposed in the substrate; detects a change of a second resonance frequency based on the strain in the substrate; and has a pressure sensitivity of the second resonance frequency; and a processor that: measures the static pressure based on the detected change of the first resonance frequency; and corrects the static pressure according to internal temperature of the pressure sensor based on a difference between the second resonance frequency and the first resonance frequency.
-
公开(公告)号：US20210215560A1
公开(公告)日：2021-07-15
申请号：US17143517
申请日：2021-01-07
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
IPC: G01L9/00
Abstract: An resonant pressure sensor, includes: a housing; a housing-fixed portion that is fixed to the housing; a substrate that includes a substrate-fixed portion that is fixed to the housing-fixed portion and a substrate-separated portion that is separated from the housing-fixed portion and extends from the substrate-fixed portion; a first resonator that is disposed in the substrate-separated portion and that detects a change of a resonance frequency based on a strain in the substrate caused by static pressure applied by the pressure-receiving fluid; and a processor. A pressure-receiving fluid is interposed in a gap between the housing-fixed portion and the substrate and envelops the substrate. The processor measures the static pressure based on the detected change of the resonance frequency.
-
公开(公告)号：US20200284930A1
公开(公告)日：2020-09-10
申请号：US16806411
申请日：2020-03-02
Applicant: Yokogawa Electric Corporation
Inventor： Takenori Hida , Kouichi Sato , Takashi Yoshida , Yasushi Higashino , Tetsuya Shimosaka
Abstract: A building integrity assessment system includes: an earthquake detector including: a building bottom sensor at a bottom of a building and that detects acceleration and an earthquake early-warning receiver that receives an earthquake early warning; a cloud computer; and sensors disposed at a plurality of positions in the building and that measures an influence of an earthquake on the building at each of the positions and wirelessly transmits measurement results to the cloud computer. The cloud computer estimates and evaluates the integrity of the building based on the measurement results. In response to the building bottom sensor detecting preliminary tremors or the earthquake early-warning receiver receiving the earthquake early warning, the plurality of sensors measures the influence of the earthquake on the building from a time before a major motion arrives at the building to a time after the arrival.
-
公开(公告)号：US11835413B2
公开(公告)日：2023-12-05
申请号：US17566326
申请日：2021-12-30
Applicant: Yokogawa Electric Corporation
Inventor： Takashi Yoshida , Yuusaku Yoshida , Atsushi Yumoto , Yoshitaka Suzuki
CPC classification number: G01L7/082 , G01L7/022 , G01L7/08 , G01L9/0008 , G01L9/0047 , Y10T29/4913
Abstract: A resonant pressure sensor includes a first substrate and a resonator. The first substrate includes a diaphragm and a projection disposed on the diaphragm. The resonator is disposed in the first substrate, a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate. The first substrate is an SOI substrate in which a silicon dioxide layer is inserted between a silicon substrate and a superficial silicon layer. The intermediate level of the first substrate is disposed in the silicon substrate, and the resonator is disposed in the projection included in the superficial silicon layer.
-
公开(公告)号：US11243131B2
公开(公告)日：2022-02-08
申请号：US14460684
申请日：2014-08-15
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Takashi Yoshida , Yuusaku Yoshida , Atsushi Yumoto , Yoshitaka Suzuki
Abstract: A resonant pressure sensor includes a first substrate including a diaphragm and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate.
-
Patent Agency Ranking
公开(公告)号：US09952250B2
公开(公告)日：2018-04-24
申请号：US14829801
申请日：2015-08-19
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Yusaku Yoshida , Takashi Yoshida , Atsushi Yumoto
IPC: G01P15/097 , G01P15/08
CPC classification number: G01P15/097 , G01P2015/0828
Abstract: A resonant sensor includes a mover that is movable in a first direction, a supporter that extends in a second direction perpendicular to the first direction, the supporter being connected to the mover and a fixer, the supporter supporting the mover which is movable in the first direction, and a resonator that is vibratable, at least a part of the resonator being embedded in the supporter.
-
公开(公告)号：US09893656B2
公开(公告)日：2018-02-13
申请号：US14153325
申请日：2014-01-13
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Takashi Yoshida , Shigeto Iwai , Yoshitaka Sasaki
CPC classification number: H02N11/00 , H03H3/0072 , H03H9/2463 , Y10T29/49007
Abstract: A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.
-
公开(公告)号：US09891119B2
公开(公告)日：2018-02-13
申请号：US14842273
申请日：2015-09-01
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Takeru Samejima , Nobuyuki Hamamatsu , Takashi Yoshida
CPC classification number: G01L1/18 , G01D11/30 , G01L1/26 , G01L19/0092 , G01L19/04
Abstract: A sensor includes a first structure that is attachable to a measurement specimen, a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being connected to the first structure, and a detector that is connected to an upper surface of the second structure, the detector being configured to detect a deformation of the second structure.
-
公开(公告)号：US20230175908A1
公开(公告)日：2023-06-08
申请号：US18160632
申请日：2023-01-27
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
IPC: G01L9/00
CPC classification number: G01L9/0072
Abstract: A resonant pressure sensor with improved linearity includes: a substrate including a substrate-separated portion separated from a housing-fixed portion; a first resonator that: is disposed in the substrate-separated portion; and detects a change of a first resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a second resonator that: is disposed in the substrate; detects a change of a second resonance frequency based on the strain in the substrate; and has a pressure sensitivity of the second resonance frequency; and a processor that: measures the static pressure based on the detected change of the first resonance frequency; and corrects the static pressure according to internal temperature of the pressure sensor based on a difference between the second resonance frequency and the first resonance frequency.
-
10.发明授权Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer 有权谐振换能器，其制造方法和谐振换能器的多层结构公开(公告)号：US09139419B2
公开(公告)日：2015-09-22
申请号：US14336613
申请日：2014-07-21
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Takashi Yoshida , Shuuji Okuda , Shigeto Iwai
IPC: H01L29/84 , B81B3/00 , G01N29/12 , H01L41/09 , H03H3/007 , H03H9/24 , B81B7/02 , B81C1/00 , G01L1/14
CPC classification number: B81B3/0021 , B81B3/0002 , B81B7/02 , B81B2201/0271 , B81B2201/0285 , B81C1/00198 , B81C1/00293 , B81C2203/0145 , G01L1/14 , G01N29/12 , G01N2291/014 , G01N2291/02827 , H01L41/094 , H03H3/0072 , H03H9/2463
Abstract: A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole, a second layer disposed over the first layer, a third layer covering the first layer and the second layer, and a projection extending from the second layer toward the resonator, the projection being spatially separated from the resonator, the projection being separated from the first layer by a first gap, the second layer being separated from the first layer by a second gap, the first gap is communicated with the second gap.
Abstract translation: 谐振换能器包括硅单晶衬底，设置在硅单晶衬底上的硅单晶谐振器，由硅构成的外壳，围绕谐振器间隙，并与硅单晶衬底一起形成腔室，令人兴奋的 模块，其被配置为激励所述谐振器;振动检测模块，被配置为检测所述谐振器的振动，设置在所述腔室上的第一层，所述第一层具有通孔，设置在所述第一层上的第二层， 第一层和第二层，以及从第二层朝向谐振器延伸的突起，突起与谐振器在空间上分离，突起与第一层隔开第一间隙，第二层与第一层分离 通过第二间隙，第一间隙与第二间隙连通。
-
-
-
-
-
-
-
-
-
Search Results
19
records
(took 0.031 seconds)
